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CPC
C23C16/45504
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/45504
Laminar flow
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Patents Grants
last 30 patents
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Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
Patent number
11,912,730
Issue date
Feb 27, 2024
VERSUM MATERIALS US, LLC
Matthew R. MacDonald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Laminar flow MOCVD apparatus for III-nitride films
Patent number
11,827,977
Issue date
Nov 28, 2023
INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.
Kye Jin Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
Patent number
11,784,026
Issue date
Oct 10, 2023
Samsung Electronics Co., Ltd.
Woongsik Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Continuous spatial atomic layer deposition process and apparatus fo...
Patent number
11,773,487
Issue date
Oct 3, 2023
ALD NANOSOLUTIONS, INC.
Joseph Allen Spencer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for conducting plasma surface treatment, board treatment...
Patent number
11,728,142
Issue date
Aug 15, 2023
Samsung Electronics Co., Ltd.
Junyoung Oh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Concentric flow reactor
Patent number
11,702,761
Issue date
Jul 18, 2023
AlignedBio AB
Greg Alcott
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition apparatus
Patent number
11,680,316
Issue date
Jun 20, 2023
Industrial Technology Research Institute
Kuan-Chou Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liner assemblies for substrate processing systems
Patent number
11,668,006
Issue date
Jun 6, 2023
GlobalWafers Co., Ltd.
Arash Abedijaberi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,555,246
Issue date
Jan 17, 2023
Kokusai Electric Corporation
Hironori Shimada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
11,488,845
Issue date
Nov 1, 2022
EUGENE TECHNOLOGY CO., LTD.
Cha Young Yoo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mechanisms for supplying process gas into wafer process apparatus
Patent number
11,414,759
Issue date
Aug 16, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Su-Horng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Microwave plasma reactor for manufacturing synthetic diamond material
Patent number
11,371,147
Issue date
Jun 28, 2022
Element Six Technologies Limited
Steven Edward Coe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma source and surface treatment method
Patent number
11,352,696
Issue date
Jun 7, 2022
Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
Yves Lodewijk Maria Creyghton
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liner assemblies for substrate processing systems
Patent number
11,345,996
Issue date
May 31, 2022
GlobalWafers Co., Ltd.
Arash Abedijaberi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition reactor to grow diamond film by microwave...
Patent number
11,214,871
Issue date
Jan 4, 2022
II-VI DELAWARE, INC.
David Sabens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus
Patent number
11,208,724
Issue date
Dec 28, 2021
Tokyo Electron Limited
Kazuki Dempoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for processing substrate
Patent number
11,111,580
Issue date
Sep 7, 2021
EUGENE TECHNOLOGY CO., LTD.
Sung Ho Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective silicon growth for gapfill improvement
Patent number
11,107,903
Issue date
Aug 31, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
De-Wei Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,015,248
Issue date
May 25, 2021
Kokusai Electric Corporation
Hironori Shimada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas-phase reactor and system having exhaust plenum and components t...
Patent number
11,015,245
Issue date
May 25, 2021
ASM IP Holding B.V.
Eric Hill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fluid distributing device for a thin-film deposition apparatus, rel...
Patent number
10,982,325
Issue date
Apr 20, 2021
Picosun Oy
Juhana Kostamo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Concentric flow reactor
Patent number
10,920,340
Issue date
Feb 16, 2021
AlignedBio AB
Greg Alcott
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liner assemblies for substrate processing systems
Patent number
10,907,251
Issue date
Feb 2, 2021
GlobalWafers Co., Ltd.
Arash Abedijaberi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing reactor and components thereof
Patent number
10,844,486
Issue date
Nov 24, 2020
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method for assembling tube assembly
Patent number
10,840,118
Issue date
Nov 17, 2020
Eugene Technology Co., Ltd.
Cha Young Yoo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Parallel slit torch for making optical fiber preform
Patent number
10,745,804
Issue date
Aug 18, 2020
OFS Fitel, LLC
Lazhar Mazlout
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective silicon growth for gapfill improvement
Patent number
10,741,674
Issue date
Aug 11, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
De-Wei Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing method and processing apparatus
Patent number
10,676,823
Issue date
Jun 9, 2020
Tokyo Electron Limited
Ryota Sakane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas flow control for EPI thickness uniformity improvement
Patent number
10,607,837
Issue date
Mar 31, 2020
Applied Materials, Inc.
Masato Ishii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Periphery purge shutter and flow control systems and methods
Patent number
10,570,510
Issue date
Feb 25, 2020
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE
Publication number
20240124973
Publication date
Apr 18, 2024
Shin-Etsu Chemical Co., Ltd.
Hiroshi HASHIGAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONTINUOUS SPATIAL ATOMIC LAYER DEPOSITION PROCESS AND APPARATUS FO...
Publication number
20230416914
Publication date
Dec 28, 2023
ALD Nanosolutions, Inc.
Joseph Allen Spencer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...
Publication number
20230365601
Publication date
Nov 16, 2023
VERSUM MATERIALS US, LLC
Matthew R. MacDonald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...
Publication number
20230343560
Publication date
Oct 26, 2023
New Power Plasma Co., Ltd.
Junyoung Oh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF
Publication number
20230313376
Publication date
Oct 5, 2023
Applied Materials, Inc.
Srikanth Krishnamurthy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHO...
Publication number
20230265558
Publication date
Aug 24, 2023
SAMSUNG DISPLAY CO., LTD.
Choel Min JANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE AND METHOD TO ACHIEVE HOMOGENEOUS GROWTH AND DOPING OF SEMIC...
Publication number
20230257876
Publication date
Aug 17, 2023
EPILUVAC AB
Roger NILSSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20230257879
Publication date
Aug 17, 2023
GLOBALWAFERS CO., LTD.
Arash Abedijaberi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...
Publication number
20230138138
Publication date
May 4, 2023
VERSUM MATERIALS US, LLC
Matthew R. MacDonald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
Publication number
20230112057
Publication date
Apr 13, 2023
Kokusai Electric Corporation
Hironori SHIMADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LAMINAR FLOW MOCVD APPARATUS FOR III-NITRIDE FILMS
Publication number
20230070825
Publication date
Mar 9, 2023
INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.
Kye Jin LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD SYSTEM WITH FLANGE ASSEMBLY FOR FACILITATING UNIFORM AND LAMINA...
Publication number
20220372622
Publication date
Nov 24, 2022
MELLANOX TECHNOLOGIES, LTD.
Elad Mentovich
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MECHANISMS FOR SUPPLYING PROCESS GAS INTO WAFER PROCESS APPARATUS
Publication number
20220349056
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Su-Horng LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTOR FOR GAS TREATMENT OF A SUBSTRATE
Publication number
20220307138
Publication date
Sep 29, 2022
SWEGAN AB
Olof Kordina
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUSES AND METHOD FOR ORIENTED DEPOSITION
Publication number
20220195597
Publication date
Jun 23, 2022
Canatu Oy
Ilkka VARJOS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS
Publication number
20220119943
Publication date
Apr 21, 2022
Industrial Technology Research Institute
Kuan-Chou Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
Publication number
20210246554
Publication date
Aug 12, 2021
Kokusai Electric Corporation
Hironori SHIMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20210147980
Publication date
May 20, 2021
GLOBALWAFERS CO., LTD.
Arash Abedijaberi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONCENTRIC FLOWER REACTOR
Publication number
20210130979
Publication date
May 6, 2021
AlignedBio AB
Greg Alcott
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...
Publication number
20210087682
Publication date
Mar 25, 2021
Picosun Oy
Juhana KOSTAMO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Organoamino-Functionalized Cyclic Oligosiloxanes For Deposition Of...
Publication number
20210017198
Publication date
Jan 21, 2021
VERSUM MATERIALS US, LLC
Matthew R. MacDonald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Selective Silicon Growth for Gapfill Improvement
Publication number
20200373412
Publication date
Nov 26, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
De-Wei Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective Silicon Growth for Gapfill Improvement
Publication number
20200152771
Publication date
May 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
De-Wei Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTOR AND METHOD FOR PRODUCTION OF SILICON
Publication number
20200102224
Publication date
Apr 2, 2020
Dynatec Engineering AS
Josef FILTVEDT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF
Publication number
20200056286
Publication date
Feb 20, 2020
ASM IP HOLDING, B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONCENTRIC FLOWER REACTOR
Publication number
20200032416
Publication date
Jan 30, 2020
SOL VOLTAICS AB
Greg Alcott
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS WITH MULTI-ZONE INJECTION BLOCK
Publication number
20190316258
Publication date
Oct 17, 2019
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH TEMPERATURE GAS DISTRIBUTION ASSEMBLY
Publication number
20190309419
Publication date
Oct 10, 2019
Applied Materials, Inc.
Sanjeev BALUJA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Chemical Vapor Deposition Reactor to Grow Diamond Film by Microwave...
Publication number
20190242016
Publication date
Aug 8, 2019
II-VI Incorporated
David Sabens
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20190136375
Publication date
May 9, 2019
GLOBALWAFERS CO., LTD.
Arash Abedijaberi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...