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H01J2237/3326
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/3326
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Patents Grants
last 30 patents
Information
Patent Grant
Ways to generate plasma in continuous power mode for low pressure p...
Patent number
10,410,833
Issue date
Sep 10, 2019
Europlasma NV
Filip Legein
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Radical generator and molecular beam epitaxy apparatus
Patent number
10,312,054
Issue date
Jun 4, 2019
National University Corporation Nagoya University
Masaru Hori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma-chemical coating apparatus
Patent number
10,186,401
Issue date
Jan 22, 2019
W & L Coating Systems GmbH
Michael Liehr
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma deposition of amorphous semiconductors at microwave frequencies
Patent number
8,273,641
Issue date
Sep 25, 2012
Ovshinsky Innovation LLC
Stanford R. Ovshinsky
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and apparatus for production of metal film or the like
Patent number
7,923,374
Issue date
Apr 12, 2011
Canon Anelva Corporation
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Interconnection structure
Patent number
7,262,500
Issue date
Aug 28, 2007
Phyzchemix Corporation
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for production of metal film or the like
Patent number
7,208,421
Issue date
Apr 24, 2007
Mitsubishi Heavy Industries, Ltd.
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma CVD apparatus including rotating magnetic field generation m...
Patent number
5,423,915
Issue date
Jun 13, 1995
Mitsubishi Jukogyo Kagushiki Kaisha
Masayoshi Murata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ATMOSPHERIC PLASMA PROCESSING METHOD AND ATMOSPHERIC PLASMA PROCESS...
Publication number
20230253194
Publication date
Aug 10, 2023
FUJIFILM CORPORATION
Akihisa YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DODECADON TRANSFER CHAMBER AND PROCESSING SYSTEM HAVING THE SAME
Publication number
20170352562
Publication date
Dec 7, 2017
Applied Materials, Inc.
Shinichi KURITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Improved Ways to Generate Plasma in Continuous Power Mode for Low P...
Publication number
20160284518
Publication date
Sep 29, 2016
EUROPLASMA NV
Filip Legein
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
GROUND STATE HYDROGEN RADICAL SOURCES FOR CHEMICAL VAPOR DEPOSITION...
Publication number
20160276140
Publication date
Sep 22, 2016
LAM RESEARCH CORPORATION
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA-CHEMICAL COATING APPARATUS
Publication number
20160211122
Publication date
Jul 21, 2016
W & L COATING SYSTEMS GMBH
Michael LIEHR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADICAL GENERATOR AND MOLECULAR BEAM EPITAXY APPARATUS
Publication number
20160181068
Publication date
Jun 23, 2016
National University Corporation Nagoya University
Masaru HORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARC-PLASMA FILM FORMATION DEVICE
Publication number
20160071702
Publication date
Mar 10, 2016
Shimadzu Corporation
Masayasu SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20150136735
Publication date
May 21, 2015
PANASONIC CORPORATION
TOMOHIRO OKUMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20140335288
Publication date
Nov 13, 2014
TOHOKU UNIVERSITY
Masaki Hirayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Deposition of Amorphous Semiconductors at Microwave Frequencies
Publication number
20130065356
Publication date
Mar 14, 2013
Ovshinsky Innovation LLC
Stanford R. Ovshinsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Deposition of Amorphous Semiconductors at Microwave Frequencies
Publication number
20130037755
Publication date
Feb 14, 2013
Stanford R. Ovshinsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Deposition of Amorphous Semiconductors at Microwave Frequencies
Publication number
20120040513
Publication date
Feb 16, 2012
Stanford R. Ovshinsky
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE
Publication number
20100040802
Publication date
Feb 18, 2010
Canon ANELVA Corporation
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE
Publication number
20090311866
Publication date
Dec 17, 2009
Canon ANELVA Corporation
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE
Publication number
20090233442
Publication date
Sep 17, 2009
Canon ANELVA Corporation
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for production of metal film or the like
Publication number
20050230830
Publication date
Oct 20, 2005
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for production of metal film or the like
Publication number
20050217579
Publication date
Oct 6, 2005
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for production of metal film or the like
Publication number
20040029384
Publication date
Feb 12, 2004
Hitoshi Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...