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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67173
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,948,804
Issue date
Apr 2, 2024
Tokyo Electron Limited
Takumi Honda
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
Patent number
11,935,771
Issue date
Mar 19, 2024
Applied Materials, Inc.
Randy A. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
Patent number
11,935,770
Issue date
Mar 19, 2024
Applied Materials, Inc.
Randy A. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate including process chamb...
Patent number
11,923,216
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Seung Min Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,915,947
Issue date
Feb 27, 2024
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus, substrate transfer method, a...
Patent number
11,908,712
Issue date
Feb 20, 2024
Tokyo Electron Limited
Toshiharu Hirata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus
Patent number
11,869,780
Issue date
Jan 9, 2024
Tokyo Electron Limited
Takahiro Kawazu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
Patent number
11,854,860
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Hao Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transport apparatus
Patent number
11,830,749
Issue date
Nov 28, 2023
BROOKS AUTOMATION US, LLC
Christopher A. Bussiere
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and arrangement for handling and processing substrates
Patent number
RE49725
Issue date
Nov 14, 2023
ASML Netherlands B.V.
Hendrik Jan De Jong
Information
Patent Grant
Apparatus and method for treating substrate based on defect values...
Patent number
11,809,158
Issue date
Nov 7, 2023
Semes Co., Ltd.
Tae Woong Seo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus for forming a coating film on a substrate havi...
Patent number
11,791,162
Issue date
Oct 17, 2023
Tokyo Electron Limited
Yasuaki Noda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate bonding apparatus, manufacturing system, and semiconducto...
Patent number
11,776,931
Issue date
Oct 3, 2023
Kioxia Corporation
Sho Kawadahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-line coater for vacuum deposition of thin film coatings
Patent number
11,732,349
Issue date
Aug 22, 2023
OOO IZOVAK TEHNOLOGII
Vladimir J. Shiripov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing system and substrate transfer apparatus and me...
Patent number
11,721,564
Issue date
Aug 8, 2023
Tokyo Electron Limited
Toshiaki Toyomaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated transfer and drying tool for process chamber
Patent number
11,699,619
Issue date
Jul 11, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Tsung-Sheng Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid system architecture for thin film deposition
Patent number
11,694,913
Issue date
Jul 4, 2023
Intevac, Inc.
Terry Bluck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and substrate transfer method
Patent number
11,688,619
Issue date
Jun 27, 2023
Tokyo Electron Limited
Shinji Wakabayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for chemical mechanical polishing process
Patent number
11,682,552
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-I Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing substrate with a transparent conductive fil...
Patent number
11,674,217
Issue date
Jun 13, 2023
Ulvac, Inc.
Junsuke Matsuzaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for connecting electronic assemblies
Patent number
11,676,843
Issue date
Jun 13, 2023
Pink GmbH Thermosysteme
Stefan Müssig
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,640,916
Issue date
May 2, 2023
SCREEN Holdings Co., Ltd.
Takahiro Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for continuously performing grain boundary diffus...
Patent number
11,636,976
Issue date
Apr 25, 2023
Fujian Changting Golden Dragon Rare-Earth Co., Ltd
Qingjiang Wang
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Substrate liquid processing apparatus
Patent number
11,637,026
Issue date
Apr 25, 2023
Tokyo Electron Limited
Hiroyuki Masutomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,615,969
Issue date
Mar 28, 2023
Semes Co., Ltd.
Daesung Kim
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
11,594,430
Issue date
Feb 28, 2023
Tokyo Electron Limited
Takafumi Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transport apparatus
Patent number
11,574,830
Issue date
Feb 7, 2023
BROOKS AUTOMATION US, LLC
Christopher A. Bussiere
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Computer storage medium to perform a substrate treatment method usi...
Patent number
11,574,812
Issue date
Feb 7, 2023
Tokyo Electron Limited
Makoto Muramatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
External substrate system rotation in a semiconductor processing sy...
Patent number
11,574,825
Issue date
Feb 7, 2023
Applied Materials, Inc.
Tuan Anh Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,545,377
Issue date
Jan 3, 2023
Tokyo Electron Limited
Seiji Nakano
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
Publication number
20240112932
Publication date
Apr 4, 2024
Japan Display Inc.
Takanobu TAKENAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSPORT APPARATUS
Publication number
20240096672
Publication date
Mar 21, 2024
BROOKS AUTOMATION US, LLC
Christopher A. BUSSIERE
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
Publication number
20240087945
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Hao HUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROTECTIVE LAYER FORMING METHOD
Publication number
20240087919
Publication date
Mar 14, 2024
EBARA CORPORATION
Jumpei FUJIKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED SEMICONDUCTOR PACKAGING SYSTEM WITH ENHANCED DIELECTRIC-...
Publication number
20240055389
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jen-Yuan Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
Publication number
20240006214
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Shingo Katsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240006200
Publication date
Jan 4, 2024
Kokusai Electric Corporation
Hiroshi HIROTANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230402303
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR TREATING SUBSTRATE
Publication number
20230402295
Publication date
Dec 14, 2023
SEMES CO., LTD.
Ki-Moon KANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
Publication number
20230395380
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Yasuaki NODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230307277
Publication date
Sep 28, 2023
SCREEN Holdings Co., Ltd.
Takahiro YAMAGUCHI
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...
Publication number
20230282492
Publication date
Sep 7, 2023
TOKYO ELECTRON LIMITED
Toshiaki TOYOMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS
Publication number
20230274929
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-I PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSPORT APPARATUS
Publication number
20230268211
Publication date
Aug 24, 2023
BROOKS AUTOMATION US, LLC
Christopher A. BUSSIERE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR SHIFTING AT LEAST ONE SUB-ASSEMBLY BETWEEN A PROVISIONIN...
Publication number
20230234152
Publication date
Jul 27, 2023
Siegfried Hofmann GmbH
Daniel Feseker
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20230201883
Publication date
Jun 29, 2023
SEMES CO., LTD.
Yong Hyun Choi
B08 - CLEANING
Information
Patent Application
SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SU...
Publication number
20230154772
Publication date
May 18, 2023
LAM RESEARCH CORPORATION
David William PAQUET
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PEDESTAL INCLUDING PEDESTAL PLATES FOR SEMICONDUCTOR FAB TOOLS AND...
Publication number
20230097597
Publication date
Mar 30, 2023
LAM RESEARCH CORPORATION
Travis BENTZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
Publication number
20230077331
Publication date
Mar 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Hao HUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
Publication number
20230063546
Publication date
Mar 2, 2023
SEMES CO., LTD.
Jae Yoon SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230056038
Publication date
Feb 23, 2023
TOKYO ELECTRON LIMITED
Kousei IDE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20230042033
Publication date
Feb 9, 2023
SCREEN Semiconductor Solutions Co., Ltd.
Yoshiteru Fukutomi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20230015560
Publication date
Jan 19, 2023
TOKYO ELECTRON LIMITED
Suguru MOTEGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20230007843
Publication date
Jan 12, 2023
SEMES CO., LTD.
Sang Eun NOH
B08 - CLEANING
Information
Patent Application
SYSTEM AND METHOD FOR CONNECTING ELECTRONIC ASSEMBLIES
Publication number
20220344178
Publication date
Oct 27, 2022
PINK GMBH THERMOSYSTEME
Stefan Müssig
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD USING THE...
Publication number
20220285179
Publication date
Sep 8, 2022
SAMSUNG DISPLAY CO., LTD.
Kyung Hoon CHUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD
Publication number
20220285182
Publication date
Sep 8, 2022
TOKYO ELECTRON LIMITED
Hiroaki CHIHAYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER SYSTEM, TRANSFER DEVICE, AND TRANSFER METHOD
Publication number
20220277981
Publication date
Sep 1, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20220277971
Publication date
Sep 1, 2022
SCREEN Holdings Co., Ltd.
Masafumi MAEDA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
INTEGRATED HARDWARE-SOFTWARE COMPUTER VISION SYSTEM FOR AUTONOMOUS...
Publication number
20220270901
Publication date
Aug 25, 2022
LAM RESEARCH CORPORATION
Hossein SADEGHI
G05 - CONTROLLING REGULATING