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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67115
mainly by radiation
Industries
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
11,978,654
Issue date
May 7, 2024
Semes Co., Ltd.
Min Sung Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser processing apparatus
Patent number
11,978,645
Issue date
May 7, 2024
Disco Corporation
Masaru Nakamura
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Planarization system, planarization process, and method of manufact...
Patent number
11,972,976
Issue date
Apr 30, 2024
Canon Kabushiki Kaisha
Byung-Jin Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,967,512
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Makoto Sambu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser processing apparatus
Patent number
11,964,342
Issue date
Apr 23, 2024
JSW AKTINA SYSTEM CO., LTD.
Teruaki Shimoji
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems for thermally treating conductive elements on semiconductor...
Patent number
11,967,576
Issue date
Apr 23, 2024
Micron Technology, Inc.
James M. Derderian
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Support unit and substrate treating apparatus including the same
Patent number
11,961,748
Issue date
Apr 16, 2024
Semes Co., Ltd.
Kangseop Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
Patent number
11,955,388
Issue date
Apr 9, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer temperature measurement in an ion implantation system
Patent number
11,942,343
Issue date
Mar 26, 2024
Advanced Ion Beam Technology, Inc.
Chien-Li Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for non radial temperature control for rotating substrates
Patent number
11,942,381
Issue date
Mar 26, 2024
Applied Materials, Inc.
Wolfgang R. Aderhold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflector and/or method for ultraviolet curing of semiconductor
Patent number
11,929,267
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Chun Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low warpage curing methodology by inducing curvature
Patent number
11,929,260
Issue date
Mar 12, 2024
Applied Materials, Inc.
Fang Jie Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate heating unit, substrate processing apparatus, and substra...
Patent number
11,923,213
Issue date
Mar 5, 2024
Semes Co., Ltd.
Tae Shin Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus, systems, and methods of measuring edge ring distance for...
Patent number
11,915,953
Issue date
Feb 27, 2024
Applied Materials, Inc.
Ole Luckner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Flattening apparatus, article manufacturing method, flattening meth...
Patent number
11,915,948
Issue date
Feb 27, 2024
Canon Kabushiki Kaisha
Tomohiko Yoshida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Atomic oxygen and ozone device for cleaning and surface treatment
Patent number
11,908,679
Issue date
Feb 20, 2024
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Light irradiation type heat treatment method
Patent number
11,908,703
Issue date
Feb 20, 2024
SCREEN Holdings Co., Ltd.
Mao Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization process, planarization system and method of manufactu...
Patent number
11,908,711
Issue date
Feb 20, 2024
Canon Kabushiki Kaisha
Steven C. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light irradiation type heat treatment method and heat treatment app...
Patent number
11,901,200
Issue date
Feb 13, 2024
SCREEN Holdings Co., Ltd.
Akitsugu Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer processing apparatus and method of manufacturing semiconducto...
Patent number
11,883,905
Issue date
Jan 30, 2024
Samsung Electronics Co., Ltd.
Youngchul Kwon
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Susceptor with ring to limit backside deposition
Patent number
11,885,019
Issue date
Jan 30, 2024
ASM IP Holding B.V.
Mark Hawkins
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Manufacturing apparatus and manufacturing method using the same
Patent number
11,887,998
Issue date
Jan 30, 2024
Samsung Display Co., Ltd.
Soo Young Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light-irradiation thermal treatment apparatus
Patent number
11,881,420
Issue date
Jan 23, 2024
SCREEN Holdings Co., Ltd.
Takahiro Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
Patent number
11,876,006
Issue date
Jan 16, 2024
SCREEN Holdings Co., Ltd.
Tomohiro Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system of control of epitaxial growth
Patent number
11,869,769
Issue date
Jan 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Winnie Victoria Wei-Ning Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition apparatus
Patent number
11,869,798
Issue date
Jan 9, 2024
Tokyo Electron Limited
Manabu Honma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and system for treating substrate
Patent number
11,869,763
Issue date
Jan 9, 2024
Semes Co., Ltd.
Jun Keon Ahn
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,862,491
Issue date
Jan 2, 2024
Semes Co., Ltd.
Dohyeon Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for preventing stiction of high aspect ratio st...
Patent number
11,854,792
Issue date
Dec 26, 2023
Lam Research AG
Dries Dictus
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240145267
Publication date
May 2, 2024
TOKYO ELECTRON LIMITED
Einosuke TSUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION PROCESS, PLANARIZATION SYSTEM AND METHOD OF MANUFACTU...
Publication number
20240145269
Publication date
May 2, 2024
Canon Kabushiki Kaisha
STEVEN C. SHACKLETON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS...
Publication number
20240136207
Publication date
Apr 25, 2024
Applied Materials, Inc.
Ala MORADIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RAPID THERMAL PROCESSING (RTP) CHAMBER OUTGASSING REMOVAL
Publication number
20240123477
Publication date
Apr 18, 2024
Applied Materials, Inc.
Wolfgang Aderhold
B08 - CLEANING
Information
Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
Publication number
20240128096
Publication date
Apr 18, 2024
SCREEN Holdings Co., Ltd.
Akitsugu UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND METHOD FOR MANUFACTURI...
Publication number
20240120198
Publication date
Apr 11, 2024
JSW Aktina System Co., Ltd.
Yoshihiro YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD
Publication number
20240112911
Publication date
Apr 4, 2024
SAMSUNG DISPLAY CO., LTD.
Heegwan RYU
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING S...
Publication number
20240112930
Publication date
Apr 4, 2024
ASM IP HOLDING, B.V.
Fan Gao
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PARALLEL ASSEMBLY OF DISCRETE COMPONENTS ONTO A SUBSTRATE
Publication number
20240105491
Publication date
Mar 28, 2024
KULICKE & SOFFA NETHERLANDS B.V.
Val Marinov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Optical Annealing Apparatus And Method For Forming Semiconductor St...
Publication number
20240105473
Publication date
Mar 28, 2024
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
Lei WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS
Publication number
20240105474
Publication date
Mar 28, 2024
SCREEN Holdings Co., Ltd.
Takahiro KITAZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER HEATING APPARATUS AND WAFER PROCESSING APPARATUS USING THE SAME
Publication number
20240096663
Publication date
Mar 21, 2024
SEMES CO., LTD.
Soo Han SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240087900
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Hayato TANOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND LEAK DETERMINATION METHOD FOR US...
Publication number
20240087920
Publication date
Mar 14, 2024
SCREEN Holdings Co., Ltd.
Mao OMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTOR PLATE FOR SUBSTRATE PROCESSING
Publication number
20240079252
Publication date
Mar 7, 2024
Applied Materials, Inc.
Dongming IU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SCRIBING TRENCH OPENING CONTROL IN WAFER DICING USING HYBRID...
Publication number
20240079273
Publication date
Mar 7, 2024
Applied Materials, Inc.
Jungrae Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE
Publication number
20240071786
Publication date
Feb 29, 2024
Viatron Co., Ltd.
Hyoung June Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20240071785
Publication date
Feb 29, 2024
NEXTIN, INC.
Seoung-Ju Na
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE
Publication number
20240071787
Publication date
Feb 29, 2024
Viatron Co., Ltd.
Hyoung June Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLAT SUBSTRATE HEATING APPARAUS USING LASER LIGHT-EMITTING DEVICE
Publication number
20240071788
Publication date
Feb 29, 2024
Viatron Co., Ltd.
Hyoung June Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTOR AND/OR METHOD FOR ULTRAVIOLET CURING OF SEMICONDUCTOR
Publication number
20240063035
Publication date
Feb 22, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chien-Chun Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...
Publication number
20240055279
Publication date
Feb 15, 2024
ASM IP HOLDING B.V.
Shiva K.T. Rajavelu Muralidhar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20240047239
Publication date
Feb 8, 2024
Hitachi High-Tech Corporation
Miyako Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI ZONE SPOT HEATING IN EPI
Publication number
20240044004
Publication date
Feb 8, 2024
Applied Materials, Inc.
Shu-Kwan LAU
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20240030050
Publication date
Jan 25, 2024
LAM RESEARCH AG
Alois GOLLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
Publication number
20240030021
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Yohei YAMASHITA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYNCHRONIZATION BETWEEN TEMPERATURE MEASUREMENT DEVICE AND RADIATIO...
Publication number
20240014052
Publication date
Jan 11, 2024
Benjamin BROSILOW
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CMOS WELL REGIONS WITH HIGH DOPANT ACTIVATION LEVEL AND REDUCED EXT...
Publication number
20240006246
Publication date
Jan 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Fan Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD
Publication number
20240006167
Publication date
Jan 4, 2024
SEMES CO., LTD.
Kwang Ryul KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING...
Publication number
20240006206
Publication date
Jan 4, 2024
Kokusai Electric Corporation
Masako Sueyoshi
H01 - BASIC ELECTRIC ELEMENTS