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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70375
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Patents Grants
last 30 patents
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Patent Grant
Two-photon-polymerization laser direct writing system based on acou...
Patent number
11,982,945
Issue date
May 14, 2024
Huazhong University of Science & Technology
Wei Xiong
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Grant
Use and fabrication of microscaffolds and nanoscaffolds
Patent number
11,658,305
Issue date
May 23, 2023
California Institute of Technology
Julia R. Greer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to achieve tilted patterning with a through resist thickness
Patent number
11,586,112
Issue date
Feb 21, 2023
Intel Corporation
Changhua Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Recurring process for laser induced forward transfer and high throu...
Patent number
11,554,549
Issue date
Jan 17, 2023
Mycronic AB
Torbjorn Sandstrom
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of making a three-dimensional structure containing substruct...
Patent number
11,484,969
Issue date
Nov 1, 2022
3M Innovative Properties Company
Jeremy K. Larsen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
3D printing of metal containing structures
Patent number
11,318,435
Issue date
May 3, 2022
California Institute of Technology
Daryl Wei Liang Yee
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Photoexcitation method
Patent number
11,275,308
Issue date
Mar 15, 2022
Nanotronix Inc.
Evangelos Angelakos
G11 - INFORMATION STORAGE
Information
Patent Grant
Precision optical assembly method for three dimensional printing
Patent number
11,207,833
Issue date
Dec 28, 2021
3D Systems, Inc.
David Sabo
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Modular parallel electron lithography
Patent number
10,937,630
Issue date
Mar 2, 2021
John Bennett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to reduce data stream for spatial light modulator
Patent number
10,488,762
Issue date
Nov 26, 2019
Applied Materials, Inc.
Joseph R. Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods for providing lithography features on a substrate by self-a...
Patent number
10,410,914
Issue date
Sep 10, 2019
ASML Netherlands B.V.
Sander Frederik Wuister
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production of 3D free-form waveguide structures
Patent number
10,343,332
Issue date
Jul 9, 2019
Karlsruher Institut für Technologie
Timo Mappes
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Chromatically corrected objective with specifically structured and...
Patent number
10,101,668
Issue date
Oct 16, 2018
Carl Zeiss SMT GmbH
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photonic activation of reactants for sub-micron feature formation u...
Patent number
10,061,208
Issue date
Aug 28, 2018
Applied Materials, Inc.
James Francis Mack
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photonic activation of reactants for sub-micron feature formation u...
Patent number
9,869,938
Issue date
Jan 16, 2018
Applied Materials, Inc.
James Francis Mack
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for fabricating nanoantenna array, nanoantenna array chip an...
Patent number
9,726,788
Issue date
Aug 8, 2017
Korea Institute of Science and Technology
Kyeong Seok Lee
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Amplification method for photoresist exposure in semiconductor chip...
Patent number
9,709,898
Issue date
Jul 18, 2017
International Business Machines Corporation
Richard S. Wise
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser micro/nano processing system and method
Patent number
9,636,777
Issue date
May 2, 2017
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Optical system illuminating surface to be illuminated, exposure app...
Patent number
9,563,134
Issue date
Feb 7, 2017
Canon Kabushiki Kaisha
Nobuyuki Saito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chucking system with recessed support feature
Patent number
9,529,274
Issue date
Dec 27, 2016
Canon Nanotechnologies, Inc.
Mahadevan GanapathiSubramanian
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Patterning method using surface plasmon
Patent number
9,436,091
Issue date
Sep 6, 2016
Samsung Display Co., Ltd.
Yong Son
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,316,926
Issue date
Apr 19, 2016
ASML Netherlands B.V.
Erwin John Van Zwet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement of the position of a radiation beam spot in lithography
Patent number
9,304,401
Issue date
Apr 5, 2016
ASML Netherlands B.V.
Felix Godfried Peter Peeters
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser micro/nano processing system and method
Patent number
9,187,318
Issue date
Nov 17, 2015
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Photoresists containing polymer-tethered nanoparticles
Patent number
9,104,100
Issue date
Aug 11, 2015
3M Innovative Properties Company
David H. Redinger
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Lithographic apparatus and device manufacturing method with radiati...
Patent number
8,937,705
Issue date
Jan 20, 2015
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process for production of photoresist pattern
Patent number
8,895,235
Issue date
Nov 25, 2014
National University Corporation Hokkaido University
Kosei Ueno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-photon exposure system
Patent number
8,885,146
Issue date
Nov 11, 2014
3M Innovative Properties Company
Robert J. DeVoe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Maskless exposure apparatus and method of alignment for overlay in...
Patent number
8,675,180
Issue date
Mar 18, 2014
Samsung Electronics Co., Ltd.
Sung Min Ahn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Direct write lithography system
Patent number
8,610,093
Issue date
Dec 17, 2013
Mapper Lithography IP B.V.
Pieter Kruit
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PHOTORESIST FORMULATIONS 3D MICROPRINTING TECHNIQUES
Publication number
20240201585
Publication date
Jun 20, 2024
Fondazione Istituto Italiano Di Tecnologia
Marco Carlotti
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Application
METHOD OF FORMING AMORPHOUS TITANIUM DIOXIDE THIN FILM USING LOW TE...
Publication number
20230280505
Publication date
Sep 7, 2023
Samsung Electronics Co., Ltd.
Hongkyu PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AN...
Publication number
20230185183
Publication date
Jun 15, 2023
ASML NETHERLANDS B.V.
Jiuning HU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
3D PRINTING OF METAL CONTAINING STRUCTURES
Publication number
20220314183
Publication date
Oct 6, 2022
California Institute of Technology
Daryl Wei Liang YEE
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
DEVICE AND METHOD FOR MEASURING SUBSTRATES FOR SEMICONDUCTOR LITHOG...
Publication number
20220276571
Publication date
Sep 1, 2022
Carl Zeiss SMT GMBH
Dirk Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
Publication number
20210405543
Publication date
Dec 30, 2021
Carl Zeiss SMT GMBH
Marwène Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
Publication number
20210405542
Publication date
Dec 30, 2021
Carl Zeiss SMT GMBH
Marwène Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MODULAR PARALLEL ELECTRON LITHOGRAPHY
Publication number
20210335572
Publication date
Oct 28, 2021
John Bennett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MAKING A THREE-DIMENSIONAL STRUCTURE CONTAINING SUBSTRUCT...
Publication number
20210114138
Publication date
Apr 22, 2021
3M Innovative Properties Company
Jeremy K. Larsen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FAST HIGH POWER PULSED LIGHT SOURCE SYSTEM FOR HIGH SPEED METROLOGY...
Publication number
20210063897
Publication date
Mar 4, 2021
MITUTOYO CORPORATION
Paul Gerard Gladnick
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
3D PRINTING OF METAL CONTAINING STRUCTURES
Publication number
20200156035
Publication date
May 21, 2020
California Institute of Technology
Daryl Wei Liang YEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTONIC ACTIVATION OF REACTANTS FOR SUB-MICRON FEATURE FORMATION U...
Publication number
20180143537
Publication date
May 24, 2018
Applied Materials, Inc.
James Francis MACK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR PROVIDING LITHOGRAPHY FEATURES ON A SUBSTRATE BY SELF-A...
Publication number
20170200638
Publication date
Jul 13, 2017
ASML NETHERLANDS B.V.
Sander Frederik WUISTER
C30 - CRYSTAL GROWTH
Information
Patent Application
OPTICAL SYSTEM ILLUMINATING SURFACE TO BE ILLUMINATED, EXPOSURE APP...
Publication number
20170146914
Publication date
May 25, 2017
Canon Kabushiki Kaisha
Nobuyuki Saito
G02 - OPTICS
Information
Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150219447
Publication date
Aug 6, 2015
Canon Kabushiki Kaisha
Atsushi ITO
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS, PROGRAMMABLE PATTERNING DEVICE AND LITHOGRA...
Publication number
20140160452
Publication date
Jun 12, 2014
ASML NETHERLANDS B.V.
Pieter Willem Herman De Jager
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
MULTI-PHOTON EXPOSURE SYSTEM
Publication number
20140092372
Publication date
Apr 3, 2014
3M Innovative Properties Company
Robert J. DeVoe
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Application
PHOTORESISTS CONTAINING POLYMER-TETHERED NANOPARTICLES
Publication number
20140080061
Publication date
Mar 20, 2014
3M Innovative Properties Company
David H. Redinger
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
MEASUREMENT OF THE POSITION OF A RADIATION BEAM SPOT IN LITHOGRAPHY
Publication number
20130335721
Publication date
Dec 19, 2013
ASML NETHERLANDS B.V.
Felix Godfried Peter Peeters
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20130250267
Publication date
Sep 26, 2013
ASML NETHERLANDS B.V.
Erwin John Van Zwet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER MICRO/NANO PROCESSING SYSTEM AND METHOD
Publication number
20130183833
Publication date
Jul 18, 2013
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR PRODUCTION OF PHOTORESIST PATTERN
Publication number
20130017499
Publication date
Jan 17, 2013
National University Corporation Hokkaido University
Kosei Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECT WRITE LITHOGRAPHY SYSTEM
Publication number
20120224155
Publication date
Sep 6, 2012
MAPPER LITHOGRAPHY IP BV
Pieter KRUIT
B82 - NANO-TECHNOLOGY
Information
Patent Application
HYBRID LITHOGRAPHIC METHOD FOR FABRICATING COMPLEX MULTIDIMENSIONAL...
Publication number
20120164587
Publication date
Jun 28, 2012
Massachusetts Institute of Technology
Jonathan Phillip Singer
B82 - NANO-TECHNOLOGY
Information
Patent Application
Nanometer Scale Instrument for Biochemically, Chemically, or Cataly...
Publication number
20120147722
Publication date
Jun 14, 2012
General Nanotechnology, LLC
Victor B. Kley
G01 - MEASURING TESTING
Information
Patent Application
DIGITAL OPTICAL CHEMISTRY MICROMIRROR IMAGER
Publication number
20120015305
Publication date
Jan 19, 2012
Harold R. Garner
C40 - COMBINATORIAL CHEMISTRY
Information
Patent Application
Maskless exposure apparatus and method of alignment for overlay in...
Publication number
20110273690
Publication date
Nov 10, 2011
Samsung Electronics Co., Ltd.
Sung Min Ahn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR PHOTOLITHOGRAPHIC FABRICATION WITH RESOLUTION...
Publication number
20110039213
Publication date
Feb 17, 2011
UNIVERSITY OF MARYLAND
John T. FOURKAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-PHOTON EXPOSURE SYSTEM
Publication number
20110001950
Publication date
Jan 6, 2011
Robert J. DeVoe
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
CHUCKING SYSTEM WITH RECESSED SUPPORT FEATURE
Publication number
20110001954
Publication date
Jan 6, 2011
Molecular Imprints, Inc.
Mahadevan GanapathiSubramanian
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS