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in the lower part of the bonding apparatus
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CPC
H01L2224/76501
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L2224/00
Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
Current Industry
H01L2224/76501
in the lower part of the bonding apparatus
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last 30 patents
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Patent Grant
Apparatus and method for cooling substrate
Patent number
11,456,192
Issue date
Sep 27, 2022
Semigear, Inc.
Jonghoon Kim
F28 - HEAT EXCHANGE IN GENERAL