Laminar flow

Industry

CPC
C23C16/45504

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45504Laminar flow

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Liner assemblies for substrate processing systems
- Patent number 12,071,686
- Issue date Aug 27, 2024
- GlobalWafers Co., Ltd.
- Arash Abedijaberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber and process gas flow deflector for use...
- Patent number 12,018,369
- Issue date Jun 25, 2024
- Infineon Technologies AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
- Patent number 11,912,730
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laminar flow MOCVD apparatus for III-nitride films
- Patent number 11,827,977
- Issue date Nov 28, 2023
- INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.
- Kye Jin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
- Patent number 11,784,026
- Issue date Oct 10, 2023
- Samsung Electronics Co., Ltd.
- Woongsik Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous spatial atomic layer deposition process and apparatus fo...
- Patent number 11,773,487
- Issue date Oct 3, 2023
- ALD NANOSOLUTIONS, INC.
- Joseph Allen Spencer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for conducting plasma surface treatment, board treatment...
- Patent number 11,728,142
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentric flow reactor
- Patent number 11,702,761
- Issue date Jul 18, 2023
- AlignedBio AB
- Greg Alcott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus
- Patent number 11,680,316
- Issue date Jun 20, 2023
- Industrial Technology Research Institute
- Kuan-Chou Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner assemblies for substrate processing systems
- Patent number 11,668,006
- Issue date Jun 6, 2023
- GlobalWafers Co., Ltd.
- Arash Abedijaberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,555,246
- Issue date Jan 17, 2023
- Kokusai Electric Corporation
- Hironori Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,488,845
- Issue date Nov 1, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanisms for supplying process gas into wafer process apparatus
- Patent number 11,414,759
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Horng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma reactor for manufacturing synthetic diamond material
- Patent number 11,371,147
- Issue date Jun 28, 2022
- Element Six Technologies Limited
- Steven Edward Coe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and surface treatment method
- Patent number 11,352,696
- Issue date Jun 7, 2022
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Yves Lodewijk Maria Creyghton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner assemblies for substrate processing systems
- Patent number 11,345,996
- Issue date May 31, 2022
- GlobalWafers Co., Ltd.
- Arash Abedijaberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition reactor to grow diamond film by microwave...
- Patent number 11,214,871
- Issue date Jan 4, 2022
- II-VI DELAWARE, INC.
- David Sabens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus
- Patent number 11,208,724
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kazuki Dempoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate
- Patent number 11,111,580
- Issue date Sep 7, 2021
- EUGENE TECHNOLOGY CO., LTD.
- Sung Ho Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective silicon growth for gapfill improvement
- Patent number 11,107,903
- Issue date Aug 31, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- De-Wei Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,015,248
- Issue date May 25, 2021
- Kokusai Electric Corporation
- Hironori Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase reactor and system having exhaust plenum and components t...
- Patent number 11,015,245
- Issue date May 25, 2021
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid distributing device for a thin-film deposition apparatus, rel...
- Patent number 10,982,325
- Issue date Apr 20, 2021
- Picosun Oy
- Juhana Kostamo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentric flow reactor
- Patent number 10,920,340
- Issue date Feb 16, 2021
- AlignedBio AB
- Greg Alcott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner assemblies for substrate processing systems
- Patent number 10,907,251
- Issue date Feb 2, 2021
- GlobalWafers Co., Ltd.
- Arash Abedijaberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 10,844,486
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for assembling tube assembly
- Patent number 10,840,118
- Issue date Nov 17, 2020
- Eugene Technology Co., Ltd.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallel slit torch for making optical fiber preform
- Patent number 10,745,804
- Issue date Aug 18, 2020
- OFS Fitel, LLC
- Lazhar Mazlout
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective silicon growth for gapfill improvement
- Patent number 10,741,674
- Issue date Aug 11, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- De-Wei Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
- Publication number 20240209544
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE
- Publication number 20240124973
- Publication date Apr 18, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS SPATIAL ATOMIC LAYER DEPOSITION PROCESS AND APPARATUS FO...
- Publication number 20230416914
- Publication date Dec 28, 2023
- ALD Nanosolutions, Inc.
- Joseph Allen Spencer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...
- Publication number 20230365601
- Publication date Nov 16, 2023
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...
- Publication number 20230343560
- Publication date Oct 26, 2023
- New Power Plasma Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF
- Publication number 20230313376
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Srikanth Krishnamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHO...
- Publication number 20230265558
- Publication date Aug 24, 2023
- SAMSUNG DISPLAY CO., LTD.
- Choel Min JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD TO ACHIEVE HOMOGENEOUS GROWTH AND DOPING OF SEMIC...
- Publication number 20230257876
- Publication date Aug 17, 2023
- EPILUVAC AB
- Roger NILSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230257879
- Publication date Aug 17, 2023
- GLOBALWAFERS CO., LTD.
- Arash Abedijaberi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...
- Publication number 20230138138
- Publication date May 4, 2023
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20230112057
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hironori SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINAR FLOW MOCVD APPARATUS FOR III-NITRIDE FILMS
- Publication number 20230070825
- Publication date Mar 9, 2023
- INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.
- Kye Jin LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD SYSTEM WITH FLANGE ASSEMBLY FOR FACILITATING UNIFORM AND LAMINA...
- Publication number 20220372622
- Publication date Nov 24, 2022
- MELLANOX TECHNOLOGIES, LTD.
- Elad Mentovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANISMS FOR SUPPLYING PROCESS GAS INTO WAFER PROCESS APPARATUS
- Publication number 20220349056
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Su-Horng LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR FOR GAS TREATMENT OF A SUBSTRATE
- Publication number 20220307138
- Publication date Sep 29, 2022
- SWEGAN AB
- Olof Kordina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHOD FOR ORIENTED DEPOSITION
- Publication number 20220195597
- Publication date Jun 23, 2022
- Canatu Oy
- Ilkka VARJOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20220119943
- Publication date Apr 21, 2022
- Industrial Technology Research Institute
- Kuan-Chou Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20210246554
- Publication date Aug 12, 2021
- Kokusai Electric Corporation
- Hironori SHIMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20210147980
- Publication date May 20, 2021
- GLOBALWAFERS CO., LTD.
- Arash Abedijaberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRIC FLOWER REACTOR
- Publication number 20210130979
- Publication date May 6, 2021
- AlignedBio AB
- Greg Alcott
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...
- Publication number 20210087682
- Publication date Mar 25, 2021
- Picosun Oy
- Juhana KOSTAMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organoamino-Functionalized Cyclic Oligosiloxanes For Deposition Of...
- Publication number 20210017198
- Publication date Jan 21, 2021
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Silicon Growth for Gapfill Improvement
- Publication number 20200373412
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- De-Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective Silicon Growth for Gapfill Improvement
- Publication number 20200152771
- Publication date May 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- De-Wei Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR AND METHOD FOR PRODUCTION OF SILICON
- Publication number 20200102224
- Publication date Apr 2, 2020
- Dynatec Engineering AS
- Josef FILTVEDT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF
- Publication number 20200056286
- Publication date Feb 20, 2020
- ASM IP HOLDING, B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRIC FLOWER REACTOR
- Publication number 20200032416
- Publication date Jan 30, 2020
- SOL VOLTAICS AB
- Greg Alcott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS WITH MULTI-ZONE INJECTION BLOCK
- Publication number 20190316258
- Publication date Oct 17, 2019
- Bojan Mitrovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE GAS DISTRIBUTION ASSEMBLY
- Publication number 20190309419
- Publication date Oct 10, 2019
- Applied Materials, Inc.
- Sanjeev BALUJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Laminar flow

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Liner assemblies for substrate processing systems

Chamber architecture for epitaxial deposition and advanced epitaxia...

Substrate processing chamber and process gas flow deflector for use...

Organoamino-functionalized cyclic oligosiloxanes for deposition of...

Laminar flow MOCVD apparatus for III-nitride films

Substrate processing apparatus, material layer deposition apparatus...

Continuous spatial atomic layer deposition process and apparatus fo...

Apparatus for conducting plasma surface treatment, board treatment...

Concentric flow reactor

Deposition apparatus

Liner assemblies for substrate processing systems

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Mechanisms for supplying process gas into wafer process apparatus

Microwave plasma reactor for manufacturing synthetic diamond material

Plasma source and surface treatment method

Liner assemblies for substrate processing systems

Chemical vapor deposition reactor to grow diamond film by microwave...

Film forming apparatus

Apparatus for processing substrate

Selective silicon growth for gapfill improvement

Substrate processing apparatus and method of manufacturing semicond...

Gas-phase reactor and system having exhaust plenum and components t...

Fluid distributing device for a thin-film deposition apparatus, rel...

Concentric flow reactor

Liner assemblies for substrate processing systems

Semiconductor processing reactor and components thereof

Substrate processing apparatus and method for assembling tube assembly

Parallel slit torch for making optical fiber preform

Selective silicon growth for gapfill improvement

Patents Applicationslast 30 patents

Batch Mode Silicon Carbide Epitaxial Reactor

CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...

METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE

CONTINUOUS SPATIAL ATOMIC LAYER DEPOSITION PROCESS AND APPARATUS FO...

ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...

APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF

ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHO...

DEVICE AND METHOD TO ACHIEVE HOMOGENEOUS GROWTH AND DOPING OF SEMIC...

LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS

ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...

LAMINAR FLOW MOCVD APPARATUS FOR III-NITRIDE FILMS

CVD SYSTEM WITH FLANGE ASSEMBLY FOR FACILITATING UNIFORM AND LAMINA...

MECHANISMS FOR SUPPLYING PROCESS GAS INTO WAFER PROCESS APPARATUS

REACTOR FOR GAS TREATMENT OF A SUBSTRATE

APPARATUSES AND METHOD FOR ORIENTED DEPOSITION

DEPOSITION APPARATUS

Substrate Processing Apparatus and Method of Manufacturing Semicond...

LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS

CONCENTRIC FLOWER REACTOR

FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...

Organoamino-Functionalized Cyclic Oligosiloxanes For Deposition Of...

Selective Silicon Growth for Gapfill Improvement

Selective Silicon Growth for Gapfill Improvement

REACTOR AND METHOD FOR PRODUCTION OF SILICON

SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF

CONCENTRIC FLOWER REACTOR

CHEMICAL VAPOR DEPOSITION APPARATUS WITH MULTI-ZONE INJECTION BLOCK

HIGH TEMPERATURE GAS DISTRIBUTION ASSEMBLY