Means for observation of the coating process

Industry

CPC
C23C14/52

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/52Means for observation of the coating process

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for monitoring process conditions of, and method for control...
- Patent number 12,180,579
- Issue date Dec 31, 2024
- Ionautics AB
- Daniel Lundin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Toroidal motion enhanced ion source
- Patent number 12,154,755
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- June Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Differential capacitive sensor for in-situ film thickness and diele...
- Patent number 12,123,090
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Patrick Tae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for in-situ measurement of sheet resistance on...
- Patent number 12,105,039
- Issue date Oct 1, 2024
- Lam Research Corporation
- Manish Ranjan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,065,725
- Issue date Aug 20, 2024
- Kioxia Corporation
- Yuta Konno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
In situ electrical properties characterization system towards surfa...
- Patent number 12,046,521
- Issue date Jul 23, 2024
- National University of Singapore
- Wei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Co-deposition of cesium telluride photocathode and X-ray fluorescen...
- Patent number 12,033,846
- Issue date Jul 9, 2024
- U.S. Department of Energy
- Mengjia Gaowei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for detecting abnormality of thin-film deposition...
- Patent number 11,965,237
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Hao Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,894,222
- Issue date Feb 6, 2024
- Tokyo Electron Limited
- Atsushi Takeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Differential capacitive sensors for in-situ film thickness and diel...
- Patent number 11,781,214
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Patrick Tae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Standard mask apparatus and method of manufacturing standard mask a...
- Patent number 11,732,347
- Issue date Aug 22, 2023
- Dai Nippon Printing Co., Ltd.
- Hideyuki Okamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating control using forward parameter correction and adapted reve...
- Patent number 11,692,263
- Issue date Jul 4, 2023
- Viavi Solutions Inc.
- Zhao Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microscopy
- Patent number 11,404,243
- Issue date Aug 2, 2022
- Mochii, Inc.
- Christopher Su-Yan Own
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film manufacturing apparatus and manufacturing method of double-sid...
- Patent number 11,384,424
- Issue date Jul 12, 2022
- Nitto Denko Corporation
- Daiki Morimitsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam evaporator, coating apparatus and coating method
- Patent number 11,377,724
- Issue date Jul 5, 2022
- VON ARDENNE Asset GmbH & Co. KG
- Ekkehart Reinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wireless camera wafer for vacuum chamber diagnostics
- Patent number 11,131,025
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tzu-Chung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Box coating apparatus for vacuum coating of substrates, in particul...
- Patent number 10,913,999
- Issue date Feb 9, 2021
- Satisloh AG
- Giuseppe Di Paola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real-time monitoring of fabrication of integrated computational ele...
- Patent number 10,914,863
- Issue date Feb 9, 2021
- Halliburton Energy Services, Inc.
- James M. Price
- G01 - MEASURING TESTING
Information Patent Grant
Controlled deposition of metal and metal cluster ions by surface fi...
- Patent number 10,876,202
- Issue date Dec 29, 2020
- University of North Texas
- Guido Fridolin Verbeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus for shutter disk assembly detection
- Patent number 10,851,453
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microscopy
- Patent number 10,847,343
- Issue date Nov 24, 2020
- Mochii, Inc.
- Christopher Su-Yan Own
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Portable sputtering apparatus and method
- Patent number 10,840,071
- Issue date Nov 17, 2020
- Oliver James Groves
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation device and evaporation method using the same
- Patent number 10,801,103
- Issue date Oct 13, 2020
- BOE Technology Group Co., Ltd.
- Zhizhong Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode assembly, physical vapor deposition system, and method for...
- Patent number 10,804,083
- Issue date Oct 13, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor head for crystal oscillator type of film thickness monitor
- Patent number 10,767,987
- Issue date Sep 8, 2020
- ULVAC, Inc.
- Yousuke Oguma
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum processing system and method for mounting a processing system
- Patent number 10,648,072
- Issue date May 12, 2020
- Applied Materials, Inc.
- Florian Ries
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film fabrication system employing mechanical stress measurement
- Patent number 10,580,706
- Issue date Mar 3, 2020
- UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF NASA.
- David M. Broadway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of measuring the temperature reached by a part, in particula...
- Patent number 10,539,039
- Issue date Jan 21, 2020
- SAFRAN AIRCRAFT ENGINES
- Nadine Alice Helene Harivel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counter based time compensation to reduce process shifting in react...
- Patent number 10,400,327
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Mohammad Kamruzzaman Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250059640
- Publication date Feb 20, 2025
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR IN-SITU MEASUREMENT OF SHEET RESISTANCE ON...
- Publication number 20250003908
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Manish Ranjan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA POWER SUPPLY SYSTEM AND METHOD
- Publication number 20240371616
- Publication date Nov 7, 2024
- TRUMPF Huettinger GmbH + Co. KG
- Wojciech Gajewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULE FOR FLIPPING SUBSTRATES IN VACUUM
- Publication number 20240263299
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Karunakaran NATARAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE
- Publication number 20240102147
- Publication date Mar 28, 2024
- nexTC Corporation
- Cory K. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL
- Publication number 20240052479
- Publication date Feb 15, 2024
- Chongqing JIMAT New Material Technology Co., Ltd.
- Shiwei ZANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFERENTIAL CAPACITIVE SENSOR FOR IN-SITU FILM THICKNESS AND DIELE...
- Publication number 20240002999
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- PATRICK TAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM FOR FABRICATING SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20230416904
- Publication date Dec 28, 2023
- NANYA TECHNOLOGY CORPORATION
- TZU-CHING TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU AND TUNABLE DEPOSITION OF A FILM
- Publication number 20230374654
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOROIDAL MOTION ENHANCED ION SOURCE
- Publication number 20230187165
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- June Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MONITORING PROCESS CONDITIONS OF, AND METHOD FOR CONTROL...
- Publication number 20230151476
- Publication date May 18, 2023
- Ionautics AB
- Daniel LUNDIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser Deposition with a Reactive Gas
- Publication number 20230129777
- Publication date Apr 27, 2023
- The United States of America, as represented by the Secretary of the Navy
- Alexandru Hening
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD FOR PRODUCING OF A MATERIAL LAYER OR OF A MULTI-LAYER STRU...
- Publication number 20230056927
- Publication date Feb 23, 2023
- Pulsedeon Oy
- Jari LIIMATAINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU MONITORING OF SUBSTRATE SURFACES
- Publication number 20220349850
- Publication date Nov 3, 2022
- LAM RESEARCH CORPORATION
- Manish Ranjan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220178014
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR DETECTING ABNORMALITY OF THIN-FILM DEPOSITION...
- Publication number 20220154330
- Publication date May 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING RESIDUAL COMPOUNDS IN PLASMA PR...
- Publication number 20220093429
- Publication date Mar 24, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Tai CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210407779
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Atsushi TAKEUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STANDARD MASK APPARATUS AND METHOD OF MANUFACTURING STANDARD MASK A...
- Publication number 20210348265
- Publication date Nov 11, 2021
- DAI NIPPON PRINTING CO., LTD.
- Hideyuki OKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING ELEMENTS ON A SUBSTRATE OF INTEREST AND DEVICE
- Publication number 20210348266
- Publication date Nov 11, 2021
- CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
- José Maria DE TERESA NOGUERAS
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods for In-Situ Chamber Monitoring
- Publication number 20210164093
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CO-DESPOSITION OF CESIUM TELLURIDE PHOTOCATHODE AND X-RAY FLUORESCE...
- Publication number 20210118640
- Publication date Apr 22, 2021
- UNITED STATES DEPARTMENT OF ENERGY
- Mengjia Gaowei
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FILM MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF DOUBLE-SID...
- Publication number 20210108308
- Publication date Apr 15, 2021
- NITTO DENKO CORPORATION
- Daiki Morimitsu
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210087669
- Publication date Mar 25, 2021
- Kioxia Corporation
- Yuta KONNO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...
- Publication number 20210062324
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...
- Publication number 20210062326
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
IN SITU ELECTRICAL PROPERTIES CHARACTERIZATION SYSTEM TOWRDS SURFAC...
- Publication number 20200402865
- Publication date Dec 24, 2020
- National University of Singapore
- Wei CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION CHAMBER VIEWPORT ASSEMBLY INCLUDING REPLACEABLE TRANSPAR...
- Publication number 20200377996
- Publication date Dec 3, 2020
- BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD .
- Steven LAROSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND PROCESSING SYSTEM
- Publication number 20200232090
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Hiroki MAEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20200216946
- Publication date Jul 9, 2020
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- HEUNG-WOO PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Means for observation of the coating process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for monitoring process conditions of, and method for control...

Film forming apparatus and film forming method

Toroidal motion enhanced ion source

Differential capacitive sensor for in-situ film thickness and diele...

Systems and methods for in-situ measurement of sheet resistance on...

Film forming apparatus and film forming method

In situ electrical properties characterization system towards surfa...

Co-deposition of cesium telluride photocathode and X-ray fluorescen...

System and method for detecting abnormality of thin-film deposition...

Film forming apparatus and film forming method

Differential capacitive sensors for in-situ film thickness and diel...

Standard mask apparatus and method of manufacturing standard mask a...

Coating control using forward parameter correction and adapted reve...

Microscopy

Film manufacturing apparatus and manufacturing method of double-sid...

Electron beam evaporator, coating apparatus and coating method

Wireless camera wafer for vacuum chamber diagnostics

Box coating apparatus for vacuum coating of substrates, in particul...

Real-time monitoring of fabrication of integrated computational ele...

Controlled deposition of metal and metal cluster ions by surface fi...

Methods and apparatus for shutter disk assembly detection

Microscopy

Portable sputtering apparatus and method

Evaporation device and evaporation method using the same

Cathode assembly, physical vapor deposition system, and method for...

Sensor head for crystal oscillator type of film thickness monitor

Vacuum processing system and method for mounting a processing system

Thin-film fabrication system employing mechanical stress measurement

Method of measuring the temperature reached by a part, in particula...

Counter based time compensation to reduce process shifting in react...

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

SYSTEMS AND METHODS FOR IN-SITU MEASUREMENT OF SHEET RESISTANCE ON...

PLASMA POWER SUPPLY SYSTEM AND METHOD

MODULE FOR FLIPPING SUBSTRATES IN VACUUM

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL

DIFFERENTIAL CAPACITIVE SENSOR FOR IN-SITU FILM THICKNESS AND DIELE...

DEPOSITION SYSTEM FOR FABRICATING SEMICONDUCTOR DEVICE STRUCTURE

IN SITU AND TUNABLE DEPOSITION OF A FILM

TOROIDAL MOTION ENHANCED ION SOURCE

METHOD FOR MONITORING PROCESS CONDITIONS OF, AND METHOD FOR CONTROL...

Laser Deposition with a Reactive Gas

A METHOD FOR PRODUCING OF A MATERIAL LAYER OR OF A MULTI-LAYER STRU...

IN-SITU MONITORING OF SUBSTRATE SURFACES

FILM FORMING APPARATUS AND FILM FORMING METHOD

SYSTEM AND METHOD FOR DETECTING ABNORMALITY OF THIN-FILM DEPOSITION...

SYSTEMS AND METHODS FOR DETERMINING RESIDUAL COMPOUNDS IN PLASMA PR...

FILM FORMING APPARATUS AND FILM FORMING METHOD

STANDARD MASK APPARATUS AND METHOD OF MANUFACTURING STANDARD MASK A...

METHOD FOR DEPOSITING ELEMENTS ON A SUBSTRATE OF INTEREST AND DEVICE

Methods for In-Situ Chamber Monitoring

CO-DESPOSITION OF CESIUM TELLURIDE PHOTOCATHODE AND X-RAY FLUORESCE...

FILM MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF DOUBLE-SID...

FILM FORMING APPARATUS AND FILM FORMING METHOD

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...

IN SITU ELECTRICAL PROPERTIES CHARACTERIZATION SYSTEM TOWRDS SURFAC...

DEPOSITION CHAMBER VIEWPORT ASSEMBLY INCLUDING REPLACEABLE TRANSPAR...

SUBSTRATE PROCESSING DEVICE AND PROCESSING SYSTEM

ION IMPLANTATION APPARATUS