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H01L21/67109

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67109mainly by convection

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for cooling a substrate support
- Patent number 12,232,299
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Robert Irwin Decottignies
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with varying depths of areas between mesas and co...
- Patent number 12,227,840
- Issue date Feb 18, 2025
- Lam Research Corporation
- Keith Gaff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,230,516
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Jae Oh Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust system and process equipment
- Patent number 12,230,517
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsien-Chang Hsieh
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Electrostatic chuck heater
- Patent number 12,230,526
- Issue date Feb 18, 2025
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling sheet attachment apparatus to focusing ring for semiconduct...
- Patent number 12,224,188
- Issue date Feb 11, 2025
- CM TECH Co., Ltd.
- Man Soo Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus with parallel first and second parts o...
- Patent number 12,217,986
- Issue date Feb 4, 2025
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and method of manufacturing substrate p...
- Patent number 12,211,706
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Baking apparatus
- Patent number 12,211,711
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Bumjin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manufacturing display device
- Patent number 12,211,712
- Issue date Jan 28, 2025
- Samsung Display Co., Ltd.
- Jong Jang Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with multiple embedded electrodes
- Patent number 12,198,966
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition system and method
- Patent number 12,198,927
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature adjustment apparatus for high temperature oven
- Patent number 12,188,661
- Issue date Jan 7, 2025
- Yi-Ming Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-temperature substrate support assembly with failure protection
- Patent number 12,185,433
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Denis Martin Koosau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotatable thermal processing chamber
- Patent number 12,176,242
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control system for adaptive control of a thermal processing system
- Patent number 12,174,616
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co. Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RTP substrate temperature one for all control algorithm
- Patent number 12,169,098
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Wolfgang Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,165,886
- Issue date Dec 10, 2024
- Shibaura Mechatronics Corporation
- Kensuke Demura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spatial control of plasma processing environments
- Patent number 12,159,767
- Issue date Dec 3, 2024
- Advanced Energy Industries, Inc.
- Daniel Carter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,154,797
- Issue date Nov 26, 2024
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support
- Patent number 12,148,636
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Masanori Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning apparatus for component for semiconductor production appar...
- Patent number 12,139,788
- Issue date Nov 12, 2024
- Taiyo Nippon Sanso Corporation
- Akira Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment device
- Patent number 12,138,671
- Issue date Nov 12, 2024
- Shibaura Mechatronics Corporation
- Minami Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of plasma sheath with bias supplies
- Patent number 12,142,460
- Issue date Nov 12, 2024
- Advanced Energy Industries, Inc.
- Denis Shaw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly comprising a cooling gas supply
- Patent number 12,130,084
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Melvin Verbaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,123,091
- Issue date Oct 22, 2024
- Kokusai Electric Corporation
- Takayuki Nakada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FURNACE INNER TUBE FOR PROCESS UNIFORMITY
- Publication number 20250062139
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- De-Wei YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...
- Publication number 20250062125
- Publication date Feb 20, 2025
- Semes Co., Ltd.
- Gyeong Won SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...
- Publication number 20250054778
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Anthony DE LA LLERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS
- Publication number 20250054738
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dan MAROHL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250046628
- Publication date Feb 6, 2025
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR ACCURATE DETERMINATION OF SEMICONDUCTOR WAF...
- Publication number 20250046633
- Publication date Feb 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung Hsien Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...
- Publication number 20250038015
- Publication date Jan 30, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinlong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-TEMPERATURE TUBE FURNACE
- Publication number 20250029848
- Publication date Jan 23, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20250022724
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Masanori TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW CONTROL METHOD FOR AIR FLOTATION CYCLONE OPERATION OF LOW-P...
- Publication number 20250022726
- Publication date Jan 16, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Jianmin JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION ELEMENT AND HEAT TREATMENT DEVICE CONTAINING THE SAME
- Publication number 20250022725
- Publication date Jan 16, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Jianmin JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE, SEMICONDUCTOR PROCESSING SYSTEM, A...
- Publication number 20250014932
- Publication date Jan 9, 2025
- HUAYING RESEARCH CO., LTD
- Sophia Ziying WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20250014919
- Publication date Jan 9, 2025
- HUAYING RESEARCH CO., LTD
- Sophia Ziying WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR ADJUSTING PLATE TEMPERATURE
- Publication number 20250006523
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD...
- Publication number 20250006524
- Publication date Jan 2, 2025
- HORIBA STEC, CO., LTD.
- Daisuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER
- Publication number 20240426938
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING...
- Publication number 20240426377
- Publication date Dec 26, 2024
- Kokusai Electric Corporation
- Masamichi YACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...
- Publication number 20240426939
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF
- Publication number 20240419199
- Publication date Dec 19, 2024
- LAPLACE RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Yang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...
- Publication number 20240412989
- Publication date Dec 12, 2024
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20240393050
- Publication date Nov 28, 2024
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKS WITH HYBRID PUCKS TO IMPROVE THERMAL PERFORMAN...
- Publication number 20240387224
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Yogananda Sarode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rapid Thermal Processing System With Cooling System
- Publication number 20240379390
- Publication date Nov 14, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL FOR ANNEALING OF MAGNETIC STACKS
- Publication number 20240373518
- Publication date Nov 7, 2024
- III Holdings 1, LLC
- Krishnakumar Mani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS
- Publication number 20240371665
- Publication date Nov 7, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Louis P. STEINHAUSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING CUMULATIVE HEAT AMOUNT DATA TO QUALIFY HOT PLATE USED FOR POS...
- Publication number 20240371639
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLDER REFLOW APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
- Publication number 20240355640
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Youngja Kim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

mainly by convection

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for cooling a substrate support

Substrate support with varying depths of areas between mesas and co...

Substrate treating apparatus and substrate treating method

Exhaust system and process equipment

Electrostatic chuck heater

Cooling sheet attachment apparatus to focusing ring for semiconduct...

Substrate treating apparatus with parallel first and second parts o...

Substrate processing device and method of manufacturing substrate p...

Baking apparatus

Apparatus for manufacturing display device

Substrate support with multiple embedded electrodes

Deposition system and method

Temperature adjustment apparatus for high temperature oven

Substrate processing apparatus for processing substrates

High-temperature substrate support assembly with failure protection

Rotatable thermal processing chamber

Control system for adaptive control of a thermal processing system

RTP substrate temperature one for all control algorithm

Substrate processing apparatus and substrate processing method

Spatial control of plasma processing environments

Substrate processing method and substrate processing apparatus

Substrate support

Substrate processing system and temperature control method

Cleaning apparatus for component for semiconductor production appar...

Substrate treatment device

Heating platform, thermal treatment and manufacturing method

Control of plasma sheath with bias supplies

Vertical batch furnace assembly comprising a cooling gas supply

Integrated epitaxy and preclean system

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

FURNACE INNER TUBE FOR PROCESS UNIFORMITY

SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...

IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

SYSTEMS AND METHODS FOR ACCURATE DETERMINATION OF SEMICONDUCTOR WAF...

WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...

HIGH-TEMPERATURE TUBE FURNACE

SUBSTRATE SUPPORT

AIRFLOW CONTROL METHOD FOR AIR FLOTATION CYCLONE OPERATION OF LOW-P...

GAS DISTRIBUTION ELEMENT AND HEAT TREATMENT DEVICE CONTAINING THE SAME

SEMICONDUCTOR PROCESSING DEVICE, SEMICONDUCTOR PROCESSING SYSTEM, A...

SEMICONDUCTOR PROCESSING DEVICE AND SEMICONDUCTOR PROCESSING SYSTEM

APPARATUS AND METHODS FOR ADJUSTING PLATE TEMPERATURE

WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD...

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER

SEAL ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING...

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...

PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF

THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

ELECTROSTATIC CHUCKS WITH HYBRID PUCKS TO IMPROVE THERMAL PERFORMAN...

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

Rapid Thermal Processing System With Cooling System

TOOL FOR ANNEALING OF MAGNETIC STACKS

THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS

USING CUMULATIVE HEAT AMOUNT DATA TO QUALIFY HOT PLATE USED FOR POS...

SOLDER REFLOW APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE