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Inspection and quality control of devices
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H01J2237/24592
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/24592
Inspection and quality control of devices
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conduction inspection method for multipole aberration corrector, an...
Patent number
11,915,902
Issue date
Feb 27, 2024
NuFlare Technology, Inc.
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detector for process kit ring wear
Patent number
11,913,777
Issue date
Feb 27, 2024
Applied Materials, Inc.
Yogananda Sarode Vishwanath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement method and measurement system
Patent number
11,906,466
Issue date
Feb 20, 2024
Tokyo Electron Limited
Takayuki Hatanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus suitable for a particle beam apparatus
Patent number
11,908,656
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Han Willem Hendrik Severt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for detecting rare stochastic defects
Patent number
11,860,551
Issue date
Jan 2, 2024
Applied Materials Israel Ltd.
Guy Cohen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detecting method and detecting device of gas components and process...
Patent number
11,835,465
Issue date
Dec 5, 2023
HITACHI HIGH-TECH CORPORATION
Yoshifumi Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for multiple charged-particle beams
Patent number
11,804,355
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Yan Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for bare wafer inspection
Patent number
11,791,127
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Wei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and a device for automatically determining adjustment values...
Patent number
11,739,417
Issue date
Aug 29, 2023
Saint-Gobain Glass France
Yohan Faucillon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Inspection tool and method of determining a distortion of an inspec...
Patent number
11,728,129
Issue date
Aug 15, 2023
ASML Netherlands B.V.
Peter Christianus Johannes Maria De Loijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of power generation with phase linked solid-state...
Patent number
11,721,526
Issue date
Aug 8, 2023
MKS Instruments, Inc.
Francesco Braghiroli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for charged particle detection
Patent number
11,715,619
Issue date
Aug 1, 2023
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
TEM-based metrology method and system
Patent number
11,710,616
Issue date
Jul 25, 2023
Vladimir Machavariani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,670,477
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron optical system and multi-beam image acquiring apparatus
Patent number
11,621,144
Issue date
Apr 4, 2023
NuFlare Technology, Inc.
John Hartley
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pixel shape and section shape selection for large active area high...
Patent number
11,594,395
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resonant process monitor
Patent number
11,551,905
Issue date
Jan 10, 2023
Intel Corporation
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitive sensing data integration for plasma chamber condition mo...
Patent number
11,545,346
Issue date
Jan 3, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evaluation method of metal contamination
Patent number
11,538,721
Issue date
Dec 27, 2022
Globalwafers Japan Co., Ltd
Nobue Araki
C30 - CRYSTAL GROWTH
Information
Patent Grant
System and method of power generation with phase linked solid-state...
Patent number
11,476,092
Issue date
Oct 18, 2022
MKS Instruments, Inc.
Kenneth Trenholm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for scanning a sample using multi-beam inspection...
Patent number
11,469,076
Issue date
Oct 11, 2022
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Massen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern evaluation system and pattern evaluation method
Patent number
11,428,652
Issue date
Aug 30, 2022
HITACHI HIGH-TECH CORPORATION
Koichiro Irie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,404,237
Issue date
Aug 2, 2022
HITACHI HIGH-TECH CORPORATION
Anoru Suga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,398,368
Issue date
Jul 26, 2022
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
TEM-based metrology method and system
Patent number
11,309,162
Issue date
Apr 19, 2022
Nova Ltd.
Vladimir Machavariani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System, apparatus, and method for determining elemental composition...
Patent number
11,310,438
Issue date
Apr 19, 2022
Direct Electron, LP
Benjamin Bammes
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method and apparatus for charged particle detection
Patent number
11,295,930
Issue date
Apr 5, 2022
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection tool and method of determining a distortion of an inspec...
Patent number
11,251,015
Issue date
Feb 15, 2022
ASML Netherlands B.V.
Peter Christianus Johannes Maria De Loijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for high dynamic range counting by pixelated d...
Patent number
11,252,339
Issue date
Feb 15, 2022
Direct Electron, LP
Benjamin Bammes
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
Publication number
20240153732
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Datong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
Publication number
20240128051
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIDEBAND VARIABLE IMPEDANCE LOAD FOR HIGH VOLUME MANUFACTURING QUAL...
Publication number
20240094273
Publication date
Mar 21, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mesh Integrity Check
Publication number
20240085171
Publication date
Mar 14, 2024
Carl Zeiss SMT GMBH
David Laemmle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
Publication number
20240087842
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROCESSING SUBSTRATE
Publication number
20240078663
Publication date
Mar 7, 2024
PSK INC.
KWANG SUNG YOO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20240055223
Publication date
Feb 15, 2024
KIOXIA Corporation
Chihiro IDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
Publication number
20230411110
Publication date
Dec 21, 2023
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...
Publication number
20230402253
Publication date
Dec 14, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20230343568
Publication date
Oct 26, 2023
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Application
Processing System and Charged Particle Beam Apparatus
Publication number
20230314128
Publication date
Oct 5, 2023
HITACHI HIGH-TECH CORPORATION
Masaya GOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION METHOD AND INSPECTION TOOL
Publication number
20230298850
Publication date
Sep 21, 2023
ASML NETHERLANDS B.V.
Marijke SCOTUZZI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
Publication number
20230274906
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Martinus Gerardus, Maria, Johannes MAASSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...
Publication number
20230197402
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
YUJIN CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...
Publication number
20230178406
Publication date
Jun 8, 2023
ASML NETHERLANDS B.V.
Yixiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20230103165
Publication date
Mar 30, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODEL-BASED CHARACTERIZATION OF PLASMAS IN SEMICONDUCTOR PROCESSING...
Publication number
20230096706
Publication date
Mar 30, 2023
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM
Publication number
20230086984
Publication date
Mar 23, 2023
ASML NETHERLANDS B.V.
Te-Yu CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
Publication number
20230062662
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Ayuta SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR INSPECTING ELECTROSTATIC CHUCK
Publication number
20230032518
Publication date
Feb 2, 2023
SEMES CO., LTD.
Su Hyung LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, APPARATUS, AND PROGRAM FOR DETERMINING CONDITION RELATED TO...
Publication number
20230032587
Publication date
Feb 2, 2023
HITACHI HIGH-TECH CORPORATION
Takahiro NISHIHATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STACK ALIGNMENT TECHNIQUES
Publication number
20230020745
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Arjen Benjamin STORM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
Publication number
20220392735
Publication date
Dec 8, 2022
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
Publication number
20220375712
Publication date
Nov 24, 2022
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION
Publication number
20220375716
Publication date
Nov 24, 2022
ASML NETHERLANDS B.V.
Yongxin WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNU...
Publication number
20220365187
Publication date
Nov 17, 2022
TOKYO ELECTRON LIMITED
Toshiaki KODAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-REFERENCING HEALTH MONITORING SYSTEM FOR MULTI-BEAM SEM TOOLS
Publication number
20220319805
Publication date
Oct 6, 2022
ASML NETHERLANDS B.V.
Wei FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEM-BASED METROLOGY METHOD AND SYSTEM
Publication number
20220310356
Publication date
Sep 29, 2022
NOVA LTD
VLADIMIR MACHAVARIANI
G06 - COMPUTING CALCULATING COUNTING