Manufacture or treatment of semiconductor devices or of parts thereof

Industry

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H01L21/02

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof

Industries

Patents Grantslast 30 patents

Information Patent Grant
Dynamic precursor dosing for atomic layer deposition
- Patent number 11,970,772
- Issue date Apr 30, 2024
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor and a semiconductor device
- Patent number 11,973,144
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chang-Yin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and methods of forming the same
- Patent number 11,973,027
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pei-Yu Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating substrate
- Patent number 11,972,939
- Issue date Apr 30, 2024
- Semes Co., Ltd.
- Ohyeol Kwon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Area selective carbon-based film deposition
- Patent number 11,972,940
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Xinke Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 11,972,945
- Issue date Apr 30, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Kenichi Okazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing impurities in thin film and substrate processin...
- Patent number 11,972,946
- Issue date Apr 30, 2024
- Eugene Technology Co., Ltd.
- Kyu Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method for semiconductor laminated film, and semicond...
- Patent number 11,972,947
- Issue date Apr 30, 2024
- National University Corporation Tokyo University of Agriculture and Technology
- Yoshiyuki Suda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-aligned barrier for metal vias
- Patent number 11,972,974
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sung-Li Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist developer and method of developing photoresist
- Patent number 11,971,657
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device structure with inner spacer layer and method f...
- Patent number 11,973,129
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Han-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate oxide fabrication and system
- Patent number 11,972,942
- Issue date Apr 30, 2024
- Texas Instruments Incorporated
- Mona M. Eissa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor package structure and method of manufacturing the same
- Patent number 11,973,036
- Issue date Apr 30, 2024
- Advanced Semiconductor Engineering, Inc.
- Ting-Yang Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for depositing dielectric material
- Patent number 11,972,943
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Bhargav S. Citla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a gap-fill layer by plasma-assisted deposition
- Patent number 11,972,944
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,970,768
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning liquid composition for semiconductor wafer and cleaning me...
- Patent number 11,970,672
- Issue date Apr 30, 2024
- YOUNG CHANG CHEMICAL CO., LTD
- Seung Hun Lee
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Wafer manufacturing method and wafer
- Patent number 11,969,856
- Issue date Apr 30, 2024
- Sumco Corporation
- Kantarou Torii
- B24 - GRINDING POLISHING
Information Patent Grant
Fabrication of nano-sheet transistors with different threshold volt...
- Patent number RE49954
- Issue date Apr 30, 2024
- TESSERA LLC
- Karthik Balakrishnan
Information Patent Grant
Semiconductor device
- Patent number 11,973,117
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hsien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices including vertical transistors, and related methods
- Patent number 11,973,145
- Issue date Apr 30, 2024
- Micron Technology, Inc.
- Durai Vishak Nirmal Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of forming the same
- Patent number 11,973,149
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Hsing Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,970,711
- Issue date Apr 30, 2024
- The Regents of the University of California
- Jennifer A. Doudna
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Atomic layer deposition of metal films
- Patent number 11,970,776
- Issue date Apr 30, 2024
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolation structures for transistors
- Patent number 11,973,126
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source or drain structures for germanium N-channel devices
- Patent number 11,973,143
- Issue date Apr 30, 2024
- Intel Corporation
- Ryan Keech
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization system, planarization process, and method of manufact...
- Patent number 11,972,976
- Issue date Apr 30, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor solution for thin film deposition and thin film forming m...
- Patent number 11,972,941
- Issue date Apr 30, 2024
- SK TRICHEM
- Chang Sung Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion layers for EUV lithography
- Patent number 11,972,948
- Issue date Apr 30, 2024
- Brewer Science, Inc.
- Andrea M. Chacko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACANCY-RICH SILICON FOR USE WITH A GALLIUM NITRIDE EPITAXIAL LAYER
- Publication number 20240141553
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fang CHEN
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND COMPOSITION
- Publication number 20240142876
- Publication date May 2, 2024
- JSR Corporation
- Hiroyuki MIYAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS
- Publication number 20240145240
- Publication date May 2, 2024
- Applied Materials, Inc.
- Chen-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER ANNEALING METHOD AND METHOD OF MANUFACTURING DISPLAY DEVICE U...
- Publication number 20240145243
- Publication date May 2, 2024
- SAMSUNG DISPLAY CO., LTD.
- CHEOLHO PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PATTERNING UNDERLYING STRUCTURE
- Publication number 20240145244
- Publication date May 2, 2024
- Powerchip Semiconductor Manufacturing Corporation
- Yun-An Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON-CONTAINING CAP LAYER FOR DOPED SEMICONDUCTOR EPITAXIAL LAYER
- Publication number 20240145550
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jason JEWELL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20240145581
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Wen CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GALLIUM NITRIDE-ON-SILICON DEVICES
- Publication number 20240145587
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jun-De Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING CONTACT PLUG
- Publication number 20240145384
- Publication date May 2, 2024
- Micron Technology, Inc.
- Akira Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20240145527
- Publication date May 2, 2024
- SK HYNIX INC.
- Jun Hyuk SEO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SILICON CARBIDE SUBSTRATE AND METHOD OF MANUFACTURING SILICON CARBI...
- Publication number 20240145229
- Publication date May 2, 2024
- Sumitomo Electric Industries, Ltd.
- Kyoko OKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...
- Publication number 20240145232
- Publication date May 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIN GAP FILL VIA NUCLEATION INHIBITION
- Publication number 20240145235
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zeqing SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT, SEMICONDUCTOR LAYER...
- Publication number 20240145239
- Publication date May 2, 2024
- Oki Electric Industry Co., Ltd.
- Shinya JUMONJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND DEVICES RELATED TO RADIO FREQUENCY DEVICES
- Publication number 20240145253
- Publication date May 2, 2024
- Infineon Technologies Dresden GmbH & Co., KG
- Hans Taddiken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-PLANAR SEMICONDUCTOR PACKAGING SYSTEMS AND RELATED METHODS
- Publication number 20240145266
- Publication date May 2, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. SEDDON
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Application
Fin Field-Effect Transistor Device Having Contact Plugs with Re-Ent...
- Publication number 20240145597
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH USE AND METHOD FOR MANUFACTURIN...
- Publication number 20240141552
- Publication date May 2, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE OPTO-THYRISTOR AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240145613
- Publication date May 2, 2024
- Taiwan-Asia Semiconductor Corporation
- Di-Bao WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20240145475
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- SHIH-WEI PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PANEL LEVEL SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240145258
- Publication date May 2, 2024
- STMicroelectronics Pte Ltd
- David GANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A SILICON-CARBIDE-BASED SEMICONDUCTOR STRU...
- Publication number 20240145294
- Publication date May 2, 2024
- SOITEC
- Hugo Biard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE THIN FILM FORMATION METHOD AND METHOD OF MANUFACTURING SE...
- Publication number 20240145303
- Publication date May 2, 2024
- Samsung Electronics Co., Ltd.
- Sunhye HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CLEANING USING PLASMA-FREE PRECURSORS
- Publication number 20240145230
- Publication date May 2, 2024
- Applied Materials, Inc.
- Abhishek Mandal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20240145233
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Daigo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDATION ENHANCED DOPING
- Publication number 20240145246
- Publication date May 2, 2024
- Applied Materials, Inc.
- Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR A SURFACE TREATMENT OF A SUBSTRATE WITH A LIQUID
- Publication number 20240145231
- Publication date May 2, 2024
- Semsysco GmbH
- Georg Hofer
- B08 - CLEANING
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF APPLYING A DIELECTRIC COATING ON A COMPONENT OF AN ELECTR...
- Publication number 20240145237
- Publication date May 2, 2024
- Quantinuum LLC
- Christopher Todd Ertsgaard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOSHEET WITH GRADED SILICON GERMANIUM LAYER UNDER ISOLATION REGIO...
- Publication number 20240145238
- Publication date May 2, 2024
- International Business Machines Corporation
- Reinaldo Vega
- H01 - BASIC ELECTRIC ELEMENTS

Manufacture or treatment of semiconductor devices or of parts thereof

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Dynamic precursor dosing for atomic layer deposition

Method of manufacturing a semiconductor and a semiconductor device

Semiconductor device and methods of forming the same

Method and apparatus for treating substrate

Area selective carbon-based film deposition

Method for manufacturing semiconductor device

Method for removing impurities in thin film and substrate processin...

Manufacturing method for semiconductor laminated film, and semicond...

Self-aligned barrier for metal vias

Photoresist developer and method of developing photoresist

Semiconductor device structure with inner spacer layer and method f...

Gate oxide fabrication and system

Semiconductor package structure and method of manufacturing the same

Vaporizer, substrate processing apparatus and method for manufactur...

Methods and apparatus for depositing dielectric material

Method for depositing a gap-fill layer by plasma-assisted deposition

Film forming method and film forming apparatus

Cleaning liquid composition for semiconductor wafer and cleaning me...

Wafer manufacturing method and wafer

Fabrication of nano-sheet transistors with different threshold volt...

Semiconductor device

Devices including vertical transistors, and related methods

Semiconductor device and method of forming the same

Methods and compositions for RNA-directed target DNA modification a...

Atomic layer deposition of metal films

Isolation structures for transistors

Source or drain structures for germanium N-channel devices

Planarization system, planarization process, and method of manufact...

Precursor solution for thin film deposition and thin film forming m...

Adhesion layers for EUV lithography

Patents Applicationslast 30 patents

VACANCY-RICH SILICON FOR USE WITH A GALLIUM NITRIDE EPITAXIAL LAYER

SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND COMPOSITION

LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS

LASER ANNEALING METHOD AND METHOD OF MANUFACTURING DISPLAY DEVICE U...

METHOD OF PATTERNING UNDERLYING STRUCTURE

CARBON-CONTAINING CAP LAYER FOR DOPED SEMICONDUCTOR EPITAXIAL LAYER

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

GALLIUM NITRIDE-ON-SILICON DEVICES

SEMICONDUCTOR DEVICE HAVING CONTACT PLUG

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

SILICON CARBIDE SUBSTRATE AND METHOD OF MANUFACTURING SILICON CARBI...

BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...

SIN GAP FILL VIA NUCLEATION INHIBITION

MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT, SEMICONDUCTOR LAYER...

METHODS AND DEVICES RELATED TO RADIO FREQUENCY DEVICES

NON-PLANAR SEMICONDUCTOR PACKAGING SYSTEMS AND RELATED METHODS

Fin Field-Effect Transistor Device Having Contact Plugs with Re-Ent...

SEED SUBSTRATE FOR EPITAXIAL GROWTH USE AND METHOD FOR MANUFACTURIN...

SILICON CARBIDE OPTO-THYRISTOR AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME

PANEL LEVEL SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME

METHOD FOR MANUFACTURING A SILICON-CARBIDE-BASED SEMICONDUCTOR STRU...

SELECTIVE THIN FILM FORMATION METHOD AND METHOD OF MANUFACTURING SE...

SEMICONDUCTOR CLEANING USING PLASMA-FREE PRECURSORS

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

OXIDATION ENHANCED DOPING

SYSTEM AND METHOD FOR A SURFACE TREATMENT OF A SUBSTRATE WITH A LIQUID

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

METHOD OF APPLYING A DIELECTRIC COATING ON A COMPONENT OF AN ELECTR...

NANOSHEET WITH GRADED SILICON GERMANIUM LAYER UNDER ISOLATION REGIO...