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Inert gas curtains

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  • CPC
  • C23C16/45519
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45519Inert gas curtains
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Gapfill methods and processing assemblies
    • Patent number 12,252,790
    • Issue date Mar 18, 2025
    • ASM IP Holding B.V.
    • Tommi Tynell
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Carbon nanotube preparation system
    • Patent number 12,234,551
    • Issue date Feb 25, 2025
    • SUZHOU JERNANO CARBON CO., LTD.
    • Zhenzhong Yong
    • B82 - NANO-TECHNOLOGY
  • Information Patent Grant

    Ex situ coating of chamber components for semiconductor processing
    • Patent number 12,227,837
    • Issue date Feb 18, 2025
    • Lam Research Corporation
    • Damodar Rajaram Shanbhag
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of manufacturing semiconductor device
    • Patent number 12,224,185
    • Issue date Feb 11, 2025
    • Kokusai Electric Corporation
    • Hideharu Itatani
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas transport system
    • Patent number 12,173,736
    • Issue date Dec 24, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Jheng-Syun Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Ex situ coating of chamber components for semiconductor processing
    • Patent number 12,163,219
    • Issue date Dec 10, 2024
    • Lam Research Corporation
    • Damodar Rajaram Shanbhag
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 12,142,515
    • Issue date Nov 12, 2024
    • Jusung Engineering Co., Ltd.
    • DongHyuk Oh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multilayer encapsulation thin-film
    • Patent number 12,134,821
    • Issue date Nov 5, 2024
    • Research & Business Foundation Sungkyunkwan University
    • Choelmin Jang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 12,080,572
    • Issue date Sep 3, 2024
    • Tokyo Electron Limited
    • Masahiro Dogome
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Coating of fluid-permeable materials
    • Patent number 12,065,730
    • Issue date Aug 20, 2024
    • Picosun Oy
    • Marko Pudas
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Method for prefixing of substrates
    • Patent number 12,062,521
    • Issue date Aug 13, 2024
    • EV Group E. Thallner GmbH
    • Friedrich Paul Lindner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Transport apparatus and substrate processing apparatus
    • Patent number 12,046,500
    • Issue date Jul 23, 2024
    • Ebara Corporation
    • Hao Yu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Organic vapor jet printing system
    • Patent number 11,976,360
    • Issue date May 7, 2024
    • Universal Display Corporation
    • Gregory McGraw
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas transport system
    • Patent number 11,971,057
    • Issue date Apr 30, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Jheng-Syun Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for modulating film uniformity
    • Patent number 11,913,113
    • Issue date Feb 27, 2024
    • Lam Research Corporation
    • Pulkit Agarwal
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and system for manufacturing semiconductor layer
    • Patent number 11,876,001
    • Issue date Jan 16, 2024
    • NEXCHIP SEMICONDUCTOR CORPORATION
    • Baoyou Gong
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD deposition system for deposition on selective side of the sub...
    • Patent number 11,851,760
    • Issue date Dec 26, 2023
    • Lam Research Corporation
    • Fayaz Shaikh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas separation control in spatial atomic layer deposition
    • Patent number 11,821,083
    • Issue date Nov 21, 2023
    • Applied Materials, Inc.
    • Ning Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD apparatus, method and valve
    • Patent number 11,761,082
    • Issue date Sep 19, 2023
    • Picosun Oy
    • Marko Pudas
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of manufacturing semiconductor device
    • Patent number 11,728,183
    • Issue date Aug 15, 2023
    • Kokusai Electric Corporation
    • Hideharu Itatani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD deposition system for deposition on selective side of the sub...
    • Patent number 11,725,283
    • Issue date Aug 15, 2023
    • Lam Research Corporation
    • Fayaz Shaikh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Suppression of parasitic deposition in a substrate processing syste...
    • Patent number 11,725,282
    • Issue date Aug 15, 2023
    • Novellus Systems, Inc.
    • Chunguang Xia
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Evaporator, deposition arrangement, deposition apparatus and method...
    • Patent number 11,713,506
    • Issue date Aug 1, 2023
    • Applied Materials, Inc.
    • Stefan Keller
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Concentric flow reactor
    • Patent number 11,702,761
    • Issue date Jul 18, 2023
    • AlignedBio AB
    • Greg Alcott
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition apparatus
    • Patent number 11,680,316
    • Issue date Jun 20, 2023
    • Industrial Technology Research Institute
    • Kuan-Chou Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing apparatus
    • Patent number 11,651,988
    • Issue date May 16, 2023
    • Disco Corporation
    • Yoshinobu Saito
    • B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
  • Information Patent Grant

    Apparatus and method for printing multilayer organic thin films fro...
    • Patent number 11,584,991
    • Issue date Feb 21, 2023
    • Universal Display Corporation
    • Gregory McGraw
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods of reducing chamber residues
    • Patent number 11,560,623
    • Issue date Jan 24, 2023
    • Applied Materials, Inc.
    • Liangfa Hu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and method for atomic layer deposition
    • Patent number 11,549,180
    • Issue date Jan 10, 2023
    • Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
    • Diederik Jan Maas
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition system with vacuum pre-loaded deposition head
    • Patent number 11,535,935
    • Issue date Dec 27, 2022
    • Eastman Kodak Company
    • Todd Mathew Spath
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    GAS TRANSPORT SYSTEM
    • Publication number 20250092892
    • Publication date Mar 20, 2025
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Jheng-Syun LI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ORGANIC VAPOR JET PRINTING SYSTEM
    • Publication number 20250024746
    • Publication date Jan 16, 2025
    • THE REGENTS OF THE UNIVERSITY OF MICHIGAN, INNOVATION PARTNERSHIPS
    • Stephen R. FORREST
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PREFIXING OF SUBSTRATES
    • Publication number 20240355582
    • Publication date Oct 24, 2024
    • EV GROUP E. THALLNER GMBH
    • Friedrich Paul Lindner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
    • Publication number 20240309507
    • Publication date Sep 19, 2024
    • LAM RESEARCH CORPORATION
    • Fayaz Shaikh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ORGANIC VAPOR JET PRINTING SYSTEM
    • Publication number 20240247375
    • Publication date Jul 25, 2024
    • UNIVERSAL DISPLAY CORPORATION
    • Gregory MCGRAW
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL VAPOUR DEPOSITION (CVD) REACTOR
    • Publication number 20240240312
    • Publication date Jul 18, 2024
    • SICONA BATTERY TECHNOLOGIES PTY LTD
    • John Winter
    • C01 - INORGANIC CHEMISTRY
  • Information Patent Application

    METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY
    • Publication number 20240183034
    • Publication date Jun 6, 2024
    • LAM RESEARCH CORPORATION
    • Pulkit Agarwal
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gapfill methods and processing assemblies
    • Publication number 20240117494
    • Publication date Apr 11, 2024
    • ASM IP HOLDING B.V.
    • Tommi Tynell
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS TRANSPORT SYSTEM
    • Publication number 20230407893
    • Publication date Dec 21, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Jheng-Syun LI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20230392262
    • Publication date Dec 7, 2023
    • TES CO., LTD.
    • Tae-Kwang KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD APPARATUS, METHOD AND VALVE
    • Publication number 20230383404
    • Publication date Nov 30, 2023
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRE-TREATMENT APPARATUS
    • Publication number 20230386828
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chun-Hsiang WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20230360930
    • Publication date Nov 9, 2023
    • Kokusai Electric Corporation
    • Hideharu ITATANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRODUCING A GAS CURTAIN OF PURGE GAS IN A...
    • Publication number 20230287566
    • Publication date Sep 14, 2023
    • Siltronic AG
    • Patrick MOOS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20230227979
    • Publication date Jul 20, 2023
    • Kokusai Electric Corporation
    • Takafumi SASAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20230227974
    • Publication date Jul 20, 2023
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF REDUCING CHAMBER RESIDUES
    • Publication number 20230151487
    • Publication date May 18, 2023
    • Applied Materials, Inc.
    • Liangfa HU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Organic Vapor Jet Printing System
    • Publication number 20230151491
    • Publication date May 18, 2023
    • UNIVERSAL DISPLAY CORPORATION
    • Gregory MCGRAW
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING...
    • Publication number 20230095537
    • Publication date Mar 30, 2023
    • Kokusai Electric Corporation
    • Ryosuke TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MECHATRONIC SPATIAL ATOMIC LAYER DEPOSITION SYSTEM WITH CLOSED-LOOP...
    • Publication number 20230097272
    • Publication date Mar 30, 2023
    • The Regents of the University of Michigan
    • TAE H. CHO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF PROCESSING SUBSTRATE, RECORDING MEDIUM, SUBSTRATE PROCESS...
    • Publication number 20230091654
    • Publication date Mar 23, 2023
    • Kokusai Electric Corporation
    • Koei KURIBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING APPARATUS
    • Publication number 20230046388
    • Publication date Feb 16, 2023
    • Disco Corporation
    • Yoshinobu SAITO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
    • Publication number 20230012818
    • Publication date Jan 19, 2023
    • SAMSUNG DISPLAY CO., LTD.
    • Choelmin Jang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20230008718
    • Publication date Jan 12, 2023
    • Kokusai Electric Corporation
    • Hideharu ITATANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
    • Publication number 20230002891
    • Publication date Jan 5, 2023
    • LAM RESEARCH CORPORATION
    • Damodar Rajaram SHANBHAG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230005773
    • Publication date Jan 5, 2023
    • EBARA CORPORATION
    • HAO YU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
    • Publication number 20220389574
    • Publication date Dec 8, 2022
    • TOKYO ELECTRON LIMITED
    • Tsunenaga Nakashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NON-CONFORMAL PLASMA INDUCED ALD GAPFILL
    • Publication number 20220389580
    • Publication date Dec 8, 2022
    • Applied Materials, Inc.
    • Hanhong Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
    • Publication number 20220349061
    • Publication date Nov 3, 2022
    • Kokusai Electric Corporation
    • Yusaku OKAJIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20220341041
    • Publication date Oct 27, 2022
    • Kokusai Electric Corporation
    • Yunosuke SAKAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...