Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Industry

CPC
C23C14/564

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Industries

Patents Grantslast 30 patents

Information Patent Grant
Process kit having tall deposition ring for PVD chamber
- Patent number 11,961,723
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot showerhead
- Patent number 11,946,140
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for precleaning and treating wafer surfaces
- Patent number 11,939,666
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit geometry for particle reduction in PVD processes
- Patent number 11,935,732
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Adolph M. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding device and thin-film-deposition equipment with the same
- Patent number 11,898,238
- Issue date Feb 13, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply member with baffle
- Patent number 11,885,021
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 11,851,751
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
- Patent number 11,827,973
- Issue date Nov 28, 2023
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pumping system having multiple pumps
- Patent number 11,815,079
- Issue date Nov 14, 2023
- Edwards Limited
- Andrew David Chew
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning apparatus
- Patent number 11,761,075
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Yukimasa Saito
- B08 - CLEANING
Information Patent Grant
Method and apparatus for deposition of metal nitrides
- Patent number 11,739,418
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment for high-temperature cleans
- Patent number 11,699,577
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filter for a plasma plume
- Patent number 11,628,389
- Issue date Apr 18, 2023
- Lam Research Corporation
- Jan Matthijn Dekkers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 11,608,555
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 11,600,477
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter trap having a thin high purity coating layer and method of...
- Patent number 11,584,985
- Issue date Feb 21, 2023
- Honeywell International Inc.
- Jaeyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanoparticle formation mitigation in a deposition process
- Patent number 11,542,593
- Issue date Jan 3, 2023
- Raytheon Technologies Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and recording medium for changing at...
- Patent number 11,521,880
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Satoru Takahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for contactless transportation of a device in...
- Patent number 11,508,595
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Henning Aust
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Substrate film forming machine table and usage method
- Patent number 11,466,363
- Issue date Oct 11, 2022
- HKC CORPORATION LIMITED
- Chengliang Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced cathodic ARC source for ARC plasma deposition
- Patent number 11,466,360
- Issue date Oct 11, 2022
- Veeco Instruments Inc.
- Boris L. Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device
- Patent number 11,410,837
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Hiroyuki Toshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition chamber cleaning processes
- Patent number 11,365,475
- Issue date Jun 21, 2022
- Applied Materials Inc.
- Vibhu Jindal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition apparatus
- Patent number 11,345,992
- Issue date May 31, 2022
- ULVAC, Inc.
- Shuuji Saitou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, sputtering target, and method for forming sem...
- Patent number 11,309,181
- Issue date Apr 19, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiro Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
- Patent number 11,299,802
- Issue date Apr 12, 2022
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam etching chamber with etching by-product redistributor
- Patent number 11,239,060
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-patterned sputter traps and methods of making
- Patent number 11,183,373
- Issue date Nov 23, 2021
- Honeywell International Inc.
- James L. Koch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply member with baffle
- Patent number 11,124,878
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Kartik Shah
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COATER CONDITIONING MODE
- Publication number 20240124970
- Publication date Apr 18, 2024
- BÜHLER ALZENAU GMBH
- Simon LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL LASER EVAPORATION SYSTEM
- Publication number 20240102151
- Publication date Mar 28, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang BRAUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER
- Publication number 20240102153
- Publication date Mar 28, 2024
- Fuhong ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GATE VALVE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSIN...
- Publication number 20240068090
- Publication date Feb 29, 2024
- KITZ SCT CORPORATION
- Yoshifumi HOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM
- Publication number 20240068089
- Publication date Feb 29, 2024
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Deposition of Mental Nitrides
- Publication number 20240003000
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL BARRIER COATING WITH REDUCED STABILIZER CONTENT
- Publication number 20230392251
- Publication date Dec 7, 2023
- Raytheon Technologies Corporation
- Kaylan M. Wessels
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
- Publication number 20230386802
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230383400
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING
Information Patent Application
STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20230383399
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Yi SHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
- Publication number 20230386803
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20230369024
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
- Publication number 20230187191
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...
- Publication number 20230143320
- Publication date May 11, 2023
- Honeywell International Inc.
- Jaeyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION
- Publication number 20230110960
- Publication date Apr 13, 2023
- K&N Engineering, Inc.
- Kevin McClelland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED PRECLEAN-DEPOSITION SYSTEM FOR OPTICAL FILMS
- Publication number 20230112873
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Kenichi OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER
- Publication number 20230073011
- Publication date Mar 9, 2023
- Zhiyong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230022509
- Publication date Jan 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415636
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415637
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT WITH THE SAME
- Publication number 20220411917
- Publication date Dec 29, 2022
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT FOR HIGH-TEMPERATURE CLEANS
- Publication number 20220384161
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
- Publication number 20220356560
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT SHOWERHEAD
- Publication number 20220307131
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20220275500
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Yi SHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION DEVICE
- Publication number 20220228254
- Publication date Jul 21, 2022
- THERMALYTICA, INC.
- Kazuhide MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATI...
- Publication number 20220186358
- Publication date Jun 16, 2022
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
- Publication number 20220186361
- Publication date Jun 16, 2022
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR VACUUM COATING SURFACES OF OBJECTS
- Publication number 20220154340
- Publication date May 19, 2022
- KHS GmbH
- Michael HERBORT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20220148856
- Publication date May 12, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process kit having tall deposition ring for PVD chamber

Hot showerhead

Methods and apparatus for precleaning and treating wafer surfaces

Process kit geometry for particle reduction in PVD processes

Cleaning of sin with CCP plasma or RPS clean

Shielding device and thin-film-deposition equipment with the same

Gas supply member with baffle

Deposition system and method

Germanium tetraflouride and hydrogen mixtures for an ion implantati...

Vacuum pumping system having multiple pumps

Substrate cleaning apparatus

Method and apparatus for deposition of metal nitrides

Treatment for high-temperature cleans

Filter for a plasma plume

Sputtering apparatus

Gas injection process kit to eliminate arcing and improve uniform g...

Sputter trap having a thin high purity coating layer and method of...

Nanoparticle formation mitigation in a deposition process

Substrate processing apparatus and recording medium for changing at...

Apparatus and method for contactless transportation of a device in...

Substrate film forming machine table and usage method

Enhanced cathodic ARC source for ARC plasma deposition

Film-forming device

Physical vapor deposition chamber cleaning processes

Vacuum deposition apparatus

Sputtering apparatus, sputtering target, and method for forming sem...

Germanium tetraflouride and hydrogen mixtures for an ion implantati...

Ion beam etching chamber with etching by-product redistributor

Multi-patterned sputter traps and methods of making

Gas supply member with baffle

Patents Applicationslast 30 patents

COATER CONDITIONING MODE

THERMAL LASER EVAPORATION SYSTEM

PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER

GATE VALVE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSIN...

DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM

Method and Apparatus for Deposition of Mental Nitrides

THERMAL BARRIER COATING WITH REDUCED STABILIZER CONTENT

PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...

DEPOSITION SYSTEM AND METHOD

STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...

SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...

MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION

INTEGRATED PRECLEAN-DEPOSITION SYSTEM FOR OPTICAL FILMS

SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER

DEPOSITION SYSTEM AND METHOD

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

SHIELDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT WITH THE SAME

TREATMENT FOR HIGH-TEMPERATURE CLEANS

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

HOT SHOWERHEAD

STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

VAPOR DEPOSITION DEVICE

GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATI...

GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...

APPARATUS AND METHOD FOR VACUUM COATING SURFACES OF OBJECTS

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR