Inspecting patterns on the surface of objects

Industry

CPC
G01N21/956

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N21/00Investigating or analysing materials by the use of optical means

Current Industry

G01N21/956Inspecting patterns on the surface of objects

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of measuring variation, inspection system, computer program,...
- Patent number 11,966,168
- Issue date Apr 23, 2024
- ASML Netherlands B.V.
- Antoine Gaston Marie Kiers
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for producing overlay results with absolute reference for se...
- Patent number 11,966,171
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Anton J. deVilliers
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask inspection apparatus and mask inspection method using the same
- Patent number 11,961,222
- Issue date Apr 16, 2024
- Samsung Display Co., Ltd.
- Sangdon Hwang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Photolithography method and photolithography system
- Patent number 11,959,864
- Issue date Apr 16, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chi-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV mask defect tool apparatus
- Patent number 11,960,202
- Issue date Apr 16, 2024
- EUV TECH, INC.
- Chami N Perera
- G01 - MEASURING TESTING
Information Patent Grant
Diffraction based overlay metrology tool and method of diffraction...
- Patent number 11,953,450
- Issue date Apr 9, 2024
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method for evaluating defective region of wafer
- Patent number 11,955,386
- Issue date Apr 9, 2024
- SK SILTRON CO., LTD.
- Jae Hyeong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of evaluating silicon wafer, method of evaluating silicon wa...
- Patent number 11,948,819
- Issue date Apr 2, 2024
- Sumco Corporation
- Keiichiro Mori
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for honeycomb body inspection
- Patent number 11,946,876
- Issue date Apr 2, 2024
- Corning Incorporated
- Joshua Andrew Barnes
- G01 - MEASURING TESTING
Information Patent Grant
Optical phase measurement system and method
- Patent number 11,946,875
- Issue date Apr 2, 2024
- Nova Ltd.
- Gilad Barak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect inspection apparatus, method for inspecting defect, and meth...
- Patent number 11,940,391
- Issue date Mar 26, 2024
- Shin-Etsu Chemical Co., Ltd.
- Ryusei Terashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology apparatus
- Patent number 11,940,739
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Nitesh Pandey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dark field microscope
- Patent number 11,940,608
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
User interface for judgment concerning quality classification of di...
- Patent number 11,935,221
- Issue date Mar 19, 2024
- AT&S (Chongqing) Company Limited
- Amin Nickkholgh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Non-destructive glass priming verification method for installed glass
- Patent number 11,933,733
- Issue date Mar 19, 2024
- FCA US LLC
- Gloria J Sheppard
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Appearance inspection device and defect inspection method
- Patent number 11,936,985
- Issue date Mar 19, 2024
- Omron Corporation
- Shingo Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Measurement machine and method for detecting a defect in solder joints
- Patent number 11,927,436
- Issue date Mar 12, 2024
- Hewlett Packard Enterprise Development LP
- Jaime E. Llinas
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional measurement apparatus and three-dimensional measu...
- Patent number 11,930,600
- Issue date Mar 12, 2024
- CKD Corporation
- Takayuki Shinyama
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for characterizing a microlithographic mask
- Patent number 11,914,303
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for rapid inspection of printed circuit board usi...
- Patent number 11,906,578
- Issue date Feb 20, 2024
- Battelle Memorial Institute
- Thomas F. Kent
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV mask inspection device using multilayer reflection zone plate
- Patent number 11,898,970
- Issue date Feb 13, 2024
- ESOL Inc.
- Dong Gun Lee
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry system and method
- Patent number 11,900,028
- Issue date Feb 13, 2024
- Nova Ltd.
- Ruslan Berdichevsky
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus, method and computer program product for defect detection...
- Patent number 11,892,493
- Issue date Feb 6, 2024
- KLA Corporation
- Tom Marivoet
- G01 - MEASURING TESTING
Information Patent Grant
Complex spatially-resolved reflectometry/refractometry
- Patent number 11,867,626
- Issue date Jan 9, 2024
- Regents of the Univ of Colorado, a body corporate
- Christina Porter
- G01 - MEASURING TESTING
Information Patent Grant
Inspection device for masks for semiconductor lithography and method
- Patent number 11,867,642
- Issue date Jan 9, 2024
- Carl Zeiss SMT GmbH
- Holger Seitz
- G01 - MEASURING TESTING
Information Patent Grant
System and method for characterization of patterns marked on a fabric
- Patent number 11,851,795
- Issue date Dec 26, 2023
- JEANOLOGIA, S. L.
- Pere Pérez Millán
- D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information Patent Grant
Method for inspecting display device and method for fabricating dis...
- Patent number 11,854,445
- Issue date Dec 26, 2023
- Samsung Display Co., Ltd.
- Hyung Jin Lee
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
- Patent number 11,852,583
- Issue date Dec 26, 2023
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Grant
Object damage inspecting device and inspecting method using the same
- Patent number 11,841,329
- Issue date Dec 12, 2023
- Pukyong National University Industry—University Cooperation Foundation
- Chan Jung Kim
- G01 - MEASURING TESTING
Information Patent Grant
Measuring and calculating apparatus and measuring and calculating p...
- Patent number 11,841,331
- Issue date Dec 12, 2023
- Kioxia Corporation
- Kentaro Kasa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
VEHICLE LAMP SYSTEM, FOREIGN SUBSTANCE DETERMINATION DEVICE, AND FO...
- Publication number 20240101073
- Publication date Mar 28, 2024
- Koito Manufacturing Co., Ltd.
- Hiroki SUMITANI
- B60 - VEHICLES IN GENERAL
Information Patent Application
DEFECT ANALYSIS DEVICE AND DEFECT ANALYSIS METHOD USING THE SAME
- Publication number 20240102942
- Publication date Mar 28, 2024
- SAMSUNG DISPLAY CO., LTD.
- YEON KEON MOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIME-DOMAIN OPTICAL METROLOGY AND INSPECTION OF SEMICONDUCTOR DEVICES
- Publication number 20240085805
- Publication date Mar 14, 2024
- NOVA LTD
- Gilad BARAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CELL DETECTION METHOD, APPARATUS, AND SYSTEM, COMPUTER DEVICE, AND...
- Publication number 20240077432
- Publication date Mar 7, 2024
- Contemporary Amperex Technology Co., Limited
- Yinhang TU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Z-AXIS MEASUREMENT FIXTURE AND METHOD OF DETERMINING THE PLANARITY...
- Publication number 20240077431
- Publication date Mar 7, 2024
- IDEXX Laboratories, Inc.
- David C. Giroux
- G01 - MEASURING TESTING
Information Patent Application
RNA MOLECULES, METHODS OF PRODUCING CIRCULAR RNA, AND TREATMENT MET...
- Publication number 20240078661
- Publication date Mar 7, 2024
- Cornell University
- Samie R. JAFFREY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR ASSESSING THE RESULT OF A SURFACE TREATMENT PERFORMED ON...
- Publication number 20240068959
- Publication date Feb 29, 2024
- 3D.aero GmbH
- Anton JANSSEN
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK
- Publication number 20240061328
- Publication date Feb 22, 2024
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION CONDITION PRESENTATION APPARATUS, SURFACE INSPECTION APP...
- Publication number 20240027359
- Publication date Jan 25, 2024
- Resonac Corporation
- Katsuhisa YOSHIDA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD, INSPECTION DEVICE, MANUFACTURING METHOD, AND MAN...
- Publication number 20240019724
- Publication date Jan 18, 2024
- FUJIFILM CORPORATION
- Takashi SUGANUMA
- G01 - MEASURING TESTING
Information Patent Application
PROBE AND INSPECTION APPARATUS INCLUDING THE SAME
- Publication number 20240019362
- Publication date Jan 18, 2024
- Samsung Electronics Co., Ltd.
- Junbum Park
- G01 - MEASURING TESTING
Information Patent Application
System For Detecting Surface Type Of Object And Artificial Neural N...
- Publication number 20240011916
- Publication date Jan 11, 2024
- GETAC TECHNOLOGY CORPORATION
- Kun-Yu Tsai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH-PERFORMANCE EUV MICROSCOPE WITH FREE FORM ILLUMINATION SYSTEM
- Publication number 20240011922
- Publication date Jan 11, 2024
- ESOL, Inc.
- Dong Gun LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD, DEVICE, SYSTEM AND COMPUTER READABLE MEDIUM FOR RAPIDLY DET...
- Publication number 20240003828
- Publication date Jan 4, 2024
- Nanjing University of Finance & Economics
- Xiaolong Shao
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR ACTINIC MASK INSPECTION AND REVIEW IN VACUUM
- Publication number 20240003827
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Chien-Lin Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR IMAGING NONSTATIONARY OBJECT
- Publication number 20240004313
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Coen Adrianus VERSCHUREN
- G02 - OPTICS
Information Patent Application
REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT
- Publication number 20230420281
- Publication date Dec 28, 2023
- LAM RESEARCH CORPORATION
- Eric A. Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT-SOURCE APPARATUS, INSPECTION APPARATUS, AND ADJUSTMENT METHOD
- Publication number 20230417684
- Publication date Dec 28, 2023
- Lasertec Corporation
- Jun SAKUMA
- G01 - MEASURING TESTING
Information Patent Application
PHOTOLUMINESCENCE MEASUREMENT DEVICE
- Publication number 20230400418
- Publication date Dec 14, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Renaud VARACHE
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION...
- Publication number 20230393185
- Publication date Dec 7, 2023
- KLA Corporation
- Tom Marivoet
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM OF SEMICONDUCTOR WAFER AND METHOD OF DRIVING THE...
- Publication number 20230384239
- Publication date Nov 30, 2023
- Samsung Electronics Co., Ltd.
- Doyoung YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MEASUREMENT APPARATUS
- Publication number 20230375463
- Publication date Nov 23, 2023
- Samsung Electronics Co., Ltd.
- Seoyeon JEONG
- G02 - OPTICS
Information Patent Application
INSPECTION LAYER TO IMPROVE THE DETECTION OF DEFECTS THROUGH OPTICA...
- Publication number 20230366833
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION TOOL AND INSPECTION METHOD
- Publication number 20230358690
- Publication date Nov 9, 2023
- Intel Corporation
- Jianyong MO
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SYSTEMS AND METHODS FOR SYNTHESIZING A DIAMOND USING MACHINE LEARNING
- Publication number 20230349835
- Publication date Nov 2, 2023
- Fraunhofer USA, Inc.
- Rohan Reddy MEKALA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test...
- Publication number 20230341760
- Publication date Oct 26, 2023
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Application
HIGH THROUGHPUT DEFECT DETECTION
- Publication number 20230341334
- Publication date Oct 26, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Boris Golberg
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR INSPECTING A SURFACE WITH ARTIFICAL INTELLIGE...
- Publication number 20230333028
- Publication date Oct 19, 2023
- VIRTEK VISION INTERNATIONAL INC.
- AHMED ELHOSSINI
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING AND MEASURING SEMICONDUCTOR DEVICE
- Publication number 20230332954
- Publication date Oct 19, 2023
- Samsung Electronics Co., Ltd.
- Hyeongcheol LEE
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING CONTACT HEIGHT OF A PACKAGED CHIP
- Publication number 20230324312
- Publication date Oct 12, 2023
- Vitrox Technologies Sdn. Bhd.
- Heng Juan Tan
- G06 - COMPUTING CALCULATING COUNTING

Inspecting patterns on the surface of objects

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of measuring variation, inspection system, computer program,...

Method for producing overlay results with absolute reference for se...

Mask inspection apparatus and mask inspection method using the same

Photolithography method and photolithography system

EUV mask defect tool apparatus

Diffraction based overlay metrology tool and method of diffraction...

Method for evaluating defective region of wafer

Method of evaluating silicon wafer, method of evaluating silicon wa...

Systems and methods for honeycomb body inspection

Optical phase measurement system and method

Defect inspection apparatus, method for inspecting defect, and meth...

Metrology apparatus

Dark field microscope

User interface for judgment concerning quality classification of di...

Non-destructive glass priming verification method for installed glass

Appearance inspection device and defect inspection method

Measurement machine and method for detecting a defect in solder joints

Three-dimensional measurement apparatus and three-dimensional measu...

Apparatus and method for characterizing a microlithographic mask

System and method for rapid inspection of printed circuit board usi...

EUV mask inspection device using multilayer reflection zone plate

Scatterometry system and method

Apparatus, method and computer program product for defect detection...

Complex spatially-resolved reflectometry/refractometry

Inspection device for masks for semiconductor lithography and method

System and method for characterization of patterns marked on a fabric

Method for inspecting display device and method for fabricating dis...

Apparatus and method for measuring phase of extreme ultraviolet (EU...

Object damage inspecting device and inspecting method using the same

Measuring and calculating apparatus and measuring and calculating p...

Patents Applicationslast 30 patents

VEHICLE LAMP SYSTEM, FOREIGN SUBSTANCE DETERMINATION DEVICE, AND FO...

DEFECT ANALYSIS DEVICE AND DEFECT ANALYSIS METHOD USING THE SAME

TIME-DOMAIN OPTICAL METROLOGY AND INSPECTION OF SEMICONDUCTOR DEVICES

CELL DETECTION METHOD, APPARATUS, AND SYSTEM, COMPUTER DEVICE, AND...

Z-AXIS MEASUREMENT FIXTURE AND METHOD OF DETERMINING THE PLANARITY...

RNA MOLECULES, METHODS OF PRODUCING CIRCULAR RNA, AND TREATMENT MET...

METHOD FOR ASSESSING THE RESULT OF A SURFACE TREATMENT PERFORMED ON...

METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK

INSPECTION CONDITION PRESENTATION APPARATUS, SURFACE INSPECTION APP...

INSPECTION METHOD, INSPECTION DEVICE, MANUFACTURING METHOD, AND MAN...

PROBE AND INSPECTION APPARATUS INCLUDING THE SAME

System For Detecting Surface Type Of Object And Artificial Neural N...

HIGH-PERFORMANCE EUV MICROSCOPE WITH FREE FORM ILLUMINATION SYSTEM

METHOD, DEVICE, SYSTEM AND COMPUTER READABLE MEDIUM FOR RAPIDLY DET...

SYSTEMS AND METHODS FOR ACTINIC MASK INSPECTION AND REVIEW IN VACUUM

METHOD AND APPARATUS FOR IMAGING NONSTATIONARY OBJECT

REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT

LIGHT-SOURCE APPARATUS, INSPECTION APPARATUS, AND ADJUSTMENT METHOD

PHOTOLUMINESCENCE MEASUREMENT DEVICE

APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION...

INSPECTION SYSTEM OF SEMICONDUCTOR WAFER AND METHOD OF DRIVING THE...

SEMICONDUCTOR MEASUREMENT APPARATUS

INSPECTION LAYER TO IMPROVE THE DETECTION OF DEFECTS THROUGH OPTICA...

INSPECTION TOOL AND INSPECTION METHOD

SYSTEMS AND METHODS FOR SYNTHESIZING A DIAMOND USING MACHINE LEARNING

EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test...

HIGH THROUGHPUT DEFECT DETECTION

METHOD AND SYSTEM FOR INSPECTING A SURFACE WITH ARTIFICAL INTELLIGE...

APPARATUS AND METHOD FOR INSPECTING AND MEASURING SEMICONDUCTOR DEVICE

SYSTEM AND METHOD FOR DETERMINING CONTACT HEIGHT OF A PACKAGED CHIP