Layers comprising fluoro (hydro)carbon compounds

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CPC
H01L21/3127

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3127Layers comprising fluoro (hydro)carbon compounds

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 9,972,583
- Issue date May 15, 2018
- SPTS Technologies Limited
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method of fabricating thin film pattern
- Patent number 9,091,873
- Issue date Jul 28, 2015
- LG Display Co., Ltd.
- Jin Wuk Kim
- G02 - OPTICS
Information Patent Grant
Composition for forming pattern and in-plane printing method using...
- Patent number 9,000,064
- Issue date Apr 7, 2015
- LG Display Co., Ltd.
- Jin-Wuk Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Composition for forming pattern and in-plane printing method using...
- Patent number 8,822,125
- Issue date Sep 2, 2014
- LG Display Co., Ltd.
- Jin-Wuk Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plasma treatment method
- Patent number 8,778,810
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Hiroyuki Takaba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing with shrink etching step
- Patent number 8,642,483
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 8,557,706
- Issue date Oct 15, 2013
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor die and a semiconductor de...
- Patent number 8,518,805
- Issue date Aug 27, 2013
- 3M Innovative Properties Company
- Kwang-Jae Jo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 8,501,277
- Issue date Aug 6, 2013
- Applied Microstructures, Inc.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electron beam processing device and method using carbon nanotube em...
- Patent number 8,414,787
- Issue date Apr 9, 2013
- Micron Technology, Inc.
- Neal R. Rueger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabricating TFT having fluorocarbon-containing layer
- Patent number 8,222,073
- Issue date Jul 17, 2012
- Xerox Corporation
- Yiliang Wu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interlayer insulating film, interconnection structure, and methods...
- Patent number 8,193,642
- Issue date Jun 5, 2012
- Tohoku University
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistor
- Patent number 8,178,397
- Issue date May 15, 2012
- Mitsubishi Chemical Corporation
- Shinji Aramaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
De-fluoridation process
- Patent number 8,172,948
- Issue date May 8, 2012
- Lam Research Corporation
- Dongho Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crosslinkable fluorinated aromatic prepolymer and its uses
- Patent number 8,168,742
- Issue date May 1, 2012
- Asahi Glass Company, Limited
- Shunsuke Yokotsuka
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Fabrication method of a semiconductor device and a semiconductor de...
- Patent number 8,124,523
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Noble metal barrier for fluorine-doped carbon films
- Patent number 8,119,518
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Kenichi Nishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 8,105,949
- Issue date Jan 31, 2012
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silane monomers and siloxane polymers for semiconductor optoelectro...
- Patent number 7,955,660
- Issue date Jun 7, 2011
- Silecs Oy
- Juha T. Rantala
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Interlayer insulating film, wiring structure and electronic device...
- Patent number 7,923,819
- Issue date Apr 12, 2011
- National Iniversity Corporation Tohoku University
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method therefor
- Patent number 7,902,641
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Yoshiyuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine doped carbon films produced by modification by radicals
- Patent number 7,875,549
- Issue date Jan 25, 2011
- Tokyo Electron Limited
- Kenichi Nishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor device and film deposition sy...
- Patent number 7,803,705
- Issue date Sep 28, 2010
- Tokyo Electron Limited
- Yasuo Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing the surface roughness of spin coated polymer films
- Patent number 7,800,203
- Issue date Sep 21, 2010
- Intel Corporation
- Michael J. Leeson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for plasma assisted deposition
- Patent number 7,779,784
- Issue date Aug 24, 2010
- Applied Materials, Inc.
- Chen-An Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate for electronic device capable of suppressing fluorine ato...
- Patent number 7,776,736
- Issue date Aug 17, 2010
- Tokyo Electron Limited
- Yasuo Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low dielectric (low k) barrier films with oxygen doping by plasma-e...
- Patent number 7,745,328
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Kang Sub Yim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced cyclic layer deposition process for barrier layers
- Patent number 7,732,325
- Issue date Jun 8, 2010
- Applied Materials, Inc.
- Michael X. Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic beam processing device and method using carbon nanotube...
- Patent number 7,718,080
- Issue date May 18, 2010
- Micron Technology, Inc.
- Neal R. Rueger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method for manufacturing semiconductor device...
- Patent number 7,704,893
- Issue date Apr 27, 2010
- Tokyo Eectron Limited
- Yasuo Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITION FOR FORMING PATTERN AND IN-PLANE PRINTING METHOD USING...
- Publication number 20140367358
- Publication date Dec 18, 2014
- Jin Wuk Kim
- B82 - NANO-TECHNOLOGY
Information Patent Application
MOISTURE BARRIER COATINGS
- Publication number 20130320509
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES
- Publication number 20130320510
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLASMA TREATMENT METHOD
- Publication number 20120098147
- Publication date Apr 26, 2012
- TOKYO ELECTRON LIMITED
- Hiroyuki Takaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20120094495
- Publication date Apr 19, 2012
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF FABRICATING THIN FILM PATTERN
- Publication number 20110206847
- Publication date Aug 25, 2011
- Jin Wuk KIM
- G02 - OPTICS
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DIE AND A SEMICONDUCTOR DE...
- Publication number 20110175243
- Publication date Jul 21, 2011
- 3M Innovative Properties Company
- Kwang-Jae Jo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERLAYER INSULATING FILM, INTERCONNECTION STRUCTURE, AND METHODS...
- Publication number 20110140276
- Publication date Jun 16, 2011
- TOHOKU UNIVERSITY
- TADAHIRO OHMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE DOPED CARBON FILMS PRODUCED BY MODIFICATION BY RADICALS
- Publication number 20100317188
- Publication date Dec 16, 2010
- TOKYO ELECTON LIMITED
- Kenichi Nishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PURIFYING UNSATURATED FLUOROCARBON COMPOUND, METHOD FOR...
- Publication number 20100273326
- Publication date Oct 28, 2010
- Masahiro Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, STORAGE MEDIUM AND SEM...
- Publication number 20100244204
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Takaaki Matsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM PROCESSING DEVICE AND METHOD USING CARBON NANOTUBE E...
- Publication number 20100221922
- Publication date Sep 2, 2010
- Neal R. Rueger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20100216314
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Masanobu HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION FOR SPRAY COATING, METHOD...
- Publication number 20100193971
- Publication date Aug 5, 2010
- Toshio Banba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEGATIVE-TYPE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING...
- Publication number 20100159217
- Publication date Jun 24, 2010
- Hitachi Chemical DuPont MicroSystems, Ltd.
- Tomonori Minegishi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
CROSSLINKABLE FLUORINATED AROMATIC PREPOLYMER AND ITS USES
- Publication number 20100144914
- Publication date Jun 10, 2010
- ASAHI GLASS COMPANY, LIMITED
- Shunsuke Yokotsuka
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Silane monomers and siloxane polymers for semiconductor optoelectro...
- Publication number 20100136798
- Publication date Jun 3, 2010
- Juha T. Rantala
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF...
- Publication number 20100101834
- Publication date Apr 29, 2010
- NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, STORAGE MEDIUM AND SEM...
- Publication number 20100090315
- Publication date Apr 15, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Horigome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC FIELD-EFFECT TRANSISTORS WITH POLYMERIC GATE DIELECTRIC AND...
- Publication number 20100044687
- Publication date Feb 25, 2010
- ETH ZURICH, ETH TRANSFER
- Wolfgang Kalb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERLAYER INSULATING FILM, WIRING STRUCTURE AND ELECTRONIC DEVICE...
- Publication number 20100032844
- Publication date Feb 11, 2010
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION METHOD OF A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DE...
- Publication number 20100025856
- Publication date Feb 4, 2010
- TOKYO ELECTRON LIMITED
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device and manufacturing method therefor
- Publication number 20100019356
- Publication date Jan 28, 2010
- TOKYO ELECTRON LIMITED
- Yoshiyuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20100009542
- Publication date Jan 14, 2010
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING FLUORINE-CONTAINING DIELECTRIC FILM
- Publication number 20100003833
- Publication date Jan 7, 2010
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20090134518
- Publication date May 28, 2009
- TOKYO ELECTRON LIMITED
- Masahiro Horigome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED CYCLIC LAYER DEPOSITION PROCESS FOR BARRIER LAYERS
- Publication number 20090111264
- Publication date Apr 30, 2009
- MICHAEL X. YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Interlayer Insulating Film, Interconnection Structure, and Methods...
- Publication number 20090108413
- Publication date Apr 30, 2009
- Tohoku University
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIELD EFFECT TRANSISTOR
- Publication number 20090072224
- Publication date Mar 19, 2009
- MITSUBISHI CHEMICAL CORPORATION
- Shinji Aramaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW DIELECTRIC (LOW K) BARRIER FILMS WITH OXYGEN DOPING BY PLASMA-E...
- Publication number 20090053902
- Publication date Feb 26, 2009
- Kang Sub Yim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Layers comprising fluoro (hydro)carbon compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Durable, heat-resistant multi-layer coatings and coated articles

Apparatus and method of fabricating thin film pattern

Composition for forming pattern and in-plane printing method using...

Composition for forming pattern and in-plane printing method using...

Plasma treatment method

Substrate processing with shrink etching step

Substrate processing method

Method for manufacturing a semiconductor die and a semiconductor de...

Durable, heat-resistant multi-layer coatings and coated articles

Electron beam processing device and method using carbon nanotube em...

Fabricating TFT having fluorocarbon-containing layer

Interlayer insulating film, interconnection structure, and methods...

Field effect transistor

De-fluoridation process

Crosslinkable fluorinated aromatic prepolymer and its uses

Fabrication method of a semiconductor device and a semiconductor de...

Noble metal barrier for fluorine-doped carbon films

Substrate processing method

Silane monomers and siloxane polymers for semiconductor optoelectro...

Interlayer insulating film, wiring structure and electronic device...

Semiconductor device and manufacturing method therefor

Fluorine doped carbon films produced by modification by radicals

Manufacturing method of semiconductor device and film deposition sy...

Method of reducing the surface roughness of spin coated polymer films

Apparatus and method for plasma assisted deposition

Substrate for electronic device capable of suppressing fluorine ato...

Low dielectric (low k) barrier films with oxygen doping by plasma-e...

Plasma-enhanced cyclic layer deposition process for barrier layers

Electronic beam processing device and method using carbon nanotube...

Semiconductor device, method for manufacturing semiconductor device...

Patents Applicationslast 30 patents

COMPOSITION FOR FORMING PATTERN AND IN-PLANE PRINTING METHOD USING...

MOISTURE BARRIER COATINGS

DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES

PLASMA TREATMENT METHOD

SUBSTRATE PROCESSING METHOD

APPARATUS AND METHOD OF FABRICATING THIN FILM PATTERN

METHOD FOR MANUFACTURING A SEMICONDUCTOR DIE AND A SEMICONDUCTOR DE...

INTERLAYER INSULATING FILM, INTERCONNECTION STRUCTURE, AND METHODS...

FLUORINE DOPED CARBON FILMS PRODUCED BY MODIFICATION BY RADICALS

METHOD FOR PURIFYING UNSATURATED FLUOROCARBON COMPOUND, METHOD FOR...

FILM FORMING METHOD, FILM FORMING APPARATUS, STORAGE MEDIUM AND SEM...

ELECTRON BEAM PROCESSING DEVICE AND METHOD USING CARBON NANOTUBE E...

SUBSTRATE PROCESSING METHOD

POSITIVE PHOTOSENSITIVE RESIN COMPOSITION FOR SPRAY COATING, METHOD...

NEGATIVE-TYPE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING...

CROSSLINKABLE FLUORINATED AROMATIC PREPOLYMER AND ITS USES

Silane monomers and siloxane polymers for semiconductor optoelectro...

INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF...

FILM FORMING METHOD, FILM FORMING APPARATUS, STORAGE MEDIUM AND SEM...

ORGANIC FIELD-EFFECT TRANSISTORS WITH POLYMERIC GATE DIELECTRIC AND...

INTERLAYER INSULATING FILM, WIRING STRUCTURE AND ELECTRONIC DEVICE...

FABRICATION METHOD OF A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DE...

Semiconductor device and manufacturing method therefor

SUBSTRATE PROCESSING METHOD

METHOD OF FORMING FLUORINE-CONTAINING DIELECTRIC FILM

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

PLASMA-ENHANCED CYCLIC LAYER DEPOSITION PROCESS FOR BARRIER LAYERS

Interlayer Insulating Film, Interconnection Structure, and Methods...

FIELD EFFECT TRANSISTOR

LOW DIELECTRIC (LOW K) BARRIER FILMS WITH OXYGEN DOPING BY PLASMA-E...