Lens systems

Industry

CPC
H01J2237/0492

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0492Lens systems

Industries

Patents Grantslast 30 patents

Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,087,541
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 12,080,515
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multiple particle beam system while altering...
- Patent number 12,057,290
- Issue date Aug 6, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
- Patent number 11,942,303
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Yan Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,887,807
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bandpass charged particle energy filtering detector for charged par...
- Patent number 11,749,495
- Issue date Sep 5, 2023
- KLA Corp.
- Youfei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for the removal and/or avoidance of contamination...
- Patent number 11,738,376
- Issue date Aug 29, 2023
- ASML Netherlands, B.V.
- Marc Smits
- B08 - CLEANING
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,705,304
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam lithography system
- Patent number 11,610,758
- Issue date Mar 21, 2023
- KKT HOLDINGS SYNDICATE
- Tzu-Yi Kuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,587,758
- Issue date Feb 21, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system for adjusting the current of individual partic...
- Patent number 11,562,880
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam electron characterization tool with telecentric illumina...
- Patent number 11,373,838
- Issue date Jun 28, 2022
- KLA Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D mapping of samples in charged particle microscopy
- Patent number 11,355,307
- Issue date Jun 7, 2022
- FEI Company
- Jaroslav Kamenec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 11,302,514
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pole deflector for charged particle beam and charged particle...
- Patent number 11,295,928
- Issue date Apr 5, 2022
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of charged-particle beam such as electron microscope comp...
- Patent number 11,295,927
- Issue date Apr 5, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuits for edge ring control in shaped DC pulsed plasma process d...
- Patent number 11,289,310
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Linying Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, composite charged particle beam ap...
- Patent number 11,276,555
- Issue date Mar 15, 2022
- Hitachi High-Tech Science Corporation
- Yasuhiko Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling transmission electron microscope and transmis...
- Patent number 11,251,016
- Issue date Feb 15, 2022
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and method for inspecting and/or imagi...
- Patent number 11,239,043
- Issue date Feb 1, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method
- Patent number 11,239,053
- Issue date Feb 1, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for alignment of cathodoluminescence optics
- Patent number 11,205,559
- Issue date Dec 21, 2021
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode arrangement, contact assembly for an electrode arrangemen...
- Patent number 11,177,114
- Issue date Nov 16, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle microscope
- Patent number 11,158,482
- Issue date Oct 26, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus having an aperture unit and method for sett...
- Patent number 11,139,140
- Issue date Oct 5, 2021
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Screening method and apparatus for detecting an object of interest
- Patent number 11,114,273
- Issue date Sep 7, 2021
- Wouter Arts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,107,657
- Issue date Aug 31, 2021
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,062,877
- Issue date Jul 13, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20240347316
- Publication date Oct 17, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240242921
- Publication date Jul 18, 2024
- ASML NETHERLANDS B.V.
- Mans Johan Bertil OSTERBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240128044
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
- Publication number 20240017301
- Publication date Jan 18, 2024
- ASML NETHERLANDS B.V.
- Marc SMITS
- B08 - CLEANING
Information Patent Application
Creating Multiple Electron Beams with a Photocathode Film
- Publication number 20230395349
- Publication date Dec 7, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Specimen Observation Method
- Publication number 20230343549
- Publication date Oct 26, 2023
- Hitachi High-Tech Corporation
- Masahiro FUKUTA
- G01 - MEASURING TESTING
Information Patent Application
MINIATURE HYBRID ELECTRON BEAM COLUMN
- Publication number 20230326704
- Publication date Oct 12, 2023
- KLA Corporation
- Lawrence Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Energy Filter, and Energy Analyzer and Charged Particle Beam Device...
- Publication number 20230298845
- Publication date Sep 21, 2023
- Hitachi High-Tech Corporation
- Kazuhiro HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
- Publication number 20230290609
- Publication date Sep 14, 2023
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...
- Publication number 20230282442
- Publication date Sep 7, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20230282441
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
- Publication number 20230245849
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused Ion Beam System and Method of Correcting Deviation of Field...
- Publication number 20230230801
- Publication date Jul 20, 2023
- JEOL Ltd.
- Yuichiro Ohori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...
- Publication number 20230154723
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Yan REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BANDPASS CHARGED PARTICLE ENERGY FILTERING DETECTOR FOR CHARGED PAR...
- Publication number 20230104558
- Publication date Apr 6, 2023
- KLA Corporation
- Youfei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD OF MANIPULATING CH...
- Publication number 20230037583
- Publication date Feb 9, 2023
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS
- Publication number 20220246395
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...
- Publication number 20220223386
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Linying CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D MAPPING OF SAMPLES IN CHARGED PARTICLE MICROSCOPY
- Publication number 20220181116
- Publication date Jun 9, 2022
- FEI Company
- Jaroslav Kamenec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20220148851
- Publication date May 12, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
- Publication number 20220139665
- Publication date May 5, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...
- Publication number 20220108865
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGI...
- Publication number 20210366683
- Publication date Nov 25, 2021
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE
- Publication number 20210305007
- Publication date Sep 30, 2021
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEASURING APPARATUS AND PLASMA MEASURING METHOD
- Publication number 20210287887
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Shinji KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
- Publication number 20210237129
- Publication date Aug 5, 2021
- ASML NETHERLANDS B.V.
- Marc SMITS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210233736
- Publication date Jul 29, 2021
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...
- Publication number 20210210303
- Publication date Jul 8, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNMENT OF CATHODOLUMINESCENCE OPTICS
- Publication number 20210125807
- Publication date Apr 29, 2021
- GATAN, INC.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, COMPOSITE CHARGED PARTICLE BEAM AP...
- Publication number 20210118645
- Publication date Apr 22, 2021
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Yasuhiko SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS

Lens systems

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle beam system and the use thereof for flexibly setting the c...

Apparatus of plural charged-particle beams

Apparatus for multiple charged-particle beams

Method for operating a multiple particle beam system while altering...

Systems and methods for real time stereo imaging using multiple ele...

Apparatus of plural charged-particle beams

Bandpass charged particle energy filtering detector for charged par...

Method and system for the removal and/or avoidance of contamination...

Apparatus of plural charged-particle beams

Charged particle beam lithography system

Apparatus of plural charged-particle beams

Particle beam system for adjusting the current of individual partic...

Objective lens arrangement usable in particle-optical systems

Multi-beam electron characterization tool with telecentric illumina...

3D mapping of samples in charged particle microscopy

Apparatus for multiple charged-particle beams

Multi-pole deflector for charged particle beam and charged particle...

Apparatus of charged-particle beam such as electron microscope comp...

Circuits for edge ring control in shaped DC pulsed plasma process d...

Charged particle beam apparatus, composite charged particle beam ap...

Method of controlling transmission electron microscope and transmis...

Charged particle beam device and method for inspecting and/or imagi...

Charged particle beam system and method

System and method for alignment of cathodoluminescence optics

Electrode arrangement, contact assembly for an electrode arrangemen...

Multi-beam particle microscope

Particle beam apparatus having an aperture unit and method for sett...

Screening method and apparatus for detecting an object of interest

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Patents Applicationslast 30 patents

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

CHARGED PARTICLE APPARATUS AND METHOD

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...

Creating Multiple Electron Beams with a Photocathode Film

Charged Particle Beam Device and Specimen Observation Method

MINIATURE HYBRID ELECTRON BEAM COLUMN

Energy Filter, and Energy Analyzer and Charged Particle Beam Device...

OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...

GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...

Focused Ion Beam System and Method of Correcting Deviation of Field...

SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...

BANDPASS CHARGED PARTICLE ENERGY FILTERING DETECTOR FOR CHARGED PAR...

APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD OF MANIPULATING CH...

APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS

CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...

3D MAPPING OF SAMPLES IN CHARGED PARTICLE MICROSCOPY

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...

APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGI...

DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE

PLASMA MEASURING APPARATUS AND PLASMA MEASURING METHOD

METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...

SYSTEM AND METHOD FOR ALIGNMENT OF CATHODOLUMINESCENCE OPTICS

CHARGED PARTICLE BEAM APPARATUS, COMPOSITE CHARGED PARTICLE BEAM AP...