Controlling multiple plasma processes

Abstract

A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.

Description

TECHNICAL FIELD

The invention is directed to a power converter, plasma processing system and method of controlling multiple plasma processes.

BACKGROUND

Many plasma processing systems employ multiple independent plasma processing chambers where plasma processing is performed in parallel.

Such plasma process system is known from US 2014/0357064A1, US 2006/0156979A1, US 2005/0034667 A1, U.S. Pat. Nos. 7,396,759B1, 6,756,318B2, 6,495,392B2, 6,271,053B1. To this purpose these systems employ multiple independent power supplies connected to the individual chambers. In many instances the power delivered to all chambers is always less than the sum of the rated power installed on the machine through all independent power supplies. This excess in installed power creates high installation cost.

SUMMARY

One aspect of the invention features a power converter, which is capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers. The power converter comprises: one power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports, each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port. In this way one single power converter with a given maximum power capability may be used instead of multiple of them.

“bipolar output power” in this disclosure means an output power with an alternating current, where the current changes its direction with a frequency which may excite the plasma process (excitation frequency).

Control parameters may be measured values or set values of the mentioned parameters.

The measured and set values may be absolute, actual, effective such as root mean square (rms), or extreme such as maximum or minimum values.

The input power may be an electrical power delivered from an AC power grid. It may be also a DC power line.

The controller may comprise a microcontroller with a software program running on it when the power unit is in use.

The controller may have multiple interfaces, such as data connections to external components, monitors, keyboards, connectable with wires or wireless.

The controller may have a computing part and a memory part. The memory part may be divided for multiple purposes such as monitor memory, ram, data memory, program memory.

A threshold value may be a value used for detecting ignition or breakdown of the plasma. It may be specified for each output port differently and changing in time.

The bipolar output power may be a power value more than 1 kW, preferably more than 10 kW.

The bipolar output power may be of a frequency more than 1 kHz, preferably more than 10 kHz, preferably more than 50 kHz.

In a further aspect, the power converter may comprise a first power converter stage configured to convert the input power to an intermediate power, preferable to DC link power.

In a further aspect, the power converter may comprise at least one further power converter stage configured to convert the intermediate power from the first power converter stage to the bipolar output power.

In a further aspect, the power converter may comprise at least two further power converter stages configured to convert the intermediate power from the first power converter stage to multiple bipolar output power signals and lead these bipolar output power signals to the power output ports.

In a further aspect, the power converter may comprise a switching circuitry between the power converter stage(s) and the output ports. The switching circuitry can include one or more switches each connected to a respective one of the output ports.

In a further aspect, the switches are controlled by the controller. Switches to switch between electrodes in only one plasma chamber may be embodied as described in U.S. Pat. No. 6,620,299 B1.

In a further aspect, the controller may be configured to control the power converter stages and/or the switches such that, in use, the power converter delivers at a first time a first output power signal at the first output power port for a first time frame and at a second time a second power signal at the second output power port for a second time frame, where the first time is different from the second time and/or the first time frame is different from the second time frame.

In a further aspect, the switches are configured to lead current into two opposite directions.

In a further aspect, the controller may be configured to activate a switch from a closed status into an open status only when the absolute value of current through the switch is lower than a current threshold, for example, one ampere, preferably zero.

In a further aspect, the controller may be configured to activate a switch from an open status into a closed status only when the absolute value of voltage along the open switch is lower than a voltage threshold, for example, 20 volts, preferably zero.

In a further aspect, at least one of the power converter stages comprises a bridge circuit, preferably a full bridge circuit.

One bridge circuit may be a rectifier bridge circuit capable of rectifying an AC power.

One bridge circuit may be a bipolar output power generating switching bridge circuit.

In a further aspect, the power converter may comprise a cabinet encompassing all other parts of the power converter.

In a further aspect, the input port may be directly connected to the cabinet.

In a further aspect, the output ports may be directly connected to the cabinet.

Another aspect of the invention features a plasma processing system comprising: two, preferably more than two, plasma processing chambers, and one electrical power converter as described above.

Each plasma processing chamber may be connected to one of the power output ports of the power converter.

In a further aspect, at least one of the plasma processing chambers, preferably all plasma processing chambers, may be configured to process, in use, a plasma vapor deposition (PVD) process.

At least one of the plasma processing chambers, preferably all plasma processing chambers may be configured to process, in use, a plasma enhanced chemical vapor deposition (PECVD) process.

At least one of the plasma processing chambers, preferably all plasma processing chambers, may be configured to process, in use, an atomic layer deposition (ALD) process.

At least one of the plasma processing chambers, preferably all plasma processing chambers, may be configured to process, in use a plasma etching process.

A further aspect of the invention features a method of controlling multiple plasma processes in multiple plasma processing chambers with a controller by converting an electrical input power into a bipolar output power and delivering this output power to the plasma processing chambers, where the controller controls a power converter to deliver the bipolar output power to the power output ports, using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, such that at least one of the control parameters at a first plasma chamber is different from the corresponding control parameter at a different plasma chamber.

Plasma processes in the different plasma chambers may be different or the same. They may be the same but in a different status, which means for example plasma process in a first plasma chamber is in a PECVD status where plasma process in another plasma chamber at the beginning cleaning status, and the same PECVD status will be worked later, when plasma process in a first plasma chamber may be in an etching status. All these processes may be worked out simultaneously or in a time multiplexed manner or in a combination.

The details of one or more embodiments of the invention are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the invention will be apparent from the description and drawings, and from the claims.

DESCRIPTION OF DRAWINGS

In the figures some examples of the invention are shown schematically and described in more detail in the following description.

FIG. 1 shows an example of a first plasma processing system with a power converter.

FIG. 2 shows an example of a second plasma processing system with a second power converter.

FIG. 3 shows an example of timing diagrams of output power at a first output power port.

FIG. 4 shows an example of timing diagrams of output power at a second output power port.

FIG. 5 shows an example of a rectifier bridge circuit.

FIG. 6 shows an example of a bipolar power converting bridge.

FIG. 7 shows an example of a first embodiment of a switch.

FIG. 8 shows an example of a second embodiment of a switch.

DETAILED DESCRIPTION

In FIG. 1 a first plasma processing system 19 with a first power converter 1 is shown. The plasma processing system 19 comprises plasma processing chambers 9a, 9b . . . 9n. each connected to a power output port 3a, 3b, . . . 3n.

The power converter 1 comprises a power input port 2 for connection to an electrical power delivering grid 7.

The power converter 1 further comprises a first power converter stage 5 configured to convert the input power at the input power port 2 to an intermediate power, preferably to DC link power 12. Also multiple first power converter stages 5 configured to convert the input power at the input power port 2 to an intermediate power, preferably to DC link power 12, may be part of the power converter 1 and, preferably connected in parallel.

The power converter 1 further comprises one further power converter stage 6 connected downstream to the first power converter stage 5 configured to convert the intermediate power from the first power converter stage to the bipolar output power.

In between the power converter stage 5 and the further power converter stage 6 may be implemented an energy storing element (or energy saving element) such as an inductor or a capacitor for smoothing the current or voltage respectively.

The power converter 1 further comprises a switching circuitry having multiple switches 8a, 8b, . . . 8n between the power converter stage 6 and the output ports 3a, 3b, . . . 3n.

The power converter 1 further comprises a controller 4 configured to control the power converter 1 to deliver the bipolar output power to the power output ports 3a, 3b, . . . 3n, using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, such that at least one of the control parameters at a first power output port 3a is different from the corresponding control parameter at a different power output port 3b, . . . 3n.

In this example the controller 4 has connections to the power converter stages 5, 6 and the switches 8a, 8b, . . . 8n. Some of these connections may be optional, for example, the connection to the power converter stages 5. The controller 4 may be configured to activate a switch 8a, 8b, . . . 8n from a closed status into an open status only when the absolute value of current through the switch is lower than a current threshold, for example, one ampere, preferably zero. This has the advantage that switches may be used which need not to be designed to switch higher currents. This makes the power converter even less expensive.

The plasma processing system 19 comprises a controller 17 external from the power converter 1. This external controller 17 controls also the plasma process in the plasma chambers 9a, 9b, . . . 9n.

The controller 4 may also be configured to activate a switch 8a, 8b, . . . 8n from an open status into an closed status only when the absolute value of voltage along the open switch is lower than a voltage threshold, for example, 20 volts, preferably zero. This has the advantage that switches may be used which need not to be designed to switch higher voltages. This makes the power converter even less expensive.

In the example switching circuitry, bipolar transistors 81, 82, 91, 92 are used as shown in FIGS. 7 and 8. These bipolar transistors are much cheaper than metal-oxide semiconductor field-effect transistors (MOSFETs). The bipolar transistors 81, 82, 91, 92 may be insulated-gate bipolar transistors (IGBTs), which is a low cost transistor for leading high currents with low loss of energy. This makes the power converter 1 even less expensive, due to no need of expensive cooling devices.

In FIGS. 7 and 8, additional diodes 83, 84, 93, 94 are connected for leading current into the wanted direction and blocking current into unwanted direction.

The first power converter stage 5 may comprise a rectifier circuit, preferably a bridge rectifier circuit 50 as shown in FIG. 5. Four rectifying diodes 52, 53, 54, 55 are connected in a bridge circuit to rectify AC power from the first port 51 to the second port 56. At the first port 51 may be additionally connected at least one of the following: a filter, an overvoltage protection circuit, an overcurrent protection circuit. A filter may comprise one or more energy storing elements such as capacitors or inductors.

The second power converter stage 6 may comprise a switching bridge, preferably a full switching bridge 60 as shown in FIG. 6. This full bridge switching bridge 60 comprises four switches 62, 63, 64, 65. These switches may be transistors, bipolar transistors, IGBTs and most preferably MOSFETs. A filter circuit comprising one or more energy saving elements such as a capacitor 61 and/or inductors 66, 67 may be at the input of the second power converter stage 6. The full bridge switching bridge 60 may further comprise some diodes in the shown manner.

The power converter 1 may comprise a cabinet 10 encompassing all other parts of the power converter 1. It may be of metal and therefore a good protection against electromagnetical (EM) disturbing waves. The input port 2 may be directly connected to the cabinet 10. The output ports 3a, 3b, . . . 3n may also be directly connected to the cabinet (10).

In one power converter 1 the current leading capability of all of the switches 8a, 8b . . . 8n together may be higher than the maximum power delivery possibilities of all the power converter stages 5 together.

In FIG. 2 a second plasma processing system 19′ with a second power converter 1′ is shown. The second power converter 1′ is an alternative to the first power converter 1 as shown in FIG. 1. All elements which are the same as in FIG. 1 have the same reference numbers. The power converter 1′ as shown in FIG. 2 comprises instead of the switches 8a, 8b, . . . . 8n multiple power converter stages 6a, 6b, . . . 6n configured to convert the intermediate power 12 from the first power converter stage 5 to multiple bipolar output power signals and lead these powers to the power output ports 3a, 3b . . . 3n. All power converter stages 6a, 6b, . . . 6n are controllable by the controller 4. All power converter stages 6a, 6b, . . . 6n may comprise full bridges 60 and filter elements 61, 66, 67 as shown in FIG. 6.

Measuring sensors for detecting voltage, current, frequency or power may be connected at the output ports 3a, 3b, . . . 3n (not shown).

Also multiple first power converter stages 5 configured to convert the input power at the input power port 2 to an intermediate power, preferably to DC link power 12, may be part of the power converter 1 and, preferably connected in parallel.

FIG. 3 shows a timing diagram of output power at a first output power port 3a. The axis t is the time axis and the axis S30 may be for example the voltage, current or power axis. As the axis S30 is for the actual values of these parameters, the axis S31 is for an effective value of these parameters. In the first diagram of FIG. 3 with the S30 axis the bipolar signal is shown in two signal sequences 31, 32. The signal sequence 31 has an excitation frequency with a period of 2/11 of the time frame which begins at time point T31 and ends at time point T32. The signal sequence 32 has an excitation frequency with a period of 2/11 of the time frame which begins at time point T33 and ends at time point T34. In this example these frequencies are the same, but it is possible that these frequencies may be different. In the second diagram of FIG. 3 with the S31 axis the effective values of the two signal sequences 31, 32 are shown in two signal sequences 33, 34. Two threshold lines 35, 36 are also shown in this diagram. They may be used to detect a plasma breakdown such as an arc or an ignition of the plasma, when the effective value of one of the parameters power, voltage or current exceeds such a threshold. For example, if the signal sequence 33 is a current, the line 35 can be an arc detecting threshold line and the line 36 can be an ignition detecting threshold line. If the signal sequence 33 is a voltage, the line 36 can be an arc detecting threshold line, and an ignition detecting threshold line is not shown here. Line 35 has no specific meaning in this case.

In one power converter 1′ the current leading capability of all of the power converter stages 6a, 6b, 6n together may be higher than the maximum power delivery possibilities of all the power converter stages 5 together.

FIG. 4 shows a timing diagram of output power at a different output power port 3b, . . . 3n. The axis t is the time axis and the axis S40 may be for example the voltage, current or power axis. As the axis S40 is for the actual values of these parameters, the axis S41 is for an effective value of these parameters. In the first diagram of FIG. 4 with the S40 axis the bipolar signal is shown in two signal sequences 41, 42. The signal sequence 41 has an excitation frequency with a period of 1/7 of the time frame which begins at time point T41 and ends at time point T42. At time point T43 a second pulse 44 starts the end of which cannot be seen in this diagram. It may be seen out of this example that the frequencies of the signals 31, 32 and the signals 41, 42 are different, and the frequency of the signals 41, 42 is higher than the frequency of the signals 31, 32.

Additionally or alternatively to the exciting the frequency also power, voltage, current, or threshold for protective measures may be different between two different output ports 3a, 3b, . . . 3n or at two different plasma chambers 9a, 9b, . . . 9n.

Two threshold lines 45, 46 are also shown in this diagram. They may be used to detect a plasma breakdown such as an arc or an ignition of the plasma, when the effective value of one of the parameters power, voltage or current exceeds such a threshold.

Various aspect of the invention work in a way of controlling multiple plasma processes in the multiple plasma processing chambers 9a, 9b, . . . 9n with the controller 4 by converting an electrical input power into a bipolar output power as shown in the signal sequences 31, 32, 41, 42 and deliver this output power to the plasma processing chambers 9a, 9b . . . 9n. The controller 4 controls the power converter 1 to deliver the bipolar output power to the power output ports 3a, 3b, . . . 3n, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first plasma chamber 9a is different from the corresponding control parameter at a different plasma chamber 9b, . . . 9n.

For that the controller 4 may control the power converter stages 6, 6a, 6b . . . 6n or the switches 8a, 8b, . . . 8n such that, in use, the power converter 1 delivers at a first time T31 a first output power signal at the first output power port 3a for a first time frame T31-T32 and at a second time T41 a second power signal at a second output power port 3b, . . . 3n for a second time frame T41-T42, where the first time T31, T41 is different from the second time T32, T42 and/or the first time frame T31-T32 is different from the second time frame T41-T42.

A number of embodiments of the invention have been described. Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the invention. Accordingly, other embodiments are within the scope of the following claims.

Claims

1. A power converter configured to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers, the power converter comprising: a power input port for connection to an electrical power delivering grid;at least two power output ports each for connection to a respective one of the plasma process chambers;at least one first power converter stage configured to convert the input power to an intermediate power;at least one further power converter stage configured to convert the intermediate power from the first power converter stage to the bipolar output power;a switching circuitry between the at least one further power converter stage and the power output ports, wherein the switching circuitry comprises at least two switches each connected to a respective one of the power output ports, and wherein a current leading capability of the switches together is higher than maximum power delivery possibilities of the at least one first power converter stage; anda controller configured to control delivering the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising power, voltage, current, excitation frequency, and protection threshold, such that at least one of the control parameters at a first power output port is different from a corresponding control parameter at a second, different power output port,wherein the controller is configured such that, in operation, the at least one further power converter stage delivers at a first time a first output power signal at the first power output port for a first time frame and at a second time a second output power signal at the second power output port for a second time frame, wherein the first time is different from the second time and the first time frame is different from the second time frame.

2. The power converter of claim 1, wherein the controller is configured to control the further power converter stage and the switching circuitry, such that, in operation, the further power converter stage delivers at the first time the first output power signal to the first power output port for the first time frame and at the second time the second output power signal to the second power output port for the second time frame.

3. The power converter of claim 1, wherein the controller is configured to activate one of the switches from a closed status into an open status when an absolute value of current through the one of the switches is lower than a current threshold.

4. The power converter of claim 1, wherein the controller is configured to activate one of the switches from an open status into a closed status when an absolute value of voltage along the one of the switches is lower than a voltage threshold.

5. The power converter of claim 1, wherein the at least one further power converter stage comprises two or more further power converter stages configured to: convert the intermediate power from the first power converter stage to multiple bipolar output power signals, andlead the multiple bipolar output power signals to the power output ports,wherein each of the further power converter stages is connected to a respective power output port of the power output ports.

6. The power converter of claim 5, wherein the controller is configured to control the two or more further power converter stages, such that, in operation, a first further power converter stage delivers at the first time a first bipolar output power signal to the first power output port for the first time frame and a second further power converter stage delivers at the second time a second bipolar power signal to the second power output port for the second time frame.

7. The power converter of claim 1, wherein a current leading capability of the at least one further power converter stage is higher than maximum power delivery possibilities of the at least one first power converter stage.

8. The power converter of claim 1 wherein the at least one further power converter stage comprises a full bridge and a filter.

9. The power converter of claim 1, wherein at least one of the power converter stages comprises a filter circuit comprising one or more energy storing elements at an input of the at least one of the power converter stages.

10. The power converter of claim 1, wherein at least one of the power converter stages comprises a bridge circuit.

11. The power converter of claim 1, further comprising: a cabinet encompassing the first power converter stage and the at least one further power converter stage,wherein the power input port is directly connected to the cabinet, and the power output ports are directly connected to the cabinet.

12. A plasma processing system comprising: at least two independent plasma processing chambers; anda power converter configured to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to the plasma processing chambers, the power converter comprising: a power input port for connection to an electrical power delivering grid;at least two power output ports each for connection to a respective one of the plasma process chambers;at least one first power converter stage configured to convert the input power to an intermediate power;at least one further power converter stage configured to convert the intermediate power from the first power converter stage to the bipolar output power;a switching circuitry between the at least one further power converter stage and the power output ports; anda controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and protection threshold, such that at least one of the control parameters at a first power output port is different from a corresponding control parameter at a second, different power output port,wherein the controller is configured to control the power converter such that, in operation, the power converter delivers at a first time a first output power signal at the first power output port for a first time frame and at a second time a second output power signal at the second power output port for a second time frame, wherein the first time is different from the second time and the first time frame is different from the second time frame,wherein the switching circuitry comprises at least two switches each connected to a respective one of the power output ports, andwherein the controller is configured to perform at least one of: activating one of the switches from a closed status into an open status when an absolute value of current through the one of the switches is lower than a current threshold, oractivating one of the switches from an open status into a closed status when an absolute value of voltage along the one of the switches is lower than a voltage threshold.

13. The plasma processing system of claim 12, further comprising: a second controller external from the power converter and operable to control plasma processes in the plasma processing chambers.

14. The plasma processing system of claim 12, wherein at least one of the plasma processing chambers is configured to perform at least one of a PECVD process, a PVD process, an ALD process, or a plasma etching process.

15. The plasma processing system of claim 14, wherein a first plasma processing chamber of the plasma processing chambers is configured to perform a first plasma process, and wherein a second plasma processing chamber of the plasma processing chambers is configured to perform one of:a second plasma process different from the first plasma process, andthe first plasma process in a different status.

16. A method of controlling multiple plasma processes in multiple plasma processing chambers with a controller, the method comprising: converting an electrical input power into a bipolar output power, the converting comprising: converting the electrical input power into an intermediate power by at least one first power converter stage, and converting the intermediate power from the first power converter stage to the bipolar output power by at least one further power converter stage; anddelivering the bipolar output power to the plasma processing chambers by controlling a power converter to deliver the bipolar output power to multiple power output ports connected to the plasma processing chambers, using one or more control parameters, such that at least one of the control parameters at a first plasma processing chamber is different from a corresponding control parameter at a second, different plasma processing chamber,wherein each of the plasma processing chambers is connected to a respective one of the power output ports,wherein the one or more control parameters are selected from a list comprising power, voltage, current, excitation frequency, and protection threshold,wherein delivering the bipolar output power to the plasma processing chambers comprises: delivering the bipolar output power to the multiple power output ports through a switching circuitry between the at least one further power converter stage and the multiple power output ports, wherein the switching circuitry comprises multiple switches each connected to a respective one of the multiple power output ports, andwherein a current leading capability of the multiple switches together is higher than maximum power delivery possibilities of the at least one first power converter stage.

17. The method of claim 16, wherein controlling a power converter to deliver the bipolar output power to multiple power output ports comprises: controlling the power converter to deliver at a first time a first output power signal to a first power output port connected to the first plasma processing chamber for a first time frame and at a second time a second output power signal to a second power output port connected to the second plasma processing chamber for a second time frame,wherein the first time is different from the second time and the first time frame is different from the second time frame.

18. The plasma processing system of claim 12, wherein a current leading capability of the switches together is higher than maximum power delivery possibilities of the at least one first power converter stage.

19. The method of claim 16, further comprising at least one of: activating one of the multiple switches from a closed status into an open status when an absolute value of current through the one of the multiple switches is lower than a current threshold, oractivating one of the multiple switches from an open status into a closed status when an absolute value of voltage along the one of the multiple switches is lower than a voltage threshold.

20. A power converter configured to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers, the power converter comprising: a power input port for connection to an electrical power delivering grid;at least two power output ports each for connection to a respective one of the plasma process chambers;at least one first power converter stage configured to convert the input power to an intermediate power;at least one further power converter stage configured to convert the intermediate power from the first power converter stage to the bipolar output power;a switching circuitry between the at least one further power converter stage and the power output ports; anda controller configured to control delivering the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising power, voltage, current, excitation frequency, and protection threshold, such that at least one of the control parameters at a first power output port is different from a corresponding control parameter at a second, different power output port,wherein the controller is configured such that, in operation, the at least one further power converter stage delivers at a first time a first output power signal at the first power output port for a first time frame and at a second time a second output power signal at the second power output port for a second time frame, wherein the first time is different from the second time and the first time frame is different from the second time frame,wherein the switching circuitry comprises at least two switches each connected to a respective one of the power output ports, andwherein the controller is configured to perform at least one of: activating one of the switches from a closed status into an open status when an absolute value of current through the one of the switches is lower than a current threshold, oractivating one of the switches from an open status into a closed status when an absolute value of voltage along the one of the switches is lower than a voltage threshold.