TREA

Inert gas curtains

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  • CPC
  • C23C16/45519
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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45519Inert gas curtains
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Gapfill methods and processing assemblies
    • Publication number 20240117494
    • Publication date Apr 11, 2024
    • ASM IP HOLDING B.V.
    • Tommi Tynell
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS TRANSPORT SYSTEM
    • Publication number 20230407893
    • Publication date Dec 21, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Jheng-Syun LI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20230392262
    • Publication date Dec 7, 2023
    • TES CO., LTD.
    • Tae-Kwang KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRE-TREATMENT APPARATUS
    • Publication number 20230386828
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chun-Hsiang WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD APPARATUS, METHOD AND VALVE
    • Publication number 20230383404
    • Publication date Nov 30, 2023
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20230360930
    • Publication date Nov 9, 2023
    • Kokusai Electric Corporation
    • Hideharu ITATANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRODUCING A GAS CURTAIN OF PURGE GAS IN A...
    • Publication number 20230287566
    • Publication date Sep 14, 2023
    • Siltronic AG
    • Patrick MOOS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20230227979
    • Publication date Jul 20, 2023
    • Kokusai Electric Corporation
    • Takafumi SASAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20230227974
    • Publication date Jul 20, 2023
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF REDUCING CHAMBER RESIDUES
    • Publication number 20230151487
    • Publication date May 18, 2023
    • Applied Materials, Inc.
    • Liangfa HU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Organic Vapor Jet Printing System
    • Publication number 20230151491
    • Publication date May 18, 2023
    • UNIVERSAL DISPLAY CORPORATION
    • Gregory MCGRAW
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING...
    • Publication number 20230095537
    • Publication date Mar 30, 2023
    • Kokusai Electric Corporation
    • Ryosuke TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MECHATRONIC SPATIAL ATOMIC LAYER DEPOSITION SYSTEM WITH CLOSED-LOOP...
    • Publication number 20230097272
    • Publication date Mar 30, 2023
    • The Regents of the University of Michigan
    • TAE H. CHO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF PROCESSING SUBSTRATE, RECORDING MEDIUM, SUBSTRATE PROCESS...
    • Publication number 20230091654
    • Publication date Mar 23, 2023
    • Kokusai Electric Corporation
    • Koei KURIBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING APPARATUS
    • Publication number 20230046388
    • Publication date Feb 16, 2023
    • Disco Corporation
    • Yoshinobu SAITO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
    • Publication number 20230012818
    • Publication date Jan 19, 2023
    • SAMSUNG DISPLAY CO., LTD.
    • Choelmin Jang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20230008718
    • Publication date Jan 12, 2023
    • Kokusai Electric Corporation
    • Hideharu ITATANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
    • Publication number 20230002891
    • Publication date Jan 5, 2023
    • LAM RESEARCH CORPORATION
    • Damodar Rajaram SHANBHAG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230005773
    • Publication date Jan 5, 2023
    • EBARA CORPORATION
    • HAO YU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
    • Publication number 20220389574
    • Publication date Dec 8, 2022
    • TOKYO ELECTRON LIMITED
    • Tsunenaga Nakashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NON-CONFORMAL PLASMA INDUCED ALD GAPFILL
    • Publication number 20220389580
    • Publication date Dec 8, 2022
    • Applied Materials, Inc.
    • Hanhong Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
    • Publication number 20220349061
    • Publication date Nov 3, 2022
    • Kokusai Electric Corporation
    • Yusaku OKAJIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20220341041
    • Publication date Oct 27, 2022
    • Kokusai Electric Corporation
    • Yunosuke SAKAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
    • Publication number 20220275504
    • Publication date Sep 1, 2022
    • LAM RESEARCH CORPORATION
    • Damodar Rajaram SHANBHAG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    POROUS INLET
    • Publication number 20220235466
    • Publication date Jul 28, 2022
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PREFIXING OF SUBSTRATES
    • Publication number 20220230849
    • Publication date Jul 21, 2022
    • EV GROUP E. THALLNER GMBH
    • Friedrich Paul Lindner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220208576
    • Publication date Jun 30, 2022
    • TOKYO ELECTRON LIMITED
    • Masahiro DOGOME
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
    • Publication number 20220162755
    • Publication date May 26, 2022
    • LAM RESEARCH CORPORATION
    • Fayaz Shaikh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
    • Publication number 20220162754
    • Publication date May 26, 2022
    • LAM RESEARCH CORPORATION
    • Fayaz Shaikh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
    • Publication number 20220162753
    • Publication date May 26, 2022
    • LAM RESEARCH CORPORATION
    • Fayaz Shaikh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...