Means for obtaining or maintaining the desired gas pressure within the tube

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H01S3/036

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/036Means for obtaining or maintaining the desired gas pressure within the tube

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Chamber device, gas laser device, and electronic device manufacturi...
- Patent number 12,347,995
- Issue date Jul 1, 2025
- Gigaphoton Inc.
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conduit system, radiation source, lithographic apparatus, and metho...
- Patent number 12,341,314
- Issue date Jun 24, 2025
- Cymer, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus, laser beam emitting method of gas laser appara...
- Patent number 12,341,313
- Issue date Jun 24, 2025
- Gigaphoton Inc.
- Daisuke Tei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas purge systems for a laser source
- Patent number 12,253,806
- Issue date Mar 18, 2025
- Cymer, LLC
- Gamaralalage G Padmabandu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser system with long service intervals
- Patent number 12,160,080
- Issue date Dec 3, 2024
- STRATA SKIN SCIENCES, INC.
- James Morris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing fretting corrosion in a gas discharge chamber support device
- Patent number 12,125,695
- Issue date Oct 22, 2024
- Cymer, LLC
- Thomas Dickson Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser device and electronic device manufacturing method
- Patent number 12,113,326
- Issue date Oct 8, 2024
- Gigaphoton Inc.
- Yoichi Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas monitoring system
- Patent number 11,988,966
- Issue date May 21, 2024
- Cymer, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas management system
- Patent number 11,949,202
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas management system
- Patent number 11,949,203
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser chamber and electronic device manufacturing method
- Patent number 11,947,263
- Issue date Apr 2, 2024
- Gigaphoton Inc.
- Makoto Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluorine detection in a gas discharge light source
- Patent number 11,754,541
- Issue date Sep 12, 2023
- Cymer, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system, learning device, and inference device
- Patent number 11,734,810
- Issue date Aug 22, 2023
- Mitsubishi Electric Corporation
- Takuya Kawashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vapor as a protectant and lifetime extender in optical systems
- Patent number 11,624,904
- Issue date Apr 11, 2023
- KLA Corporation
- David Jalil Zare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling pressure in a cavity of a light source
- Patent number 11,581,692
- Issue date Feb 14, 2023
- KLA Corp.
- Igor Germanenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas regenerating apparatus and electronic device manufacturin...
- Patent number 11,451,003
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Hiroaki Tsushima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Excimer laser apparatus and method for manufacturing electronic device
- Patent number 11,271,361
- Issue date Mar 8, 2022
- Gigaphoton Inc.
- Keisuke Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus including gas supply device and exhausting device
- Patent number 11,239,625
- Issue date Feb 1, 2022
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus and magnetic bearing control method
- Patent number 11,162,530
- Issue date Nov 2, 2021
- Gigaphoton Inc.
- Masaharu Miki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Gas laser apparatus
- Patent number 11,081,850
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Excimer laser apparatus and electronic-device manufacturing method
- Patent number 11,079,686
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Keisuke Ishida
- G01 - MEASURING TESTING
Information Patent Grant
Capacitor cooling structure and laser apparatus
- Patent number 11,050,210
- Issue date Jun 29, 2021
- Gigaphoton Inc.
- Hisakazu Katsuumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Online calibration for repetition rate dependent performance variables
- Patent number 11,050,213
- Issue date Jun 29, 2021
- Cymer, LLC
- Joshua Jon Thornes
- G01 - MEASURING TESTING
Information Patent Grant
Laser apparatus
- Patent number 10,971,886
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 10,971,883
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser chamber with metal damper member
- Patent number 10,965,085
- Issue date Mar 30, 2021
- Gigaphoton Inc.
- Hisakazu Katsuumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas optimization in a gas discharge light source
- Patent number 10,892,594
- Issue date Jan 12, 2021
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas purifying system and laser system
- Patent number 10,892,592
- Issue date Jan 12, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas regeneration system and laser system
- Patent number 10,879,664
- Issue date Dec 29, 2020
- Gigaphoton Inc.
- Masanori Yashiro
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Laser machining device
- Patent number 10,741,988
- Issue date Aug 11, 2020
- FANUC CORPORATION
- Kazuya Oota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER OF GAS LASER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC...
- Publication number 20250233378
- Publication date Jul 17, 2025
- Gigaphoton Inc.
- Makoto TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PURGE SYSTEMS FOR A LASER SOURCE
- Publication number 20250189905
- Publication date Jun 12, 2025
- CYMER, LLC
- Gamaralalage G Padmabandu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250141172
- Publication date May 1, 2025
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUTTER APPARATUS HAVING PORTS TO CONTROL ENERGY BEAM AND GAS TRANS...
- Publication number 20240297474
- Publication date Sep 5, 2024
- XCIMER ENERGY, INC.
- Cyrus M. Herring
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE
- Publication number 20240291226
- Publication date Aug 29, 2024
- CYMER, LLC
- Siyu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Dustproof structure for laser output window of laser, and laser
- Publication number 20240235144
- Publication date Jul 11, 2024
- Beijing Rslaser Opto-Electronics Technology Co., Ltd.
- Jinsong WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240146011
- Publication date May 2, 2024
- Gigaphoton Inc.
- Koji ASHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPA...
- Publication number 20240128705
- Publication date Apr 18, 2024
- Mitsubishi Electric Corporation
- Tatsuya YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CO2 BEAM SOURCE COMPRISING A CATALYST
- Publication number 20240120700
- Publication date Apr 11, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Jonathan MUELLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER
- Publication number 20240039228
- Publication date Feb 1, 2024
- CYMER, LLC
- Mohammad Taghi Mohebbi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUS
- Publication number 20240035514
- Publication date Feb 1, 2024
- EBARA CORPORATION
- Ichiju SATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURI...
- Publication number 20230387642
- Publication date Nov 30, 2023
- Gigaphoton Inc.
- Junichi FUJIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER SYSTEM, LEARNING DEVICE, AND INFERENCE DEVICE
- Publication number 20230196538
- Publication date Jun 22, 2023
- Mitsubishi Electric Corporation
- Takuya KAWASHIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...
- Publication number 20230163551
- Publication date May 25, 2023
- CYMER, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING FRETTING CORROSION IN A GAS DISCHARGE CHAMBER SUPPORT DEVICE
- Publication number 20230087803
- Publication date Mar 23, 2023
- CYMER, LLC
- Thomas Dickson Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER
- Publication number 20230016894
- Publication date Jan 19, 2023
- CYMER, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PURGE SYSTEMS FOR A LASER SOURCE
- Publication number 20220413402
- Publication date Dec 29, 2022
- CYMER, LLC
- Gamaralalage G Padmabandu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR INCREASING THE CONTRAST OF PULSED LASER RADIATIO...
- Publication number 20220399695
- Publication date Dec 15, 2022
- TRUMPF Scientific Lasers GmbH + Co. KG
- Thomas Metzger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTR...
- Publication number 20220385022
- Publication date Dec 1, 2022
- Gigaphoton Inc.
- Takahito KUMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY...
- Publication number 20220385031
- Publication date Dec 1, 2022
- CYMER, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20220376455
- Publication date Nov 24, 2022
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CONTROL METHOD AND RELATED USES
- Publication number 20220285902
- Publication date Sep 8, 2022
- CYMER, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS
- Publication number 20220255286
- Publication date Aug 11, 2022
- CYMER, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER DEVICE AND LEAK CHECK METHOD FOR LASER DEVICE
- Publication number 20220190540
- Publication date Jun 16, 2022
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- G01 - MEASURING TESTING
Information Patent Application
EXCIMER LASER SYSTEM WITH LONG SERVICE INTERVALS
- Publication number 20220094133
- Publication date Mar 24, 2022
- STRATA SKIN SCIENCES, INC.
- James Morris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CHAMBER AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20220091515
- Publication date Mar 24, 2022
- Gigaphoton Inc.
- Makoto TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20210367390
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Daisuke TEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARA...
- Publication number 20210336403
- Publication date Oct 28, 2021
- Gigaphoton Inc.
- Daisuke TEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MONITORING SYSTEM
- Publication number 20210226407
- Publication date Jul 22, 2021
- CYMER, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE
- Publication number 20210167568
- Publication date Jun 3, 2021
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS

Means for obtaining or maintaining the desired gas pressure within the tube

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Chamber device, gas laser device, and electronic device manufacturi...

Conduit system, radiation source, lithographic apparatus, and metho...

Gas laser apparatus, laser beam emitting method of gas laser appara...

Gas purge systems for a laser source

Excimer laser system with long service intervals

Reducing fretting corrosion in a gas discharge chamber support device

Laser device and electronic device manufacturing method

Gas monitoring system

Gas management system

Gas management system

Laser chamber and electronic device manufacturing method

Fluorine detection in a gas discharge light source

Laser system, learning device, and inference device

Vapor as a protectant and lifetime extender in optical systems

Controlling pressure in a cavity of a light source

Laser gas regenerating apparatus and electronic device manufacturin...

Excimer laser apparatus and method for manufacturing electronic device

Laser apparatus including gas supply device and exhausting device

Gas laser apparatus and magnetic bearing control method

Gas laser apparatus

Excimer laser apparatus and electronic-device manufacturing method

Capacitor cooling structure and laser apparatus

Online calibration for repetition rate dependent performance variables

Laser apparatus

Gas laser apparatus

Laser chamber with metal damper member

Gas optimization in a gas discharge light source

Laser gas purifying system and laser system

Laser gas regeneration system and laser system

Laser machining device

Patents Applicationslast 30 patents

CHAMBER OF GAS LASER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC...

GAS PURGE SYSTEMS FOR A LASER SOURCE

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

SHUTTER APPARATUS HAVING PORTS TO CONTROL ENERGY BEAM AND GAS TRANS...

GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE

Dustproof structure for laser output window of laser, and laser

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPA...

CO2 BEAM SOURCE COMPRISING A CATALYST

REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER

BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUS

CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURI...

LASER SYSTEM, LEARNING DEVICE, AND INFERENCE DEVICE

CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...

REDUCING FRETTING CORROSION IN A GAS DISCHARGE CHAMBER SUPPORT DEVICE

UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER

GAS PURGE SYSTEMS FOR A LASER SOURCE

OPTICAL SYSTEM FOR INCREASING THE CONTRAST OF PULSED LASER RADIATIO...

LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTR...

CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY...

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS CONTROL METHOD AND RELATED USES

CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS

LASER DEVICE AND LEAK CHECK METHOD FOR LASER DEVICE

EXCIMER LASER SYSTEM WITH LONG SERVICE INTERVALS

LASER CHAMBER AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARA...

GAS MONITORING SYSTEM

GAS LASER DEVICE