Means for shaping the magnetic field

Industry

CPC
H01J37/3461

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3461Means for shaping the magnetic field

Industries

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor apparatus and magnetic structure of semiconductor app...
- Patent number 12,198,914
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Zhenduo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable magnet array for magnetron sputtering
- Patent number 12,191,128
- Issue date Jan 7, 2025
- Intellivation LLC
- Michael G. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vacuum deposition into trenches and vias
- Patent number 12,154,770
- Issue date Nov 26, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method for tuning magnetic field distribution of deposit...
- Patent number 12,129,541
- Issue date Oct 29, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 12,094,698
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally controlled magnetic fields optimization system for sputte...
- Patent number 11,908,669
- Issue date Feb 20, 2024
- Arizona Thin Film Research, LLC
- Patrick Morse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,894,222
- Issue date Feb 6, 2024
- Tokyo Electron Limited
- Atsushi Takeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 11,875,980
- Issue date Jan 16, 2024
- Stephen R Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,688,591
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing apparatus
- Patent number 11,646,180
- Issue date May 9, 2023
- Samsung Display Co., Ltd.
- Kwanyong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,462,394
- Issue date Oct 4, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multifocal magnetron design for physical vapor deposition processin...
- Patent number 11,456,162
- Issue date Sep 27, 2022
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Providing voice call support in a network
- Patent number 11,283,932
- Issue date Mar 22, 2022
- Nokia Solutions and Networks Oy
- Devaki Chandramouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 10,900,114
- Issue date Jan 26, 2021
- Stephen R Burgess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flexible adjustable return path magnet assembly and methods
- Patent number 10,790,127
- Issue date Sep 29, 2020
- Cardinal CG Company
- Klaus H. W. Hartig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 10,513,432
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surrounding field sputtering source
- Patent number 10,358,713
- Issue date Jul 23, 2019
- Kurt J. Lesker Company
- Matthew Jaszcar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD plasma control using a magnet edge lift mechanism
- Patent number 10,283,331
- Issue date May 7, 2019
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Online adjustable magnet bar
- Patent number 10,163,612
- Issue date Dec 25, 2018
- Soleras Advanced Coatings BVBA
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laterally adjustable return path magnet assembly and methods
- Patent number 10,151,023
- Issue date Dec 11, 2018
- Cardinal CG Company
- Klaus H. W. Hartig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field generator, magnetron cathode and spattering apparatus
- Patent number 10,000,844
- Issue date Jun 19, 2018
- Shincron Co., Ltd.
- Wei Kong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron assembly for physical vapor deposition chamber
- Patent number 9,991,101
- Issue date Jun 5, 2018
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 9,928,998
- Issue date Mar 27, 2018
- Canon Anelva Corporation
- Yohsuke Shibuya
- B08 - CLEANING
Information Patent Grant
Configurable variable position closed track magnetron
- Patent number 9,812,303
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Alan Ritchie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fine tuning a magnetron sputtering electrode in a rotatab...
- Patent number 9,812,304
- Issue date Nov 7, 2017
- Angstrom Sciences, Inc.
- Mark A. Bernick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and magnet unit
- Patent number 9,761,423
- Issue date Sep 12, 2017
- Canon Anelva Corporation
- Hidekazu Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Intaglio printing plate coating apparatus
- Patent number 9,646,809
- Issue date May 9, 2017
- KBA-NotaSys SA
- François Gremion
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESS APPARATUS
- Publication number 20240212980
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Jaesuk KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STABLE GROUND ANODE FOR THIN FILM PROCESSING
- Publication number 20240194464
- Publication date Jun 13, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIAS MAGNETIC FIELD CONTROL METHOD, CONTROL DEVICE, AND SEMICONDUCT...
- Publication number 20240191340
- Publication date Jun 13, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yujie GENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM DEPOSITION INTO TRENCHES AND VIAS
- Publication number 20240021421
- Publication date Jan 18, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20230307218
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES
- Publication number 20230282466
- Publication date Sep 7, 2023
- SCION PLASMA LLC
- LI QIN ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD FOR TUNING MAGNETIC FIELD DISTRIBUTION OF DEPOSIT...
- Publication number 20230091273
- Publication date Mar 23, 2023
- SKY TECH INC.
- JING-CHENG LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND MAGNETIC STRUCTURE OF SEMICONDUCTOR APP...
- Publication number 20230055004
- Publication date Feb 23, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Zhenduo YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE MAGNET ARRAY FOR MAGNETRON SPUTTERING
- Publication number 20230052340
- Publication date Feb 16, 2023
- INTELLIVATION LLC
- Michael G. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...
- Publication number 20220406582
- Publication date Dec 22, 2022
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC-FIELD-DISTRIBUTION TUNER, DEPOSITION EQUIPMENT AND METHOD...
- Publication number 20220384166
- Publication date Dec 1, 2022
- SKY TECH INC.
- JING-CHENG LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20220367161
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THERMALLY CONTROLLED MAGNETIC FIELDS OPTIMIZATION SYSTEM FOR SPUTTE...
- Publication number 20220223392
- Publication date Jul 14, 2022
- Arizona Thin Film Research, LLC
- Patrick Morse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210407779
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Atsushi TAKEUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Depositing a Material
- Publication number 20210123130
- Publication date Apr 29, 2021
- SPTS TECHNOLOGIES LIMITED
- STEPHEN R. BURGESS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING APPARATUS
- Publication number 20210020417
- Publication date Jan 21, 2021
- SAMSUNG DISPLAY CO., LTD.
- Kwanyong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20200105511
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR UNIFORM TARGET EROSION MAGNETIC ASSEMBLIES
- Publication number 20190035611
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufactyring Co., Ltd.
- Chen-Fang Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURROUNDING FIELD SPUTTERING SOURCE
- Publication number 20170175251
- Publication date Jun 22, 2017
- Kurt J. Lesker Company
- Matthew Jaszcar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITING A MATERIAL
- Publication number 20160289815
- Publication date Oct 6, 2016
- SPTS TECHNOLOGIES LIMITED
- STEPHEN R. BURGESS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetic Configuration for a Magnetron Sputter Deposition System
- Publication number 20160273094
- Publication date Sep 22, 2016
- Soleras Advanced Coatings bvba
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Online Adjustable Magnet Bar
- Publication number 20160013034
- Publication date Jan 14, 2016
- Soleras Advanced Coatings bvba
- Wilmert DE BOSSCHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Fine Tuning a Magnetron Sputtering Electrode in a Rotatab...
- Publication number 20150194294
- Publication date Jul 9, 2015
- Angstrom Sciences, Inc.
- Mark A. Bernick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTAGLIO PRINTING PLATE COATING APPARATUS
- Publication number 20150075979
- Publication date Mar 19, 2015
- François Gremion
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20140291146
- Publication date Oct 2, 2014
- SAMSUNG DISPLAY CO., LTD.
- Jae-Yun Sim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND ARRANGEMENTS OF MAGNETIC FIELD GENERATORS TO FACILITA...
- Publication number 20140265857
- Publication date Sep 18, 2014
- JEONGHEE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable Shunt Assembly For A Sputtering Magnetron And A Method F...
- Publication number 20140158523
- Publication date Jun 12, 2014
- Angstrom Sciences, Inc.
- Richard Newcomb
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR PRODUCING NANOPARTICLES AT HIGH EFFICIENCY, USE OF SAID...
- Publication number 20140001031
- Publication date Jan 2, 2014
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Etienne Quesnel
- B82 - NANO-TECHNOLOGY

Means for shaping the magnetic field

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor apparatus and magnetic structure of semiconductor app...

Movable magnet array for magnetron sputtering

Anti-stiction process for MEMS device

Vacuum deposition into trenches and vias

Deposition method for tuning magnetic field distribution of deposit...

Physical vapor deposition apparatus and method thereof

Thermally controlled magnetic fields optimization system for sputte...

Film forming apparatus and film forming method

Method and apparatus for depositing a material

Physical vapor deposition apparatus and method thereof

Depositing apparatus

Physical vapor deposition apparatus and method thereof

Multifocal magnetron design for physical vapor deposition processin...

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Providing voice call support in a network

Method and apparatus for depositing a material

Flexible adjustable return path magnet assembly and methods

Anti-stiction process for MEMS device

Surrounding field sputtering source

PVD plasma control using a magnet edge lift mechanism

Online adjustable magnet bar

Laterally adjustable return path magnet assembly and methods

Magnetic field generator, magnetron cathode and spattering apparatus

Magnetron assembly for physical vapor deposition chamber

Sputtering apparatus

Configurable variable position closed track magnetron

Method of fine tuning a magnetron sputtering electrode in a rotatab...

Sputtering apparatus and magnet unit

Intaglio printing plate coating apparatus

Patents Applicationslast 30 patents

PLASMA PROCESS APPARATUS

STABLE GROUND ANODE FOR THIN FILM PROCESSING

BIAS MAGNETIC FIELD CONTROL METHOD, CONTROL DEVICE, AND SEMICONDUCT...

VACUUM DEPOSITION INTO TRENCHES AND VIAS

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES

DEPOSITION METHOD FOR TUNING MAGNETIC FIELD DISTRIBUTION OF DEPOSIT...

SEMICONDUCTOR APPARATUS AND MAGNETIC STRUCTURE OF SEMICONDUCTOR APP...

MOVABLE MAGNET ARRAY FOR MAGNETRON SPUTTERING

MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...

MAGNETIC-FIELD-DISTRIBUTION TUNER, DEPOSITION EQUIPMENT AND METHOD...

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

ANTI-STICTION PROCESS FOR MEMS DEVICE

THERMALLY CONTROLLED MAGNETIC FIELDS OPTIMIZATION SYSTEM FOR SPUTTE...

FILM FORMING APPARATUS AND FILM FORMING METHOD

Method and Apparatus for Depositing a Material

DEPOSITING APPARATUS

ANTI-STICTION PROCESS FOR MEMS DEVICE

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SYSTEMS AND METHODS FOR UNIFORM TARGET EROSION MAGNETIC ASSEMBLIES

SURROUNDING FIELD SPUTTERING SOURCE

METHOD AND APPARATUS FOR DEPOSITING A MATERIAL

Magnetic Configuration for a Magnetron Sputter Deposition System

Online Adjustable Magnet Bar

Method of Fine Tuning a Magnetron Sputtering Electrode in a Rotatab...

INTAGLIO PRINTING PLATE COATING APPARATUS

SPUTTERING APPARATUS

APPARATUS AND ARRANGEMENTS OF MAGNETIC FIELD GENERATORS TO FACILITA...

Adjustable Shunt Assembly For A Sputtering Magnetron And A Method F...

DEVICE FOR PRODUCING NANOPARTICLES AT HIGH EFFICIENCY, USE OF SAID...