mainly by radiation

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H01L21/67115

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67115mainly by radiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Laser machining apparatus and laser machining method
- Patent number 12,237,185
- Issue date Feb 25, 2025
- Samsung Display Co., Ltd.
- Heung Yeol Na
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light irradiation type heat treatment apparatus
- Patent number 12,230,518
- Issue date Feb 18, 2025
- SCREEN Holdings Co., Ltd.
- Nobuhiko Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for providing variable ramp-up control for an ele...
- Patent number 12,225,635
- Issue date Feb 11, 2025
- Watlow Electric Manufacturing Company
- Brittany Phillips
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate heating apparatus and method for processing a substrate
- Patent number 12,225,634
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Taehong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing a wafer, and method of controlling such an...
- Patent number 12,217,980
- Issue date Feb 4, 2025
- Lam Research AG
- Daniel Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and method of collecting residues
- Patent number 12,217,989
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light-irradiation heat treatment apparatus
- Patent number 12,219,670
- Issue date Feb 4, 2025
- SCREEN Holdings Co., Ltd.
- Makoto Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature profile measurement and synchronized control on substra...
- Patent number 12,196,617
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Zuoming Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Laser processing method, semiconductor member manufacturing method,...
- Patent number 12,194,570
- Issue date Jan 14, 2025
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Atsushi Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser processing device, laser processing system and laser processi...
- Patent number 12,191,168
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Hirotoshi Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for thermally processing a substrate
- Patent number 12,191,171
- Issue date Jan 7, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- Xin Zhi He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulse train annealing method and apparatus
- Patent number 12,186,832
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Stephen Moffatt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Parallel assembly of discrete components onto a substrate
- Patent number 12,176,239
- Issue date Dec 24, 2024
- KULICKE & SOFFA NETHERLANDS B.V.
- Val Marinov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Support structure for thermal processing systems
- Patent number 12,176,241
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flat pocket susceptor design with improved heat transfer
- Patent number 12,170,213
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser processing apparatus
- Patent number 12,170,211
- Issue date Dec 17, 2024
- Disco Corporation
- Yuta Yoshida
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical heating device
- Patent number 12,165,889
- Issue date Dec 10, 2024
- Ushio Denki Kabushiki Kaisha
- Yoshiaki Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Identification of and compensation for a failure in a heater array
- Patent number 12,165,891
- Issue date Dec 10, 2024
- Lam Research Corporation
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus of light irradiation type and method for c...
- Patent number 12,160,936
- Issue date Dec 3, 2024
- SCREEN Holdings Co., Ltd.
- Kazuhiko Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 12,154,800
- Issue date Nov 26, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro Kitazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate-floatation-type laser processing apparatus and method for...
- Patent number 12,154,803
- Issue date Nov 26, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,154,826
- Issue date Nov 26, 2024
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating substrate
- Patent number 12,154,796
- Issue date Nov 26, 2024
- Semes Co., Ltd.
- Joo Jib Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus
- Patent number 12,148,644
- Issue date Nov 19, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Yuki Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser light source and a laser crystallization apparatus including...
- Patent number 12,131,920
- Issue date Oct 29, 2024
- Samsung Display Co., Ltd.
- Kyong Sik Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 12,131,913
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
- Publication number 20250079201
- Publication date Mar 6, 2025
- SCREEN Holdings Co., Ltd.
- Takahiro YAMADA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER
- Publication number 20250079203
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER CONTROL DEVICE FOR TEMPERATURE CONTROL, THERMAL PROCESSING SY...
- Publication number 20250076906
- Publication date Mar 6, 2025
- AP SYSTEMS INC
- Sang Hyun JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOHEATING APPARATUS AND FLOW PATH STRUCTURE
- Publication number 20250079202
- Publication date Mar 6, 2025
- Ushio Denki Kabushiki Kaisha
- Kazumasa YOSHIOKA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE DEGAS STATION
- Publication number 20250069915
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Thomas BREZOCZKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...
- Publication number 20250066921
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Ranjit Rohidas Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE DEGAS STATION
- Publication number 20250069914
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Thomas BREZOCZKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE ANNEALER FOR SEMICONDUCTOR WAFERS
- Publication number 20250063641
- Publication date Feb 20, 2025
- Cornell University
- James C. M. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS COTROLLING INDIVIDUALLY THE OUTP...
- Publication number 20250062142
- Publication date Feb 20, 2025
- Viatron Co., Ltd.
- Hyoung June Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY
- Publication number 20250054788
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
- Publication number 20250054772
- Publication date Feb 13, 2025
- SCREEN Holdings Co., Ltd.
- Hideaki TANIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE
- Publication number 20250046634
- Publication date Feb 6, 2025
- SAMSUNG DISPLAY CO., LTD.
- Soonjong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF OPERATING THEREOF
- Publication number 20250046632
- Publication date Feb 6, 2025
- Rohm Co., Ltd.
- Makoto TAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20250046631
- Publication date Feb 6, 2025
- SEMES CO., LTD.
- Young Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...
- Publication number 20250038005
- Publication date Jan 30, 2025
- Hitachi High-Tech Corporation
- Yoshihide YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AN...
- Publication number 20250038040
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250038016
- Publication date Jan 30, 2025
- AP SYSTEMS INC.
- Dae Ryong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED REFLECTOR FOR PROCESS CHAMBER
- Publication number 20250027716
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022753
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE
- Publication number 20250014530
- Publication date Jan 9, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
ETCHING METHOD
- Publication number 20250014907
- Publication date Jan 9, 2025
- HITACHI HIGH-TECH CORPORATION
- Takashi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250006525
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Takeshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...
- Publication number 20250006498
- Publication date Jan 2, 2025
- JSW Aktina System Co., Ltd.
- Ryosuke SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...
- Publication number 20240430986
- Publication date Dec 26, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Wenyan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND SEMICONDUCTOR SUBSTRATE MANUFACTURING...
- Publication number 20240395584
- Publication date Nov 28, 2024
- GlobalWafers Japan Co., Ltd.
- Takuya KAKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME
- Publication number 20240395574
- Publication date Nov 28, 2024
- SAMSUNG DISPLAY CO., LTD.
- DEOKJAE KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20240387205
- Publication date Nov 21, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS

mainly by radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser machining apparatus and laser machining method

Substrate processing system and substrate processing method

Light irradiation type heat treatment apparatus

Method and system for providing variable ramp-up control for an ele...

Substrate heating apparatus and method for processing a substrate

Apparatus for processing a wafer, and method of controlling such an...

Semiconductor apparatus and method of collecting residues

Light-irradiation heat treatment apparatus

Temperature profile measurement and synchronized control on substra...

Laser processing method, semiconductor member manufacturing method,...

Laser processing device, laser processing system and laser processi...

Apparatus for thermally processing a substrate

Pulse train annealing method and apparatus

Parallel assembly of discrete components onto a substrate

Support structure for thermal processing systems

Flat pocket susceptor design with improved heat transfer

Laser processing apparatus

Optical heating device

Multi zone spot heating in EPI

Identification of and compensation for a failure in a heater array

Heat treatment apparatus of light irradiation type and method for c...

Heat treatment apparatus and heat treatment method

Substrate-floatation-type laser processing apparatus and method for...

Method of manufacturing semiconductor device, substrate processing...

Method for treating substrate

Laser irradiation apparatus

Heating platform, thermal treatment and manufacturing method

Laser light source and a laser crystallization apparatus including...

Methods, systems, and apparatus for processing substrates using one...

Integrated epitaxy and preclean system

Patents Applicationslast 30 patents

HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION

FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER

POWER CONTROL DEVICE FOR TEMPERATURE CONTROL, THERMAL PROCESSING SY...

PHOTOHEATING APPARATUS AND FLOW PATH STRUCTURE

SUBSTRATE DEGAS STATION

MULTI ZONE SPOT HEATING IN EPI

MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...

SUBSTRATE DEGAS STATION

MICROWAVE ANNEALER FOR SEMICONDUCTOR WAFERS

SUBSTRATE HEAT TREATMENT APPARATUS COTROLLING INDIVIDUALLY THE OUTP...

IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY

HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION

APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE

HEAT TREATMENT APPARATUS AND METHOD OF OPERATING THEREOF

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...

LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

IMPROVED REFLECTOR FOR PROCESS CHAMBER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

DISPLAY DEVICE

ETCHING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...

HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...

HEAT TREATMENT APPARATUS AND SEMICONDUCTOR SUBSTRATE MANUFACTURING...

LASER DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

Support Plate for Localized Heating in Thermal Processing Systems