Ion sources Ion guns

Industry

CPC
H01J27/02

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J27/00Ion beam tubes

Current Industry

H01J27/02Ion sources Ion guns

Industries

Patents Grantslast 30 patents

Information Patent Grant
Ion source for controlling decomposition buildup using chlorine co-gas
- Patent number 12,224,149
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Mateo Navarro Goldaraz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam source, substrate process apparatus including the same, an...
- Patent number 12,224,163
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- SeungWan Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for ion beam modulation
- Patent number 12,154,750
- Issue date Nov 26, 2024
- TAE TECHNOLOGIES, INC.
- Vladislav Vekselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam source, surface processing apparatus and surf...
- Patent number 12,125,664
- Issue date Oct 22, 2024
- Oxford Instruments Nanotechnology Tools Limited
- David Pearson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 12,119,203
- Issue date Oct 15, 2024
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Cyclotron having continuously variable energy output
- Patent number 12,106,925
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generation device, ion generation method, and ion generation pr...
- Patent number 12,002,646
- Issue date Jun 4, 2024
- Kabushiki Kaisha Toshiba
- Takeshi Takeuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable support for arc chamber of ion source
- Patent number 12,002,647
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Facial beautifying and care apparatus
- Patent number 11,964,149
- Issue date Apr 23, 2024
- BIBOTING INTERNATIONAL CO., LTD.
- Po-Chang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ionizing an analyte, and apparatus and met...
- Patent number 11,923,184
- Issue date Mar 5, 2024
- PLASMION GMBH
- Jan-Christoph Wolf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
- Patent number 11,894,212
- Issue date Feb 6, 2024
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
System and method for power conversion
- Patent number 11,881,786
- Issue date Jan 23, 2024
- Accion Systems, Inc.
- Paul E. Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crucible design for liquid metal in an ion source
- Patent number 11,854,760
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inner source assembly and associated components
- Patent number 11,848,186
- Issue date Dec 19, 2023
- Micromass UK Limited
- Alastair Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable thickness ion source extraction plate
- Patent number 11,810,746
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for operating a liquid metal-ion source or liquid...
- Patent number 11,705,299
- Issue date Jul 18, 2023
- Technische Universitát Dresden
- Martin Tajmar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power wafer cooling
- Patent number 11,670,483
- Issue date Jun 6, 2023
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extended cathode and repeller life by active management of halogen...
- Patent number 11,664,183
- Issue date May 30, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with single-slot tubular cathode
- Patent number 11,631,567
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static eliminator having offset voltage reduction unit
- Patent number 11,606,855
- Issue date Mar 14, 2023
- Dong IL Technology Ltd.
- Dae Ju Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source having a magnetic field translatable along an axis of th...
- Patent number 11,574,788
- Issue date Feb 7, 2023
- Adelphi Technology, Inc.
- David Lowndes Williams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with multiple bias electrodes
- Patent number 11,545,330
- Issue date Jan 3, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High propellant throughput hall-effect thrusters
- Patent number 11,540,381
- Issue date Dec 27, 2022
- Gabriel F. Benavides
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grid assembly and ion beam etching apparatus
- Patent number 11,508,545
- Issue date Nov 22, 2022
- CANON ANELVA CORPORATION
- Masashi Tsujiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for providing a beam of charged particles
- Patent number 11,501,943
- Issue date Nov 15, 2022
- HIL Applied Medical, Ltd.
- Indranuj Dey
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus and method for operating a heaterless hollow cathode, and...
- Patent number 11,473,568
- Issue date Oct 18, 2022
- Rafael Advanced Defense Systems Ltd.
- Dan Lev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 11,355,314
- Issue date Jun 7, 2022
- Canon Anelva Corporation
- Yasushi Yasumatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for power conversion
- Patent number 11,356,027
- Issue date Jun 7, 2022
- Accion Systems, Inc.
- Paul Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
- Patent number 11,355,303
- Issue date Jun 7, 2022
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for continuously supplying negative ions using...
- Patent number 11,337,296
- Issue date May 17, 2022
- Korea Atomic Energy Research Institute
- Sungryul Huh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20250014861
- Publication date Jan 9, 2025
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...
- Publication number 20250006452
- Publication date Jan 2, 2025
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
- Publication number 20240282543
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source For Controlling Decomposition Buildup Using Chlorine Co-Gas
- Publication number 20240249904
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Mateo Navarro Goldaraz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTRACTION GRID
- Publication number 20240021399
- Publication date Jan 18, 2024
- BÜHLER ALZENAU GMBH
- Holger REUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR POWER CONVERSION
- Publication number 20230417228
- Publication date Dec 28, 2023
- Accion Systems, Inc.
- Paul E. Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL ION SOURCE
- Publication number 20230369003
- Publication date Nov 16, 2023
- ENPULSION GmbH
- Ivanhoe VASILJEVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACCELERATOR AND PARTICLE THERAPY SYSTEM
- Publication number 20230282436
- Publication date Sep 7, 2023
- Hitachi, Ltd
- Chishin HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Long-LifeTime, Short Pulse, High Current Ion Source and Particle Ac...
- Publication number 20230260737
- Publication date Aug 17, 2023
- Mark Derzon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM EXTRACTION APPARATUS AND METHOD FOR CREATING AN ION BEAM
- Publication number 20230230793
- Publication date Jul 20, 2023
- Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Christian HOPF
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CYCLOTRON HAVING CONTINUOUSLY VARIABLE ENERGY OUTPUT
- Publication number 20230207247
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Variable Thickness Ion Source Extraction Plate
- Publication number 20230080083
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Crucible Design For Liquid Metal In An Ion Source
- Publication number 20220406554
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH MULTIPLE BIAS ELECTRODES
- Publication number 20220367138
- Publication date Nov 17, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extended Cathode And Repeller Life By Active Management Of Halogen...
- Publication number 20220359147
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
- Publication number 20220336181
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR POWER CONVERSION
- Publication number 20220271673
- Publication date Aug 25, 2022
- Accion Systems, Inc.
- Paul E. Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20220262598
- Publication date Aug 18, 2022
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
CHARGED PARTICLE BEAM SOURCE, SURFACE PROCESSING APPARATUS AND SURF...
- Publication number 20220216027
- Publication date Jul 7, 2022
- Oxford Instruments Nanotechnology Tools Limited
- David PEARSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ION BEAM MODULATION
- Publication number 20220084774
- Publication date Mar 17, 2022
- TAE TECHNOLOGIES, INC.
- Vladislav Vekselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACIAL BEAUTIFYING AND CARE APPARATUS
- Publication number 20220032050
- Publication date Feb 3, 2022
- Biboting International Co., Ltd.
- Po-Chang LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
- Publication number 20210383995
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATION DEVICE, ION GENERATION METHOD, AND ION GENERATION PR...
- Publication number 20210383996
- Publication date Dec 9, 2021
- Kabushiki Kaisha Toshiba
- Takeshi TAKEUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVE MOLECULAR ION DEPOSITION
- Publication number 20210351003
- Publication date Nov 11, 2021
- Battelle Memorial Institute
- Sandilya V.B. Garimella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING EXTRACTION OPTICS HAVING MOVABLE BLO...
- Publication number 20210305001
- Publication date Sep 30, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING A BEAM OF CHARGED PARTICLES
- Publication number 20210265125
- Publication date Aug 26, 2021
- Indranuj Dey
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
INNER SOURCE ASSEMBLY AND ASSOCIATED COMPONENTS
- Publication number 20210265154
- Publication date Aug 26, 2021
- Micromass UK Limited
- Alastair BOOTH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic Electron Impact Ion Source
- Publication number 20210257180
- Publication date Aug 19, 2021
- PerkinElmer Health Sciences, Inc.
- David G. Welkie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20210104377
- Publication date Apr 8, 2021
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR POWER CONVERSION
- Publication number 20210083587
- Publication date Mar 18, 2021
- Accion Systems, Inc.
- Paul Fogel
- H01 - BASIC ELECTRIC ELEMENTS

Ion sources Ion guns

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion source for controlling decomposition buildup using chlorine co-gas

Ion beam source, substrate process apparatus including the same, an...

Systems, devices, and methods for ion beam modulation

Charged particle beam source, surface processing apparatus and surf...

Ion beam processing apparatus, electrode assembly, and method of cl...

Cyclotron having continuously variable energy output

Ion generation device, ion generation method, and ion generation pr...

Adjustable support for arc chamber of ion source

Facial beautifying and care apparatus

Apparatus and method for ionizing an analyte, and apparatus and met...

Systems, devices, and methods for contaminant resistant insulative...

System and method for power conversion

Crucible design for liquid metal in an ion source

Inner source assembly and associated components

Variable thickness ion source extraction plate

Method and device for operating a liquid metal-ion source or liquid...

High power wafer cooling

Extended cathode and repeller life by active management of halogen...

Ion source with single-slot tubular cathode

Static eliminator having offset voltage reduction unit

Ion source having a magnetic field translatable along an axis of th...

Ion source with multiple bias electrodes

High propellant throughput hall-effect thrusters

Grid assembly and ion beam etching apparatus

Systems and methods for providing a beam of charged particles

Apparatus and method for operating a heaterless hollow cathode, and...

Ion beam processing apparatus, electrode assembly, and method of cl...

System and method for power conversion

Systems, devices, and methods for contaminant resistant insulative...

Systems and methods for continuously supplying negative ions using...

Patents Applicationslast 30 patents

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

Ion Source For Controlling Decomposition Buildup Using Chlorine Co-Gas

EXTRACTION GRID

SYSTEM AND METHOD FOR POWER CONVERSION

LIQUID METAL ION SOURCE

ACCELERATOR AND PARTICLE THERAPY SYSTEM

Long-LifeTime, Short Pulse, High Current Ion Source and Particle Ac...

ION BEAM EXTRACTION APPARATUS AND METHOD FOR CREATING AN ION BEAM

CYCLOTRON HAVING CONTINUOUSLY VARIABLE ENERGY OUTPUT

Variable Thickness Ion Source Extraction Plate

Crucible Design For Liquid Metal In An Ion Source

ION SOURCE WITH MULTIPLE BIAS ELECTRODES

Extended Cathode And Repeller Life By Active Management Of Halogen...

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

SYSTEM AND METHOD FOR POWER CONVERSION

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

CHARGED PARTICLE BEAM SOURCE, SURFACE PROCESSING APPARATUS AND SURF...

SYSTEMS, DEVICES, AND METHODS FOR ION BEAM MODULATION

FACIAL BEAUTIFYING AND CARE APPARATUS

ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE

ION GENERATION DEVICE, ION GENERATION METHOD, AND ION GENERATION PR...

SYSTEMS AND METHODS FOR SELECTIVE MOLECULAR ION DEPOSITION

APPARATUS AND SYSTEM INCLUDING EXTRACTION OPTICS HAVING MOVABLE BLO...

SYSTEMS AND METHODS FOR PROVIDING A BEAM OF CHARGED PARTICLES

INNER SOURCE ASSEMBLY AND ASSOCIATED COMPONENTS

Dynamic Electron Impact Ion Source

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SYSTEM AND METHOD FOR POWER CONVERSION