mainly by radiation

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H01L21/67115

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67115mainly by radiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Temperature measurement method, optical heating method, and optical...
- Patent number 12,320,706
- Issue date Jun 3, 2025
- Ushio Denki Kabushiki Kaisha
- Takahiro Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate laser processing method and substrate laser processing ap...
- Patent number 12,322,656
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Yohei Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure heating apparatus
- Patent number 12,322,613
- Issue date Jun 3, 2025
- Samsung Electronics Co., Ltd.
- Tatsuya Ishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for thermal treatment of a semiconductor layer in semicondu...
- Patent number 12,322,596
- Issue date Jun 3, 2025
- Yangtze Memory Technologies Co., Ltd.
- Kun Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, modification device and substrate proc...
- Patent number 12,322,599
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Norifumi Kohama
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,308,261
- Issue date May 20, 2025
- SCREEN Holdings Co., Ltd.
- Akira Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing apparatus
- Patent number 12,296,402
- Issue date May 13, 2025
- Disco Corporation
- Hironari Ohkubo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor deposition monitoring device
- Patent number 12,283,497
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Young Uk Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment apparatus
- Patent number 12,283,498
- Issue date Apr 22, 2025
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and heating method
- Patent number 12,278,122
- Issue date Apr 15, 2025
- Tokyo Electron Limited
- Takashi Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support unit, substrate treating apparatus including the same, and...
- Patent number 12,278,121
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Kangseop Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto fine-tuner for desired temperature profile
- Patent number 12,278,127
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device for laser annealing apparatus and laser annealing me...
- Patent number 12,263,537
- Issue date Apr 1, 2025
- Sumitomo Heavy Industries, Ltd.
- Yasuhiro Okada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical heating apparatus with angled light holding substrate and h...
- Patent number 12,261,061
- Issue date Mar 25, 2025
- Ushio Denki Kabushiki Kaisha
- Tomonori Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spot heating by moving a beam with horizontal rotary motion
- Patent number 12,261,062
- Issue date Mar 25, 2025
- Applied Materials, Inc.
- Shu-Kwan Danny Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,255,069
- Issue date Mar 18, 2025
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Splash resistant laser wafer singulation by crack length control
- Patent number 12,255,097
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Yang Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,255,063
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Hayato Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support device for supporting a substrate, method of processing a s...
- Patent number 12,255,088
- Issue date Mar 18, 2025
- Applied Materials Italia S.R.L.
- Daniele Andreola
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer holder and temperature conditioning arrangement and method of...
- Patent number 12,249,523
- Issue date Mar 11, 2025
- EVATEC AG
- Juergen Kielwein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 12,249,507
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing device for forming a modified region in an object...
- Patent number 12,246,397
- Issue date Mar 11, 2025
- Hamamatsu Photonics K.K.
- Takafumi Ogiwara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser machining apparatus and laser machining method
- Patent number 12,237,185
- Issue date Feb 25, 2025
- Samsung Display Co., Ltd.
- Heung Yeol Na
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light irradiation type heat treatment apparatus
- Patent number 12,230,518
- Issue date Feb 18, 2025
- SCREEN Holdings Co., Ltd.
- Nobuhiko Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for providing variable ramp-up control for an ele...
- Patent number 12,225,635
- Issue date Feb 11, 2025
- Watlow Electric Manufacturing Company
- Brittany Phillips
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate heating apparatus and method for processing a substrate
- Patent number 12,225,634
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Taehong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing a wafer, and method of controlling such an...
- Patent number 12,217,980
- Issue date Feb 4, 2025
- Lam Research AG
- Daniel Brien
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...
- Publication number 20250183066
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Abbas RASTEGAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS
- Publication number 20250167008
- Publication date May 22, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING APPARATUS AND PRETREMENT METHOD FOR WAFER
- Publication number 20250157835
- Publication date May 15, 2025
- HERMES-EPITEK CORPORATION
- Shang-Jr Gwo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250149389
- Publication date May 8, 2025
- SEMES CO., LTD.
- Il Young KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER BLOCK AND APPARATUS FOR HEATING SUBSTRATE HAVING THE SAME
- Publication number 20250140583
- Publication date May 1, 2025
- AP SYSTEMS INC
- Dae Ryong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...
- Publication number 20250132175
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATERS, AND RELATED CHAMBER KITS AND PROCESSING CHAMBERS, FOR SEMI...
- Publication number 20250132176
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Enle CHOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUC...
- Publication number 20250125165
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Sivananda Krishnan Kanakasabapathy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND STORAGE MEDIUM
- Publication number 20250125166
- Publication date Apr 17, 2025
- Sumitomo Heavy Industries, Ltd.
- Kazumasa YASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING PROCESSING METHOD AND ETCHING PROCESSING APPARATUS
- Publication number 20250112055
- Publication date Apr 3, 2025
- HITACHI HIGH-TECH CORPORATION
- Nobuya MIYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DECAPSULATING PACKAGED INTEGRATED CIRCUIT
- Publication number 20250112058
- Publication date Apr 3, 2025
- Tung Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...
- Publication number 20250112064
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT TRANSFER APPARATUS AND TRANSFER METHOD USING...
- Publication number 20250105047
- Publication date Mar 27, 2025
- Hyundai Motor Company
- Tae Woo KWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Structure for Thermal Processing Systems
- Publication number 20250096032
- Publication date Mar 20, 2025
- Mattson Technology, Inc.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR PROVIDING VARIABLE RAMP-UP CONTROL FOR AN ELE...
- Publication number 20250089130
- Publication date Mar 13, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Brittany PHILLIPS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGETED GAS DELIVERY VIA SIDE GAS INJECTION
- Publication number 20250087506
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Tobin Kaufman-Osborn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS
- Publication number 20250087505
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Shashank Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
- Publication number 20250079201
- Publication date Mar 6, 2025
- SCREEN Holdings Co., Ltd.
- Takahiro YAMADA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER
- Publication number 20250079203
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER CONTROL DEVICE FOR TEMPERATURE CONTROL, THERMAL PROCESSING SY...
- Publication number 20250076906
- Publication date Mar 6, 2025
- AP SYSTEMS INC
- Sang Hyun JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOHEATING APPARATUS AND FLOW PATH STRUCTURE
- Publication number 20250079202
- Publication date Mar 6, 2025
- Ushio Denki Kabushiki Kaisha
- Kazumasa YOSHIOKA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE DEGAS STATION
- Publication number 20250069915
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Thomas BREZOCZKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...
- Publication number 20250066921
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Ranjit Rohidas Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE DEGAS STATION
- Publication number 20250069914
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Thomas BREZOCZKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE ANNEALER FOR SEMICONDUCTOR WAFERS
- Publication number 20250063641
- Publication date Feb 20, 2025
- Cornell University
- James C. M. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS COTROLLING INDIVIDUALLY THE OUTP...
- Publication number 20250062142
- Publication date Feb 20, 2025
- Viatron Co., Ltd.
- Hyoung June Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY
- Publication number 20250054788
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
- Publication number 20250054772
- Publication date Feb 13, 2025
- SCREEN Holdings Co., Ltd.
- Hideaki TANIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE
- Publication number 20250046634
- Publication date Feb 6, 2025
- SAMSUNG DISPLAY CO., LTD.
- Soonjong Park
- H01 - BASIC ELECTRIC ELEMENTS

mainly by radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Temperature measurement method, optical heating method, and optical...

Substrate laser processing method and substrate laser processing ap...

Pressure heating apparatus

Methods for thermal treatment of a semiconductor layer in semicondu...

Substrate processing method, modification device and substrate proc...

Substrate processing apparatus and substrate processing method

Method and apparatus for low temperature selective epitaxy in a dee...

Laser processing apparatus

Semiconductor deposition monitoring device

Light irradiation type heat treatment apparatus

Heating device and heating method

Support unit, substrate treating apparatus including the same, and...

Auto fine-tuner for desired temperature profile

Control device for laser annealing apparatus and laser annealing me...

Optical heating apparatus with angled light holding substrate and h...

Spot heating by moving a beam with horizontal rotary motion

Substrate processing apparatus and stage cleaning method

Substrate processing apparatus, method of manufacturing semiconduct...

Splash resistant laser wafer singulation by crack length control

Substrate processing system and substrate processing method

Support device for supporting a substrate, method of processing a s...

Wafer holder and temperature conditioning arrangement and method of...

Method of manufacturing a semiconductor device

Laser processing device for forming a modified region in an object...

Laser machining apparatus and laser machining method

Substrate processing system and substrate processing method

Light irradiation type heat treatment apparatus

Method and system for providing variable ramp-up control for an ele...

Substrate heating apparatus and method for processing a substrate

Apparatus for processing a wafer, and method of controlling such an...

Patents Applicationslast 30 patents

PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...

GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS

HEATING APPARATUS AND PRETREMENT METHOD FOR WAFER

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

HEATER BLOCK AND APPARATUS FOR HEATING SUBSTRATE HAVING THE SAME

ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...

HEATERS, AND RELATED CHAMBER KITS AND PROCESSING CHAMBERS, FOR SEMI...

APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUC...

LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND STORAGE MEDIUM

ETCHING PROCESSING METHOD AND ETCHING PROCESSING APPARATUS

METHOD FOR DECAPSULATING PACKAGED INTEGRATED CIRCUIT

CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...

SEMICONDUCTOR ELEMENT TRANSFER APPARATUS AND TRANSFER METHOD USING...

Support Structure for Thermal Processing Systems

METHOD AND SYSTEM FOR PROVIDING VARIABLE RAMP-UP CONTROL FOR AN ELE...

TARGETED GAS DELIVERY VIA SIDE GAS INJECTION

MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS

HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION

FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER

POWER CONTROL DEVICE FOR TEMPERATURE CONTROL, THERMAL PROCESSING SY...

PHOTOHEATING APPARATUS AND FLOW PATH STRUCTURE

SUBSTRATE DEGAS STATION

MULTI ZONE SPOT HEATING IN EPI

MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...

SUBSTRATE DEGAS STATION

MICROWAVE ANNEALER FOR SEMICONDUCTOR WAFERS

SUBSTRATE HEAT TREATMENT APPARATUS COTROLLING INDIVIDUALLY THE OUTP...

IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY

HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION

APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE