Introduction of auxiliary energy into the plasma

Industry

CPC
C23C14/3471

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3471Introduction of auxiliary energy into the plasma

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing coated metallic substrates and coated metallic...
- Patent number 11,691,176
- Issue date Jul 4, 2023
- HEC High End Coating GmbH
- Matthias Koch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EM source for enhanced plasma control
- Patent number 11,692,262
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and deposition method using the same
- Patent number 11,637,001
- Issue date Apr 25, 2023
- Samsung Display Co., Ltd.
- Kwan Yong Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxide superconducting wire
- Patent number 11,621,105
- Issue date Apr 4, 2023
- Fujikura Ltd.
- Masaki Ohsugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing of workpieces with reactive species generated using alky...
- Patent number 11,387,111
- Issue date Jul 12, 2022
- Mattson Technology, Inc.
- Michael X. Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 11,149,342
- Issue date Oct 19, 2021
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for preparing multi-component alloy film
- Patent number 11,149,344
- Issue date Oct 19, 2021
- THE ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Xiaobin Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for selective deposition using angled ions
- Patent number 11,053,580
- Issue date Jul 6, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition with isotropic neutral and non-isotropic...
- Patent number 10,648,074
- Issue date May 12, 2020
- Applied Materials, Inc.
- Daniel J. Hoffman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for dynamically treating atomic layer deposit...
- Patent number 10,563,304
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Xiangjin Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and/or coil, and process for producing same
- Patent number 10,557,195
- Issue date Feb 11, 2020
- JX Nippon Mining & Metals Corporation
- Kenichi Nagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition system with a source of isotropic ion vel...
- Patent number 10,400,328
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Daniel J. Hoffman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for forming waveguides for use in laser systems or other...
- Patent number 10,203,461
- Issue date Feb 12, 2019
- Raytheon Company
- Roy Zamudio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric film, production method thereof, piezoelectric elemen...
- Patent number 10,011,111
- Issue date Jul 3, 2018
- FUJIFILM Corporation
- Naoki Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and/or coil, and process for producing same
- Patent number 9,951,412
- Issue date Apr 24, 2018
- JX Nippon Mining & Metals Corporation
- Kenichi Nagata
- C21 - METALLURGY OF IRON
Information Patent Grant
Physical vapor deposition method with a source of isotropic ion vel...
- Patent number 9,856,558
- Issue date Jan 2, 2018
- Applied Materials, Inc.
- Daniel J. Hoffman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bipolar collimator utilized in a physical vapor deposition chamber
- Patent number 9,831,074
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Joung Joo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coaxial microwave applicator for plasma production
- Patent number 9,750,120
- Issue date Aug 29, 2017
- Universite Joseph Fourier-Grenoble 1
- Ana Lacoste
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition RF plasma shield deposit control
- Patent number 9,605,341
- Issue date Mar 28, 2017
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for stable substrate processing with multiple...
- Patent number 9,593,410
- Issue date Mar 14, 2017
- Applied Materials, Inc.
- Zhenbin Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition chamber with capacitive tuning at wafer s...
- Patent number 9,593,411
- Issue date Mar 14, 2017
- Applied Materials, Inc.
- Daniel J. Hoffman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating method for depositing a layer system on a substrate and sub...
- Patent number 9,551,067
- Issue date Jan 24, 2017
- OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON
- Jörg Vetter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing method for a high hardness and abrasion resistan...
- Patent number 9,469,904
- Issue date Oct 18, 2016
- NINGBO RUNNER INDUSTRIAL CORPORATION
- Hu-Dong Niu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote arc discharge plasma assisted processes
- Patent number 9,412,569
- Issue date Aug 9, 2016
- Vapor Technologies, Inc.
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a layer on a substrate using surface energy...
- Patent number 9,217,197
- Issue date Dec 22, 2015
- Applied Materials, Inc.
- Jick M. Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma vapor deposition
- Patent number 9,194,036
- Issue date Nov 24, 2015
- Infineon Technologies AG
- Sun-Oo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, film formation device, piezoelectric film, p...
- Patent number 8,366,259
- Issue date Feb 5, 2013
- FUJIFILM Corporation
- Takamichi Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, film formation device, piezoelectric film, p...
- Patent number 8,172,372
- Issue date May 8, 2012
- FUJIFILM Corporation
- Takamichi Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
- Publication number 20230257866
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
- Publication number 20230253190
- Publication date Aug 10, 2023
- SAMSUNG DISPLAY CO., LTD.
- Kwan Yong LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR USE IN GENERATING PLASMA
- Publication number 20230028207
- Publication date Jan 26, 2023
- Dyson Technology Limited
- Sean Michael CARLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SOLID STATE BATTERY CATHODES FOR USE IN BAT...
- Publication number 20220411913
- Publication date Dec 29, 2022
- Dyson Technology Limited
- Robert Ian Joseph GRUAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEPOSITION APPARATUS AND METHOD
- Publication number 20220389564
- Publication date Dec 8, 2022
- Dyson Technology Limited
- Michael Edward RENDALL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20220341029
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLES COATED WITH CRACK-RESISTANT FLUORO-ANNEALED FILMS AND METH...
- Publication number 20220154325
- Publication date May 19, 2022
- Entegris, Inc.
- Nilesh Gunda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SUPERCONDUCTING WIRE
- Publication number 20220148762
- Publication date May 12, 2022
- FUJIKURA LTD.
- Masaki Ohsugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALUM PENTOXIDE BASED LOW-LOSS METASURFACE OPTICS FOR UV APPLICA...
- Publication number 20210262077
- Publication date Aug 26, 2021
- University of Maryland, College Park
- Cheng ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20210017639
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20200255935
- Publication date Aug 13, 2020
- TOKYO ELECTRON LIMITED
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPERALLOY TURBINE PART AND ASSOCIATED METHOD FOR MANUFACTURING BY...
- Publication number 20200191002
- Publication date Jun 18, 2020
- SAFRAN
- Amar SABOUNDJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PREPARING MULTI-COMPONENT ALLOY FILM
- Publication number 20190390323
- Publication date Dec 26, 2019
- THE ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Xiaobin WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION WITH ISOTROPIC NEUTRAL AND NON-ISOTROPIC...
- Publication number 20190338411
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Daniel J. Hoffman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING COATED SUBSTRATES, COATED SUBSTRATES AND USE T...
- Publication number 20190255563
- Publication date Aug 22, 2019
- HEC High End Coating GmbH
- Matthias Koch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO IMPART COLOR AND DURABLE PROPERTIES TO SUBSTRATES
- Publication number 20190161847
- Publication date May 30, 2019
- Georgia Tech Research Corporation
- William Judson Ready
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION OF SUPERHYDROPHOBIC AND ICEPHOBIC COATINGS BY NANOLAYER...
- Publication number 20190127841
- Publication date May 2, 2019
- Nanocoatings, Inc.
- Francis M. Kustas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Physical Vapor Deposition System with a Source of Isotropic Ion Vel...
- Publication number 20180119272
- Publication date May 3, 2018
- Applied Materials, Inc.
- Daniel J. Hoffman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET AND/OR COIL, AND PROCESS FOR PRODUCING SAME
- Publication number 20180010241
- Publication date Jan 11, 2018
- JX NIPPON MINING & METALS CORPORATION
- Kenichi Nagata
- C21 - METALLURGY OF IRON
Information Patent Application
PIEZOELECTRIC FILM, PRODUCTION METHOD THEREOF, PIEZOELECTRIC ELEMEN...
- Publication number 20170157931
- Publication date Jun 8, 2017
- FUJIFILM CORPORATION
- Naoki MURAKAMI
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
TECHNIQUES FOR FORMING WAVEGUIDES FOR USE IN LASER SYSTEMS OR OTHER...
- Publication number 20170068058
- Publication date Mar 9, 2017
- Raytheon Company
- Roy Zamudio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface Processing Method For A High Hardness And Abrasion Resistan...
- Publication number 20160024661
- Publication date Jan 28, 2016
- NINGBO RUNNER INDUSTRIAL CORPORATION
- Hu-Dong Niu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...
- Publication number 20150259802
- Publication date Sep 17, 2015
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON FILM STRESS RELAXATION
- Publication number 20150200094
- Publication date Jul 16, 2015
- Applied Materials, Inc.
- Brian Saxton Underwood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIPOLAR COLLIMATOR UTILIZED IN A PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20150114823
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Joung Joo LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Optical Component, Spectacle Lens, and Method of Manufacturing the...
- Publication number 20140347625
- Publication date Nov 27, 2014
- Masaoki TOMODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEVICE
- Publication number 20140346037
- Publication date Nov 27, 2014
- Shigeru MIZUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR STABLE SUBSTRATE PROCESSING WITH MULTIPLE...
- Publication number 20140251788
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- Zhenbin GE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMATION SPUTTERING DEVICE
- Publication number 20140216928
- Publication date Aug 7, 2014
- EMD CORPORATION
- Yuichi Setsuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Introduction of auxiliary energy into the plasma

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for controlling stress variation in a material...

Method for producing coated metallic substrates and coated metallic...

EM source for enhanced plasma control

Deposition apparatus and deposition method using the same

Oxide superconducting wire

Method and apparatus for controlling stress variation in a material...

Processing of workpieces with reactive species generated using alky...

Sputtering apparatus

Apparatus and method for preparing multi-component alloy film

Techniques for selective deposition using angled ions

Physical vapor deposition with isotropic neutral and non-isotropic...

Methods and apparatus for dynamically treating atomic layer deposit...

Sputtering target and/or coil, and process for producing same

Physical vapor deposition system with a source of isotropic ion vel...

Techniques for forming waveguides for use in laser systems or other...

Piezoelectric film, production method thereof, piezoelectric elemen...

Sputtering target and/or coil, and process for producing same

Physical vapor deposition method with a source of isotropic ion vel...

Bipolar collimator utilized in a physical vapor deposition chamber

Coaxial microwave applicator for plasma production

Physical vapor deposition RF plasma shield deposit control

Methods and apparatus for stable substrate processing with multiple...

Physical vapor deposition chamber with capacitive tuning at wafer s...

Coating method for depositing a layer system on a substrate and sub...

Surface processing method for a high hardness and abrasion resistan...

Remote arc discharge plasma assisted processes

Methods for depositing a layer on a substrate using surface energy...

Plasma vapor deposition

Film formation method, film formation device, piezoelectric film, p...

Film formation method, film formation device, piezoelectric film, p...

Patents Applicationslast 30 patents

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

Method and Apparatus for Controlling Stress Variation in a Material...

METHOD AND APPARATUS FOR USE IN GENERATING PLASMA

METHOD OF MANUFACTURING SOLID STATE BATTERY CATHODES FOR USE IN BAT...

SPUTTER DEPOSITION APPARATUS AND METHOD

EM SOURCE FOR ENHANCED PLASMA CONTROL

ARTICLES COATED WITH CRACK-RESISTANT FLUORO-ANNEALED FILMS AND METH...

OXIDE SUPERCONDUCTING WIRE

TANTALUM PENTOXIDE BASED LOW-LOSS METASURFACE OPTICS FOR UV APPLICA...

EM SOURCE FOR ENHANCED PLASMA CONTROL

SPUTTERING APPARATUS

SUPERALLOY TURBINE PART AND ASSOCIATED METHOD FOR MANUFACTURING BY...

APPARATUS AND METHOD FOR PREPARING MULTI-COMPONENT ALLOY FILM

PHYSICAL VAPOR DEPOSITION WITH ISOTROPIC NEUTRAL AND NON-ISOTROPIC...

METHOD FOR PRODUCING COATED SUBSTRATES, COATED SUBSTRATES AND USE T...

METHODS TO IMPART COLOR AND DURABLE PROPERTIES TO SUBSTRATES

FABRICATION OF SUPERHYDROPHOBIC AND ICEPHOBIC COATINGS BY NANOLAYER...

Physical Vapor Deposition System with a Source of Isotropic Ion Vel...

SPUTTERING TARGET AND/OR COIL, AND PROCESS FOR PRODUCING SAME

PIEZOELECTRIC FILM, PRODUCTION METHOD THEREOF, PIEZOELECTRIC ELEMEN...

TECHNIQUES FOR FORMING WAVEGUIDES FOR USE IN LASER SYSTEMS OR OTHER...

Surface Processing Method For A High Hardness And Abrasion Resistan...

APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...

CARBON FILM STRESS RELAXATION

BIPOLAR COLLIMATOR UTILIZED IN A PHYSICAL VAPOR DEPOSITION CHAMBER

Optical Component, Spectacle Lens, and Method of Manufacturing the...

SPUTTER DEVICE

METHODS AND APPARATUS FOR STABLE SUBSTRATE PROCESSING WITH MULTIPLE...

THIN-FILM FORMATION SPUTTERING DEVICE