Ionized cluster beam [ICB] sources

Industry

CPC
H01J2237/0812

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0812Ionized cluster beam [ICB] sources

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming substrate surfaces with exposed cr...
- Patent number 11,735,432
- Issue date Aug 22, 2023
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for modifying the wettability and/or other biocompatibility...
- Patent number 11,698,582
- Issue date Jul 11, 2023
- Exogenesis Corporation
- Joseph B. Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gratings with variable depths formed using planarization for wavegu...
- Patent number 11,579,364
- Issue date Feb 14, 2023
- Meta Platforms Technologies, LLC
- Matthew E. Colburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gratings with variable depths formed using planarization for wavegu...
- Patent number 11,402,578
- Issue date Aug 2, 2022
- Meta Platforms Technologies, LLC
- Matthew E. Colburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,199,769
- Issue date Dec 14, 2021
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Volume scanning electron microscopy of serial thick tissue sections...
- Patent number 11,177,110
- Issue date Nov 16, 2021
- Howard Hughes Medical Institute
- Kenneth J. Hayworth
- G01 - MEASURING TESTING
Information Patent Grant
Gratings with variable etch heights for waveguide displays
- Patent number 11,175,455
- Issue date Nov 16, 2021
- Facebook Technologies, LLC
- Matthew E. Colburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,048,162
- Issue date Jun 29, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for ultra-shallow etching using neutral beam processing base...
- Patent number 11,004,692
- Issue date May 11, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment method for inhibiting platelet attachment and articles tr...
- Patent number 10,971,324
- Issue date Apr 6, 2021
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for neutral beam processing based on gas cluster ion beam te...
- Patent number 10,858,732
- Issue date Dec 8, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compensated location specific processing apparatus and method
- Patent number 10,861,674
- Issue date Dec 8, 2020
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for neutral beam processing based on gas cluster ion beam te...
- Patent number 10,825,685
- Issue date Nov 3, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Gratings with variable depths formed using planarization for wavegu...
- Patent number 10,732,351
- Issue date Aug 4, 2020
- Facebook Technologies, LLC
- Matthew E. Colburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for generating organic molecular cluster ion beam
- Patent number 10,699,868
- Issue date Jun 30, 2020
- Korea Basic Science Institute
- Chang Min Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced high aspect ratio etch performance using accelerated neutr...
- Patent number 10,670,960
- Issue date Jun 2, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gratings with variable etch heights for waveguide displays
- Patent number 10,649,141
- Issue date May 12, 2020
- Facebook Technologies, LLC
- Matthew E. Colburn
- G02 - OPTICS
Information Patent Grant
Methods and apparatus for employing an accelerated neutral beam for...
- Patent number 10,627,352
- Issue date Apr 21, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G01 - MEASURING TESTING
Information Patent Grant
Compensated location specific processing apparatus and method
- Patent number 10,497,540
- Issue date Dec 3, 2019
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 10,409,155
- Issue date Sep 10, 2019
- Exogensis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Nanocluster production device
- Patent number 10,283,333
- Issue date May 7, 2019
- Japan Science and Technology Agency
- Atsushi Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment method for defect reduction in a substrate and substrates...
- Patent number 10,209,617
- Issue date Feb 19, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Method for neutral beam processing based on gas cluster ion beam te...
- Patent number 10,202,684
- Issue date Feb 12, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 10,181,402
- Issue date Jan 15, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Drug delivery system and method of manufacturing thereof
- Patent number 9,795,719
- Issue date Oct 24, 2017
- Stephen M. Blinn
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 9,799,488
- Issue date Oct 24, 2017
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process gas enhancement for beam treatment of a substrate
- Patent number 9,735,019
- Issue date Aug 15, 2017
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for beam deflection in a gas cluster ion beam...
- Patent number 9,540,725
- Issue date Jan 10, 2017
- TEL Epion Inc.
- Kenneth Regan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step location specific process for substrate edge profile cor...
- Patent number 9,502,209
- Issue date Nov 22, 2016
- TEL Epion Inc.
- Hongyu H. Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Switchable gas cluster and atomic ion gun, and method of surface pr...
- Patent number 9,478,388
- Issue date Oct 25, 2016
- VG Systems Limited
- Bryan Barnard
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MIXED GAS CLUSTER ION BEAM GENERATOR AND MASS SPECTROMETER INCLUDIN...
- Publication number 20220157554
- Publication date May 19, 2022
- KOREA BASIC SCIENCE INSTITUTE
- Sang Ju LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS
- Publication number 20210405523
- Publication date Dec 30, 2021
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING SUBSTRATE SURFACES WITH EXPOSED CR...
- Publication number 20210225661
- Publication date Jul 22, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...
- Publication number 20200249565
- Publication date Aug 6, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compensated Location Specific Processing Apparatus And Method
- Publication number 20200066485
- Publication date Feb 27, 2020
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Volume Scanning Electron Microscopy of Serial Thick Tissue Sections...
- Publication number 20190355550
- Publication date Nov 21, 2019
- HOWARD HUGHES MEDICAL INSTITUTE
- Kenneth J. Hayworth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR GENERATING ORGANIC MOLECULAR CLUSTER ION BEAM
- Publication number 20190355542
- Publication date Nov 21, 2019
- KOREA BASIC SCIENCE INSTITUTE
- Chang Min CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRATINGS WITH VARIABLE DEPTHS FORMED USING PLANARIZATION FOR WAVEGU...
- Publication number 20190324202
- Publication date Oct 24, 2019
- Facebook Technologies, LLC
- Matthew E. Colburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...
- Publication number 20190185991
- Publication date Jun 20, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20190171098
- Publication date Jun 6, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
Method for modifying the wettability and/or other biocompatibility...
- Publication number 20190137868
- Publication date May 9, 2019
- Joseph B. Khoury
- B24 - GRINDING POLISHING
Information Patent Application
MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE
- Publication number 20180321583
- Publication date Nov 8, 2018
- Laurence B. Tarrant
- B24 - GRINDING POLISHING
Information Patent Application
ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...
- Publication number 20180292745
- Publication date Oct 11, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR ULTRA-SHALLOW ETCHING USING NEUTRAL BEAM PROCESSING BASE...
- Publication number 20180247831
- Publication date Aug 30, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20180211813
- Publication date Jul 26, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT METHOD FOR INHIBITING PLATELET ATTACHMENT AND ARTICLES TR...
- Publication number 20180190468
- Publication date Jul 5, 2018
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20180090295
- Publication date Mar 29, 2018
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, GAS CLUSTER ION BEAM IRRADIATING DEVICE AND...
- Publication number 20170338114
- Publication date Nov 23, 2017
- TOKYO ELECTRON LIMITED
- Ji Hyun Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID DROPLET INJECTING APPARATUS AND ION SOURCE
- Publication number 20160086758
- Publication date Mar 24, 2016
- Canon Kabushiki Kaisha
- Kota Iwasaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESS GAS ENHANCEMENT FOR BEAM TREATMENT OF A SUBSTRATE
- Publication number 20160071734
- Publication date Mar 10, 2016
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GCIB NOZZLE ASSEMBLY
- Publication number 20160042909
- Publication date Feb 11, 2016
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE COR...
- Publication number 20150348746
- Publication date Dec 3, 2015
- TEL Epion Inc.
- Hongyu H. Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...
- Publication number 20150213996
- Publication date Jul 30, 2015
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLECULAR BEAM ENHANCED GCIB TREATMENT
- Publication number 20150144786
- Publication date May 28, 2015
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...
- Publication number 20140363678
- Publication date Dec 11, 2014
- Sean R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SURFACE SMOOTHING METHOD
- Publication number 20140299465
- Publication date Oct 9, 2014
- Akinobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANGLED GAS CLUSTER ION BEAM
- Publication number 20140295674
- Publication date Oct 2, 2014
- International Business Machines Corporation
- Kangguo Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND APPARATUS FOR HIGH RATE HYDROGEN IMPLANTATION AND CO...
- Publication number 20140256121
- Publication date Sep 11, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MASS SELECTOR, ION IRRADIATION DEVICE, SURFACE ANALYSIS DEVICE,...
- Publication number 20140138533
- Publication date May 22, 2014
- Canon Kabushiki Kaisha
- Kota Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-ALIGNED NOZZLE/SKIMMER
- Publication number 20140123457
- Publication date May 8, 2014
- TEL Epion Inc.
- Robert K. Becker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Ionized cluster beam [ICB] sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for forming substrate surfaces with exposed cr...

Method for modifying the wettability and/or other biocompatibility...

Gratings with variable depths formed using planarization for wavegu...

Gratings with variable depths formed using planarization for wavegu...

Method and apparatus for neutral beam processing based on gas clust...

Volume scanning electron microscopy of serial thick tissue sections...

Gratings with variable etch heights for waveguide displays

Method and apparatus for neutral beam processing based on gas clust...

Method for ultra-shallow etching using neutral beam processing base...

Treatment method for inhibiting platelet attachment and articles tr...

Method for neutral beam processing based on gas cluster ion beam te...

Compensated location specific processing apparatus and method

Method for neutral beam processing based on gas cluster ion beam te...

Gratings with variable depths formed using planarization for wavegu...

Device and method for generating organic molecular cluster ion beam

Enhanced high aspect ratio etch performance using accelerated neutr...

Gratings with variable etch heights for waveguide displays

Methods and apparatus for employing an accelerated neutral beam for...

Compensated location specific processing apparatus and method

Method and apparatus for neutral beam processing based on gas clust...

Nanocluster production device

Treatment method for defect reduction in a substrate and substrates...

Method for neutral beam processing based on gas cluster ion beam te...

Method and apparatus for neutral beam processing based on gas clust...

Drug delivery system and method of manufacturing thereof

Method and apparatus for neutral beam processing based on gas clust...

Process gas enhancement for beam treatment of a substrate

Method and apparatus for beam deflection in a gas cluster ion beam...

Multi-step location specific process for substrate edge profile cor...

Switchable gas cluster and atomic ion gun, and method of surface pr...

Patents Applicationslast 30 patents

MIXED GAS CLUSTER ION BEAM GENERATOR AND MASS SPECTROMETER INCLUDIN...

INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS

METHOD AND APPARATUS FOR FORMING SUBSTRATE SURFACES WITH EXPOSED CR...

METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...

Compensated Location Specific Processing Apparatus And Method

Volume Scanning Electron Microscopy of Serial Thick Tissue Sections...

DEVICE AND METHOD FOR GENERATING ORGANIC MOLECULAR CLUSTER ION BEAM

GRATINGS WITH VARIABLE DEPTHS FORMED USING PLANARIZATION FOR WAVEGU...

METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

Method for modifying the wettability and/or other biocompatibility...

MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE

ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...

METHOD FOR ULTRA-SHALLOW ETCHING USING NEUTRAL BEAM PROCESSING BASE...

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

TREATMENT METHOD FOR INHIBITING PLATELET ATTACHMENT AND ARTICLES TR...

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

PATTERN FORMING METHOD, GAS CLUSTER ION BEAM IRRADIATING DEVICE AND...

LIQUID DROPLET INJECTING APPARATUS AND ION SOURCE

PROCESS GAS ENHANCEMENT FOR BEAM TREATMENT OF A SUBSTRATE

GCIB NOZZLE ASSEMBLY

MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE COR...

METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...

MOLECULAR BEAM ENHANCED GCIB TREATMENT

METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...

SOLID SURFACE SMOOTHING METHOD

ANGLED GAS CLUSTER ION BEAM

TECHNIQUES AND APPARATUS FOR HIGH RATE HYDROGEN IMPLANTATION AND CO...

ION MASS SELECTOR, ION IRRADIATION DEVICE, SURFACE ANALYSIS DEVICE,...

PRE-ALIGNED NOZZLE/SKIMMER