Magnet distribution

Industry

CPC
H01J37/3452

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3452Magnet distribution

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for metal and ceramic nanolayering for acciden...
- Patent number 12,211,679
- Issue date Jan 28, 2025
- Starfire Industries LLC
- Brian E. Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for shaping magnetic fields during semiconductor processing
- Patent number 12,203,163
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Goichi Yoshidome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process apparatus and process chamber
- Patent number 12,198,913
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Shiru Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicathode PVD system for high aspect ratio barrier seed deposition
- Patent number 12,195,843
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Harish V. Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movable magnet array for magnetron sputtering
- Patent number 12,191,128
- Issue date Jan 7, 2025
- Intellivation LLC
- Michael G. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron design for improved bottom coverage and uniformity
- Patent number 12,176,191
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Cory Lafollett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition into trenches and vias
- Patent number 12,154,770
- Issue date Nov 26, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch uniformity improvement for single turn internal coil PVD chamber
- Patent number 12,136,544
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Anthony Chih-Tung Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 12,094,698
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for generating magnetic fields on substrates during semic...
- Patent number 12,027,352
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Suhas Bangalore Umesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputter target magnet
- Patent number 12,020,917
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Jie He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
- Patent number 11,913,109
- Issue date Feb 27, 2024
- SPTS Technologies Limited
- Tony Wilby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and apparatus for magnetron sputtering
- Patent number 11,848,179
- Issue date Dec 19, 2023
- EVATEC AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,821,068
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
- Patent number 11,823,859
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,688,591
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for an improved magnetron electromagnetic assembly
- Patent number 11,615,947
- Issue date Mar 28, 2023
- OEM Group, LLC
- Marc-Andre Lariviere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering source and coating system arrangement
- Patent number 11,594,402
- Issue date Feb 28, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Othmar Züger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for sputtering
- Patent number 11,530,476
- Issue date Dec 20, 2022
- APPLIED NANO TECHNOLOGY SCIENCE, INC.
- Tien-Chun Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of and apparatus for magnetron sputtering
- Patent number 11,476,099
- Issue date Oct 18, 2022
- EVATEC AG
- Hartmut Rohrmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,462,394
- Issue date Oct 4, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multifocal magnetron design for physical vapor deposition processin...
- Patent number 11,456,162
- Issue date Sep 27, 2022
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for processing, coating or curing a substrate
- Patent number 11,359,280
- Issue date Jun 14, 2022
- CAMVAC LIMITED
- Alexander John Topping
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter target magnet
- Patent number 11,322,338
- Issue date May 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Jie He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
- Patent number 11,306,391
- Issue date Apr 19, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...
- Publication number 20240301546
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Thomas Werner Zilbauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetron Design for Improved Bottom Coverage and Uniformity
- Publication number 20240290593
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Cory LAFOLLETT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION SOURCE AND CHAMBER ASSEMBLY
- Publication number 20240282558
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Sathiyamurthi GOVINDASAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20240274420
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Atsushi SHIMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING
- Publication number 20240258087
- Publication date Aug 1, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABLE GROUND ANODE FOR THIN FILM PROCESSING
- Publication number 20240194464
- Publication date Jun 13, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM DEPOSITION INTO TRENCHES AND VIAS
- Publication number 20240021421
- Publication date Jan 18, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
- Publication number 20240014018
- Publication date Jan 11, 2024
- SPTS TECHNOLOGIES LIMITED
- Tony WILBY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS APPARATUS AND PROCESS CHAMBER
- Publication number 20230411132
- Publication date Dec 21, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shiru WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
- Publication number 20230386809
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hung TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20230307218
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES
- Publication number 20230282466
- Publication date Sep 7, 2023
- SCION PLASMA LLC
- LI QIN ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR MAKING THICK-MULTILAYER DIELECTRIC FILMS
- Publication number 20230274920
- Publication date Aug 31, 2023
- INTEVAC, INC.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
- Publication number 20230260770
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Chia-Hung TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCH UNIFORMITY IMPROVEMENT FOR SINGLE TURN INTERNAL COIL PVD CHAMBER
- Publication number 20230141298
- Publication date May 11, 2023
- Anthony Chih-Tung CHAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOVABLE MAGNET ARRAY FOR MAGNETRON SPUTTERING
- Publication number 20230052340
- Publication date Feb 16, 2023
- INTELLIVATION LLC
- Michael G. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
- Publication number 20230014186
- Publication date Jan 19, 2023
- Evatec AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SPUTTER-COATING SUBSTRATES OR OF MANUFACTURING SPUTTER CO...
- Publication number 20230005725
- Publication date Jan 5, 2023
- Evatec AG
- Romeo Good
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...
- Publication number 20220406582
- Publication date Dec 22, 2022
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
- Publication number 20220380888
- Publication date Dec 1, 2022
- Goichi YOSHIDOME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR GENERATING MAGNETIC FIELDS ON SUBSTRATES DURING SEMIC...
- Publication number 20220384164
- Publication date Dec 1, 2022
- Suhas BANGALORE UMESH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20220367161
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20220319819
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER TARGET MAGNET
- Publication number 20220223391
- Publication date Jul 14, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Ming-Jie HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20220195585
- Publication date Jun 23, 2022
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220178014
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR SPUTTERING
- Publication number 20220106680
- Publication date Apr 7, 2022
- Applied Nano Technology Science, Inc.
- TIEN-CHUN CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR AN IMPROVED MAGNETRON ELECTROMAGNETIC ASSEMBLY
- Publication number 20220068620
- Publication date Mar 3, 2022
- OEM Group, LLC
- Marc-Andre Lariviere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Magnet distribution

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for metal and ceramic nanolayering for acciden...

Methods for shaping magnetic fields during semiconductor processing

Semiconductor process apparatus and process chamber

Multicathode PVD system for high aspect ratio barrier seed deposition

Movable magnet array for magnetron sputtering

Magnetron design for improved bottom coverage and uniformity

Film forming apparatus and film forming method

Vacuum deposition into trenches and vias

Etch uniformity improvement for single turn internal coil PVD chamber

Physical vapor deposition apparatus and method thereof

Methods and apparatus for controlling ion fraction in physical vapo...

Apparatus for generating magnetic fields on substrates during semic...

Sputter target magnet

Method and apparatus for controlling stress variation in a material...

Apparatus and a method of controlling thickness variation in a mate...

Methods of and apparatus for magnetron sputtering

Magnetically enhanced high density plasma-chemical vapor deposition...

Sputtering a layer on a substrate using a high-energy density plasm...

Methods and apparatus for controlling ion fraction in physical vapo...

Physical vapor deposition apparatus and method thereof

Systems and methods for an improved magnetron electromagnetic assembly

Magnetron sputtering source and coating system arrangement

Device for sputtering

Method and apparatus for controlling stress variation in a material...

Methods of and apparatus for magnetron sputtering

Physical vapor deposition apparatus and method thereof

Multifocal magnetron design for physical vapor deposition processin...

Apparatus and method for processing, coating or curing a substrate

Sputter target magnet

Magnetically enhanced low temperature-high density plasma-chemical...

Patents Applicationslast 30 patents

SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...

Magnetron Design for Improved Bottom Coverage and Uniformity

PHYSICAL VAPOR DEPOSITION SOURCE AND CHAMBER ASSEMBLY

FILM FORMATION METHOD AND FILM FORMATION DEVICE

CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING

STABLE GROUND ANODE FOR THIN FILM PROCESSING

VACUUM DEPOSITION INTO TRENCHES AND VIAS

Apparatus and a Method of Controlling Thickness Variation in a Mate...

SEMICONDUCTOR PROCESS APPARATUS AND PROCESS CHAMBER

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

SEMICONDUCTOR TOOL FOR COPPER DEPOSITION

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES

SYSTEM AND METHOD FOR MAKING THICK-MULTILAYER DIELECTRIC FILMS

SEMICONDUCTOR TOOL FOR COPPER DEPOSITION

ETCH UNIFORMITY IMPROVEMENT FOR SINGLE TURN INTERNAL COIL PVD CHAMBER

Method and Apparatus for Controlling Stress Variation in a Material...

MOVABLE MAGNET ARRAY FOR MAGNETRON SPUTTERING

METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING

METHOD OF SPUTTER-COATING SUBSTRATES OR OF MANUFACTURING SPUTTER CO...

MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...

METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING

APPARATUS FOR GENERATING MAGNETIC FIELDS ON SUBSTRATES DURING SEMIC...

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SPUTTER TARGET MAGNET

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

FILM FORMING APPARATUS AND FILM FORMING METHOD

DEVICE FOR SPUTTERING

SYSTEMS AND METHODS FOR AN IMPROVED MAGNETRON ELECTROMAGNETIC ASSEMBLY