Inspecting patterns on the surface of objects

Industry

CPC
G01N21/956

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N21/00Investigating or analysing materials by the use of optical means

Current Industry

G01N21/956Inspecting patterns on the surface of objects

Industries

Patents Grantslast 30 patents

Information Patent Grant
Mask inspection for semiconductor specimen fabrication
- Patent number 12,361,535
- Issue date Jul 15, 2025
- Applied Materials Israel Ltd.
- Ronen Madmon
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Integration of an optical height sensor in mask inspection tools
- Patent number 12,360,058
- Issue date Jul 15, 2025
- KLA Corporation
- Zefram Marks
- G01 - MEASURING TESTING
Information Patent Grant
Foreign matter inspection apparatus, foreign matter inspection meth...
- Patent number 12,360,059
- Issue date Jul 15, 2025
- Canon Kabushiki Kaisha
- Yuichi Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Finding semiconductor defects using convolutional context attributes
- Patent number 12,353,970
- Issue date Jul 8, 2025
- KLA Corporation
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 12,345,661
- Issue date Jul 1, 2025
- HITACHI HIGH-TECH CORPORATION
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Optical measurement apparatus, measuring method using the same, and...
- Patent number 12,345,521
- Issue date Jul 1, 2025
- Samsung Electronics Co., Ltd.
- Jin Yong Kim
- G01 - MEASURING TESTING
Information Patent Grant
Photoluminescence measurement device
- Patent number 12,332,187
- Issue date Jun 17, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Renaud Varache
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
High-performance EUV microscope with free form illumination system
- Patent number 12,332,188
- Issue date Jun 17, 2025
- ESOL, Inc.
- Dong Gun Lee
- G01 - MEASURING TESTING
Information Patent Grant
Mask inspection apparatus and method for inspecting a mask having f...
- Patent number 12,333,706
- Issue date Jun 17, 2025
- Samsung Display Co., Ltd.
- Dae Won Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inspection apparatus and inspection method
- Patent number 12,326,407
- Issue date Jun 10, 2025
- ASML Netherlands B.V.
- Nitish Kumar
- G01 - MEASURING TESTING
Information Patent Grant
Methods for manufacturing and inspecting orthodontic aligners
- Patent number 12,322,093
- Issue date Jun 3, 2025
- Align Technology, Inc.
- Anatoliy Parpara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for inspection of multiple features of patterned...
- Patent number 12,320,758
- Issue date Jun 3, 2025
- Orbotech Ltd.
- Vered Gatt
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for inspecting a surface with artifical intellige...
- Patent number 12,320,759
- Issue date Jun 3, 2025
- Virtek Vision International Inc.
- Ahmed Elhossini
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
3D image acquisition system for optical inspection and method for o...
- Patent number 12,306,110
- Issue date May 20, 2025
- Scuola universitaria professionale della Svizzera italiana (SUPSI)
- Daniele Guido Allegri
- G01 - MEASURING TESTING
Information Patent Grant
Laser repair method and laser repair device
- Patent number 12,303,998
- Issue date May 20, 2025
- V Technology Co., Ltd.
- Michinobu Mizumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection condition presentation apparatus, surface inspection app...
- Patent number 12,306,109
- Issue date May 20, 2025
- Resonac Corporation
- Katsuhisa Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus for performing the same
- Patent number 12,298,256
- Issue date May 13, 2025
- Samsung Display Co., Ltd.
- Alexander Voronov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Monolithic particle inspection device
- Patent number 12,298,257
- Issue date May 13, 2025
- ASML Netherlands B.V.
- Ilse Van Weperen
- G01 - MEASURING TESTING
Information Patent Grant
Dark field microscope
- Patent number 12,287,470
- Issue date Apr 29, 2025
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G01 - MEASURING TESTING
Information Patent Grant
Inspection layer to improve the detection of defects through optica...
- Patent number 12,281,991
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Space-based circuit-replacing robotic system
- Patent number 12,263,959
- Issue date Apr 1, 2025
- The United States of America as represented by the Secretary of the Navy
- Daniel H. Muhleman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light-source apparatus, inspection apparatus, and adjustment method
- Patent number 12,259,339
- Issue date Mar 25, 2025
- Lasertec Corporation
- Jun Sakuma
- G01 - MEASURING TESTING
Information Patent Grant
Method of evaluating semiconductor wafer
- Patent number 12,247,927
- Issue date Mar 11, 2025
- Sumco Corporation
- Motoi Kurokami
- G01 - MEASURING TESTING
Information Patent Grant
Process window qualification modulation layouts
- Patent number 12,235,224
- Issue date Feb 25, 2025
- KLA Corporation
- Andrew Cross
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor measurement apparatus
- Patent number 12,222,282
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Seoyeon Jeong
- G01 - MEASURING TESTING
Information Patent Grant
Method for assessing contrasts on surfaces
- Patent number 12,222,299
- Issue date Feb 11, 2025
- 4Art Holding AG
- Kai Zeh
- G01 - MEASURING TESTING
Information Patent Grant
EUV microscope
- Patent number 12,203,874
- Issue date Jan 21, 2025
- EUV TECH, INC.
- Chami N Perera
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection device and pattern inspection method
- Patent number 12,205,272
- Issue date Jan 21, 2025
- NuFlare Technology, Inc.
- Hiromu Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 12,196,673
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Takeru Utsugi
- G01 - MEASURING TESTING
Information Patent Grant
Valuable document system
- Patent number 12,194,772
- Issue date Jan 14, 2025
- GIESECKE+DEVRIENT CURRENCY TECHNOLOGY GMBH
- Johann Kecht
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES AND METHODS FOR ASSESSING DEEP ULTRAVIOLET REFLECTIVITY...
- Publication number 20250231474
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kelvin Elphick
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION METHOD
- Publication number 20250231121
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Doyoung Yoon
- G01 - MEASURING TESTING
Information Patent Application
VISION INSPECTION SYSTEMS AND METHODS USING LIGHT SOURCES OF DIFFER...
- Publication number 20250231122
- Publication date Jul 17, 2025
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Guangze LI
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Inspecting Mask
- Publication number 20250216773
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE OF INSPECTING SURFACE OF INTERCONNECT STRUCTURE
- Publication number 20250216343
- Publication date Jul 3, 2025
- CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD.
- CHIH-YUAN LIN
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL PLANAR METROLOGY MOUNTING DEVICE AND METHODS FOR ABRASIVE C...
- Publication number 20250216190
- Publication date Jul 3, 2025
- The United States of America, as represented by the Secretary of the Navy
- Derek Lengacher
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Inspection Layer to Improve The Detection of Defects Through Optica...
- Publication number 20250216342
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MANUFACTURING METHOD FOR CONDUCTIVE FILM, MANUFACTURING METHOD FOR...
- Publication number 20250208500
- Publication date Jun 26, 2025
- MITSUBISHI CHEMICAL CORPORATION
- Shunsuke KANAME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD CAPABLE OF AUTOMATICALLY MO...
- Publication number 20250198948
- Publication date Jun 19, 2025
- GLORY STEEL ENTERPRISE CO., LTD.
- YI-LIANG CHEN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INSPECTION SYSTEM AND METHOD FOR OPERATING THEREOF
- Publication number 20250199398
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chao-Ting CHEN
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD, RESIN SOLUTION, RESIST COMPOSITION OR THERMOSETT...
- Publication number 20250189903
- Publication date Jun 12, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Komei HIRAHARA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INSPECTION SYSTEM OF ELIMINATING IMAGE NOISE
- Publication number 20250189458
- Publication date Jun 12, 2025
- GUDENG EQUIPMENT CO., LTD.
- Che-Wei Chan
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION USING A DYNAMIC SCAN PLAN
- Publication number 20250182266
- Publication date Jun 5, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Prashanth Venkatarama Reddy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Process for Identifying and Correcting Defects or Non-Conformities...
- Publication number 20250180492
- Publication date Jun 5, 2025
- GRAPHIMECC GROUP S.R.L
- Andrea Ranzato Vianello
- B31 - MAKING ARTICLES OF PAPER OR CARDBOARD WORKING PAPER OR CARDBOARD
Information Patent Application
AUTOMATIC MAVERICK WAFER SCREENING USING DIE PASS PATTERN
- Publication number 20250172503
- Publication date May 29, 2025
- Infineon Technologies Canada Inc.
- Iman ABDALI MASHHADI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL METROLOGY
- Publication number 20250164410
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Holger Tuitje
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS TO IMPROVE DETECTION OF DEFECTS IN PHOTOMASK...
- Publication number 20250164871
- Publication date May 22, 2025
- Intel Corporation
- Yoshihiro Tezuka
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION OF PANEL EMBEDDED DIES USING CO...
- Publication number 20250146955
- Publication date May 8, 2025
- ORBOTECH LTD.
- Elkana Porat
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Inspection of Multiple Features of Patterned...
- Publication number 20250137938
- Publication date May 1, 2025
- ORBOTECH LTD.
- Vered Gatt
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM TO FOR RAPID INSPECTION OF PHOTOLITHOGRAPHY RETICLE
- Publication number 20250123555
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jia-Lin SYU
- G01 - MEASURING TESTING
Information Patent Application
ENHANCED MODES FOR SCANNING ACOUSTIC MICROSCOPE INSPECTION IN SEMIC...
- Publication number 20250116598
- Publication date Apr 10, 2025
- KLA Corporation
- Daniel Ivanov Kavaldjiev
- G01 - MEASURING TESTING
Information Patent Application
EUV Microscope
- Publication number 20250116615
- Publication date Apr 10, 2025
- EUV TECH, INC.
- CHAMI N. PERERA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE APPARATUS, INSPECTION APPARATUS, EXPOSURE APPARATUS, L...
- Publication number 20250102445
- Publication date Mar 27, 2025
- Lasertec Corporation
- Ko GONDAIRA
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A MASK INSPECTION SYSTEM
- Publication number 20250093770
- Publication date Mar 20, 2025
- Carl Zeiss SMT GMBH
- Sören Schmidt
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR ROAD CONDITION ASSESSMENT AND FEEDBACK
- Publication number 20250086985
- Publication date Mar 13, 2025
- Purdue Research Foundation
- Mohammad Reza Jahanshahi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SPECTRAL ANGULAR METROLOGY
- Publication number 20250076208
- Publication date Mar 6, 2025
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
DETERIORATION ESTIMATION SYSTEM, DETERIORATION ESTIMATION METHOD, A...
- Publication number 20250067681
- Publication date Feb 27, 2025
- NEC Corporation
- Yusuke Mizukoshi
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING PARAMETERS OF PATTERNED STRUCTURE...
- Publication number 20250067683
- Publication date Feb 27, 2025
- NOVA LTD
- Amir Shayari
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR ACQUIRING THREE-DIMENSIONAL INFORMATION OF OBJECTS AN...
- Publication number 20250060316
- Publication date Feb 20, 2025
- SCUOLA UNIVERSITARIA PROFESSIONALE DELLA SVIZZERA ITALIANA (SUPSI)
- Daniele Guido ALLEGRI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING AN EFFECT OF A WAVELENGTH-DEPENDENT MEASURING...
- Publication number 20250060677
- Publication date Feb 20, 2025
- Carl Zeiss SMT GMBH
- Walter Pauls
- G01 - MEASURING TESTING

Inspecting patterns on the surface of objects

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Mask inspection for semiconductor specimen fabrication

Integration of an optical height sensor in mask inspection tools

Foreign matter inspection apparatus, foreign matter inspection meth...

Finding semiconductor defects using convolutional context attributes

Defect inspection apparatus and defect inspection method

Optical measurement apparatus, measuring method using the same, and...

Photoluminescence measurement device

High-performance EUV microscope with free form illumination system

Mask inspection apparatus and method for inspecting a mask having f...

Inspection apparatus and inspection method

Methods for manufacturing and inspecting orthodontic aligners

System and method for inspection of multiple features of patterned...

Method and system for inspecting a surface with artifical intellige...

3D image acquisition system for optical inspection and method for o...

Laser repair method and laser repair device

Inspection condition presentation apparatus, surface inspection app...

Inspection method and inspection apparatus for performing the same

Monolithic particle inspection device

Dark field microscope

Inspection layer to improve the detection of defects through optica...

Space-based circuit-replacing robotic system

Light-source apparatus, inspection apparatus, and adjustment method

Method of evaluating semiconductor wafer

Process window qualification modulation layouts

Semiconductor measurement apparatus

Method for assessing contrasts on surfaces

EUV microscope

Pattern inspection device and pattern inspection method

Defect inspection apparatus and defect inspection method

Valuable document system

Patents Applicationslast 30 patents

APPARATUSES AND METHODS FOR ASSESSING DEEP ULTRAVIOLET REFLECTIVITY...

WAFER INSPECTION METHOD

VISION INSPECTION SYSTEMS AND METHODS USING LIGHT SOURCES OF DIFFER...

System and Method for Inspecting Mask

METHOD AND DEVICE OF INSPECTING SURFACE OF INTERCONNECT STRUCTURE

OPTICAL PLANAR METROLOGY MOUNTING DEVICE AND METHODS FOR ABRASIVE C...

Inspection Layer to Improve The Detection of Defects Through Optica...

MANUFACTURING METHOD FOR CONDUCTIVE FILM, MANUFACTURING METHOD FOR...

PROCESSING SYSTEM AND PROCESSING METHOD CAPABLE OF AUTOMATICALLY MO...

INSPECTION SYSTEM AND METHOD FOR OPERATING THEREOF

INSPECTION METHOD, RESIN SOLUTION, RESIST COMPOSITION OR THERMOSETT...

OPTICAL INSPECTION SYSTEM OF ELIMINATING IMAGE NOISE

WAFER INSPECTION USING A DYNAMIC SCAN PLAN

Process for Identifying and Correcting Defects or Non-Conformities...

AUTOMATIC MAVERICK WAFER SCREENING USING DIE PASS PATTERN

OPTICAL METROLOGY

METHODS AND APPARATUS TO IMPROVE DETECTION OF DEFECTS IN PHOTOMASK...

METHOD AND APPARATUS FOR INSPECTION OF PANEL EMBEDDED DIES USING CO...

System and Method for Inspection of Multiple Features of Patterned...

METHOD AND SYSTEM TO FOR RAPID INSPECTION OF PHOTOLITHOGRAPHY RETICLE

ENHANCED MODES FOR SCANNING ACOUSTIC MICROSCOPE INSPECTION IN SEMIC...

EUV Microscope

LIGHT SOURCE APPARATUS, INSPECTION APPARATUS, EXPOSURE APPARATUS, L...

ILLUMINATION OPTICAL UNIT FOR A MASK INSPECTION SYSTEM

METHODS AND SYSTEMS FOR ROAD CONDITION ASSESSMENT AND FEEDBACK

SPECTRAL ANGULAR METROLOGY

DETERIORATION ESTIMATION SYSTEM, DETERIORATION ESTIMATION METHOD, A...

SYSTEM AND METHOD FOR DETERMINING PARAMETERS OF PATTERNED STRUCTURE...

APPARATUS FOR ACQUIRING THREE-DIMENSIONAL INFORMATION OF OBJECTS AN...

METHOD FOR MEASURING AN EFFECT OF A WAVELENGTH-DEPENDENT MEASURING...