Inspection and quality control of devices

Industry

CPC
H01J2237/24592

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/24592Inspection and quality control of devices

Industries

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam inspection apparatus
- Patent number 12,142,453
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant frequency shift as etch stop of gate oxide of MOSFET trans...
- Patent number 12,020,915
- Issue date Jun 25, 2024
- KING FAISAL UNIVERSITY
- Hesham Mohammed Enshasy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,961,697
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conduction inspection method for multipole aberration corrector, an...
- Patent number 11,915,902
- Issue date Feb 27, 2024
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector for process kit ring wear
- Patent number 11,913,777
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement method and measurement system
- Patent number 11,906,466
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Takayuki Hatanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus suitable for a particle beam apparatus
- Patent number 11,908,656
- Issue date Feb 20, 2024
- ASML Netherlands B.V.
- Han Willem Hendrik Severt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for detecting rare stochastic defects
- Patent number 11,860,551
- Issue date Jan 2, 2024
- Applied Materials Israel Ltd.
- Guy Cohen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting method and detecting device of gas components and process...
- Patent number 11,835,465
- Issue date Dec 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Yoshifumi Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 11,804,355
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Yan Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for bare wafer inspection
- Patent number 11,791,127
- Issue date Oct 17, 2023
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and a device for automatically determining adjustment values...
- Patent number 11,739,417
- Issue date Aug 29, 2023
- Saint-Gobain Glass France
- Yohan Faucillon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inspection tool and method of determining a distortion of an inspec...
- Patent number 11,728,129
- Issue date Aug 15, 2023
- ASML Netherlands B.V.
- Peter Christianus Johannes Maria De Loijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of power generation with phase linked solid-state...
- Patent number 11,721,526
- Issue date Aug 8, 2023
- MKS Instruments, Inc.
- Francesco Braghiroli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,715,619
- Issue date Aug 1, 2023
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
TEM-based metrology method and system
- Patent number 11,710,616
- Issue date Jul 25, 2023
- Vladimir Machavariani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,670,477
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron optical system and multi-beam image acquiring apparatus
- Patent number 11,621,144
- Issue date Apr 4, 2023
- NuFlare Technology, Inc.
- John Hartley
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pixel shape and section shape selection for large active area high...
- Patent number 11,594,395
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant process monitor
- Patent number 11,551,905
- Issue date Jan 10, 2023
- Intel Corporation
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive sensing data integration for plasma chamber condition mo...
- Patent number 11,545,346
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evaluation method of metal contamination
- Patent number 11,538,721
- Issue date Dec 27, 2022
- Globalwafers Japan Co., Ltd
- Nobue Araki
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method of power generation with phase linked solid-state...
- Patent number 11,476,092
- Issue date Oct 18, 2022
- MKS Instruments, Inc.
- Kenneth Trenholm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 11,469,076
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Massen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern evaluation system and pattern evaluation method
- Patent number 11,428,652
- Issue date Aug 30, 2022
- HITACHI HIGH-TECH CORPORATION
- Koichiro Irie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,404,237
- Issue date Aug 2, 2022
- HITACHI HIGH-TECH CORPORATION
- Anoru Suga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,398,368
- Issue date Jul 26, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
TEM-based metrology method and system
- Patent number 11,309,162
- Issue date Apr 19, 2022
- Nova Ltd.
- Vladimir Machavariani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System, apparatus, and method for determining elemental composition...
- Patent number 11,310,438
- Issue date Apr 19, 2022
- Direct Electron, LP
- Benjamin Bammes
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,295,930
- Issue date Apr 5, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CALIBRATION APPARATUS FOR SENSOR DEVICE AND SYSTEM INCLUDING THE SAME
- Publication number 20240379335
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Taijo Jeon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Program, Information Processing Method, Information Processing Devi...
- Publication number 20240355653
- Publication date Oct 24, 2024
- SPP Technologies Co., Ttd.
- Tatsuo Hiramura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPA...
- Publication number 20240339291
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Herre Tjerk STEENSTRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
- Publication number 20240339295
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Tzu-Chao CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
- Publication number 20240321547
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING AN ION BEAM SOURCE, ION BEAM SOURCE AND COMPUTE...
- Publication number 20240266139
- Publication date Aug 8, 2024
- CARL ZEISS MICROSCOPY GMBH
- Ramu Pradip
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW POWER PLASMA SYSTEM MONITOR METHOD
- Publication number 20240242946
- Publication date Jul 18, 2024
- SKY TECH INC.
- JING-CHENG LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240243019
- Publication date Jul 18, 2024
- Kokusai Electric Corporation
- Yuichiro TAKESHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR FOR PROCESS KIT RING WEAR
- Publication number 20240183656
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING COATING FILM AND INSPECTIO...
- Publication number 20240162012
- Publication date May 16, 2024
- SEMES CO., LTD.
- Ki Ryong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
- Publication number 20240153732
- Publication date May 9, 2024
- ASML NETHERLANDS B.V.
- Datong ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
- Publication number 20240128047
- Publication date Apr 18, 2024
- Hitachi High-Tech Corporation
- Masahiro YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
- Publication number 20240128051
- Publication date Apr 18, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIDEBAND VARIABLE IMPEDANCE LOAD FOR HIGH VOLUME MANUFACTURING QUAL...
- Publication number 20240094273
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Yue GUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
- Publication number 20240087838
- Publication date Mar 14, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mesh Integrity Check
- Publication number 20240085171
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- David Laemmle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
- Publication number 20240087842
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE
- Publication number 20240078663
- Publication date Mar 7, 2024
- PSK INC.
- KWANG SUNG YOO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20240055223
- Publication date Feb 15, 2024
- KIOXIA Corporation
- Chihiro IDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
- Publication number 20230411110
- Publication date Dec 21, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...
- Publication number 20230402253
- Publication date Dec 14, 2023
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
- Publication number 20230343568
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Yaoling Pan
- G01 - MEASURING TESTING
Information Patent Application
Processing System and Charged Particle Beam Apparatus
- Publication number 20230314128
- Publication date Oct 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Masaya GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD AND INSPECTION TOOL
- Publication number 20230298850
- Publication date Sep 21, 2023
- ASML NETHERLANDS B.V.
- Marijke SCOTUZZI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20230274906
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...
- Publication number 20230197402
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- YUJIN CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...
- Publication number 20230178406
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
- Publication number 20230103165
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODEL-BASED CHARACTERIZATION OF PLASMAS IN SEMICONDUCTOR PROCESSING...
- Publication number 20230096706
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Soonwook Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM
- Publication number 20230086984
- Publication date Mar 23, 2023
- ASML NETHERLANDS B.V.
- Te-Yu CHEN
- H01 - BASIC ELECTRIC ELEMENTS

Inspection and quality control of devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multi-beam inspection apparatus

Resonant frequency shift as etch stop of gate oxide of MOSFET trans...

Apparatus using charged particle beams

Conduction inspection method for multipole aberration corrector, an...

Detector for process kit ring wear

Measurement method and measurement system

Stage apparatus suitable for a particle beam apparatus

System and method for detecting rare stochastic defects

Detecting method and detecting device of gas components and process...

Apparatus for multiple charged-particle beams

System and method for bare wafer inspection

Method and a device for automatically determining adjustment values...

Inspection tool and method of determining a distortion of an inspec...

System and method of power generation with phase linked solid-state...

Method and apparatus for charged particle detection

TEM-based metrology method and system

Apparatus using charged particle beams

Electron optical system and multi-beam image acquiring apparatus

Pixel shape and section shape selection for large active area high...

Resonant process monitor

Capacitive sensing data integration for plasma chamber condition mo...

Evaluation method of metal contamination

System and method of power generation with phase linked solid-state...

System and method for scanning a sample using multi-beam inspection...

Pattern evaluation system and pattern evaluation method

Charged particle beam device

Apparatus of plural charged-particle beams

TEM-based metrology method and system

System, apparatus, and method for determining elemental composition...

Method and apparatus for charged particle detection

Patents Applicationslast 30 patents

CALIBRATION APPARATUS FOR SENSOR DEVICE AND SYSTEM INCLUDING THE SAME

Program, Information Processing Method, Information Processing Devi...

DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPA...

METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...

CHARGED-PARTICLE OPTICAL DEVICE

METHOD OF OPERATING AN ION BEAM SOURCE, ION BEAM SOURCE AND COMPUTE...

LOW POWER PLASMA SYSTEM MONITOR METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

DETECTOR FOR PROCESS KIT RING WEAR

SUBSTRATE PROCESSING APPARATUS INCLUDING COATING FILM AND INSPECTIO...

SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...

Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...

MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...

WIDEBAND VARIABLE IMPEDANCE LOAD FOR HIGH VOLUME MANUFACTURING QUAL...

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...

Mesh Integrity Check

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...

METHOD FOR PROCESSING SUBSTRATE

INSPECTION DEVICE AND INSPECTION METHOD

APPARATUS USING CHARGED PARTICLE BEAMS

MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...

CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...

Processing System and Charged Particle Beam Apparatus

INSPECTION METHOD AND INSPECTION TOOL

SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...

SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...

METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...

CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...

MODEL-BASED CHARACTERIZATION OF PLASMAS IN SEMICONDUCTOR PROCESSING...

BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM