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Masks or their effects on the imaging process
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G03F7/70283
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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70283
Masks or their effects on the imaging process
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Patents Grants
last 30 patents
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Patent Grant
Methods of tuning a model for a lithographic process and associated...
Patent number
12,147,161
Issue date
Nov 19, 2024
ASML Netherlands B.V.
Mhamed Akhssay
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase-shift reticle for use in photolithography
Patent number
12,078,921
Issue date
Sep 3, 2024
Entegris, Inc.
Tse-An Yeh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for preparing holographic pattern-expressing organogel using...
Patent number
12,038,719
Issue date
Jul 16, 2024
UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
Jiseok Lee
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Composition for forming organic film, patterning process, and polymer
Patent number
12,032,293
Issue date
Jul 9, 2024
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction or elimination of pattern placement error in metrology me...
Patent number
12,013,634
Issue date
Jun 18, 2024
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of modeling a mask having patterns with arbitrary angles
Patent number
11,994,796
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Jen Lai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle processing system
Patent number
11,940,724
Issue date
Mar 26, 2024
Applied Materials, Inc.
Sanjay Bhat
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ion exposure method and apparatus
Patent number
11,915,942
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,789,371
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Spin-on compositions comprising an inorganic oxide component and an...
Patent number
11,767,398
Issue date
Sep 26, 2023
Merck Patent GmbH
M. Dalil Rahman
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for performing a manufacturing process and associated appara...
Patent number
11,733,606
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Thomas Theeuwes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for illuminating image points
Patent number
11,681,228
Issue date
Jun 20, 2023
EV Group E. Thallner GmbH
Bernhard Thallner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask, exposure apparatus, and method of fabricating three-dime...
Patent number
11,662,659
Issue date
May 30, 2023
Samsung Electronics Co., Ltd.
Donghwan Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of modeling a mask by taking into account of mask pattern ed...
Patent number
11,645,443
Issue date
May 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Jen Lai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Phase shift mask and manufacturing method of semiconductor device
Patent number
11,586,107
Issue date
Feb 21, 2023
Powerchip Semiconductor Manufacturing Corporation
Yi-Kai Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Maskless photolithography devices, methods, and systems
Patent number
11,567,411
Issue date
Jan 31, 2023
NANOPATH, INC.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
UV lithography system
Patent number
11,561,476
Issue date
Jan 24, 2023
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduction or elimination of pattern placement error in metrology me...
Patent number
11,537,043
Issue date
Dec 27, 2022
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Control apparatus and control method, exposure apparatus and exposu...
Patent number
11,537,051
Issue date
Dec 27, 2022
Nikon Corporation
Satoshi Yashiki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography system with diffraction optics
Patent number
11,520,235
Issue date
Dec 6, 2022
Kenneth Carlisle Johnson
G02 - OPTICS
Information
Patent Grant
Prism-mask for angled patterning applications
Patent number
11,506,982
Issue date
Nov 22, 2022
Intel Corporation
Vahidreza Parichehreh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Utilize pattern recognition to improve SEM contour measurement accu...
Patent number
11,422,473
Issue date
Aug 23, 2022
ASML Netherlands B.V.
Jiao Liang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,409,203
Issue date
Aug 9, 2022
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ion exposure method and apparatus
Patent number
11,393,695
Issue date
Jul 19, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology apparatus and method for determining a characteristic rel...
Patent number
11,385,554
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Miguel Garcia Granda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography improvement based on defect probability distributions a...
Patent number
11,314,171
Issue date
Apr 26, 2022
Synopsys, Inc.
Lawrence S. Melvin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and patterning devices and apparatuses for measuring focus...
Patent number
11,314,174
Issue date
Apr 26, 2022
ASML Netherlands B.V.
Laurentius Cornelius De Winter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV phase-shift SRAF masks by means of embedded phase shift layers
Patent number
11,300,885
Issue date
Apr 12, 2022
Intel Corporation
Robert Bristol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods using mask pattern measurements performed with...
Patent number
11,281,093
Issue date
Mar 22, 2022
Samsung Electronics Co., Ltd.
Ji Hoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for nanoscale data recording
Patent number
11,269,258
Issue date
Mar 8, 2022
Franklin Mark Schellenberg
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
DIGITAL ULTRAVIOLET LITHOGRAPHY METHOD AND APPARATUS
Publication number
20240210837
Publication date
Jun 27, 2024
The Hong Kong Polytechnic University
Aping ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ION EXPOSURE METHOD AND APPARATUS
Publication number
20240203749
Publication date
Jun 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATTENUATED PHASE SHIFT MASK FOR TALBOT LITHOGRAPHY
Publication number
20240094623
Publication date
Mar 21, 2024
META PLATFORMS, INC.
Cheng Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING MASK PATTERN AND TRAINING MACHINE LEARNING M...
Publication number
20240004305
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Jun TAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MODELING A MASK BY TAKING INTO ACCOUNT OF MASK PATTERN ED...
Publication number
20230274063
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Chien-Jen Lai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS
Publication number
20230168588
Publication date
Jun 1, 2023
NanoPath, Inc.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mask Synthesis Integrating Mask Fabrication Effects and Wafer Litho...
Publication number
20230152683
Publication date
May 18, 2023
Synopsys, Inc.
Peng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK FABRICATION EFFECTS IN THREE-DIMENSIONAL MASK SIMULATIONS USIN...
Publication number
20230104510
Publication date
Apr 6, 2023
Synopsys, Inc.
Peng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...
Publication number
20230099105
Publication date
Mar 30, 2023
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF TUNING A MODEL FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED...
Publication number
20230084130
Publication date
Mar 16, 2023
ASML NETHERLANDS B.V.
Mhamed AKHSSAY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK CORNER ROUNDING EFFECTS IN THREE-DIMENSIONAL MASK SIMULATIONS...
Publication number
20230079453
Publication date
Mar 16, 2023
Synopsys, Inc.
Peng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UV Lithography System
Publication number
20230011685
Publication date
Jan 12, 2023
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION AIDED TWO-STAGE PHASE UNWRAPPING ON PATTERN WAFER GEOMETR...
Publication number
20220390862
Publication date
Dec 8, 2022
KLA Corporation
Helen Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR GREYSCALE LITHOGRAPHY
Publication number
20220357668
Publication date
Nov 10, 2022
Applied Materials, Inc.
Ludovic GODET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Ion Exposure Method and Apparatus
Publication number
20220336225
Publication date
Oct 20, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING
Publication number
20220276564
Publication date
Sep 1, 2022
Mir Farrokh SHAYEGAN SALEK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF LITHOGRAPHICALLY FORMING AN OPTICAL STRUCTURE IN A SEMICO...
Publication number
20220269167
Publication date
Aug 25, 2022
TRUMPF Photonic Components GmbH
Stephan Gronenborn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
Publication number
20220197150
Publication date
Jun 23, 2022
Franklin Mark Schellenberg
B82 - NANO-TECHNOLOGY
Information
Patent Application
PHASE-SHIFT RETICLE FOR USE IN PHOTOLITHOGRAPHY
Publication number
20220163881
Publication date
May 26, 2022
Entegris, Inc.
Tse-An Yeh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT MASK AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20220155673
Publication date
May 19, 2022
Powerchip Semiconductor Manufacturing Corporation
Yi-Kai Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOMASK, EXPOSURE APPARATUS, AND METHOD OF FABRICATING THREE-DIME...
Publication number
20220128900
Publication date
Apr 28, 2022
Samsung Electronics Co., Ltd.
Donghwan KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV Lithography System with Diffraction Optics
Publication number
20220107568
Publication date
Apr 7, 2022
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TECHNIQUES FOR MANUFACTURING VARIABLE ETCH DEPTH GRATINGS USING GRA...
Publication number
20220082739
Publication date
Mar 17, 2022
Facebook Technologies, LLC
Elliott FRANKE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SPIN-ON COMPOSITIONS COMPRISING AN INORGANIC OXIDE COMPONENT AND AN...
Publication number
20220025109
Publication date
Jan 27, 2022
Merck Patent GmbH
M. Dalil RAHMAN
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHOD FOR PREPARING HOLOGRAPHIC PATTERN-EXPRESSING ORGANOGEL USING...
Publication number
20220004147
Publication date
Jan 6, 2022
UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
Jiseok LEE
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
FORMATION OF THREE-DIMENSIONAL STRUCTURES USING GREY-SCALE PHOTOLIT...
Publication number
20210405541
Publication date
Dec 30, 2021
ams AG
Gerhard Eilmsteiner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS USING MASK PATTERN MEASUREMENTS PERFORMED WITH...
Publication number
20210302828
Publication date
Sep 30, 2021
Samsung Electronics Co., Ltd.
Ji Hoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20210271173
Publication date
Sep 2, 2021
ASML NETHERLANDS B.V.
Yu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UTILIZE PATTERN RECOGNITION TO IMPROVE SEM CONTOUR MEASUREMENT ACCU...
Publication number
20210263426
Publication date
Aug 26, 2021
ASML NETHERLANDS B.V.
Jiao LIANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR ILLUMINATING IMAGE POINTS
Publication number
20210247697
Publication date
Aug 12, 2021
EV GROUP E. THALLNER GMBH
Bernhard Thallner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY