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High voltage power supply or regulation circuits
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H01J37/241
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/241
High voltage power supply or regulation circuits
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Patents Grants
last 30 patents
Information
Patent Grant
Power supply module and charged particle beam device
Patent number
12,132,411
Issue date
Oct 29, 2024
HITACHI HIGH-TECH CORPORATION
Ryo Kadoi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for generating particle wave carrying electric...
Patent number
12,125,666
Issue date
Oct 22, 2024
Yanbing Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Booster circuit and voltage generator
Patent number
12,062,993
Issue date
Aug 13, 2024
Mitsubishi Electric Corporation
Masato Moriwaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aggregating capacity for depot charging
Patent number
12,043,134
Issue date
Jul 23, 2024
BP PULSE FLEET NORTH AMERICA INC.
Bryan M. Chow
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Corona/plasma treatment machine
Patent number
11,848,175
Issue date
Dec 19, 2023
3DT LLC
Donald J. Weyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,830,704
Issue date
Nov 28, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High voltage power supply
Patent number
11,764,033
Issue date
Sep 19, 2023
AES Global Holdings, PTE. LTD
Gary Byfield
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF voltage and current (V-I) sensors and measurement methods
Patent number
11,600,474
Issue date
Mar 7, 2023
Tokyo Electron Limited
Barton Lane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,574,798
Issue date
Feb 7, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Current source apparatus and method
Patent number
11,562,884
Issue date
Jan 24, 2023
ASML Netherlands B.V.
Yixiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective material ring
Patent number
11,545,345
Issue date
Jan 3, 2023
THINKON NEW TECHNOLOGY JAPAN CORPORATION
Atsushi Ikari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Controlling multiple plasma processes
Patent number
11,538,670
Issue date
Dec 27, 2022
TRUMPF Huettinger Sp. z o. o.
Jan Peter Engelstaedter
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Precise plasma control system
Patent number
11,532,457
Issue date
Dec 20, 2022
Eagle Harbor Technologies, Inc.
Christopher Bowman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ plasma cleaning of process chamber components
Patent number
11,495,434
Issue date
Nov 8, 2022
Varian Semiconductor Equipment Associates, Inc.
Kevin Anglin
B08 - CLEANING
Information
Patent Grant
System and method of generating high voltage variable frequency ele...
Patent number
11,420,070
Issue date
Aug 23, 2022
Advanced Biotechnologies, LLC
James William Law
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control method for electron microscope and electron microscope
Patent number
11,404,238
Issue date
Aug 2, 2022
Jeol Ltd.
Mitsuru Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance matching device and impedance matching method
Patent number
11,387,078
Issue date
Jul 12, 2022
Daihen Corporation
Tatsuya Morii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact high-voltage power supply and radiation apparatus systems a...
Patent number
11,310,898
Issue date
Apr 19, 2022
Schlumberger Technology Corporation
Jani Reijonen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Space charge insensitive electron gun designs
Patent number
11,302,510
Issue date
Apr 12, 2022
KLA-Tencor Corporation
Christopher Sears
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam particle beam system
Patent number
11,239,054
Issue date
Feb 1, 2022
Carl Zeiss MultiSEM GmbH
Yanko Sarov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nanosecond pulser bias compensation
Patent number
11,222,767
Issue date
Jan 11, 2022
Eagle Harbor Technologies, Inc.
Timothy Ziemba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma polymerization apparatus and plasma polymerization method us...
Patent number
11,133,159
Issue date
Sep 28, 2021
Ming Chi University of Technology
Jang-Hsing Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Noise reduction of a high voltage supply voltage
Patent number
11,101,105
Issue date
Aug 24, 2021
Applied Materials Israel Ltd.
Denys Mets
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Discharge control apparatus and method
Patent number
11,094,500
Issue date
Aug 17, 2021
NGK Spark Plug Co., Ltd.
Yuji Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ plasma cleaning of process chamber components
Patent number
11,037,758
Issue date
Jun 15, 2021
Varian Semiconductor Equipment Associates, Inc.
Kevin Anglin
B08 - CLEANING
Information
Patent Grant
Ion plasma disintegrator
Patent number
10,998,165
Issue date
May 4, 2021
Bradley Nelson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
10,973,112
Issue date
Apr 6, 2021
HITACHI HIGH-TECH CORPORATION
Ryo Kadoi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic lens and exciting current control method
Patent number
10,923,312
Issue date
Feb 16, 2021
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matching method and plasma processing apparatus
Patent number
10,903,051
Issue date
Jan 26, 2021
Tokyo Electron Limited
Masato Kon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with multiple configurations
Patent number
10,896,799
Issue date
Jan 19, 2021
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HIGH POWER GENERATOR AND METHOD OF SUPPLYING HIGH POWER PULSES
Publication number
20240429021
Publication date
Dec 26, 2024
TRUMPF Huettinger Sp. z o. o.
Andrzej KLIMCZAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA LOW NOISE, HIGH STABILITY, HIGH PRECISION VOLTAGE OR CURRENT...
Publication number
20240405655
Publication date
Dec 5, 2024
ZEALOGICS TECHNOLOGIES PVT. LTD.
Gursaran Singh Bhumbra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Magnetron Sputtering
Publication number
20240404806
Publication date
Dec 5, 2024
Melec GmbH
Günter Mark
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inductively Coupled Plasma Light Source with Direct Gas Injection
Publication number
20240194454
Publication date
Jun 13, 2024
Hamamatsu Photonics K. K.
Donald K. Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING...
Publication number
20240128892
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Hyuk Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH VOLTAGE PLASMA CONTROL
Publication number
20240120170
Publication date
Apr 11, 2024
Timothy Ziemba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCTION OF POWER CONSUMPTION FOR A CHARGED PARTICLE SYSTEM
Publication number
20240120171
Publication date
Apr 11, 2024
FEI Company
Casper Smit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20230290606
Publication date
Sep 14, 2023
Hitachi High-Tech Corporation
Yusuke ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF NUCLEAR REPROGRAMMING
Publication number
20230282445
Publication date
Sep 7, 2023
KYOTO UNIVERSITY
Shinya Yamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD
Publication number
20230162946
Publication date
May 25, 2023
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD OF GENERATING HIGH VOLTAGE VARIABLE FREQUENCY ELE...
Publication number
20230097778
Publication date
Mar 30, 2023
Advanced Biotechnologies, LLC.
James William Law
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING PARTICLE WAVE CARRYING ELECTRIC...
Publication number
20220392733
Publication date
Dec 8, 2022
Yanbing LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Corona/Plasma Treatment Machine
Publication number
20220310358
Publication date
Sep 29, 2022
3DT LLC
Donald J. Weyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH VOLTAGE POWER SUPPLY
Publication number
20220246390
Publication date
Aug 4, 2022
AES Global Holdings, PTE. LTD.
Gary Byfield
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RC IGBT, Method of Producing an RC IGBT and Method of Controlling a...
Publication number
20220093585
Publication date
Mar 24, 2022
Roman Baburske
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF Voltage and Current (V-I) Sensors and Measurement Methods
Publication number
20210407775
Publication date
Dec 30, 2021
TOKYO ELECTRON LIMITED
Justin Moses
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA POLYMERIZATION APPARATUS AND PLASMA POLYMERIZATION METHOD US...
Publication number
20210305026
Publication date
Sep 30, 2021
Ming Chi University of Technology
Jang-Hsing HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPACT HIGH-VOLTAGE POWER SUPPLY AND RADIATION APPARATUS SYSTEMS A...
Publication number
20210195721
Publication date
Jun 24, 2021
SCHLUMBERGER TECHNOLOGY CORPORATION
Jani Reijonen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC FILTER WITH SHAPED ELECTRODES
Publication number
20210090845
Publication date
Mar 25, 2021
Applied Materials, Inc.
Robert C. Lindberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Control Method for Electron Microscope and Electron Microscope
Publication number
20210074506
Publication date
Mar 11, 2021
Mitsuru Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
Publication number
20210066037
Publication date
Mar 4, 2021
Carl Zeiss MultiSEM GmbH
Yanko Sarov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
Publication number
20210013001
Publication date
Jan 14, 2021
Varian Semiconductor Equipment Associates, Inc.
Kevin Anglin
B08 - CLEANING
Information
Patent Application
PROTECTIVE MATERIAL RING
Publication number
20200365376
Publication date
Nov 19, 2020
THINKON NEW TECHNOLOGY JAPAN CORPORATION
Atsushi Ikari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20200335306
Publication date
Oct 22, 2020
TOKYO ELECTRON LIMITED
Masato KON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CURRENT SOURCE APPARATUS AND METHOD
Publication number
20200335298
Publication date
Oct 22, 2020
ASML NETHERLANDS B.V.
Yixiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISCHARGE CONTROL APPARATUS AND METHOD
Publication number
20200312607
Publication date
Oct 1, 2020
NGK SPARK PLUG CO., LTD.
Yuji MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Impedance Matching Device and Impedance Matching Method
Publication number
20200303166
Publication date
Sep 24, 2020
DAIHEN Corporation
Tatsuya Morii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION PLASMA DISINTEGRATOR
Publication number
20200303160
Publication date
Sep 24, 2020
Bradley Nelson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD
Publication number
20200273670
Publication date
Aug 27, 2020
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NANOSECOND PULSER BIAS COMPENSATION
Publication number
20200227230
Publication date
Jul 16, 2020
Eagle Harbor Technologies, Inc.
Timothy Ziemba
H01 - BASIC ELECTRIC ELEMENTS