TREA

Homogenization of illumination intensity in the mask plane, by using an integrator

Follow

Industry

  • CPC
  • G03F7/70075
This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70075Homogenization of illumination intensity in the mask plane, by using an integrator
Industries