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H01J37/32853
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/32853
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Patents Grants
last 30 patents
Information
Patent Grant
Micro-surface morphological matching for reactor components
Patent number
11,901,164
Issue date
Feb 13, 2024
Intel Corporation
Patrick Whiting
B08 - CLEANING
Information
Patent Grant
Shutter disc for a semiconductor processing tool
Patent number
11,827,970
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Lin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chamber processes for reducing backside particles
Patent number
11,702,738
Issue date
Jul 18, 2023
Applied Materials, Inc.
Yi Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment module with a cleaning chamber
Patent number
11,637,004
Issue date
Apr 25, 2023
Applied Materials, Inc.
Alexander N. Lerner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
3D printed chamber components configured for lower film stress and...
Patent number
11,569,069
Issue date
Jan 31, 2023
Applied Materials, Inc.
Kadthala R. Narendrnath
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Conditioning treatment for ALD productivity
Patent number
11,566,324
Issue date
Jan 31, 2023
Applied Materials, Inc.
Christina L. Engler
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Capacitive sensing data integration for plasma chamber condition mo...
Patent number
11,545,346
Issue date
Jan 3, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for aligning a mask with a substrate
Patent number
11,538,706
Issue date
Dec 27, 2022
Applied Materials, Inc.
Alexander N. Lerner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning method
Patent number
11,517,942
Issue date
Dec 6, 2022
Edwards, S.R.O.
Martin Zahradka
B08 - CLEANING
Information
Patent Grant
Low contamination chamber for surface activation
Patent number
11,508,562
Issue date
Nov 22, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Ping-Yin Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing system having an inspection tool and controller t...
Patent number
11,276,564
Issue date
Mar 15, 2022
Lam Research Corporation
Richard Alan Gottscho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and cleaning method
Patent number
11,264,218
Issue date
Mar 1, 2022
Tokyo Electron Limited
Wataru Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,145,494
Issue date
Oct 12, 2021
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro-surface morphological matching for reactor components
Patent number
11,139,151
Issue date
Oct 5, 2021
Intel Corporation
Patrick Whiting
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conditioning chamber component
Patent number
10,967,407
Issue date
Apr 6, 2021
Lam Research Corporation
Amir A. Yasseri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning a substrate processing apparatus and the substra...
Patent number
10,944,051
Issue date
Mar 9, 2021
Tokyo Electron Limited
Takuya Kubo
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate processing chamber with showerhead having cooled faceplate
Patent number
10,900,124
Issue date
Jan 26, 2021
Lam Research Corporation
Damodar Rajaram Shanbhag
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching organic region
Patent number
10,903,085
Issue date
Jan 26, 2021
Tokyo Electron Limited
Ryuichi Asako
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical vapor deposition tool and operating method thereof
Patent number
10,879,049
Issue date
Dec 29, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Ta Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Textured skin for chamber components
Patent number
10,872,749
Issue date
Dec 22, 2020
Applied Materials, Inc.
Gangadhar Sheelavant
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for fabrication semiconductor device
Patent number
10,867,843
Issue date
Dec 15, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Shao-Kuan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D printed chamber components configured for lower film stress and...
Patent number
10,777,391
Issue date
Sep 15, 2020
Applied Materials, Inc.
Kadthala R. Narendrnath
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Plasma film forming method
Patent number
10,734,219
Issue date
Aug 4, 2020
ASM IP Holdings B.V.
Fumitaka Shoji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process kit shield for improved particle reduction
Patent number
10,718,049
Issue date
Jul 21, 2020
Applied Materials, Inc.
Muhammad Rasheed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
10,714,355
Issue date
Jul 14, 2020
Tokyo Electron Limited
Hiroki Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring gas introducing hole provided in electrode for...
Patent number
10,679,828
Issue date
Jun 9, 2020
A-SAT CORPORATION
Takayuki Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cooled gas feed block with baffle and nozzle for HDP-CVD
Patent number
10,662,529
Issue date
May 26, 2020
Applied Materials, Inc.
Govinda Raj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
10,665,436
Issue date
May 26, 2020
HITACHI HIGH-TECH CORPORATION
Takashi Uemura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Precleaning chamber and plasma processing apparatus
Patent number
10,622,224
Issue date
Apr 14, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qing She
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Macroparticle filter device and method for use in cathodic arc depo...
Patent number
10,604,835
Issue date
Mar 31, 2020
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
Juergen Ramm
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...
Publication number
20240150894
Publication date
May 9, 2024
ASM IP HOLDING B.V.
Toshiharu Watarai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLEANING METHOD AND PLASMA PROCESSING METHOD
Publication number
20240087858
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Junichi SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE
Publication number
20240047185
Publication date
Feb 8, 2024
Applied Materials, Inc.
Abhijit A. Kangude
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20240006161
Publication date
Jan 4, 2024
ASM IP HOLDING B.V.
HaeIn Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL
Publication number
20230383397
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Lin WANG
B08 - CLEANING
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20230343568
Publication date
Oct 26, 2023
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Application
PLASMA DEVICE FOR GAS-BASED SURFACE TREATMENT AND WATER ACTIVATION
Publication number
20230298858
Publication date
Sep 21, 2023
The Regents of the University of Michigan
John Foster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR FILLING GAP FEATURES ON SUBSTRATE SURFACES
Publication number
20230295795
Publication date
Sep 21, 2023
ASM IP HOLDING B.V.
Yasiel Cabrera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, AND WATERPROOFING DEVICE FOR ACOUST...
Publication number
20230268194
Publication date
Aug 24, 2023
EBARA CORPORATION
Hiroaki NISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEALING SURFACES OF COMPONENTS USED IN PLASMA ETCHING TOOLS USING A...
Publication number
20230215703
Publication date
Jul 6, 2023
LAM RESEARCH CORPORATION
Robin KOSHY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONDITIONING TREATMENT FOR ALD PRODUCTIVITY
Publication number
20230139267
Publication date
May 4, 2023
Applied Materials, Inc.
Christina L. Engler
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20230103165
Publication date
Mar 30, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL
Publication number
20230023914
Publication date
Jan 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Lin WANG
B08 - CLEANING
Information
Patent Application
Process Kit Conditioning Chamber
Publication number
20220189749
Publication date
Jun 16, 2022
Applied Materials, Inc.
Ribhu Gautam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220102114
Publication date
Mar 31, 2022
Kokusai Electric Corporation
Naofumi OHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADHESION REMOVAL METHOD AND FILM-FORMING METHOD
Publication number
20220059327
Publication date
Feb 24, 2022
SHOWA DENKO K.K.
Yosuke TANIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICRO-SURFACE MORPHOLOGICAL MATCHING FOR REACTOR COMPONENTS
Publication number
20220028668
Publication date
Jan 27, 2022
Intel Corporation
Patrick Whiting
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR CLEANING A SHOWERHEAD
Publication number
20210335586
Publication date
Oct 28, 2021
Applied Materials, Inc.
Tom H. YU
B08 - CLEANING
Information
Patent Application
METHODS AND APPARATUS FOR CONDUCTANCE LINERS IN SEMICONDUCTOR PROCE...
Publication number
20210285101
Publication date
Sep 16, 2021
Applied Materials, Inc.
TIMOTHY JOSEPH FRANKLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20210280400
Publication date
Sep 9, 2021
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Conditioning Treatment For ALD Productivity
Publication number
20210269916
Publication date
Sep 2, 2021
Applied Materials, Inc.
Christina L. Engler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDITIONING CHAMBER COMPONENT
Publication number
20210205858
Publication date
Jul 8, 2021
LAM RESEARCH CORPORATION
Amir A. YASSERI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20210180185
Publication date
Jun 17, 2021
Kokusai Electric Corporation
Daisuke HARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR ALIGNING A MASK WITH A SUBSTRATE
Publication number
20200373183
Publication date
Nov 26, 2020
Applied Materials, Inc.
Alexander N. LERNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALIGNMENT MODULE WITH A CLEANING CHAMBER
Publication number
20200373134
Publication date
Nov 26, 2020
Applied Materials, Inc.
Alexander N. LERNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...
Publication number
20200365374
Publication date
Nov 19, 2020
Applied Materials, Inc.
Kadthala R. NARENDRNATH
B22 - CASTING POWDER METALLURGY
Information
Patent Application
PARTICLE REMOVAL DURING FABRICATION OF ELECTROCHROMIC DEVICES
Publication number
20200264487
Publication date
Aug 20, 2020
VIEW, INC.
Robert T. Rozbicki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD
Publication number
20200251316
Publication date
Aug 6, 2020
TOKYO ELECTRON LIMITED
Wataru SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD
Publication number
20200094297
Publication date
Mar 26, 2020
Edwards, S.R.O.
Martin Zahradka
B08 - CLEANING
Information
Patent Application
PLASMA FILM FORMING METHOD
Publication number
20200098563
Publication date
Mar 26, 2020
ASM IP HOLDING B.V.
Fumitaka SHOJI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...