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H01L21/67173

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67173in-line arrangement

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus and polishing method
- Patent number 12,131,923
- Issue date Oct 29, 2024
- Ebara Corporation
- Yuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for chemical mechanical polishing process
- Patent number 12,131,897
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-I Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system, transfer device, and transfer method
- Patent number 12,131,937
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device
- Patent number 12,106,982
- Issue date Oct 1, 2024
- SCREEN Holdings Co., Ltd.
- Masaki Inaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System configurations for fabrication of micro-LED displays
- Patent number 12,062,735
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Hou T. Ng
- B08 - CLEANING
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,027,390
- Issue date Jul 2, 2024
- Semes Co., Ltd.
- Sung Yong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manufacturing a thin film and a method therefor
- Patent number 12,014,922
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsai-Fu Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating system and substrate transporting method
- Patent number 12,014,940
- Issue date Jun 18, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate carrying apparatus
- Patent number 11,996,310
- Issue date May 28, 2024
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 11,996,311
- Issue date May 28, 2024
- Kokusai Electric Corporation
- Hiroshi Ashihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, film formation unit, substrate proc...
- Patent number 11,986,853
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,948,804
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Takumi Honda
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,771
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,770
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate including process chamb...
- Patent number 11,923,216
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,915,947
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus, substrate transfer method, a...
- Patent number 11,908,712
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,869,780
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Takahiro Kawazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 11,854,860
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 11,830,749
- Issue date Nov 28, 2023
- BROOKS AUTOMATION US, LLC
- Christopher A. Bussiere
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and arrangement for handling and processing substrates
- Patent number RE49725
- Issue date Nov 14, 2023
- ASML Netherlands B.V.
- Hendrik Jan De Jong
Information Patent Grant
Apparatus and method for treating substrate based on defect values...
- Patent number 11,809,158
- Issue date Nov 7, 2023
- Semes Co., Ltd.
- Tae Woong Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for forming a coating film on a substrate havi...
- Patent number 11,791,162
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Yasuaki Noda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate bonding apparatus, manufacturing system, and semiconducto...
- Patent number 11,776,931
- Issue date Oct 3, 2023
- Kioxia Corporation
- Sho Kawadahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-line coater for vacuum deposition of thin film coatings
- Patent number 11,732,349
- Issue date Aug 22, 2023
- OOO IZOVAK TEHNOLOGII
- Vladimir J. Shiripov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and substrate transfer apparatus and me...
- Patent number 11,721,564
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated transfer and drying tool for process chamber
- Patent number 11,699,619
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid system architecture for thin film deposition
- Patent number 11,694,913
- Issue date Jul 4, 2023
- Intevac, Inc.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 11,688,619
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for chemical mechanical polishing process
- Patent number 11,682,552
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-I Peng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240312809
- Publication date Sep 19, 2024
- KIOXIA Corporation
- Takashi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERAT...
- Publication number 20240290638
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240274455
- Publication date Aug 15, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266197
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS OF CLEANING SUBSTRATE, APPARATUS OF SEMICONDUCTOR DEVICE...
- Publication number 20240242979
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Hyo Shin LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING SYSTEM GROUP
- Publication number 20240222969
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
- Publication number 20240194503
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Randy A. HARRIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PROCESS FLOWS FOR HYBRID BONDING
- Publication number 20240170443
- Publication date May 23, 2024
- Ruiping WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240112932
- Publication date Apr 4, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20240096672
- Publication date Mar 21, 2024
- BROOKS AUTOMATION US, LLC
- Christopher A. BUSSIERE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20240087945
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROTECTIVE LAYER FORMING METHOD
- Publication number 20240087919
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Jumpei FUJIKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SEMICONDUCTOR PACKAGING SYSTEM WITH ENHANCED DIELECTRIC-...
- Publication number 20240055389
- Publication date Feb 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Yuan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006214
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Shingo Katsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240006200
- Publication date Jan 4, 2024
- Kokusai Electric Corporation
- Hiroshi HIROTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230402303
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20230402295
- Publication date Dec 14, 2023
- SEMES CO., LTD.
- Ki-Moon KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
- Publication number 20230395380
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki NODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307277
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Takahiro YAMAGUCHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...
- Publication number 20230282492
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS
- Publication number 20230274929
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-I PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20230268211
- Publication date Aug 24, 2023
- BROOKS AUTOMATION US, LLC
- Christopher A. BUSSIERE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SHIFTING AT LEAST ONE SUB-ASSEMBLY BETWEEN A PROVISIONIN...
- Publication number 20230234152
- Publication date Jul 27, 2023
- Siegfried Hofmann GmbH
- Daniel Feseker
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230201883
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Yong Hyun Choi
- B08 - CLEANING
Information Patent Application
SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SU...
- Publication number 20230154772
- Publication date May 18, 2023
- LAM RESEARCH CORPORATION
- David William PAQUET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL INCLUDING PEDESTAL PLATES FOR SEMICONDUCTOR FAB TOOLS AND...
- Publication number 20230097597
- Publication date Mar 30, 2023
- LAM RESEARCH CORPORATION
- Travis BENTZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20230077331
- Publication date Mar 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20230063546
- Publication date Mar 2, 2023
- SEMES CO., LTD.
- Jae Yoon SHIN
- H01 - BASIC ELECTRIC ELEMENTS

in-line arrangement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Polishing apparatus and polishing method

Method and system for chemical mechanical polishing process

Transfer system, transfer device, and transfer method

Substrate processing device

System configurations for fabrication of micro-LED displays

Apparatus and method for treating substrate

Apparatus for manufacturing a thin film and a method therefor

Substrate treating system and substrate transporting method

Substrate carrying apparatus

Substrate processing apparatus, method of processing substrate, met...

Substrate processing apparatus, film formation unit, substrate proc...

Substrate processing method and substrate processing apparatus

Modular mainframe layout for supporting multiple semiconductor proc...

Modular mainframe layout for supporting multiple semiconductor proc...

Apparatus and method for treating substrate including process chamb...

Substrate processing apparatus and substrate processing method

Semiconductor manufacturing apparatus, substrate transfer method, a...

Substrate liquid processing apparatus

Semiconductor processing apparatus and method utilizing electrostat...

Substrate transport apparatus

Method and arrangement for handling and processing substrates

Apparatus and method for treating substrate based on defect values...

Processing apparatus for forming a coating film on a substrate havi...

Substrate bonding apparatus, manufacturing system, and semiconducto...

In-line coater for vacuum deposition of thin film coatings

Substrate processing system and substrate transfer apparatus and me...

Automated transfer and drying tool for process chamber

Hybrid system architecture for thin film deposition

Vacuum processing apparatus and substrate transfer method

Apparatus for chemical mechanical polishing process

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS

DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERAT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

SUBSTRATE PROCESSING METHOD

APPARATUS OF CLEANING SUBSTRATE, APPARATUS OF SEMICONDUCTOR DEVICE...

POWER SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING SYSTEM GROUP

MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...

INTEGRATED PROCESS FLOWS FOR HYBRID BONDING

MANUFACTURING DEVICE OF DISPLAY DEVICE

SUBSTRATE TRANSPORT APPARATUS

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

SUBSTRATE PROCESSING APPARATUS AND PROTECTIVE LAYER FORMING METHOD

INTEGRATED SEMICONDUCTOR PACKAGING SYSTEM WITH ENHANCED DIELECTRIC-...

SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR TREATING SUBSTRATE

PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...

METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS

SUBSTRATE TRANSPORT APPARATUS

DEVICE FOR SHIFTING AT LEAST ONE SUB-ASSEMBLY BETWEEN A PROVISIONIN...

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SU...

PEDESTAL INCLUDING PEDESTAL PLATES FOR SEMICONDUCTOR FAB TOOLS AND...

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

SUBSTRATE PROCESSING APPARATUS AND METHOD