TREA

Lateral isolation by selective oxidation of silicon

Follow

Industry

  • CPC
  • H01L21/76281
This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/76281Lateral isolation by selective oxidation of silicon
Industries