mainly by radiation

Industry

CPC
H01L21/67115

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67115mainly by radiation

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Temperature profile measurement and synchronized control on substra...
- Patent number 12,196,617
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Zuoming Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Laser processing method, semiconductor member manufacturing method,...
- Patent number 12,194,570
- Issue date Jan 14, 2025
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Atsushi Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser processing device, laser processing system and laser processi...
- Patent number 12,191,168
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Hirotoshi Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for thermally processing a substrate
- Patent number 12,191,171
- Issue date Jan 7, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- Xin Zhi He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulse train annealing method and apparatus
- Patent number 12,186,832
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Stephen Moffatt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Parallel assembly of discrete components onto a substrate
- Patent number 12,176,239
- Issue date Dec 24, 2024
- KULICKE & SOFFA NETHERLANDS B.V.
- Val Marinov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Support structure for thermal processing systems
- Patent number 12,176,241
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flat pocket susceptor design with improved heat transfer
- Patent number 12,170,213
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser processing apparatus
- Patent number 12,170,211
- Issue date Dec 17, 2024
- Disco Corporation
- Yuta Yoshida
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical heating device
- Patent number 12,165,889
- Issue date Dec 10, 2024
- Ushio Denki Kabushiki Kaisha
- Yoshiaki Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Identification of and compensation for a failure in a heater array
- Patent number 12,165,891
- Issue date Dec 10, 2024
- Lam Research Corporation
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus of light irradiation type and method for c...
- Patent number 12,160,936
- Issue date Dec 3, 2024
- SCREEN Holdings Co., Ltd.
- Kazuhiko Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 12,154,800
- Issue date Nov 26, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro Kitazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate-floatation-type laser processing apparatus and method for...
- Patent number 12,154,803
- Issue date Nov 26, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,154,826
- Issue date Nov 26, 2024
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating substrate
- Patent number 12,154,796
- Issue date Nov 26, 2024
- Semes Co., Ltd.
- Joo Jib Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus
- Patent number 12,148,644
- Issue date Nov 19, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Yuki Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser light source and a laser crystallization apparatus including...
- Patent number 12,131,920
- Issue date Oct 29, 2024
- Samsung Display Co., Ltd.
- Kyong Sik Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 12,131,913
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Display device
- Patent number 12,125,453
- Issue date Oct 22, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Light treating member, substrate treating apparatus including the s...
- Patent number 12,125,720
- Issue date Oct 22, 2024
- Semes Co., Ltd.
- Oh Jin Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,125,723
- Issue date Oct 22, 2024
- SCREEN Holdings Co., Ltd.
- Oma Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 12,125,708
- Issue date Oct 22, 2024
- HITACHI HIGH-TECH CORPORATION
- Takashi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen injection for arc lamps
- Patent number 12,120,780
- Issue date Oct 15, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlling temperature uniformity of subs...
- Patent number 12,106,979
- Issue date Oct 1, 2024
- University-Industry Cooperation Group of Kyung Hee University
- Jin Gyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flotation conveyance apparatus and laser processing apparatus
- Patent number 12,103,790
- Issue date Oct 1, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Takahiro Fuji
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser dicing system and method for dicing semiconductor structure i...
- Patent number 12,106,985
- Issue date Oct 1, 2024
- Yangtze Memory Technologies Co., Ltd.
- Liquan Cai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...
- Publication number 20250038005
- Publication date Jan 30, 2025
- Hitachi High-Tech Corporation
- Yoshihide YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AN...
- Publication number 20250038040
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250038016
- Publication date Jan 30, 2025
- AP SYSTEMS INC.
- Dae Ryong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED REFLECTOR FOR PROCESS CHAMBER
- Publication number 20250027716
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022753
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE
- Publication number 20250014530
- Publication date Jan 9, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
ETCHING METHOD
- Publication number 20250014907
- Publication date Jan 9, 2025
- HITACHI HIGH-TECH CORPORATION
- Takashi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250006525
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Takeshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...
- Publication number 20250006498
- Publication date Jan 2, 2025
- JSW Aktina System Co., Ltd.
- Ryosuke SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...
- Publication number 20240430986
- Publication date Dec 26, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Wenyan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND SEMICONDUCTOR SUBSTRATE MANUFACTURING...
- Publication number 20240395584
- Publication date Nov 28, 2024
- GlobalWafers Japan Co., Ltd.
- Takuya KAKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME
- Publication number 20240395574
- Publication date Nov 28, 2024
- SAMSUNG DISPLAY CO., LTD.
- DEOKJAE KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20240387205
- Publication date Nov 21, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES
- Publication number 20240387215
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PROCESSING A SUBSTRATE
- Publication number 20240379380
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-chun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFRARED REFLOW DEVICE
- Publication number 20240363376
- Publication date Oct 31, 2024
- National Pingtung University of Science and Technology
- Wei-Hua Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS
- Publication number 20240363327
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
DRY DEVELOPMENT APPARATUS AND METHODS FOR VOLATILIZATION OF DRY DEV...
- Publication number 20240355650
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Sivananda Krishnan Kanakasabapathy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240347356
- Publication date Oct 17, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE
- Publication number 20240347345
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR USING A SYSTEM FOR ANNEALING A WAFER AND SYSTEM FOR ANNE...
- Publication number 20240347355
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsin-Hao YEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED METHOD FOR CREATING ELECTROSTATIC CHUCK (ESC) MESA PATTERNS
- Publication number 20240339349
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Joseph Sommers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPI CHAMBER WITH FULL WAFER LASER HEATING
- Publication number 20240339342
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Danny LAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR RECYCLING SULFURIC ACID
- Publication number 20240327249
- Publication date Oct 3, 2024
- Industrial Technology Research Institute
- Hsin-Ju Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE OF MASS TRANSFERRING CHIPS
- Publication number 20240332049
- Publication date Oct 3, 2024
- AU OPTRONICS CORPORATION
- Wei-Chieh CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEATING APPARATUS AND LIGHT SOURCE UNIT
- Publication number 20240332045
- Publication date Oct 3, 2024
- Ushio Denki Kabushiki Kaisha
- Kazumasa YOSHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDI...
- Publication number 20240321599
- Publication date Sep 26, 2024
- Samsung Electronics Co., Ltd.
- Hoyoung RYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR CALIBRATING A SE...
- Publication number 20240321605
- Publication date Sep 26, 2024
- ASM IP HOLDING B.V.
- Shiva Rajavelu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER CLEAN
- Publication number 20240307930
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- B08 - CLEANING

mainly by radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Temperature profile measurement and synchronized control on substra...

Laser processing method, semiconductor member manufacturing method,...

Laser processing device, laser processing system and laser processi...

Apparatus for thermally processing a substrate

Pulse train annealing method and apparatus

Parallel assembly of discrete components onto a substrate

Support structure for thermal processing systems

Flat pocket susceptor design with improved heat transfer

Laser processing apparatus

Optical heating device

Multi zone spot heating in EPI

Identification of and compensation for a failure in a heater array

Heat treatment apparatus of light irradiation type and method for c...

Heat treatment apparatus and heat treatment method

Substrate-floatation-type laser processing apparatus and method for...

Method of manufacturing semiconductor device, substrate processing...

Method for treating substrate

Laser irradiation apparatus

Heating platform, thermal treatment and manufacturing method

Laser light source and a laser crystallization apparatus including...

Methods, systems, and apparatus for processing substrates using one...

Integrated epitaxy and preclean system

Display device

Light treating member, substrate treating apparatus including the s...

Heat treatment method and heat treatment apparatus

Etching method

Nitrogen injection for arc lamps

Apparatus and method for controlling temperature uniformity of subs...

Flotation conveyance apparatus and laser processing apparatus

Laser dicing system and method for dicing semiconductor structure i...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...

LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

IMPROVED REFLECTOR FOR PROCESS CHAMBER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

DISPLAY DEVICE

ETCHING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...

HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...

HEAT TREATMENT APPARATUS AND SEMICONDUCTOR SUBSTRATE MANUFACTURING...

LASER DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

Support Plate for Localized Heating in Thermal Processing Systems

SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES

SYSTEMS AND METHODS FOR PROCESSING A SUBSTRATE

INFRARED REFLOW DEVICE

EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS

DRY DEVELOPMENT APPARATUS AND METHODS FOR VOLATILIZATION OF DRY DEV...

Workpiece Processing Apparatus with Thermal Processing Systems

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

METHOD FOR USING A SYSTEM FOR ANNEALING A WAFER AND SYSTEM FOR ANNE...

ADVANCED METHOD FOR CREATING ELECTROSTATIC CHUCK (ESC) MESA PATTERNS

EPI CHAMBER WITH FULL WAFER LASER HEATING

DEVICE AND METHOD FOR RECYCLING SULFURIC ACID

DEVICE OF MASS TRANSFERRING CHIPS

OPTICAL HEATING APPARATUS AND LIGHT SOURCE UNIT

CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDI...

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR CALIBRATING A SE...

PROCESS CHAMBER CLEAN