in a reactive atmosphere

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CPC
C23C16/0218

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/0218in a reactive atmosphere

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Patents Grantslast 30 patents

Information Patent Grant
Epitaxial growth methods and structures thereof
- Patent number 12,369,374
- Issue date Jul 22, 2025
- Taiwan Semicoductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organometallic precursor compound
- Patent number 12,281,130
- Issue date Apr 22, 2025
- EGTM Co., Ltd.
- Sung Jun Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for forming graphene structure
- Patent number 12,014,907
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Superlubricity coating containing carbon nanotubes
- Patent number 11,970,764
- Issue date Apr 30, 2024
- UT-Battelle, LLC
- Chanaka Kapila Kumara Ihala Gamaralalage
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,959,167
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nucleation layer deposition method
- Patent number 11,887,848
- Issue date Jan 30, 2024
- Aixtron SE
- Christof Martin Mauder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium-group nano-whiskers and method of production
- Patent number 11,724,310
- Issue date Aug 15, 2023
- Consolidated Nuclear Security, LLC
- Paul A. Menchhofer
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Ozone for selective hydrophilic surface treatment
- Patent number 11,495,456
- Issue date Nov 8, 2022
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Ting Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth methods and structures thereof
- Patent number 11,456,360
- Issue date Sep 27, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,384,429
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor system for sublimation of pre-clean byproducts and method t...
- Patent number 11,053,585
- Issue date Jul 6, 2021
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polymer substrate with hardcoat layer, and manufacturing method for...
- Patent number 11,028,284
- Issue date Jun 8, 2021
- Teijin Limited
- Tatsuya Ekinaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium-group nano-whiskers and method of production
- Patent number 10,850,324
- Issue date Dec 1, 2020
- Consolidated Nuclear Security, LLC
- Roland D. Seals
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Epitaxial growth methods and structures thereof
- Patent number 10,658,468
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor composition containing group IV organic compound and meth...
- Patent number 10,597,777
- Issue date Mar 24, 2020
- EUGENETECH MATERIALS CO., LTD.
- Geun-Su Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor system for sublimation of pre-clean byproducts and method t...
- Patent number 10,519,541
- Issue date Dec 31, 2019
- ASM IP Holdings, B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrical de-icing for aircraft
- Patent number 10,479,512
- Issue date Nov 19, 2019
- Airbus Defence and Space GmbH
- Juergen Steinwandel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth methods and structures thereof
- Patent number 10,453,925
- Issue date Oct 22, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing CIGS thin film for solar cell
- Patent number 10,446,703
- Issue date Oct 15, 2019
- Korea Institute of Science and Technology
- Byoung Koun Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier for Raman spectroscopy and method of manufacturing the same
- Patent number 10,429,308
- Issue date Oct 1, 2019
- National Cheng Kung University
- Yon-Hua Tzeng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing graphene using metal catalyst
- Patent number 10,253,409
- Issue date Apr 9, 2019
- SRC Corporation
- Kang Hyung Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for manufacturing a silicon carbide wafer using a susceptor...
- Patent number 10,153,207
- Issue date Dec 11, 2018
- STMicroelectronics S.r.l.
- Ferruccio Frisina
- C30 - CRYSTAL GROWTH
Information Patent Grant
Reactor system for sublimation of pre-clean byproducts and method t...
- Patent number 10,053,774
- Issue date Aug 21, 2018
- ASM IP Holding B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming thin film and method of manufacturing semiconduct...
- Patent number 9,929,252
- Issue date Mar 27, 2018
- Samsung Electronics Co., Ltd.
- Sun-gyu Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing graphene using metal catalyst
- Patent number 9,776,875
- Issue date Oct 3, 2017
- SRC Corporation
- Kang Hyung Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Graphene forming method
- Patent number 9,702,039
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Daisuke Nishide
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for producing aligned carbon nanotube assembly
- Patent number 9,682,863
- Issue date Jun 20, 2017
- Zeon Corporation
- Akiyoshi Shibuya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Enhanced deposition of noble metals
- Patent number 9,587,307
- Issue date Mar 7, 2017
- ASM International N.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,552,980
- Issue date Jan 24, 2017
- Hitachi Kokusai Electric Inc.
- Takashi Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20250197303
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Peter J. GUERCIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003064
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003063
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20240218503
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Sang-Ho YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20240014032
- Publication date Jan 11, 2024
- Kokusai Electric Corporation
- Kazuhiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...
- Publication number 20230036426
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Abhishek DUBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL GROWTH METHODS AND STRUCTURES THEREOF
- Publication number 20220367639
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tesuji UENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD
- Publication number 20220341038
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PREPARING COMPOSITE CRYSTALS
- Publication number 20220316093
- Publication date Oct 6, 2022
- MEISHAN BOYA ADVANCED MATERIALS CO., LTD.
- Yu WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20220298625
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Sang-Ho YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR FORMING GRAPHENE STRUCTURE
- Publication number 20220223407
- Publication date Jul 14, 2022
- Tokyo Electron Limited
- Ryota IFUKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organometallic Precursor Compound
- Publication number 20220194967
- Publication date Jun 23, 2022
- EGTM Co., Ltd.
- Sung Jun JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NUCLEATION LAYER DEPOSITION METHOD
- Publication number 20220051893
- Publication date Feb 17, 2022
- AIXTRON SE
- Christof Martin MAUDER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPERLUBRICITY COATING CONTAINING CARBON NANOTUBES
- Publication number 20210222290
- Publication date Jul 22, 2021
- UT-Battelle, LLC
- Chanaka Kapila Kumara lhala Gamaralalage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20210017092
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Peter J. GUERCIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20200331816
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Peter J. GUERCIO
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
EPITAXIAL GROWTH METHODS AND STRUCTURES THEREOF
- Publication number 20200279920
- Publication date Sep 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ozone for Selective Hydrophilic Surface Treatment
- Publication number 20200118813
- Publication date Apr 16, 2020
- Mattson Technology, Inc.
- Ting Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...
- Publication number 20200102648
- Publication date Apr 2, 2020
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR GROWING DISCRETE ULTRALONG CYLINDRICAL SP2...
- Publication number 20190389727
- Publication date Dec 26, 2019
- The Government of the United States of America, as represented by the Secreta...
- F. Keith Perkins
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING CIGS THIN FILM FOR SOLAR CELL
- Publication number 20190319141
- Publication date Oct 17, 2019
- Korea Institute of Science and Technology
- Byoung Koun MIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL GROWTH METHODS AND STRUCTURES THEREOF
- Publication number 20190109194
- Publication date Apr 11, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Tetsuji Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR COMPOSITION CONTAINING GROUP IV ORGANIC COMPOUND AND METH...
- Publication number 20180347042
- Publication date Dec 6, 2018
- EUGENETECH MATERIALS CO., LTD.
- Geun-Su LEE
- C07 - ORGANIC CHEMISTRY
Information Patent Application
REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...
- Publication number 20180312968
- Publication date Nov 1, 2018
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Proportional-Integral-Derivative Radio Frequencies Synchronized pla...
- Publication number 20180187322
- Publication date Jul 5, 2018
- John Timothy Sullivan
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Titanium-Group Nano-Whiskers and Method of Production
- Publication number 20180154435
- Publication date Jun 7, 2018
- Consolidated Nuclear Security, LLC
- Paul A. Menchhofer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING GRAPHENE USING METAL CATALYST
- Publication number 20180029890
- Publication date Feb 1, 2018
- SRC Corporation
- KANG HYUNG KIM
- B82 - NANO-TECHNOLOGY
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20170321320
- Publication date Nov 9, 2017
- Applied Materials, Inc.
- Sang-Ho YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRICAL DE-ICING FOR AIRCRAFT
- Publication number 20170081033
- Publication date Mar 23, 2017
- AIRBUS DEFENCE AND SPACE GMBH
- Juergen STEINWANDEL
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR PRODUCING ALIGNED CARBON NANOTUBE ASSEMBLY
- Publication number 20160075558
- Publication date Mar 17, 2016
- Zeon Corporation
- Akiyoshi SHIBUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

in a reactive atmosphere

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Epitaxial growth methods and structures thereof

Method and apparatus for low temperature selective epitaxy in a dee...

Organometallic precursor compound

Method and device for forming graphene structure

Superlubricity coating containing carbon nanotubes

Selective cobalt deposition on copper surfaces

Nucleation layer deposition method

Titanium-group nano-whiskers and method of production

Ozone for selective hydrophilic surface treatment

Epitaxial growth methods and structures thereof

Selective cobalt deposition on copper surfaces

Reactor system for sublimation of pre-clean byproducts and method t...

Polymer substrate with hardcoat layer, and manufacturing method for...

Titanium-group nano-whiskers and method of production

Epitaxial growth methods and structures thereof

Precursor composition containing group IV organic compound and meth...

Reactor system for sublimation of pre-clean byproducts and method t...

Electrical de-icing for aircraft

Epitaxial growth methods and structures thereof

Method for manufacturing CIGS thin film for solar cell

Carrier for Raman spectroscopy and method of manufacturing the same

Method of manufacturing graphene using metal catalyst

Method for manufacturing a silicon carbide wafer using a susceptor...

Reactor system for sublimation of pre-clean byproducts and method t...

Method of forming thin film and method of manufacturing semiconduct...

Method of manufacturing graphene using metal catalyst

Graphene forming method

Method for producing aligned carbon nanotube assembly

Enhanced deposition of noble metals

Method of manufacturing semiconductor device, substrate processing...

Patents Applicationslast 30 patents

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

Particle Coating Apparatus And Method Of Coating Particle

Particle Coating Apparatus And Method Of Coating Particle

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...

EPITAXIAL GROWTH METHODS AND STRUCTURES THEREOF

RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD

METHODS AND SYSTEMS FOR PREPARING COMPOSITE CRYSTALS

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

METHOD AND DEVICE FOR FORMING GRAPHENE STRUCTURE

Organometallic Precursor Compound

NUCLEATION LAYER DEPOSITION METHOD

SUPERLUBRICITY COATING CONTAINING CARBON NANOTUBES

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

EPITAXIAL GROWTH METHODS AND STRUCTURES THEREOF

Ozone for Selective Hydrophilic Surface Treatment

REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...

APPARATUS AND METHOD FOR GROWING DISCRETE ULTRALONG CYLINDRICAL SP2...

METHOD FOR MANUFACTURING CIGS THIN FILM FOR SOLAR CELL

EPITAXIAL GROWTH METHODS AND STRUCTURES THEREOF

PRECURSOR COMPOSITION CONTAINING GROUP IV ORGANIC COMPOUND AND METH...

REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...

Proportional-Integral-Derivative Radio Frequencies Synchronized pla...

Titanium-Group Nano-Whiskers and Method of Production

METHOD OF MANUFACTURING GRAPHENE USING METAL CATALYST

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

ELECTRICAL DE-ICING FOR AIRCRAFT

METHOD FOR PRODUCING ALIGNED CARBON NANOTUBE ASSEMBLY