magnetic

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CPC
H01J2237/0264

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0264magnetic

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Magnetic-material shield around plasma chambers near pedestal
- Patent number 11,984,302
- Issue date May 14, 2024
- Applied Materials, Inc.
- Job George Konnoth Joseph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction in charged particle system
- Patent number 11,348,756
- Issue date May 31, 2022
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
E-beam apparatus
- Patent number 11,315,752
- Issue date Apr 26, 2022
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection tool and method of controlling heat load
- Patent number 11,158,484
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Dennis Herman Caspar Van Banning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
E-beam apparatus
- Patent number 10,867,770
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle-type electron beam irradiation device, and electron beam ste...
- Patent number 10,568,980
- Issue date Feb 25, 2020
- Hitachi Zosen Corporation
- Takeshi Noda
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Conductive interface system between vacuum chambers in a charged pa...
- Patent number 10,290,522
- Issue date May 14, 2019
- Hitachi High-Technologies Corporation
- Masashi Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage shielding and cooling in a charged particle beam gener...
- Patent number 10,037,864
- Issue date Jul 31, 2018
- Mapper Lithography IP B.V.
- Alexander Hendrik Vincent Van Veen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Housing device for magnetic shielding, housing arrangement for magn...
- Patent number 9,673,017
- Issue date Jun 6, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle lithography system and beam generator
- Patent number 9,653,261
- Issue date May 16, 2017
- Mapper Lithography IP B.V.
- Alexander Hendrik Vincent Van Veen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Nano-patterned system and magnetic-field applying device thereof
- Patent number 9,640,363
- Issue date May 2, 2017
- Institute of Physics, Chinese Academy of Sciences
- Guoqiang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,601,302
- Issue date Mar 21, 2017
- Ebara Corporation
- Shoji Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Top opening-closing mechanism and inspection apparatus
- Patent number 9,508,526
- Issue date Nov 29, 2016
- Ebara Corporation
- Matsutaro Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano-patterned system and magnetic-field applying device thereof
- Patent number 9,484,138
- Issue date Nov 1, 2016
- Institute of Physics, Chinese Academy of Sciences
- Guoqiang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation device and power supply arrangement
- Patent number 9,455,122
- Issue date Sep 27, 2016
- Mapper Lithography IP B.V.
- Teunis Van De Peut
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Low-interference sensor head for a radiation detector, as well as a...
- Patent number 9,299,532
- Issue date Mar 29, 2016
- Bruker Nano GmbH
- Meiken Falke
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 9,134,261
- Issue date Sep 15, 2015
- Ebara Corporation
- Shoji Yoshikawa
- G01 - MEASURING TESTING
Information Patent Grant
Linear motor, movable stage and electron microscope
- Patent number 9,093,890
- Issue date Jul 28, 2015
- Hitachi High-Technologies Corporation
- Hideki Tanaka
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Charged particle beam apparatus sample holder with magnetic field g...
- Patent number 9,070,532
- Issue date Jun 30, 2015
- Hitachi, Ltd.
- Akira Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum deposition apparatus
- Patent number 9,017,534
- Issue date Apr 28, 2015
- Kobe Steel, Ltd.
- Kenji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron microscope
- Patent number 9,006,653
- Issue date Apr 14, 2015
- Hitachi High-Technologies Corporation
- Hideki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for electromagnetic interference shielding for cr...
- Patent number 8,952,330
- Issue date Feb 10, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for magnetic shielding
- Patent number 8,884,253
- Issue date Nov 11, 2014
- Mapper Lithography IP B.V.
- Alon Rosenthal
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System and method for electromagnetic interference shielding for cr...
- Patent number 8,633,439
- Issue date Jan 21, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam drawing apparatus and article manufacturing m...
- Patent number 8,476,607
- Issue date Jul 2, 2013
- Canon Kabushiki Kaisha
- Tomonori Ishikawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle filter
- Patent number 8,049,182
- Issue date Nov 1, 2011
- Oxford Instruments Nanotechnology Tools Limited
- Angus Bewick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus and focused ion beam irradiation method
- Patent number 7,411,192
- Issue date Aug 12, 2008
- Hitachi High-Technologies Corporation
- Koichiro Takeuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and method for manufacturing semiconductor...
- Patent number 7,372,027
- Issue date May 13, 2008
- Tokyo Electron Limited
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active magnetic shielding
- Patent number 6,846,396
- Issue date Jan 25, 2005
- Applied Materials, Inc.
- Mark A. Perrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices for detecting and canceling magnetic fields ext...
- Patent number 6,831,281
- Issue date Dec 14, 2004
- Nikon Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS
- Publication number 20240266152
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Michael Andrew STEARNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MICROSCOPE
- Publication number 20240006146
- Publication date Jan 4, 2024
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS
- Publication number 20230071249
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Scott Briggs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220375730
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Ryota SAKANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL
- Publication number 20220139679
- Publication date May 5, 2022
- Applied Materials, Inc.
- Job George KONNOTH JOSEPH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM APPARATUS
- Publication number 20210151282
- Publication date May 20, 2021
- Peter Paul HEMPENIUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM INSPECTION TOOL AND METHOD FOR POSITIONING AN OBJECT...
- Publication number 20200303158
- Publication date Sep 24, 2020
- ASML NETHERLANDS B.V.
- Niels Johannes Maria Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM INSPECTION TOOL AND METHOD OF CONTROLLING HEAT LOAD
- Publication number 20200203117
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Dennis Herman Caspar VAN BANNING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM APPARATUS
- Publication number 20190341224
- Publication date Nov 7, 2019
- ASML Netherlands B.V.
- Peter Paul HEMPENIUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOUSING DEVICE FOR MAGNETIC SHIELDING, HOUSING ARRANGEMENT FOR MAGN...
- Publication number 20170148608
- Publication date May 25, 2017
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, MET...
- Publication number 20150034842
- Publication date Feb 5, 2015
- Canon Kabushiki Kaisha
- Shinji Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE HOLDER AND CHARGED PARTICLE BEAM APPARATUS USING SAME
- Publication number 20140319371
- Publication date Oct 30, 2014
- Akira Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140312227
- Publication date Oct 23, 2014
- EBARA CORPORATION
- Shoji YOSHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ART...
- Publication number 20140306123
- Publication date Oct 16, 2014
- Canon Kabushiki Kaisha
- Tomonori ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND ELECTRON BEAM APPLICATION APPARATUS
- Publication number 20140292111
- Publication date Oct 2, 2014
- EBARA CORPORATION
- Matsutaro Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Method For Electromagnetic Interference Shielding For Cr...
- Publication number 20140124667
- Publication date May 8, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE
- Publication number 20130313431
- Publication date Nov 28, 2013
- Hideki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR MAGNETIC SHIELDING
- Publication number 20130043414
- Publication date Feb 21, 2013
- MAPPER LITHOGRAPHY IP BV
- Alon ROSENTHAL
- B82 - NANO-TECHNOLOGY
Information Patent Application
VACUUM DEPOSITION APPARATUS
- Publication number 20130020195
- Publication date Jan 24, 2013
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Kenji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...
- Publication number 20130011797
- Publication date Jan 10, 2013
- Canon Kabushiki Kaisha
- Tomonori Ishikawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR ELECTROMAGNETIC INTERFERECE SHIELDING FOR CRI...
- Publication number 20130001419
- Publication date Jan 3, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR MOTOR, MOVABLE STAGE AND ELECTRON MICROSCOPE
- Publication number 20120305766
- Publication date Dec 6, 2012
- Hitachi High-Technologies Corporation
- Hideki TANAKA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
LOW-INTERFERENCE SENSOR HEAD FOR A RADIATION DETECTOR, AS WELL AS A...
- Publication number 20120132818
- Publication date May 31, 2012
- BRUKER NANO GMBH
- Meiken Falke
- G01 - MEASURING TESTING
Information Patent Application
LINEAR MOTOR PAIR, MOVING STAGE AND ELECTRON MICROSCOPE
- Publication number 20110226950
- Publication date Sep 22, 2011
- Hitachi, Ltd.
- Hideki TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE FILTER
- Publication number 20110168887
- Publication date Jul 14, 2011
- OXFORD INSTRUMENTS ANALYTICAL LIMITED
- Angus BEWICK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT AND POSITIONING STRUCTURE, SEMICONDUCTOR EQUIPMENT SYSTEM A...
- Publication number 20110147612
- Publication date Jun 23, 2011
- Jerry Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE RADIATION APPARATUS
- Publication number 20090194692
- Publication date Aug 6, 2009
- Atsushi KOBARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus and method for manufacturing semiconductor...
- Publication number 20060097165
- Publication date May 11, 2006
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused ion beam apparatus and focused ion beam irradiation method
- Publication number 20060022150
- Publication date Feb 2, 2006
- Hitachi High-Technologies Corporation
- Koichiro Takeuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20040056214
- Publication date Mar 25, 2004
- Sang-Kee Kim
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Magnetic-material shield around plasma chambers near pedestal

Aberration correction in charged particle system

E-beam apparatus

Electron beam inspection tool and method of controlling heat load

E-beam apparatus

Nozzle-type electron beam irradiation device, and electron beam ste...

Conductive interface system between vacuum chambers in a charged pa...

High voltage shielding and cooling in a charged particle beam gener...

Housing device for magnetic shielding, housing arrangement for magn...

Charged particle lithography system and beam generator

Nano-patterned system and magnetic-field applying device thereof

Inspection apparatus

Top opening-closing mechanism and inspection apparatus

Nano-patterned system and magnetic-field applying device thereof

Modulation device and power supply arrangement

Low-interference sensor head for a radiation detector, as well as a...

Inspection apparatus

Linear motor, movable stage and electron microscope

Charged particle beam apparatus sample holder with magnetic field g...

Vacuum deposition apparatus

Electron microscope

System and method for electromagnetic interference shielding for cr...

System for magnetic shielding

System and method for electromagnetic interference shielding for cr...

Charged particle beam drawing apparatus and article manufacturing m...

Charged particle filter

Focused ion beam apparatus and focused ion beam irradiation method

Electron beam apparatus and method for manufacturing semiconductor...

Active magnetic shielding

Methods and devices for detecting and canceling magnetic fields ext...

Patents Applicationslast 30 patents

PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS

ION MICROSCOPE

ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS

PLASMA PROCESSING APPARATUS

MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL

E-BEAM APPARATUS

ELECTRON BEAM INSPECTION TOOL AND METHOD FOR POSITIONING AN OBJECT...

ELECTRON BEAM INSPECTION TOOL AND METHOD OF CONTROLLING HEAT LOAD

E-BEAM APPARATUS

HOUSING DEVICE FOR MAGNETIC SHIELDING, HOUSING ARRANGEMENT FOR MAGN...

DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, MET...

SAMPLE HOLDER AND CHARGED PARTICLE BEAM APPARATUS USING SAME

INSPECTION APPARATUS

STAGE APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ART...

STAGE DEVICE AND ELECTRON BEAM APPLICATION APPARATUS

System And Method For Electromagnetic Interference Shielding For Cr...

ELECTRON MICROSCOPE

SYSTEM FOR MAGNETIC SHIELDING

VACUUM DEPOSITION APPARATUS

CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...

SYSTEM AND METHOD FOR ELECTROMAGNETIC INTERFERECE SHIELDING FOR CRI...

LINEAR MOTOR, MOVABLE STAGE AND ELECTRON MICROSCOPE

LOW-INTERFERENCE SENSOR HEAD FOR A RADIATION DETECTOR, AS WELL AS A...

LINEAR MOTOR PAIR, MOVING STAGE AND ELECTRON MICROSCOPE

CHARGED PARTICLE FILTER

SUPPORT AND POSITIONING STRUCTURE, SEMICONDUCTOR EQUIPMENT SYSTEM A...

CHARGED PARTICLE RADIATION APPARATUS

Electron beam apparatus and method for manufacturing semiconductor...

Focused ion beam apparatus and focused ion beam irradiation method

ION IMPLANTING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES