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Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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ELECTRICITY
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/027
Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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Patents Grants
last 30 patents
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Patent Grant
Photoresist developer and method of developing photoresist
Patent number
11,971,657
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of forming the same
Patent number
11,973,149
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yu-Hsing Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adhesion layers for EUV lithography
Patent number
11,972,948
Issue date
Apr 30, 2024
Brewer Science, Inc.
Andrea M. Chacko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sequential infiltration synthesis apparatus
Patent number
11,970,766
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Ivo Johannes Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
SRAM layout for double patterning
Patent number
11,974,421
Issue date
Apr 30, 2024
Texas Instruments Incorporated
James Walter Blatchford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical-resistant protective film forming composition containing h...
Patent number
11,965,059
Issue date
Apr 23, 2024
NISSAN CHEMICAL CORPORATION
Shigetaka Otagiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photomask for imprinting and manufacturing method therefor
Patent number
11,966,163
Issue date
Apr 23, 2024
LG Chem, Ltd.
Yong Goo Son
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming interconnect structures in semiconductor fabrica...
Patent number
11,967,552
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Ming-Han Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
Patent number
11,961,708
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Haruyuki Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photocurable composition, method for producing concave-convex struc...
Patent number
11,958,971
Issue date
Apr 16, 2024
Mitsui Chemicals, Inc.
Takashi Oda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor devices
Patent number
11,961,738
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chin-Ta Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
11,955,335
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus, imprint method, and manufacturing method of semi...
Patent number
11,953,825
Issue date
Apr 9, 2024
Kioxia Corporation
Masayuki Hatano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Two-stage bake photoresist with releasable quencher
Patent number
11,955,343
Issue date
Apr 9, 2024
Intel Corporation
Robert L. Bristol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Conductive element for semiconductor devices
Patent number
11,955,380
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Chiang Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a picoscopic scale/ nanoscopic scale circuit pattern
Patent number
11,953,828
Issue date
Apr 9, 2024
LONGSERVING TECHNOLOGY CO., LTD
Ko-Cheng Fang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lined photobucket structure for back end of line (BEOL) interconnec...
Patent number
11,953,826
Issue date
Apr 9, 2024
Intel Corporation
James M. Blackwell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,955,336
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jing Hong Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Differential hardmasks for modulation of electrobucket sensitivity
Patent number
11,955,377
Issue date
Apr 9, 2024
Intel Corporation
Kevin L. Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for passivating sidewalls of semiconductor wafers and semic...
Patent number
11,948,803
Issue date
Apr 2, 2024
Modulight Oy
Riina Ulkuniemi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for making photolithography mask plate
Patent number
11,947,255
Issue date
Apr 2, 2024
Tsinghua University
Mo Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
11,948,797
Issue date
Apr 2, 2024
Mitsubishi Electric Corporation
Takahiro Ueno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for forming semiconductor device with helmet structure betwe...
Patent number
11,942,476
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reticle enclosure for lithography systems
Patent number
11,940,727
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Tsung Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Embedded memory with improved fill-in window
Patent number
11,943,921
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Meng-Han Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microelectronic assemblies having conductive structures with differ...
Patent number
11,942,334
Issue date
Mar 26, 2024
Intel Corporation
Jeremy Ecton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask protective module, pellicle having the same, and lithography a...
Patent number
11,940,726
Issue date
Mar 26, 2024
Industry-University Cooperation Foundation Hanyang University
Jinho Ahn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,935,747
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Hsin Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PATTERNING UNDERLYING STRUCTURE
Publication number
20240145244
Publication date
May 2, 2024
Powerchip Semiconductor Manufacturing Corporation
Yun-An Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND COMPOSITION
Publication number
20240142876
Publication date
May 2, 2024
JSR Corporation
Hiroyuki MIYAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DISCOVERING PHOTORESIST DISSOLVENT
Publication number
20240142882
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
Thanh Cuong NGUYEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF
Publication number
20240136199
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Chi LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Publication number
20240136153
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Matthew Scott Weimer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
Publication number
20240134273
Publication date
Apr 25, 2024
Samsung SDI Co., Ltd.
Kyungsoo MOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240134279
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh-Hsin HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF BREAKING THROUGH ETCH STOP LAYER
Publication number
20240136183
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Shih Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240128082
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Inoue NAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PHOTORESIST COMP...
Publication number
20240126170
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Chih HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY
Publication number
20240126174
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Meng-Che Tu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20240116958
Publication date
Apr 11, 2024
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POLYMER, COMPOSITION, METHOD FOR PRODUCING POLYMER, COMPOSITION FOR...
Publication number
20240117102
Publication date
Apr 11, 2024
Mitsubishi Gas Chemical Company, Inc.
Kodai MATSUURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST UNDERLAYER FILM-FORMING COMPOSITION INCLUDING REACTION PRODU...
Publication number
20240118620
Publication date
Apr 11, 2024
NISSAN CHEMICAL CORPORATION
Yuki KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PATTERN FOR A PATTERNING PROCESS, AND METHOD AND SYST...
Publication number
20240118628
Publication date
Apr 11, 2024
Prosemi Co., Ltd.
Chen-Kun WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
Publication number
20240120217
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Shinichiro KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR P...
Publication number
20240118627
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Jeongjin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FILM FORMATION, RESIST COMPOSITION, RADIATION-SENSI...
Publication number
20240117101
Publication date
Apr 11, 2024
Mitsubishi Gas Chemical Company, Inc.
Hiroaki YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240118618
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Chih HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING AN INDIVIDUALIZATION ZONE OF AN INTEGRATED CIR...
Publication number
20240113040
Publication date
Apr 4, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Stefan LANDIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE SELECTIVE ETCHING TECHNOLOGY FOR THICK SOI DEVICES
Publication number
20240112914
Publication date
Apr 4, 2024
University of Electronic Science and Technology of China
Bo ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FIN FIELD EFFECT TRANSISTOR (FINFET) DEVICE STRUCTURE
Publication number
20240113221
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Hsiung TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIN, COMPOSITION, RESIST PATTERN FORMATION METHOD, CIRCUIT PATTER...
Publication number
20240109997
Publication date
Apr 4, 2024
Mitsubishi Gas Chemical Company, Inc.
Junya HORIUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY
Publication number
20240111217
Publication date
Apr 4, 2024
Arkema France
Xavier Chevalier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM RESISTOR MISMATCH IMPROVEMENT USING A SELF-ALIGNED DOUBLE...
Publication number
20240113156
Publication date
Apr 4, 2024
TEXAS INSTRUMENTS INCORPORATED
Scott William JESSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240112915
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Janghoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTONIC COMMUNICATION PLATFORM
Publication number
20240111094
Publication date
Apr 4, 2024
Lightmatter, Inc
Nicholas C. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mask for X-Ray Lithography and Metrology
Publication number
20240112913
Publication date
Apr 4, 2024
Anne Sakdinawat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
Publication number
20240112912
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Hsiung LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
Publication number
20240111210
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Hsiung LIU
H01 - BASIC ELECTRIC ELEMENTS