Membership
Tour
Register
Log in
Layout for increasing efficiency, for compensating imaging errors
Follow
Industry
CPC
G03F7/70433
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/70433
Layout for increasing efficiency, for compensating imaging errors
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Arrangement apparatus and arrangement method
Patent number
12,112,962
Issue date
Oct 8, 2024
Shinkawa Ltd.
Kohei Seyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask topology optimization method and system for surface plasmon ne...
Patent number
12,092,960
Issue date
Sep 17, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Geometric mask rule check with favorable and unfavorable zones
Patent number
12,019,974
Issue date
Jun 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Ming Chang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for generating and analyzing roughness measuremen...
Patent number
11,996,265
Issue date
May 28, 2024
Fractilla, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of fabricating reticle
Patent number
11,940,737
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsueh-Yi Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preserving hierarchical structure information within a design file
Patent number
11,906,905
Issue date
Feb 20, 2024
Applied Materials, Inc.
Chung-Shin Kang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for extreme ultraviolet lithography mask treatment
Patent number
11,906,897
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stochastic-aware lithographic models for mask synthesis
Patent number
11,900,042
Issue date
Feb 13, 2024
Synopsys, Inc.
Kevin Dean Lucas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Proximity effect correction in electron beam lithography
Patent number
11,899,373
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Geometrically shaped components in an assembly for a transfer print...
Patent number
11,829,074
Issue date
Nov 28, 2023
X-FAB SEMICONDUCTOR FOUNDRIES GMBH
Ralf Lerner
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,809,087
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-Chieh Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determining the combination of patterns to be applied to a substrat...
Patent number
11,747,738
Issue date
Sep 5, 2023
ASML Netherlands B.V.
Coen Adrianus Verschuren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical mode optimization for wafer inspection
Patent number
11,748,551
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Bing-Siang Chao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Geometric mask rule check with favorable and unfavorable zones
Patent number
11,714,951
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Ming Chang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern centric process control
Patent number
11,694,009
Issue date
Jul 4, 2023
Anchor Semiconductor, Inc.
Chenmin Hu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for generating and updating position distribution...
Patent number
11,687,065
Issue date
Jun 27, 2023
Industrial Technology Research Institute
Shau-Yin Tseng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of fabricating micro-nano structure
Patent number
11,675,273
Issue date
Jun 13, 2023
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Simulation-assisted alignment between metrology image and design
Patent number
11,669,018
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of wafer layout and exposure system of lithography machine
Patent number
11,657,204
Issue date
May 23, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Wei Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Proximity effect correction in electron beam lithography
Patent number
11,556,058
Issue date
Jan 17, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for optimizing a lithography exposure process
Patent number
11,531,279
Issue date
Dec 20, 2022
Onto Innovation Inc.
Elvino da Silveira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
In-die metrology methods and systems for process control
Patent number
11,527,405
Issue date
Dec 13, 2022
ASML Netherlands B.V.
Lingling Pu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of designing mask layout based on error pattern and method o...
Patent number
11,506,983
Issue date
Nov 22, 2022
Samsung Electronics Co., Ltd.
Hungbae Ahn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure method and exposure apparatus
Patent number
11,500,299
Issue date
Nov 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Yao Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for scatterometric single-wavelength measuremen...
Patent number
11,454,894
Issue date
Sep 27, 2022
KLA Corporation
Alon Yagil
G01 - MEASURING TESTING
Information
Patent Grant
Patterning process improvement involving optical aberration
Patent number
11,422,472
Issue date
Aug 23, 2022
ASML Netherlands B.V.
Paulus Jacobus Maria Van Adrichem
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method, apparatus and electronic device for Hessian-free photolitho...
Patent number
11,366,952
Issue date
Jun 21, 2022
SHENZHEN JINGYUAN INFORMATION TECHNOLOGY CO., LTD
Ming Ding
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical mode optimization for wafer inspection
Patent number
11,347,926
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Bing-Siang Chao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology apparatus
Patent number
11,300,889
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Leon Paul Van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Compositions containing an etheramine
Patent number
11,274,267
Issue date
Mar 15, 2022
The Procter & Gamble Company
Stefano Scialla
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
GEOMETRIC MASK RULE CHECK WITH FAVORABLE AND UNFAVORABLE ZONES
Publication number
20240311545
Publication date
Sep 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Ming Chang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20240312757
Publication date
Sep 19, 2024
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MASK TOPOLOGY OPTIMIZATION METHOD AND SYSTEM FOR SURFACE PLASMON NE...
Publication number
20240264535
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DIGITAL DIRECT RECORDING DEVICE COMPRISING REAL TIME ANALYSIS AND C...
Publication number
20240160111
Publication date
May 16, 2024
Visitech Lithography AS
Endre Kirkhorn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR OPTIMIZING LITHOGRAPHY QUALITY, ELECTRONIC...
Publication number
20240005064
Publication date
Jan 4, 2024
Institute of Microelectronics, Chinese Academy of Sciences
Lihong Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230384688
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kai-Chieh CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR CORRECTING PLACEMENT ERROR OF PHOTOMASK
Publication number
20230375917
Publication date
Nov 23, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xiuxuan ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROXIMITY EFFECT CORRECTION IN ELECTRON BEAM LITHOGRAPHY
Publication number
20230375941
Publication date
Nov 23, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Wen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optical Mode Optimization for Wafer Inspection
Publication number
20230367951
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Bing-Siang Chao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, S...
Publication number
20230341782
Publication date
Oct 26, 2023
Canon Kabushiki Kaisha
Atsushi Kusaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Geometric Mask Rule Check With Favorable and Unfavorable Zones
Publication number
20230325579
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Ming Chang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROXIMITY EFFECT CORRECTION IN ELECTRON BEAM LITHOGRAPHY
Publication number
20230168589
Publication date
Jun 1, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wen LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK LAYOUT DESIGN METHOD, MASK AND INTEGRATED CIRCUIT MANUFACTURIN...
Publication number
20230161937
Publication date
May 25, 2023
Samsung Electronics Co., Ltd.
Somin Cheon
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR DETERMINING AND/OR PREDICTING UNBIASED PARAME...
Publication number
20230134093
Publication date
May 4, 2023
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF FABRICATING MICRO-NANO STRUCTURE
Publication number
20230132100
Publication date
Apr 27, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL
Publication number
20230076943
Publication date
Mar 9, 2023
ASML NETHERLANDS B.V.
Lingling PU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
Publication number
20230076566
Publication date
Mar 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Yao LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Geometric Mask Rule Check With Favorable and Unfavorable Zones
Publication number
20220365419
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Ming Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRESERVING HIERARCHICAL STRUCTURE INFORMATION WITHIN A DESIGN FILE
Publication number
20220365443
Publication date
Nov 17, 2022
Applied Materials, Inc.
Chung-Shin KANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTIMIZATION OF A DIGITAL PATTERN FILE FOR A DIGITAL LITHOGRAPHY DE...
Publication number
20220367438
Publication date
Nov 17, 2022
Applied Materials, Inc.
Chung-Shin KANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR SELECTING PHOTOLITHOGRAPHY PROCESSES
Publication number
20220357669
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Ming CHANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Optical Mode Optimization for Wafer Inspection
Publication number
20220284167
Publication date
Sep 8, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Bing-Siang Chao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
STOCHASTIC-AWARE LITHOGRAPHIC MODELS FOR MASK SYNTHESIS
Publication number
20220146945
Publication date
May 12, 2022
Synopsys, Inc.
Kevin Dean Lucas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20220146947
Publication date
May 12, 2022
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR SCATTEROMETRIC SINGLE-WAVELENGTH MEASUREMEN...
Publication number
20220082950
Publication date
Mar 17, 2022
KLA Corporation
Alon Yagil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS
Publication number
20220075282
Publication date
Mar 10, 2022
Onto Innovation, Inc.
Elvino da Silveira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DESIGNING MASK LAYOUT BASED ON ERROR PATTERN AND METHOD O...
Publication number
20220043359
Publication date
Feb 10, 2022
Samsung Electronics Co., Ltd.
Hungbae AHN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, APPARATUS AND ELECTRONIC DEVICE FOR HESSIAN-FREE PHOTOLITHO...
Publication number
20220027547
Publication date
Jan 27, 2022
SHENZHEN JINGYUAN INFORMATION TECHNOLOGY CO.,LTD
Ming DING
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OVERLAY COMPENSATION METHOD, EXPOSURE SYSTEM, SERVER AND READABLE S...
Publication number
20210397101
Publication date
Dec 23, 2021
CHANGXIN MEMORY TECHNOLOGIES, INC
Peng DONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF WAFER LAYOUT AND EXPOSURE SYSTEM OF LITHOGRAPHY MACHINE
Publication number
20210374316
Publication date
Dec 2, 2021
Changxin Memory Technologies, Inc.
Wei XU
G06 - COMPUTING CALCULATING COUNTING