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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67115
mainly by radiation
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Patents Grants
last 30 patents
Information
Patent Grant
Temperature measurement method, optical heating method, and optical...
Patent number
12,320,706
Issue date
Jun 3, 2025
Ushio Denki Kabushiki Kaisha
Takahiro Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate laser processing method and substrate laser processing ap...
Patent number
12,322,656
Issue date
Jun 3, 2025
Tokyo Electron Limited
Yohei Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure heating apparatus
Patent number
12,322,613
Issue date
Jun 3, 2025
Samsung Electronics Co., Ltd.
Tatsuya Ishimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for thermal treatment of a semiconductor layer in semicondu...
Patent number
12,322,596
Issue date
Jun 3, 2025
Yangtze Memory Technologies Co., Ltd.
Kun Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, modification device and substrate proc...
Patent number
12,322,599
Issue date
Jun 3, 2025
Tokyo Electron Limited
Norifumi Kohama
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,308,261
Issue date
May 20, 2025
SCREEN Holdings Co., Ltd.
Akira Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
Patent number
12,297,559
Issue date
May 13, 2025
Applied Materials, Inc.
Abhishek Dube
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser processing apparatus
Patent number
12,296,402
Issue date
May 13, 2025
Disco Corporation
Hironari Ohkubo
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor deposition monitoring device
Patent number
12,283,497
Issue date
Apr 22, 2025
Samsung Electronics Co., Ltd.
Young Uk Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Light irradiation type heat treatment apparatus
Patent number
12,283,498
Issue date
Apr 22, 2025
SCREEN Holdings Co., Ltd.
Akitsugu Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating device and heating method
Patent number
12,278,122
Issue date
Apr 15, 2025
Tokyo Electron Limited
Takashi Sugimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support unit, substrate treating apparatus including the same, and...
Patent number
12,278,121
Issue date
Apr 15, 2025
Semes Co., Ltd.
Kangseop Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Auto fine-tuner for desired temperature profile
Patent number
12,278,127
Issue date
Apr 15, 2025
Applied Materials, Inc.
Yi Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control device for laser annealing apparatus and laser annealing me...
Patent number
12,263,537
Issue date
Apr 1, 2025
Sumitomo Heavy Industries, Ltd.
Yasuhiro Okada
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Optical heating apparatus with angled light holding substrate and h...
Patent number
12,261,061
Issue date
Mar 25, 2025
Ushio Denki Kabushiki Kaisha
Tomonori Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spot heating by moving a beam with horizontal rotary motion
Patent number
12,261,062
Issue date
Mar 25, 2025
Applied Materials, Inc.
Shu-Kwan Danny Lau
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus and stage cleaning method
Patent number
12,261,060
Issue date
Mar 25, 2025
Tokyo Electron Limited
Tsutomu Hiroki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
12,255,069
Issue date
Mar 18, 2025
Kokusai Electric Corporation
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Splash resistant laser wafer singulation by crack length control
Patent number
12,255,097
Issue date
Mar 18, 2025
Texas Instruments Incorporated
Yang Liu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
12,255,063
Issue date
Mar 18, 2025
Tokyo Electron Limited
Hayato Tanoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support device for supporting a substrate, method of processing a s...
Patent number
12,255,088
Issue date
Mar 18, 2025
Applied Materials Italia S.R.L.
Daniele Andreola
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer holder and temperature conditioning arrangement and method of...
Patent number
12,249,523
Issue date
Mar 11, 2025
EVATEC AG
Juergen Kielwein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
12,249,507
Issue date
Mar 11, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser processing device for forming a modified region in an object...
Patent number
12,246,397
Issue date
Mar 11, 2025
Hamamatsu Photonics K.K.
Takafumi Ogiwara
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser machining apparatus and laser machining method
Patent number
12,237,185
Issue date
Feb 25, 2025
Samsung Display Co., Ltd.
Heung Yeol Na
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
12,230,540
Issue date
Feb 18, 2025
Tokyo Electron Limited
Yoshihiro Kawaguchi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Light irradiation type heat treatment apparatus
Patent number
12,230,518
Issue date
Feb 18, 2025
SCREEN Holdings Co., Ltd.
Nobuhiko Nishide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for providing variable ramp-up control for an ele...
Patent number
12,225,635
Issue date
Feb 11, 2025
Watlow Electric Manufacturing Company
Brittany Phillips
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate heating apparatus and method for processing a substrate
Patent number
12,225,634
Issue date
Feb 11, 2025
Samsung Electronics Co., Ltd.
Taehong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing a wafer, and method of controlling such an...
Patent number
12,217,980
Issue date
Feb 4, 2025
Lam Research AG
Daniel Brien
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...
Publication number
20250183066
Publication date
Jun 5, 2025
Applied Materials, Inc.
Abbas RASTEGAR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS
Publication number
20250167008
Publication date
May 22, 2025
Beijing E-Town Semiconductor Technology Co., Ltd.
Matthias Bauer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING APPARATUS AND PRETREMENT METHOD FOR WAFER
Publication number
20250157835
Publication date
May 15, 2025
HERMES-EPITEK CORPORATION
Shang-Jr Gwo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250149389
Publication date
May 8, 2025
SEMES CO., LTD.
Il Young KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATER BLOCK AND APPARATUS FOR HEATING SUBSTRATE HAVING THE SAME
Publication number
20250140583
Publication date
May 1, 2025
AP SYSTEMS INC
Dae Ryong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...
Publication number
20250132175
Publication date
Apr 24, 2025
Applied Materials, Inc.
Tetsuya ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATERS, AND RELATED CHAMBER KITS AND PROCESSING CHAMBERS, FOR SEMI...
Publication number
20250132176
Publication date
Apr 24, 2025
Applied Materials, Inc.
Enle CHOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUC...
Publication number
20250125165
Publication date
Apr 17, 2025
LAM RESEARCH CORPORATION
Sivananda Krishnan Kanakasabapathy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND STORAGE MEDIUM
Publication number
20250125166
Publication date
Apr 17, 2025
Sumitomo Heavy Industries, Ltd.
Kazumasa YASUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING PROCESSING METHOD AND ETCHING PROCESSING APPARATUS
Publication number
20250112055
Publication date
Apr 3, 2025
HITACHI HIGH-TECH CORPORATION
Nobuya MIYOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DECAPSULATING PACKAGED INTEGRATED CIRCUIT
Publication number
20250112058
Publication date
Apr 3, 2025
Tung Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...
Publication number
20250112064
Publication date
Apr 3, 2025
ASM IP HOLDING B.V.
Amir Kajbafvala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR ELEMENT TRANSFER APPARATUS AND TRANSFER METHOD USING...
Publication number
20250105047
Publication date
Mar 27, 2025
Hyundai Motor Company
Tae Woo KWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Support Structure for Thermal Processing Systems
Publication number
20250096032
Publication date
Mar 20, 2025
Mattson Technology, Inc.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR PROVIDING VARIABLE RAMP-UP CONTROL FOR AN ELE...
Publication number
20250089130
Publication date
Mar 13, 2025
WATLOW ELECTRIC MANUFACTURING COMPANY
Brittany PHILLIPS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TARGETED GAS DELIVERY VIA SIDE GAS INJECTION
Publication number
20250087506
Publication date
Mar 13, 2025
Applied Materials, Inc.
Tobin Kaufman-Osborn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS
Publication number
20250087505
Publication date
Mar 13, 2025
Applied Materials, Inc.
Shashank Sharma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
Publication number
20250079201
Publication date
Mar 6, 2025
SCREEN Holdings Co., Ltd.
Takahiro YAMADA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER
Publication number
20250079203
Publication date
Mar 6, 2025
Applied Materials, Inc.
Zhepeng CONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER CONTROL DEVICE FOR TEMPERATURE CONTROL, THERMAL PROCESSING SY...
Publication number
20250076906
Publication date
Mar 6, 2025
AP SYSTEMS INC
Sang Hyun JI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOHEATING APPARATUS AND FLOW PATH STRUCTURE
Publication number
20250079202
Publication date
Mar 6, 2025
Ushio Denki Kabushiki Kaisha
Kazumasa YOSHIOKA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
SUBSTRATE DEGAS STATION
Publication number
20250069915
Publication date
Feb 27, 2025
Applied Materials, Inc.
Thomas BREZOCZKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI ZONE SPOT HEATING IN EPI
Publication number
20250066918
Publication date
Feb 27, 2025
Applied Materials, Inc.
Shu-Kwan LAU
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...
Publication number
20250066921
Publication date
Feb 27, 2025
ASM IP HOLDING B.V.
Ranjit Rohidas Borude
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE DEGAS STATION
Publication number
20250069914
Publication date
Feb 27, 2025
Applied Materials, Inc.
Thomas BREZOCZKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE ANNEALER FOR SEMICONDUCTOR WAFERS
Publication number
20250063641
Publication date
Feb 20, 2025
Cornell University
James C. M. Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS COTROLLING INDIVIDUALLY THE OUTP...
Publication number
20250062142
Publication date
Feb 20, 2025
Viatron Co., Ltd.
Hyoung June Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY
Publication number
20250054788
Publication date
Feb 13, 2025
LAM RESEARCH CORPORATION
Changyou Jing
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
Publication number
20250054772
Publication date
Feb 13, 2025
SCREEN Holdings Co., Ltd.
Hideaki TANIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE
Publication number
20250046634
Publication date
Feb 6, 2025
SAMSUNG DISPLAY CO., LTD.
Soonjong Park
H01 - BASIC ELECTRIC ELEMENTS