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Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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ELECTRICITY
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/027
Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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Patents Grants
last 30 patents
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Patent Grant
Width adjustment of EUV radiation beam
Patent number
12,292,687
Issue date
May 6, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion exposure method and apparatus
Patent number
12,293,924
Issue date
May 6, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
12,292,686
Issue date
May 6, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Yung-Yao Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Directed self-assembly enabled subtractive metal patterning
Patent number
12,293,913
Issue date
May 6, 2025
Intel Corporation
Gurpreet Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adhesion layer for multi-layer photoresist
Patent number
12,292,684
Issue date
May 6, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Yu Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organic light emitting diode display and method for manufacturing t...
Patent number
12,289,952
Issue date
Apr 29, 2025
Samsung Display Co., Ltd.
Jin-Kwang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist and method of formation and use
Patent number
12,287,575
Issue date
Apr 29, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Keng-Chu Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Film deposition apparatus for fine pattern forming
Patent number
12,288,671
Issue date
Apr 29, 2025
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabricating a device using a multilayer stack
Patent number
12,288,687
Issue date
Apr 29, 2025
Google LLC
Anthony Edward Megrant
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Modifying hydrophobicity of a wafer surface using an organosilicon...
Patent number
12,288,685
Issue date
Apr 29, 2025
Lam Research Corporation
Jeremy D. Fields
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Selective deposition of carbon on photoresist layer for lithography...
Patent number
12,283,484
Issue date
Apr 22, 2025
Applied Materials, Inc.
Nancy Fung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Manufacturing method for compound semiconductor device
Patent number
12,283,922
Issue date
Apr 22, 2025
Fujitsu Limited
Kozo Makiyama
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Pattern decomposition lithography techniques
Patent number
12,278,204
Issue date
Apr 15, 2025
Intel Corporation
Charles H. Wallace
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Preparation method of semiconductor device
Patent number
12,278,106
Issue date
Apr 15, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Jun Xia
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device with helmet structure between two semiconducto...
Patent number
12,278,236
Issue date
Apr 15, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of forming semiconductor devices
Patent number
12,272,555
Issue date
Apr 8, 2025
Samsung Electronics Co., Ltd.
Jinyoung Park
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Template, manufacturing method of template, and manufacturing metho...
Patent number
12,271,111
Issue date
Apr 8, 2025
Kioxia Corporation
Takahiro Iwasaki
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Grant
Method of manufacturing a semiconductor device
Patent number
12,271,113
Issue date
Apr 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Cheng Liu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Multi-layer photo etching mask including organic and inorganic mate...
Patent number
12,272,553
Issue date
Apr 8, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Oblique deposition and etch processes
Patent number
12,272,559
Issue date
Apr 8, 2025
Tokyo Electron Limited
Akiteru Ko
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for preparing semiconductor structure
Patent number
12,272,565
Issue date
Apr 8, 2025
NANYA TECHNOLOGY CORPORATION
Wei-Chuan Fang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Selective metal removal with flowable polymer
Patent number
12,272,551
Issue date
Apr 8, 2025
Applied Materials, Inc.
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Low warpage high density trench capacitor
Patent number
12,272,725
Issue date
Apr 8, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Jyun-Ying Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Gate-all-around integrated circuit structures having embedded GeSnB...
Patent number
12,272,727
Issue date
Apr 8, 2025
Intel Corporation
Cory Bomberger
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for preparing semiconductor device structure with features a...
Patent number
12,272,552
Issue date
Apr 8, 2025
NANYA TECHNOLOGY CORPORATION
Chih-Tsung Wu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Agglutinant for pellicle, pellicle, exposure original plate with pe...
Patent number
12,265,324
Issue date
Apr 1, 2025
Shin-Etsu Chemical Co., Ltd.
Yuichi Hamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
12,265,332
Issue date
Apr 1, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Tse Lai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Photoactive, inorganic ligand-capped inorganic nanocrystals
Patent number
12,265,328
Issue date
Apr 1, 2025
The University of Chicago
Dmitri V. Talapin
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Grant
Directed self-assembly enabled patterning over metal layers using a...
Patent number
12,266,527
Issue date
Apr 1, 2025
Intel Corporation
Gurpreet Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor devices
Patent number
12,266,539
Issue date
Apr 1, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ru-Gun Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD TO PATTERN A SEMICONDUCTOR SUBSTRATE USING A MULTILAYER PHOT...
Publication number
20250149335
Publication date
May 8, 2025
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
Publication number
20250147417
Publication date
May 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Cheng LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRC...
Publication number
20250149336
Publication date
May 8, 2025
Samsung Electronics Co., Ltd.
Yonghoon MOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polymer, Positive And Negative Photosensitive Resin Compositions, P...
Publication number
20250147420
Publication date
May 8, 2025
Shin-Etsu Chemical Co., Ltd.
Hiroyuki URANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithography Process and Material for Negative Tone Development
Publication number
20250138428
Publication date
May 1, 2025
Taiwan Semiconductor Manufacturing Co., LTD
Chien-Wei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, PATTERN FORMING APPARATUS, INFORM...
Publication number
20250138427
Publication date
May 1, 2025
Canon Kabushiki Kaisha
JUNYA TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTIMIZATION FOR LOCAL CHEMICAL EXPOSURE
Publication number
20250132207
Publication date
Apr 24, 2025
Geminatio, Inc.
Brennan Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GENERATION OF MULTILINE ETCH SUBSTRATES
Publication number
20250132166
Publication date
Apr 24, 2025
Geminatio, Inc.
Brennan Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING ORGANIC FILM, METHOD FOR FORMING ORGANIC FI...
Publication number
20250129203
Publication date
Apr 24, 2025
Shin-Etsu Chemical Co., Ltd.
Daisuke KORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NARROW LINE CUT MASKING PROCESS
Publication number
20250132156
Publication date
Apr 24, 2025
Geminatio, Inc.
Brennan Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POSITIVE TYPE LIFT-OFF RESIST COMPOSITION AND METHOD FOR MANUFACTUR...
Publication number
20250130496
Publication date
Apr 24, 2025
Merck Patent GmbH
YANO TOMOTSUGU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Composition For Forming Resist Underlayer Film, Resist Underlayer F...
Publication number
20250129209
Publication date
Apr 24, 2025
Shin-Etsu Chemical Co., Ltd.
Shohei IWAMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST UNDERLAYER COMPOSITION
Publication number
20250130499
Publication date
Apr 24, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Yu KUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM, RESIST UNDERLAYER F...
Publication number
20250123565
Publication date
Apr 17, 2025
Shin-Etsu Chemical Co., Ltd.
Shohei IWAMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING LINE PATTERN IN SEMICONDUCTOR DEVICE
Publication number
20250125147
Publication date
Apr 17, 2025
NANYA TECHNOLOGY CORPORATION
Chao Yuan CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE PASSIVATION OF PHOTORESISTS
Publication number
20250118555
Publication date
Apr 10, 2025
TOKYO ELECTRON LIMITED
Ankur Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY PROCESS
Publication number
20250116937
Publication date
Apr 10, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hui WENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOCURABLE RESIN COMPOSITION CONTAINING SELF-CROSSLINKABLE POLYMER
Publication number
20250116936
Publication date
Apr 10, 2025
NISSAN CHEMICAL CORPORATION
Takahiro KISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST COMPOSITION FOR PHOTOLITHOGRAPHY AND METHOD FOR MANUFACTURIN...
Publication number
20250116923
Publication date
Apr 10, 2025
Inha University Research and Business Foundation
Jinkyun LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE HARDMASK ETCH FOR SEMICONDUCTOR PROCESSING
Publication number
20250118557
Publication date
Apr 10, 2025
Applied Materials, Inc.
Sonam Dorje Sherpa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH SLANTED FIELD PLATE
Publication number
20250120157
Publication date
Apr 10, 2025
TEXAS INSTRUMENTS INCORPORATED
Jonas Höhenberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PATTERNS
Publication number
20250115691
Publication date
Apr 10, 2025
Samsung SDI Co., Ltd.
Seung-Wook SHIN
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
METHOD FOR FORMING DEPOSITION FILM
Publication number
20250118556
Publication date
Apr 10, 2025
Resonac Corporation
Daisuke SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION HAVIN...
Publication number
20250110402
Publication date
Apr 3, 2025
NISSAN CHEMICAL CORPORATION
Kodai KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM CONTAINING HYDROXYCI...
Publication number
20250109242
Publication date
Apr 3, 2025
NISSAN CHEMICAL CORPORATION
Shun KUBODERA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20250112044
Publication date
Apr 3, 2025
NANYA TECHNOLOGY CORPORATION
Shing-Yih SHIH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY DEVELOPMENT OF RESISTS
Publication number
20250112045
Publication date
Apr 3, 2025
LAM RESEARCH CORPORATION
Boris Volosskiy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD, AND RESIST BASE FILM...
Publication number
20250110407
Publication date
Apr 3, 2025
JSR Corporation
Hiroyuki KOMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE-ALL-AROUND INTEGRATED CIRCUIT STRUCTURES HAVING REMOVED SUBSTRATE
Publication number
20250107181
Publication date
Mar 27, 2025
Intel Corporation
Biswajeet GUHA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND STRUCTURES FOR IMPROVING ETCH PROFILE OF UNDERLYING LAYERS
Publication number
20250105015
Publication date
Mar 27, 2025
TOKYO ELECTRON LIMITED
Shihsheng CHANG
H01 - BASIC ELECTRIC ELEMENTS