Magnetron sputtering

Industry

CPC
H01J37/3405

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3405Magnetron sputtering

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Multi-layer coating
- Patent number 12,221,687
- Issue date Feb 11, 2025
- CemeCon AG
- Werner Kölker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic-field-assisted plasma coating system
- Patent number 12,224,165
- Issue date Feb 11, 2025
- Board of Trustees of Michigan State University
- Thomas Schuelke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for producing uniform films on moving substrates...
- Patent number 12,217,947
- Issue date Feb 4, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Michael Vergöhl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnet system, sputtering device and housing cover
- Patent number 12,217,950
- Issue date Feb 4, 2025
- VON ARDENNE Asset GmbH & Co. KG
- Thorsten Sander
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolated volume seals and method of forming an isolated volume with...
- Patent number 12,217,982
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 12,217,949
- Issue date Feb 4, 2025
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed power module with pulse and ion flux control for magnetron s...
- Patent number 12,211,680
- Issue date Jan 28, 2025
- Starfire Industries LLC
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for metal and ceramic nanolayering for acciden...
- Patent number 12,211,679
- Issue date Jan 28, 2025
- Starfire Industries LLC
- Brian E. Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for shaping magnetic fields during semiconductor processing
- Patent number 12,203,163
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Goichi Yoshidome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, film formation method, and method for manufac...
- Patent number 12,205,805
- Issue date Jan 21, 2025
- Canon Kabushiki Kaisha
- Kazuya Demura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process apparatus and process chamber
- Patent number 12,198,913
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Shiru Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor apparatus and magnetic structure of semiconductor app...
- Patent number 12,198,914
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Zhenduo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable magnet array for magnetron sputtering
- Patent number 12,191,128
- Issue date Jan 7, 2025
- Intellivation LLC
- Michael G. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced ripple in switch mode power supply with snubber
- Patent number 12,184,161
- Issue date Dec 31, 2024
- Advanced Energy Industries, Inc.
- Mike Armstrong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for particle control in MRAM processing
- Patent number 12,176,192
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Han Kuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron design for improved bottom coverage and uniformity
- Patent number 12,176,191
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Cory Lafollett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron plasma sputtering arrangement
- Patent number 12,170,194
- Issue date Dec 17, 2024
- Danmarks Tekniske Universitet
- Eugen Stamate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnet system, sputtering device and method
- Patent number 12,165,857
- Issue date Dec 10, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Klaus Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vacuum deposition into trenches and vias
- Patent number 12,154,770
- Issue date Nov 26, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass airflow sensor and hydrocarbon trap combination
- Patent number 12,140,111
- Issue date Nov 12, 2024
- K & N Engineering, Inc.
- Kevin McClelland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode unit for magnetron sputtering apparatus and magnetron sputt...
- Patent number 12,112,929
- Issue date Oct 8, 2024
- ULVAC, Inc.
- Koji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual reverse pulse sputtering system
- Patent number 12,112,931
- Issue date Oct 8, 2024
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inverted cylindrical magnetron (ICM) system and methods of use
- Patent number 12,106,924
- Issue date Oct 1, 2024
- Vactronix Scientific, LLC.
- Tianzong Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 12,094,698
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and program
- Patent number 12,094,700
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating a substrate with tantalum nitride
- Patent number 12,084,755
- Issue date Sep 10, 2024
- SAFRAN
- Marjorie Christine Cavarroc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 12,077,849
- Issue date Sep 3, 2024
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250059640
- Publication date Feb 20, 2025
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING METAL
- Publication number 20250037981
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- David Eitan Barlaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES
- Publication number 20250029820
- Publication date Jan 23, 2025
- INTEVAC, INC.
- Patrick Morse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Magnetron Sputtering
- Publication number 20240404806
- Publication date Dec 5, 2024
- Melec GmbH
- Günter Mark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PHYSICAL VAPOR DEPOSITION
- Publication number 20240339310
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Young WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...
- Publication number 20240332046
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...
- Publication number 20240301546
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Thomas Werner Zilbauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetron Design for Improved Bottom Coverage and Uniformity
- Publication number 20240290593
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Cory LAFOLLETT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTALLINE STRONTIUM TITANATE (STO) AND METHOD FOR DEPOSITION OF T...
- Publication number 20240242964
- Publication date Jul 18, 2024
- SUPERQ TECHNOLOGIES INDIA PRIVATE LIMITED
- SUBHASH KANNAPPA MANOHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE
- Publication number 20240209493
- Publication date Jun 27, 2024
- HYDROMECANIQUE ET FROTTEMENT
- Christophe Heau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Power Compensation in PVD Chambers
- Publication number 20240213007
- Publication date Jun 27, 2024
- Junjie PAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTER DEVICE
- Publication number 20240203715
- Publication date Jun 20, 2024
- DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY
- June Seo KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABLE GROUND ANODE FOR THIN FILM PROCESSING
- Publication number 20240194464
- Publication date Jun 13, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD...
- Publication number 20240186128
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Alan RITCHIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20240183027
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Naoki TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20240177978
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE
- Publication number 20240170269
- Publication date May 23, 2024
- Applied Materials, Inc.
- Harish PENMETHSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device, Method and Machine of Manufacture
- Publication number 20240093357
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AN LICOO2 FILM AND DEVICE FOR CARRYING OUT SAME
- Publication number 20240084438
- Publication date Mar 14, 2024
- Iaroslav Anatolevich Korolenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION
- Publication number 20240024957
- Publication date Jan 25, 2024
- WALTER AG
- Veit SCHIER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
VACUUM DEPOSITION INTO TRENCHES AND VIAS
- Publication number 20240021421
- Publication date Jan 18, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEW TRANSPARENT CONDUCTIVE OXIDE THIN FILM AND USE THEREOF
- Publication number 20240003051
- Publication date Jan 4, 2024
- Ningbo Institute of Materials Technology and Engineering, Chinese Academy of...
- Ruyi ZHANG
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and Apparatus for Deposition of Mental Nitrides
- Publication number 20240003000
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Resistivity Control of Coated Glass Units for Uniformity Improvement
- Publication number 20240003840
- Publication date Jan 4, 2024
- SAGE Electrochromics, Inc.
- Yan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS APPARATUS AND PROCESS CHAMBER
- Publication number 20230411132
- Publication date Dec 21, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shiru WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
- Publication number 20230386806
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Han KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPULSE POWER SUPPLY FOR COMPACT SYSTEM FOR COUPLING RADIO FREQUENC...
- Publication number 20230360898
- Publication date Nov 9, 2023
- Starfire Industries LLC
- Robert A. Stubbers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE
- Publication number 20230313364
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Kevin KASHEFI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR SPUTTERING AND DEPOSITING METAL ON SURFACE OF...
- Publication number 20230317429
- Publication date Oct 5, 2023
- Bin ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Magnetron sputtering

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multi-layer coating

Magnetic-field-assisted plasma coating system

Method and device for producing uniform films on moving substrates...

Magnet system, sputtering device and housing cover

Isolated volume seals and method of forming an isolated volume with...

Magnetically enhanced high density plasma-chemical vapor deposition...

Pulsed power module with pulse and ion flux control for magnetron s...

Method and apparatus for metal and ceramic nanolayering for acciden...

Methods for shaping magnetic fields during semiconductor processing

Sputtering apparatus, film formation method, and method for manufac...

Semiconductor process apparatus and process chamber

Semiconductor apparatus and magnetic structure of semiconductor app...

Movable magnet array for magnetron sputtering

Reduced ripple in switch mode power supply with snubber

System and method for particle control in MRAM processing

Magnetron design for improved bottom coverage and uniformity

Magnetron plasma sputtering arrangement

Film forming apparatus and film forming method

Magnet system, sputtering device and method

Anti-stiction process for MEMS device

Vacuum deposition into trenches and vias

Mass airflow sensor and hydrocarbon trap combination

Cathode unit for magnetron sputtering apparatus and magnetron sputt...

Dual reverse pulse sputtering system

Inverted cylindrical magnetron (ICM) system and methods of use

Physical vapor deposition apparatus and method thereof

Film forming method, film forming apparatus, and program

Methods and apparatus for controlling ion fraction in physical vapo...

Method for coating a substrate with tantalum nitride

Electrically and magnetically enhanced ionized physical vapor depos...

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

SYSTEMS AND METHODS FOR DEPOSITING METAL

ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES

Method for Magnetron Sputtering

APPARATUS AND METHOD FOR PHYSICAL VAPOR DEPOSITION

ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...

SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...

Magnetron Design for Improved Bottom Coverage and Uniformity

CRYSTALLINE STRONTIUM TITANATE (STO) AND METHOD FOR DEPOSITION OF T...

METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE

Power Compensation in PVD Chambers

MAGNETRON SPUTTER DEVICE

STABLE GROUND ANODE FOR THIN FILM PROCESSING

METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD

SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE

Semiconductor Device, Method and Machine of Manufacture

METHOD FOR FORMING AN LICOO2 FILM AND DEVICE FOR CARRYING OUT SAME

COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION

VACUUM DEPOSITION INTO TRENCHES AND VIAS

NEW TRANSPARENT CONDUCTIVE OXIDE THIN FILM AND USE THEREOF

Method and Apparatus for Deposition of Mental Nitrides

Resistivity Control of Coated Glass Units for Uniformity Improvement

SEMICONDUCTOR PROCESS APPARATUS AND PROCESS CHAMBER

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING

IMPULSE POWER SUPPLY FOR COMPACT SYSTEM FOR COUPLING RADIO FREQUENC...

ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE

DEVICE AND METHOD FOR SPUTTERING AND DEPOSITING METAL ON SURFACE OF...