Hybrid exposure, i.e. combining different types of exposure

Industry

CPC
G03F7/7045

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/7045Hybrid exposure, i.e. combining different types of exposure

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Microlithographic fabrication of structures
- Patent number 11,960,204
- Issue date Apr 16, 2024
- Molecular Imprints, Inc.
- Vikramjit Singh
- G02 - OPTICS
Information Patent Grant
Method for controlling a manufacturing apparatus and associated app...
- Patent number 11,669,017
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Roy Werkman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus and lithographic processing cell
- Patent number RE49460
- Issue date Mar 14, 2023
- ASML Netherlands B.V.
- Everhardus Cornelis Mos
Information Patent Grant
Apparatus for lithographically forming wafer identification marks a...
- Patent number 11,562,968
- Issue date Jan 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hu-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus and lithographic processing cell
- Patent number RE49199
- Issue date Sep 6, 2022
- ASML Netherlands B.V.
- Everhardus Cornelis Mos
Information Patent Grant
Microlithographic fabrication of structures
- Patent number 11,415,883
- Issue date Aug 16, 2022
- Molecular Imprints, Inc.
- Vikramjit Singh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performing model-based scanner tuning
- Patent number 11,372,337
- Issue date Jun 28, 2022
- ASML Netherlands B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron-beam lithography process adapted for a sample comprising a...
- Patent number 11,127,565
- Issue date Sep 21, 2021
- Centre National de la Recherche Scientifique
- Agnès Maitre
- G01 - MEASURING TESTING
Information Patent Grant
Projection lighting system for semiconductor lithography with an im...
- Patent number 10,969,699
- Issue date Apr 6, 2021
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask and manufacturing method thereof
- Patent number 10,908,494
- Issue date Feb 2, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Ming Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic fabrication of structures
- Patent number 10,838,298
- Issue date Nov 17, 2020
- Molecular Imprints, Inc.
- Vikramjit Singh
- G02 - OPTICS
Information Patent Grant
Method of performing model-based scanner tuning
- Patent number 10,795,266
- Issue date Oct 6, 2020
- ASML Netherlands B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reproduction of a stem cell niche of an organism and method for the...
- Patent number 10,780,613
- Issue date Sep 22, 2020
- Technische Universitaet Ilmenau
- Andreas Schober
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method to enhance the resolution of maskless lithography while main...
- Patent number 10,761,430
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing pattern and article manufacturing method
- Patent number 10,754,257
- Issue date Aug 25, 2020
- Canon Kabushiki Kaisha
- Noburu Takakura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and projection exposure apparatus for mi...
- Patent number 10,678,144
- Issue date Jun 9, 2020
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining the dose corrections to be applied to an IC...
- Patent number 10,578,978
- Issue date Mar 3, 2020
- Aselta Nanographics
- Mohamed Saib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model-based scanner tuning systems and methods
- Patent number 10,569,469
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Pattern formation method and article manufacturing method
- Patent number 10,564,541
- Issue date Feb 18, 2020
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern manufacturing apparatus, pattern manufacturing method, and...
- Patent number 10,539,885
- Issue date Jan 21, 2020
- Kantatsu Co., Ltd.
- Eiji Oshima
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Projection exposure method and projection exposure apparatus for mi...
- Patent number 10,514,611
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multicolor photolithography materials and methods
- Patent number 10,459,337
- Issue date Oct 29, 2019
- University of Maryland, College Park
- John T. Fourkas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic illumination unit
- Patent number 10,394,129
- Issue date Aug 27, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Lithography method, determination method, information processing ap...
- Patent number 10,353,299
- Issue date Jul 16, 2019
- Canon Kabushiki Kaisha
- Kazushi Mizumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Maskless photolithographic system in cooperative working mode for c...
- Patent number 10,317,800
- Issue date Jun 11, 2019
- Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
- Xuanming Duan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pattern forming method and method of manufacturing article
- Patent number 10,303,069
- Issue date May 28, 2019
- Canon Kabushiki Kaisha
- Eiji Sakamoto
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method for determining the parameters of an IC manufacturing proces...
- Patent number 10,156,796
- Issue date Dec 18, 2018
- Aselta Nanographics
- Mohamed Saïb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Model-based process simulation systems and methods
- Patent number 10,137,643
- Issue date Nov 27, 2018
- ASML Netherlands B.V.
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Real-time variable parameter micro-nano optical field modulation sy...
- Patent number 10,054,859
- Issue date Aug 21, 2018
- Soochow University
- Yan Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for printing colour images
- Patent number 10,025,197
- Issue date Jul 17, 2018
- Eulitha A.G.
- Harun H. Solak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20240313066
- Publication date Sep 19, 2024
- Samsung Electronics Co., Ltd.
- Soo Kyung KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL LITHOGRAPHY SCAN SEQUENCING
- Publication number 20240288778
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Ying-Chiao Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC FABRICATION OF STRUCTURES
- Publication number 20240248394
- Publication date Jul 25, 2024
- Molecular Imprints, Inc.
- Vikramjit Singh
- G02 - OPTICS
Information Patent Application
DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE
- Publication number 20230341783
- Publication date Oct 26, 2023
- ASML NETHERLANDS B.V.
- Arnaud HUBAUX
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEDICAL DIAGNOSTIC CHIP AND METHOD FOR MANUFACTURING THE MEDICAL DI...
- Publication number 20230191395
- Publication date Jun 22, 2023
- Kyungpook National University Industry-Academic Cooperation Foundation
- Sung-Wook NAM
- B82 - NANO-TECHNOLOGY
Information Patent Application
MICROLITHOGRAPHIC FABRICATION OF STRUCTURES
- Publication number 20220390836
- Publication date Dec 8, 2022
- Molecular Imprints, Inc.
- Vikramjit Singh
- G02 - OPTICS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20220359156
- Publication date Nov 10, 2022
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROLITHOGRAPHIC FABRICATION OF STRUCTURES
- Publication number 20210033968
- Publication date Feb 4, 2021
- Molecular Imprints, Inc.
- Vikramjit Singh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PERFORMING MODEL-BASED SCANNER TUNING
- Publication number 20210018844
- Publication date Jan 21, 2021
- ASML NETHERLANDS B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fabricating Devices with Reduced Isolation Regions
- Publication number 20200409273
- Publication date Dec 31, 2020
- Spin Memory, Inc.
- Amitay Levi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APP...
- Publication number 20200278614
- Publication date Sep 3, 2020
- ASML NETHERLANDS B.V.
- Roy WERKMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS
- Publication number 20200189192
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
- Publication number 20200096877
- Publication date Mar 26, 2020
- Carl Zeiss SMT GMBH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO ENHANCE THE RESOLUTION OF MASKLESS LITHOGRAPHY WHILE MAIN...
- Publication number 20200089128
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON-BEAM LITHOGRAPHY PROCESS ADAPTED FOR A SAMPLE COMPRISING A...
- Publication number 20200006037
- Publication date Jan 2, 2020
- Centre National de la Recherche Scientifique
- Agnès MAITRE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION LIGHTING SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY WITH AN IM...
- Publication number 20190384187
- Publication date Dec 19, 2019
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PERFORMING MODEL-BASED SCANNER TUNING
- Publication number 20180231896
- Publication date Aug 16, 2018
- ASML NETHERLANDS B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING THE DOSE CORRECTIONS TO BE APPLIED TO AN IC...
- Publication number 20180203361
- Publication date Jul 19, 2018
- ASELTA NANOGRAPHICS
- Mohamed SAIB
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REPRODUCTION OF A STEM CELL NICHE OF AN ORGANISM AND METHOD FOR THE...
- Publication number 20180147751
- Publication date May 31, 2018
- TECHNISCHE UNIVERSITAET ILMENAU
- Andreas SCHOBER
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING SHEET, PATTERN MANUFACTURING APPARATUS, PATTERN MAN...
- Publication number 20180087897
- Publication date Mar 29, 2018
- KANTATSU CO., LTD
- Eiji OSHIMA
- G01 - MEASURING TESTING
Information Patent Application
PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND...
- Publication number 20180088471
- Publication date Mar 29, 2018
- KANTATSU CO., LTD
- Eiji OSHIMA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT ACTUATED AND PROJECTED LITHOGRAPHY SYSTEMS AND METHODS
- Publication number 20180059550
- Publication date Mar 1, 2018
- Northwestern University
- Chad A. Mirkin
- B82 - NANO-TECHNOLOGY
Information Patent Application
REAL-TIME VARIABLE PARAMETER MICRO-NANO OPTICAL FIELD MODULATION SY...
- Publication number 20180039183
- Publication date Feb 8, 2018
- SOOCHOW UNIVERSITY
- Yan YE
- G02 - OPTICS
Information Patent Application
MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS
- Publication number 20140351773
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Yu CAO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, AND...
- Publication number 20140347643
- Publication date Nov 27, 2014
- Canon Kabushiki Kaisha
- Masashi KOTOKU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMBINING CUT MASK LITHOGRAPHY AND CONVENTIONAL LITHOGRAPHY TO ACHI...
- Publication number 20140312500
- Publication date Oct 23, 2014
- QUALCOMM Incorporated
- John J. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE DEFECT CORRECTION BY SECOND EXPOSURE
- Publication number 20140247438
- Publication date Sep 4, 2014
- GLOBALFOUNDRIES INC.
- Arthur Hotzel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FORMING TIGHT-PITCHED PATTERN
- Publication number 20140205955
- Publication date Jul 24, 2014
- NANYA TECHNOLOGY CORP.
- Chun-Wei Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, EXPOSURE SYSTEM AND DEVICE MAN...
- Publication number 20140204359
- Publication date Jul 24, 2014
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB-DIFFRACTION-LIMITED PATTERNING AND IMAGING VIA MULTI-STEP PHOTO...
- Publication number 20140199636
- Publication date Jul 17, 2014
- Rajesh Menon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hybrid exposure, i.e. combining different types of exposure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microlithographic fabrication of structures

Method for controlling a manufacturing apparatus and associated app...

Inspection method and apparatus and lithographic processing cell

Apparatus for lithographically forming wafer identification marks a...

Inspection method and apparatus and lithographic processing cell

Microlithographic fabrication of structures

Method of performing model-based scanner tuning

Electron-beam lithography process adapted for a sample comprising a...

Projection lighting system for semiconductor lithography with an im...

Photomask and manufacturing method thereof

Microlithographic fabrication of structures

Method of performing model-based scanner tuning

Reproduction of a stem cell niche of an organism and method for the...

Method to enhance the resolution of maskless lithography while main...

Method of manufacturing pattern and article manufacturing method

Projection exposure method and projection exposure apparatus for mi...

Method for determining the dose corrections to be applied to an IC...

Model-based scanner tuning systems and methods

Pattern formation method and article manufacturing method

Pattern manufacturing apparatus, pattern manufacturing method, and...

Projection exposure method and projection exposure apparatus for mi...

Multicolor photolithography materials and methods

Microlithographic illumination unit

Lithography method, determination method, information processing ap...

Maskless photolithographic system in cooperative working mode for c...

Pattern forming method and method of manufacturing article

Method for determining the parameters of an IC manufacturing proces...

Model-based process simulation systems and methods

Real-time variable parameter micro-nano optical field modulation sy...

Method for printing colour images

Patents Applicationslast 30 patents

METHOD OF FABRICATING SEMICONDUCTOR DEVICE

DIGITAL LITHOGRAPHY SCAN SEQUENCING

MICROLITHOGRAPHIC FABRICATION OF STRUCTURES

DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE

MEDICAL DIAGNOSTIC CHIP AND METHOD FOR MANUFACTURING THE MEDICAL DI...

MICROLITHOGRAPHIC FABRICATION OF STRUCTURES

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MICROLITHOGRAPHIC FABRICATION OF STRUCTURES

METHOD OF PERFORMING MODEL-BASED SCANNER TUNING

Fabricating Devices with Reduced Isolation Regions

METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APP...

MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS

PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...

METHOD TO ENHANCE THE RESOLUTION OF MASKLESS LITHOGRAPHY WHILE MAIN...

ELECTRON-BEAM LITHOGRAPHY PROCESS ADAPTED FOR A SAMPLE COMPRISING A...

PROJECTION LIGHTING SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY WITH AN IM...

METHOD OF PERFORMING MODEL-BASED SCANNER TUNING

METHOD FOR DETERMINING THE DOSE CORRECTIONS TO BE APPLIED TO AN IC...

REPRODUCTION OF A STEM CELL NICHE OF AN ORGANISM AND METHOD FOR THE...

PATTERN FORMING SHEET, PATTERN MANUFACTURING APPARATUS, PATTERN MAN...

PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND...

HEAT ACTUATED AND PROJECTED LITHOGRAPHY SYSTEMS AND METHODS

REAL-TIME VARIABLE PARAMETER MICRO-NANO OPTICAL FIELD MODULATION SY...

MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, AND...

COMBINING CUT MASK LITHOGRAPHY AND CONVENTIONAL LITHOGRAPHY TO ACHI...

RETICLE DEFECT CORRECTION BY SECOND EXPOSURE

METHOD OF FORMING TIGHT-PITCHED PATTERN

EXPOSURE METHOD, EXPOSURE APPARATUS, EXPOSURE SYSTEM AND DEVICE MAN...

SUB-DIFFRACTION-LIMITED PATTERNING AND IMAGING VIA MULTI-STEP PHOTO...