Ion implantation

Industry

CPC
C23C14/48

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/48Ion implantation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlled ion implantation
- Patent number 12,247,283
- Issue date Mar 11, 2025
- Applied Materials, Inc.
- Alexander K. Eidukonis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source Ion implanter with preparation chamber for linear or...
- Patent number 12,234,545
- Issue date Feb 25, 2025
- Xinxin Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gold nickel alloy layer having nitrogen atoms inserted therein and...
- Patent number 12,234,546
- Issue date Feb 25, 2025
- IONICS SA
- Fabien Monteverde
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Insulating structure, method for manufacturing insulating structure...
- Patent number 12,221,689
- Issue date Feb 11, 2025
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yuuji Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gate structure of semiconductor device and method of manufacture
- Patent number 12,211,701
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsan-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a composite structure comprising a thin la...
- Patent number 12,159,781
- Issue date Dec 3, 2024
- Soitec
- Hugo Biard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Toroidal motion enhanced ion source
- Patent number 12,154,755
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- June Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer, ion source and method for generating aluminum-containing...
- Patent number 12,112,915
- Issue date Oct 8, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Sami K. Hahto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Guiding member, mechanical system comprising such a guiding member,...
- Patent number 12,098,744
- Issue date Sep 24, 2024
- HYDROMECANIQUE ET FROTTEMENT
- Fabrice Prost
- C21 - METALLURGY OF IRON
Information Patent Grant
Structure and manufacturing method of surface acoustic wave filter...
- Patent number 12,088,271
- Issue date Sep 10, 2024
- Shenzhen Newsonic Technologies Co., Ltd.
- Guojun Weng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser radiation system
- Patent number 12,072,507
- Issue date Aug 27, 2024
- Gigaphoton Inc.
- Osamu Wakabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for an ion implantation process employing an ion-collecting...
- Patent number 12,051,593
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fluorescent nanodiamonds production
- Patent number 12,012,537
- Issue date Jun 18, 2024
- Korea Institute of Science and Technology
- Seung Hee Han
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Corrosion-inhibiting protection for watch magnets, in particular ne...
- Patent number 12,012,651
- Issue date Jun 18, 2024
- Comadur S.A.
- Alexandra Amherd-Hidalgo
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Method for manufacturing LCP-based flexible copper-clad plate, and...
- Patent number 12,012,660
- Issue date Jun 18, 2024
- RICHVIEW ELECTRONICS CO., LTD.
- Nianqun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck, vacuum processing apparatus, and substrate pro...
- Patent number 12,014,946
- Issue date Jun 18, 2024
- Ulvac, Inc.
- Genji Sakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spinning disk with electrostatic clamped platens for ion implantation
- Patent number 12,002,649
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Robert Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High aspect ratio taper improvement using directional deposition
- Patent number 11,987,879
- Issue date May 21, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation gas supply system
- Patent number 11,961,707
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsing-Piao Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer temperature measurement in an ion implantation system
- Patent number 11,942,343
- Issue date Mar 26, 2024
- Advanced Ion Beam Technology, Inc.
- Chien-Li Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer
- Patent number 11,929,229
- Issue date Mar 12, 2024
- MI2-FACTORY GMBH
- Florian Krippendorf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single-layer circuit board, multi-layer circuit board, and manufact...
- Patent number 11,917,768
- Issue date Feb 27, 2024
- RICHVIEW ELECTRONICS CO., LTD.
- Siping Bai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite ion source based upon heterogeneous metal-metal fluoride...
- Patent number 11,887,806
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Graham Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure annealing process for metal containing materials
- Patent number 11,881,411
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation to modify glass locally for optical devices
- Patent number 11,873,554
- Issue date Jan 16, 2024
- Applied Materials, Inc.
- Nai-Wen Pi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods of electrically conductive optical semiconduc...
- Patent number 11,852,977
- Issue date Dec 26, 2023
- Danbury Mission Technologies, LLC
- Bradley Dean Schwartz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
- Patent number 11,827,973
- Issue date Nov 28, 2023
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treating sulfide glass surfaces and making solid state laminate ele...
- Patent number 11,817,569
- Issue date Nov 14, 2023
- PolyPlus Battery Company
- Steven J. Visco
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
High heat dissipating thin film and method for manufacturing same
- Patent number 11,787,157
- Issue date Oct 17, 2023
- SOLUETA
- Eui Hong Min
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and device for surface treatment of substrates
- Patent number 11,776,842
- Issue date Oct 3, 2023
- EV Group E. Thallner GmbH
- Markus Wimplinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT
- Publication number 20250104965
- Publication date Mar 27, 2025
- Axcelis Technologies, Inc.
- Wilhelm Platow
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-Vacuum Rotatable RF Component
- Publication number 20250079116
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Michael Mason Carrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING ELECTRET MATERIAL
- Publication number 20250075310
- Publication date Mar 6, 2025
- Toyota Jidosha Kabushiki Kaisha
- Kenichi OKUMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING ASSEMBLY AND AEROSOL GENERATING DEVICE
- Publication number 20250057232
- Publication date Feb 20, 2025
- SHENZHEN FIRST UNION TECHNOLOGY CO., LTD.
- Jiamao LUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION METHOD AND RELATED SYSTEMS
- Publication number 20250043411
- Publication date Feb 6, 2025
- Entegris, Inc.
- Kaitlin J. Lawrence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION THICK FILM RESIST COMPOSITION, A METHOD FOR MANUFA...
- Publication number 20250021004
- Publication date Jan 16, 2025
- MERCK ELECTRONICS LTD.
- TETSUMASA TAKAICHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING SOURCE PRECURSOR DELIVERY SYSTEM
- Publication number 20250003057
- Publication date Jan 2, 2025
- Entegris, Inc.
- Weihang Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROTECTING IR TRANSMITTING WINDOWS AND DOMES FROM EMI
- Publication number 20250008715
- Publication date Jan 2, 2025
- Raytheon Company
- Ralph Korenstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE WAVEGUIDE ION IMPLANTATION TO ADJUST LOCAL REFRACTIVE IND...
- Publication number 20240411085
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Qintao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS OF ELECTRICALLY CONDUCTIVE OPTICAL SEMICONDUC...
- Publication number 20240393697
- Publication date Nov 28, 2024
- Danbury Mission Technologies, LLC
- Bradley Dean Schwartz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPLANT INTO EUV METAL OXIDE PHOTORESIST MODULE TO REDUCE EUV DOSE
- Publication number 20240379376
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ION IMPLANTATION THAT ADJUSTS A TARGET'S TILT ANGLE BASE...
- Publication number 20240347341
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Jung HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS BARRIER FILM AND METHOD FOR MANUFACTURING SAME
- Publication number 20240301213
- Publication date Sep 12, 2024
- LINTEC CORPORATION
- Nana SHINDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20240297201
- Publication date Sep 5, 2024
- SUMCO CORPORATION
- Takeshi Kadono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE SUBSTRATE AND PREPARATION METHOD THEREOF, AND SEMICONDUCT...
- Publication number 20240297069
- Publication date Sep 5, 2024
- ENKRIS SEMICONDUCTOR, INC.
- Kai CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20240282801
- Publication date Aug 22, 2024
- SUMCO CORPORATION
- Takeshi KADONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRESS MANAGEMENT FOR PRECISE SUBSTRATE -TO- SUBSTRATE BONDING
- Publication number 20240266186
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- San-Kuei Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFLUENCE FUNCTION-BASED MITIGATION OF SUBSTRATE DEFORMATION WITH F...
- Publication number 20240266233
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Wonjae Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dose Cup Assembly for an Ion Implanter
- Publication number 20240249908
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Frank Sinclair
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRECISION OXIDATION CONTROL BY ION IMPLANTATION
- Publication number 20240203743
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Supakit Charnvanichborikarn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THREE LAYER RESONATOR COIL FOR LINEAR ACCELERATOR
- Publication number 20240170251
- Publication date May 23, 2024
- Applied Materials, Inc.
- William Herron Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF ENVIRONMENT WITHIN PROCESSING MODULES
- Publication number 20240153787
- Publication date May 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhih-Yu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VOLUME FILLING CASSETTE FOR LOAD LOCK
- Publication number 20240153733
- Publication date May 9, 2024
- Applied Materials, Inc.
- Michael Mason Carrell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION TO MODIFY GLASS LOCALLY FOR OPTICAL DEVICES
- Publication number 20240124969
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Nai-Wen PI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD CARBON COATINGS WITH IMPROVED ADHESION STRENGTH BY MEANS OF HI...
- Publication number 20240093344
- Publication date Mar 21, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Julien KERAUDY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIXED POINT DEFECT DOPING METHOD FOR MICRO-NANOSTRUCTURE, AND NV CE...
- Publication number 20240093345
- Publication date Mar 21, 2024
- UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
- Mengqi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS MIXTURE AS CO-GAS FOR ION IMPLANT
- Publication number 20240043988
- Publication date Feb 8, 2024
- Entegris, Inc.
- Ying Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion implantation device with an energy filter and a support element...
- Publication number 20240038491
- Publication date Feb 1, 2024
- mi2-factory GmbH
- Constantin Csato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NO...
- Publication number 20240035148
- Publication date Feb 1, 2024
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE AND OPERATING METHOD THEREOF
- Publication number 20240038499
- Publication date Feb 1, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuta IWANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ion implantation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for controlled ion implantation

Plasma source Ion implanter with preparation chamber for linear or...

Gold nickel alloy layer having nitrogen atoms inserted therein and...

Insulating structure, method for manufacturing insulating structure...

Gate structure of semiconductor device and method of manufacture

Method for manufacturing a composite structure comprising a thin la...

Toroidal motion enhanced ion source

Vaporizer, ion source and method for generating aluminum-containing...

Guiding member, mechanical system comprising such a guiding member,...

Structure and manufacturing method of surface acoustic wave filter...

Laser radiation system

Method for an ion implantation process employing an ion-collecting...

Method of fluorescent nanodiamonds production

Corrosion-inhibiting protection for watch magnets, in particular ne...

Method for manufacturing LCP-based flexible copper-clad plate, and...

Electrostatic chuck, vacuum processing apparatus, and substrate pro...

Spinning disk with electrostatic clamped platens for ion implantation

High aspect ratio taper improvement using directional deposition

Ion implantation gas supply system

Wafer temperature measurement in an ion implantation system

Semiconductor wafer

Single-layer circuit board, multi-layer circuit board, and manufact...

Composite ion source based upon heterogeneous metal-metal fluoride...

High pressure annealing process for metal containing materials

Ion implantation to modify glass locally for optical devices

Apparatus and methods of electrically conductive optical semiconduc...

Germanium tetraflouride and hydrogen mixtures for an ion implantati...

Treating sulfide glass surfaces and making solid state laminate ele...

High heat dissipating thin film and method for manufacturing same

Method and device for surface treatment of substrates

Patents Applicationslast 30 patents

HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT

In-Vacuum Rotatable RF Component

METHOD FOR MANUFACTURING ELECTRET MATERIAL

HEATING ASSEMBLY AND AEROSOL GENERATING DEVICE

ION IMPLANTATION METHOD AND RELATED SYSTEMS

ION IMPLANTATION THICK FILM RESIST COMPOSITION, A METHOD FOR MANUFA...

SEMICONDUCTOR MANUFACTURING SOURCE PRECURSOR DELIVERY SYSTEM

METHOD FOR PROTECTING IR TRANSMITTING WINDOWS AND DOMES FROM EMI

SELECTIVE WAVEGUIDE ION IMPLANTATION TO ADJUST LOCAL REFRACTIVE IND...

APPARATUS AND METHODS OF ELECTRICALLY CONDUCTIVE OPTICAL SEMICONDUC...

IMPLANT INTO EUV METAL OXIDE PHOTORESIST MODULE TO REDUCE EUV DOSE

METHOD FOR ION IMPLANTATION THAT ADJUSTS A TARGET'S TILT ANGLE BASE...

GAS BARRIER FILM AND METHOD FOR MANUFACTURING SAME

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

COMPOSITE SUBSTRATE AND PREPARATION METHOD THEREOF, AND SEMICONDUCT...

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

STRESS MANAGEMENT FOR PRECISE SUBSTRATE -TO- SUBSTRATE BONDING

INFLUENCE FUNCTION-BASED MITIGATION OF SUBSTRATE DEFORMATION WITH F...

Dose Cup Assembly for an Ion Implanter

METHOD FOR PRECISION OXIDATION CONTROL BY ION IMPLANTATION

THREE LAYER RESONATOR COIL FOR LINEAR ACCELERATOR

CONTROL OF ENVIRONMENT WITHIN PROCESSING MODULES

VOLUME FILLING CASSETTE FOR LOAD LOCK

ION IMPLANTATION TO MODIFY GLASS LOCALLY FOR OPTICAL DEVICES

HARD CARBON COATINGS WITH IMPROVED ADHESION STRENGTH BY MEANS OF HI...

FIXED POINT DEFECT DOPING METHOD FOR MICRO-NANOSTRUCTURE, AND NV CE...

GAS MIXTURE AS CO-GAS FOR ION IMPLANT

Ion implantation device with an energy filter and a support element...

ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NO...

ION SOURCE AND OPERATING METHOD THEREOF