mainly by radiation

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CPC
H01L21/67115

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67115mainly by radiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for providing variable ramp-down control for an e...
- Patent number 12,369,228
- Issue date Jul 22, 2025
- Watlow Electric Manufacturing Company
- Brittany Phillips
- G01 - MEASURING TESTING
Information Patent Grant
Reflector plate for substrate processing
- Patent number 12,366,481
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflector and/or method for ultraviolet curing of semiconductor
- Patent number 12,368,062
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Chun Hu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Rapid thermal processing system with cooling system
- Patent number 12,362,194
- Issue date Jul 15, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device using stationary laser...
- Patent number 12,362,204
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Ji Hoon Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for laser drilling blind vias
- Patent number 12,358,073
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus, heat insulator assembly and method...
- Patent number 12,344,935
- Issue date Jul 1, 2025
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 12,341,031
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and temperature regulation method
- Patent number 12,341,039
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Tatsuya Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing target material in deposition chamber with ti...
- Patent number 12,341,042
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods of selective oxidation on rapid thermal processing (RTP) ch...
- Patent number 12,341,032
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Chaitanya Anjaneyalu Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate laser processing method and substrate laser processing ap...
- Patent number 12,322,656
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Yohei Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement method, optical heating method, and optical...
- Patent number 12,320,706
- Issue date Jun 3, 2025
- Ushio Denki Kabushiki Kaisha
- Takahiro Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure heating apparatus
- Patent number 12,322,613
- Issue date Jun 3, 2025
- Samsung Electronics Co., Ltd.
- Tatsuya Ishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for thermal treatment of a semiconductor layer in semicondu...
- Patent number 12,322,596
- Issue date Jun 3, 2025
- Yangtze Memory Technologies Co., Ltd.
- Kun Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, modification device and substrate proc...
- Patent number 12,322,599
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Norifumi Kohama
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,308,261
- Issue date May 20, 2025
- SCREEN Holdings Co., Ltd.
- Akira Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing apparatus
- Patent number 12,296,402
- Issue date May 13, 2025
- Disco Corporation
- Hironari Ohkubo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor deposition monitoring device
- Patent number 12,283,497
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Young Uk Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment apparatus
- Patent number 12,283,498
- Issue date Apr 22, 2025
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and heating method
- Patent number 12,278,122
- Issue date Apr 15, 2025
- Tokyo Electron Limited
- Takashi Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support unit, substrate treating apparatus including the same, and...
- Patent number 12,278,121
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Kangseop Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto fine-tuner for desired temperature profile
- Patent number 12,278,127
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device for laser annealing apparatus and laser annealing me...
- Patent number 12,263,537
- Issue date Apr 1, 2025
- Sumitomo Heavy Industries, Ltd.
- Yasuhiro Okada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical heating apparatus with angled light holding substrate and h...
- Patent number 12,261,061
- Issue date Mar 25, 2025
- Ushio Denki Kabushiki Kaisha
- Tomonori Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spot heating by moving a beam with horizontal rotary motion
- Patent number 12,261,062
- Issue date Mar 25, 2025
- Applied Materials, Inc.
- Shu-Kwan Danny Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,255,069
- Issue date Mar 18, 2025
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Splash resistant laser wafer singulation by crack length control
- Patent number 12,255,097
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Yang Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...
- Publication number 20250239475
- Publication date Jul 24, 2025
- JSW Aktina System Co., Ltd.
- Takahiro FUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20250239478
- Publication date Jul 24, 2025
- Mitsubishi Electric Corporation
- Kota HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250239440
- Publication date Jul 24, 2025
- SEMES CO., LTD.
- Yo Han BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250232990
- Publication date Jul 17, 2025
- SCREEN Holdings Co., Ltd.
- Akira ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20250231066
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20250226244
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Kento NAKANISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS
- Publication number 20250218819
- Publication date Jul 3, 2025
- LAM RESEARCH CORPORATION
- Ilia Kalinovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT PROCESSING APPARATUS
- Publication number 20250218830
- Publication date Jul 3, 2025
- PlayNitride Display Co., Ltd.
- Yen-Mu Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE SUPPORT UNIT AND HEAT TREATMENT DEVICE INCLUDING SAME
- Publication number 20250218855
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20250218824
- Publication date Jul 3, 2025
- SCREEN Holdings Co., Ltd.
- Tomohiro UENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES
- Publication number 20250216154
- Publication date Jul 3, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL SENSOR WAFER TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20250216268
- Publication date Jul 3, 2025
- LAM RESEARCH CORPORATION
- Ilia Kalinovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO FINE-TUNER FOR DESIRED TEMPERATURE PROFILE
- Publication number 20250210384
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL ASSEMBLY OF DISCRETE COMPONENTS ONTO A SUBSTRATE
- Publication number 20250201620
- Publication date Jun 19, 2025
- KULICKE & SOFFA NETHERLANDS B.V.
- Val Marinov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
- Publication number 20250201596
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Shu-Kwan Danny LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBS...
- Publication number 20250201595
- Publication date Jun 19, 2025
- SCREEN Holdings Co., Ltd.
- Kazuhiko FUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250191905
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Hayato TANOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250191921
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...
- Publication number 20250183066
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Abbas RASTEGAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS
- Publication number 20250167008
- Publication date May 22, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING APPARATUS AND PRETREMENT METHOD FOR WAFER
- Publication number 20250157835
- Publication date May 15, 2025
- HERMES-EPITEK CORPORATION
- Shang-Jr Gwo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250149389
- Publication date May 8, 2025
- SEMES CO., LTD.
- Il Young KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER BLOCK AND APPARATUS FOR HEATING SUBSTRATE HAVING THE SAME
- Publication number 20250140583
- Publication date May 1, 2025
- AP SYSTEMS INC
- Dae Ryong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...
- Publication number 20250132175
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATERS, AND RELATED CHAMBER KITS AND PROCESSING CHAMBERS, FOR SEMI...
- Publication number 20250132176
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Enle CHOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUC...
- Publication number 20250125165
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Sivananda Krishnan Kanakasabapathy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND STORAGE MEDIUM
- Publication number 20250125166
- Publication date Apr 17, 2025
- Sumitomo Heavy Industries, Ltd.
- Kazumasa YASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING PROCESSING METHOD AND ETCHING PROCESSING APPARATUS
- Publication number 20250112055
- Publication date Apr 3, 2025
- HITACHI HIGH-TECH CORPORATION
- Nobuya MIYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DECAPSULATING PACKAGED INTEGRATED CIRCUIT
- Publication number 20250112058
- Publication date Apr 3, 2025
- Tung Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...
- Publication number 20250112064
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS

mainly by radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for providing variable ramp-down control for an e...

Reflector plate for substrate processing

Reflector and/or method for ultraviolet curing of semiconductor

Rapid thermal processing system with cooling system

Method of manufacturing semiconductor device using stationary laser...

Method and apparatus for laser drilling blind vias

Substrate processing apparatus, heat insulator assembly and method...

Light irradiation type heat treatment method and heat treatment app...

Substrate processing apparatus and temperature regulation method

Method for depositing target material in deposition chamber with ti...

Methods of selective oxidation on rapid thermal processing (RTP) ch...

Substrate laser processing method and substrate laser processing ap...

Temperature measurement method, optical heating method, and optical...

Pressure heating apparatus

Methods for thermal treatment of a semiconductor layer in semicondu...

Substrate processing method, modification device and substrate proc...

Substrate processing apparatus and substrate processing method

Method and apparatus for low temperature selective epitaxy in a dee...

Laser processing apparatus

Semiconductor deposition monitoring device

Light irradiation type heat treatment apparatus

Heating device and heating method

Support unit, substrate treating apparatus including the same, and...

Auto fine-tuner for desired temperature profile

Control device for laser annealing apparatus and laser annealing me...

Optical heating apparatus with angled light holding substrate and h...

Spot heating by moving a beam with horizontal rotary motion

Substrate processing apparatus and stage cleaning method

Substrate processing apparatus, method of manufacturing semiconduct...

Splash resistant laser wafer singulation by crack length control

Patents Applicationslast 30 patents

CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...

RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS

COMPONENT PROCESSING APPARATUS

SUBSTRATE SUPPORT UNIT AND HEAT TREATMENT DEVICE INCLUDING SAME

HEAT TREATMENT APPARATUS

THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES

DUAL SENSOR WAFER TEMPERATURE MEASUREMENT SYSTEM

AUTO FINE-TUNER FOR DESIRED TEMPERATURE PROFILE

PARALLEL ASSEMBLY OF DISCRETE COMPONENTS ONTO A SUBSTRATE

SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBS...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...

GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS

HEATING APPARATUS AND PRETREMENT METHOD FOR WAFER

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

HEATER BLOCK AND APPARATUS FOR HEATING SUBSTRATE HAVING THE SAME

ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...

HEATERS, AND RELATED CHAMBER KITS AND PROCESSING CHAMBERS, FOR SEMI...

APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUC...

LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND STORAGE MEDIUM

ETCHING PROCESSING METHOD AND ETCHING PROCESSING APPARATUS

METHOD FOR DECAPSULATING PACKAGED INTEGRATED CIRCUIT

CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...