Interferometric lithography; Holographic lithography; Self-imaging lithography

Industry

CPC
G03F7/70408

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70408Interferometric lithography; Holographic lithography; Self-imaging lithography

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for printing a periodic pattern with a varying...
- Patent number 12,124,170
- Issue date Oct 22, 2024
- Eulitha A.G.
- Francis Clube
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase plate and fabrication method for color-separated laser backli...
- Patent number 12,124,070
- Issue date Oct 22, 2024
- Meta Platforms Technologies, LLC
- Jian Xu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometric lithography grating-mask-based wafer-scale large-ar...
- Patent number 12,092,959
- Issue date Sep 17, 2024
- UNM Rainforest Innovations
- Steven R. J. Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rapid large-scale fabrication of metasurfaces with complex unit cells
- Patent number 12,007,695
- Issue date Jun 11, 2024
- Board of Regents, The University of Texas System
- Robert Magnusson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling porosity of an interference lithography process by fine...
- Patent number 11,914,304
- Issue date Feb 27, 2024
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Shailesh N. Joshi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Metasurface-assisted 3D beam shaping using array of scatterers
- Patent number 11,855,348
- Issue date Dec 26, 2023
- California Institute of Technology
- Seyedeh Mahsa Kamali
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting particles using structured illumination
- Patent number 11,841,495
- Issue date Dec 12, 2023
- Rebus Biosystems, Inc.
- Jekwan Ryu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Large area self imaging lithography based on broadband light source
- Patent number 11,829,073
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Arvinder Chadha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electrodeposition compatible anti-reflection coatings for laser int...
- Patent number 11,815,822
- Issue date Nov 14, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Shailesh N. Joshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for industrial scale continuous holographic litho...
- Patent number 11,687,004
- Issue date Jun 27, 2023
- Photia Incorporated
- Joseph Bernhardt Geddes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wire grid polarizer manufacturing methods using frequency doubling...
- Patent number 11,592,740
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Jang Fung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing template
- Patent number 11,467,487
- Issue date Oct 11, 2022
- BOE Technology Group Co., Ltd.
- Kang Guo
- B24 - GRINDING POLISHING
Information Patent Grant
Metasurface-assisted 3D beam shaping for desired phase, amplitude,...
- Patent number 11,450,970
- Issue date Sep 20, 2022
- California Institute of Technology
- Seyedeh Mahsa Kamali
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for printing large periodic patterns by overlap...
- Patent number 11,422,471
- Issue date Aug 23, 2022
- Eulitha A.G.
- Francis Clube
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for detecting particles using structured illumination
- Patent number 11,366,303
- Issue date Jun 21, 2022
- Rebus Biosystems, Inc.
- Jekwan Ryu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Block copolymer and method of producing the same, and method of pro...
- Patent number 11,261,299
- Issue date Mar 1, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Akiyoshi Yamazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustable retardance compensator for self-referencing interferomet...
- Patent number 11,249,402
- Issue date Feb 15, 2022
- ASML Holding N.V.
- Ryan Richard Westover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Large area self imaging lithography based on broadband light source
- Patent number 11,036,145
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Arvinder Chadha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fabrication of multi-level graded photonic super-crystals
- Patent number 10,964,916
- Issue date Mar 30, 2021
- University of North Texas
- Yuankun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for industrial scale continuous holographic litho...
- Patent number 10,845,709
- Issue date Nov 24, 2020
- Photia Incorporated
- Joseph Bernhardt Geddes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Generation of vector partially coherent optical sources using phase...
- Patent number 10,809,626
- Issue date Oct 20, 2020
- The United States of America as represented by the Secretary of the Air Force
- Milo W. Hyde
- G01 - MEASURING TESTING
Information Patent Grant
System and method of maskless lithography with the use of a curvili...
- Patent number 10,768,531
- Issue date Sep 8, 2020
- Vadim Rakhovsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable neutral density filter for multi-beam interference lithogr...
- Patent number 10,712,670
- Issue date Jul 14, 2020
- Facebook Technologies, LLC
- Matthieu Charles Raoul Leibovici
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable neutral density filter for multi-beam interference lithogr...
- Patent number 10,509,327
- Issue date Dec 17, 2019
- Facebook Technologies, LLC
- Matthieu Charles Raoul Leibovici
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for printing arrays of features
- Patent number 10,365,566
- Issue date Jul 30, 2019
- Eulitha A.G.
- Francis Clube
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High-aspect ratio structure production method, ultrasonic probe pro...
- Patent number 10,283,229
- Issue date May 7, 2019
- Konica Minolta, Inc.
- Mitsuru Yokoyama
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Lensless imaging with reduced aperture
- Patent number 10,281,258
- Issue date May 7, 2019
- John Farah
- G01 - MEASURING TESTING
Information Patent Grant
System and method for generating a lithographic image with the use...
- Patent number 10,162,307
- Issue date Dec 25, 2018
- Vadim Rakhovsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
All fiber laser interference lithography setup and methods
- Patent number 10,133,007
- Issue date Nov 20, 2018
- Wendi Li
- G02 - OPTICS
Information Patent Grant
Exposure method, method of fabricating periodic microstructure, met...
- Patent number 10,101,652
- Issue date Oct 16, 2018
- Ushio Denki Kabushiki Kaisha
- Daisuke Yajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY METHOD AND DEVICE
- Publication number 20240361705
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Sergey TARABRIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD
- Publication number 20240353761
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for laser interference structuring of substrat...
- Publication number 20240337950
- Publication date Oct 10, 2024
- FUSION BIONIC GMBH
- Tim KUNZE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
- Publication number 20240264534
- Publication date Aug 8, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A POSITION OF A MIRROR
- Publication number 20240255319
- Publication date Aug 1, 2024
- Carl Zeiss SMT GMBH
- Michael Patra
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...
- Publication number 20240061352
- Publication date Feb 22, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD OF LASER INTERFERENCE LITHOGRAPHY
- Publication number 20230408927
- Publication date Dec 21, 2023
- The University of Hong Kong
- Wendi LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE WITH GRATING STRUCTURE
- Publication number 20230400777
- Publication date Dec 14, 2023
- NANYA TECHNOLOGY CORPORATION
- CHUN-YEN WEI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRODEPOSITION COMPATIBLE ANTI-REFLECTION COATINGS FOR LASER INT...
- Publication number 20230314965
- Publication date Oct 5, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Shailesh N. Joshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
- Publication number 20230280658
- Publication date Sep 7, 2023
- TSINGHUA UNIVERSITY
- Leijie WANG
- G01 - MEASURING TESTING
Information Patent Application
PHASE PLATE AND FABRICATION METHOD FOR COLOR-SEPARATED LASER BACKLI...
- Publication number 20230244185
- Publication date Aug 3, 2023
- Meta Platforms Technologies, LLC
- Wai Sze Tiffany LAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROLLING POROSITY OF AN INTERFERENCE LITHOGRAPHY PROCESS BY FINE...
- Publication number 20230045339
- Publication date Feb 9, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Shailesh N. Joshi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METASURFACE-ASSISTED 3D BEAM SHAPING
- Publication number 20220393364
- Publication date Dec 8, 2022
- California Institute of Technology
- Seyedeh Mahsa KAMALI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Detecting Particles Using Structured Illumination
- Publication number 20220334368
- Publication date Oct 20, 2022
- Rebus Biosystems, Inc.
- Jekwan Ryu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR COMBINATORIAL ARRAYS USING DYNAMIC INTERFER...
- Publication number 20220283510
- Publication date Sep 8, 2022
- Rutgers, The State University of New Jersey
- Ki-Bum Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20220283518
- Publication date Sep 8, 2022
- Canon Kabushiki Kaisha
- Satoshi Iwatani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PRINTING A PERIODIC PATTERN WITH A VARYING...
- Publication number 20220155691
- Publication date May 19, 2022
- Francis Clube
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING GRATING REFERENCE MATERIALS HAVING A SELF-...
- Publication number 20210397081
- Publication date Dec 23, 2021
- Tongji University
- Xinbin CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADJUSTABLE RETARDANCE COMPENSATOR FOR SELF-REFERENCING INTERFEROMET...
- Publication number 20210333720
- Publication date Oct 28, 2021
- ASML Holding N.V.
- Ryan Richard Westover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LARGE AREA SELF IMAGING LITHOGRAPHY BASED ON BROADBAND LIGHT SOURCE
- Publication number 20210255550
- Publication date Aug 19, 2021
- Appljed Materia|Si !nc
- Arvinder CHADHA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RAPID LARGE-SCALE FABRICATION OF METASURFACES WITH COMPLEX UNIT CELLS
- Publication number 20210216020
- Publication date Jul 15, 2021
- Board of Regents, The Univerity of Texas System
- Robert Magnusson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR INDUSTRIAL SCALE CONTINUOUS HOLOGRAPHIC LITHO...
- Publication number 20210173311
- Publication date Jun 10, 2021
- Photia Incorporated
- Joseph Bernhardt Geddes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR PRINTING LARGE PERIODIC PATTERNS BY OVERLAP...
- Publication number 20210103222
- Publication date Apr 8, 2021
- EULITHA A.G.
- FRANCIS CLUBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY TARGET
- Publication number 20200011650
- Publication date Jan 9, 2020
- Carl Zeiss SMT GMBH
- Hans-Michael Stiepan
- G01 - MEASURING TESTING
Information Patent Application
BLOCK COPOLYMER AND METHOD OF PRODUCING THE SAME, AND METHOD OF PRO...
- Publication number 20190270852
- Publication date Sep 5, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Akiyoshi YAMAZAKI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
LENSLESS IMAGING WITH REDUCED APERTURE
- Publication number 20190271534
- Publication date Sep 5, 2019
- John Farah
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETECTING PARTICLES USING STRUCTURED ILLUMINATION
- Publication number 20190235222
- Publication date Aug 1, 2019
- Optical Biosystems, Inc.
- Jekwan Ryu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Generation of Vector Partially Coherent Optical Sources Using Phase...
- Publication number 20190129312
- Publication date May 2, 2019
- Government of the United States, as represented by the Secretary of the Air F...
- Milo W. Hyde
- G02 - OPTICS
Information Patent Application
Dynamic Holography Printing Device
- Publication number 20190004476
- Publication date Jan 3, 2019
- Dualitas Ltd
- Brian Mullins
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Interferometric lithography; Holographic lithography; Self-imaging lithography

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for printing a periodic pattern with a varying...

Phase plate and fabrication method for color-separated laser backli...

Interferometric lithography grating-mask-based wafer-scale large-ar...

Rapid large-scale fabrication of metasurfaces with complex unit cells

Controlling porosity of an interference lithography process by fine...

Metasurface-assisted 3D beam shaping using array of scatterers

Method for detecting particles using structured illumination

Large area self imaging lithography based on broadband light source

Electrodeposition compatible anti-reflection coatings for laser int...

System and method for industrial scale continuous holographic litho...

Wire grid polarizer manufacturing methods using frequency doubling...

Method for manufacturing template

Metasurface-assisted 3D beam shaping for desired phase, amplitude,...

Methods and systems for printing large periodic patterns by overlap...

Method for detecting particles using structured illumination

Block copolymer and method of producing the same, and method of pro...

Adjustable retardance compensator for self-referencing interferomet...

Large area self imaging lithography based on broadband light source

Fabrication of multi-level graded photonic super-crystals

System and method for industrial scale continuous holographic litho...

Generation of vector partially coherent optical sources using phase...

System and method of maskless lithography with the use of a curvili...

Variable neutral density filter for multi-beam interference lithogr...

Variable neutral density filter for multi-beam interference lithogr...

Methods and systems for printing arrays of features

High-aspect ratio structure production method, ultrasonic probe pro...

Lensless imaging with reduced aperture

System and method for generating a lithographic image with the use...

All fiber laser interference lithography setup and methods

Exposure method, method of fabricating periodic microstructure, met...

Patents Applicationslast 30 patents

METROLOGY METHOD AND DEVICE

METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD

Apparatus and method for laser interference structuring of substrat...

PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...

SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM

METHOD FOR DETERMINING A POSITION OF A MIRROR

EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...

APPARATUS AND METHOD OF LASER INTERFERENCE LITHOGRAPHY

SEMICONDUCTOR DEVICE WITH GRATING STRUCTURE

ELECTRODEPOSITION COMPATIBLE ANTI-REFLECTION COATINGS FOR LASER INT...

DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...

PHASE PLATE AND FABRICATION METHOD FOR COLOR-SEPARATED LASER BACKLI...

CONTROLLING POROSITY OF AN INTERFERENCE LITHOGRAPHY PROCESS BY FINE...

METASURFACE-ASSISTED 3D BEAM SHAPING

Method for Detecting Particles Using Structured Illumination

SYSTEMS AND METHODS FOR COMBINATORIAL ARRAYS USING DYNAMIC INTERFER...

STAGE DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

METHOD AND APPARATUS FOR PRINTING A PERIODIC PATTERN WITH A VARYING...

METHOD FOR MANUFACTURING GRATING REFERENCE MATERIALS HAVING A SELF-...

ADJUSTABLE RETARDANCE COMPENSATOR FOR SELF-REFERENCING INTERFEROMET...

LARGE AREA SELF IMAGING LITHOGRAPHY BASED ON BROADBAND LIGHT SOURCE

RAPID LARGE-SCALE FABRICATION OF METASURFACES WITH COMPLEX UNIT CELLS

SYSTEM AND METHOD FOR INDUSTRIAL SCALE CONTINUOUS HOLOGRAPHIC LITHO...

METHODS AND SYSTEMS FOR PRINTING LARGE PERIODIC PATTERNS BY OVERLAP...

METROLOGY TARGET

BLOCK COPOLYMER AND METHOD OF PRODUCING THE SAME, AND METHOD OF PRO...

LENSLESS IMAGING WITH REDUCED APERTURE

METHOD FOR DETECTING PARTICLES USING STRUCTURED ILLUMINATION

Generation of Vector Partially Coherent Optical Sources Using Phase...

Dynamic Holography Printing Device