Means for transferring objects between different enclosures of different pressure or atmosphere

Industry

CPC
H01J37/185

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/185Means for transferring objects between different enclosures of different pressure or atmosphere

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for sample transfer
- Patent number 12,112,916
- Issue date Oct 8, 2024
- FEI Company
- Krishna Kanth Neelisetty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample protection device for scanning electron microscopy
- Patent number 12,040,156
- Issue date Jul 16, 2024
- SHANGHAI NEMOR OPTOELECTRONIC TECHNOLOGY CO., LTD.
- Xuan Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and apparatuses for contamination-free vacuum transfer of s...
- Patent number 12,020,895
- Issue date Jun 25, 2024
- FEI Company
- Jakub Kuba
- G01 - MEASURING TESTING
Information Patent Grant
Transport apparatus and method for transferring a sample between tw...
- Patent number 11,753,254
- Issue date Sep 12, 2023
- FEI Company
- Tomas Kratochvíl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder and charged particle beam system
- Patent number 11,640,895
- Issue date May 2, 2023
- Jeol Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
- Patent number 11,600,472
- Issue date Mar 7, 2023
- HITACHI HIGH-TECH CORPORATION
- Ryoichi Isomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,276,550
- Issue date Mar 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Mari Takabatake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, plasma processing apparatus, and processing system
- Patent number 11,244,804
- Issue date Feb 8, 2022
- Tokyo Electron Limited
- Daisuke Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for dynamically compensating position errors of a sample
- Patent number 11,127,618
- Issue date Sep 21, 2021
- ASML Netherlands B.V.
- Fangfu Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryotransfer system
- Patent number 11,041,788
- Issue date Jun 22, 2021
- HennyZ B.V.
- Hendrik Willem Zandbergen
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 11,024,481
- Issue date Jun 1, 2021
- FEI Company
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,796,879
- Issue date Oct 6, 2020
- Phenom-World Holding B.V.
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simple and environment-friendly production equipment for carbon nan...
- Patent number 10,763,080
- Issue date Sep 1, 2020
- WORLD LINKAGE HOLDINGS LIMITED
- Tsz Kin Ho
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sample carrier and electron microscope
- Patent number 10,699,870
- Issue date Jun 30, 2020
- Jeol Ltd.
- Shuho Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correlation microscope
- Patent number 10,663,708
- Issue date May 26, 2020
- Nakamura Sangyo Gakuen
- Shinichiro Isobe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Load lock system for charged particle beam imaging
- Patent number 10,643,818
- Issue date May 5, 2020
- ASML Netherlands B.V.
- Hsuan-Bin Huang
- G01 - MEASURING TESTING
Information Patent Grant
Ion implant system having grid assembly
- Patent number 10,636,935
- Issue date Apr 28, 2020
- Intevac, Inc.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sample stage
- Patent number 10,580,613
- Issue date Mar 3, 2020
- Phenom-World Holding B.V.
- Gerhardus Bernardus Stamsnijder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System of height and alignment rollers for precise alignment of waf...
- Patent number 10,559,710
- Issue date Feb 11, 2020
- Intevac, Inc.
- William Eugene Runstadler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber and method of using a transfer chamber
- Patent number 10,446,710
- Issue date Oct 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Aaron P. Webb
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Automated experiment apparatus and automated experiment method usin...
- Patent number 10,363,556
- Issue date Jul 30, 2019
- Do Won Kang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Workpiece transport and positioning apparatus
- Patent number 10,361,060
- Issue date Jul 23, 2019
- Howard Hughes Medical Institute
- John H. Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transporting apparatus and method of transporting using the same
- Patent number 10,249,473
- Issue date Apr 2, 2019
- Samsung Electronics Co., Ltd.
- Wonhee Ko
- G01 - MEASURING TESTING
Information Patent Grant
Electron microscope and method for transmission electron microscopy...
- Patent number 10,199,198
- Issue date Feb 5, 2019
- Scienion AG
- Claude Dufresne
- G01 - MEASURING TESTING
Information Patent Grant
Workpiece holder for workpiece transport apparatus
- Patent number 10,186,397
- Issue date Jan 22, 2019
- Howard Hughes Medical Institute
- John H. Price
- G01 - MEASURING TESTING
Information Patent Grant
Cryogenic specimen processing in a charged particle microscope
- Patent number 10,170,275
- Issue date Jan 1, 2019
- FEI Company
- John Mitchels
- G01 - MEASURING TESTING
Information Patent Grant
Wafer temperature control with consideration to beam power input
- Patent number 10,128,084
- Issue date Nov 13, 2018
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for modifying surfaces of titanium implants made of titan...
- Patent number 10,115,560
- Issue date Oct 30, 2018
- Sodick Co., Ltd.
- Motohiro Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical fiber feedthrough device and fiber path arrangement
- Patent number 10,008,362
- Issue date Jun 26, 2018
- Mapper Lithography IP B.V.
- Johannes Petrus Sprengers
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Device For Interfacing A Sample Transfer Device To An Analytic Or S...
- Publication number 20240274399
- Publication date Aug 15, 2024
- Ferrovac AG
- Urs MAIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Sample Analysis Method
- Publication number 20240170250
- Publication date May 23, 2024
- Hitachi High-Tech Corporation
- Masayoshi YOSHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPARATUSES FOR CONTAMINATION-FREE VACUUM TRANSFER OF S...
- Publication number 20230253176
- Publication date Aug 10, 2023
- FEI Company
- Jakub Kuba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR SAMPLE TRANSFER
- Publication number 20230132874
- Publication date May 4, 2023
- FEI Company
- Krishna Kanth NEELISETTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR ULTRA-HIGH VACUUM ELECTRON MICROSCOPE
- Publication number 20230101644
- Publication date Mar 30, 2023
- FEI Company
- Rudolf GEURINK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKSTATION, PREPARATION STATION AND METHOD FOR MANIPULATING AN ELE...
- Publication number 20230073506
- Publication date Mar 9, 2023
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Sebastian TACKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Holder and Charged Particle Beam System
- Publication number 20220223368
- Publication date Jul 14, 2022
- JEOL Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PROTECTION DEVICE FOR SCANNING ELECTRON MICROSCOPY
- Publication number 20220216031
- Publication date Jul 7, 2022
- SHANGHAI NEMOR OPTOELECTRONIC TECHNOLOGY CO., LTD
- Xuan TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND PROCESSING SYSTEM
- Publication number 20220122802
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Charged Particle Beam Device
- Publication number 20210241993
- Publication date Aug 5, 2021
- HITACHI HIGH-TECH CORPORATION
- Mari TAKABATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20200402760
- Publication date Dec 24, 2020
- Phenom-World Holding B.V.
- Karel Diederick VAN DER MAST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200279753
- Publication date Sep 3, 2020
- TOKYO ELECTRON LIMITED
- Tomohiko NIIZEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND METHOD FOR TRANSFERRING A SAMPLE BETWEEN TW...
- Publication number 20200270070
- Publication date Aug 27, 2020
- FEI Company
- Tomas Kratochvíl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND PROCESSING SYSTEM
- Publication number 20200243298
- Publication date Jul 30, 2020
- TOKYO ELECTRON LIMITED
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA HEATED CHAMBER HO...
- Publication number 20200219705
- Publication date Jul 9, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA PURGE GAS DILUTIO...
- Publication number 20200216951
- Publication date Jul 9, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL FEEDTHROUGH APPARATUS
- Publication number 20200185188
- Publication date Jun 11, 2020
- Metal Industries Research & Development Centre
- Jyh-Nan Shieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOTRANSFER SYSTEM
- Publication number 20200141846
- Publication date May 7, 2020
- HennyZ B.V.
- Hendrik Willem ZANDBERGEN
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE STAGE
- Publication number 20190287756
- Publication date Sep 19, 2019
- Phenom-World Holding B.V.
- Gerhardus Bernardus Stamsnijder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK SYSTEM FOR CHARGED PARTICLE BEAM IMAGING
- Publication number 20190214225
- Publication date Jul 11, 2019
- HERMES MICROVISION, INC.
- Hsuan-Bin HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR DYNAMICALLY COMPENSATING POSITION ERRORS OF A SAMPLE
- Publication number 20190198372
- Publication date Jun 27, 2019
- ASML Netherlands B.V.
- Fangfu LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSI...
- Publication number 20190157053
- Publication date May 23, 2019
- Hitachi High-Technologies Corporation
- Ryoichi ISOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20190103245
- Publication date Apr 4, 2019
- Phenom-World Holding B.V.
- Karel Diederick VAN DER MAST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMPLE AND ENVIRONMENT-FRIENDLY PRODUCTION EQUIPMENT FOR CARBON NAN...
- Publication number 20180366299
- Publication date Dec 20, 2018
- WORLD LINKAGE HOLDINGS LIMITED
- Tsz Kin Ho
- B82 - NANO-TECHNOLOGY
Information Patent Application
AUTOMATED EXPERIMENT APPARATUS AND AUTOMATED EXPERIMENT METHOD USIN...
- Publication number 20180257067
- Publication date Sep 13, 2018
- Do Won KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE DESIGNED WITH DIFFERENTIAL PUMPING AND BUILT-IN FIGURE OF...
- Publication number 20180224356
- Publication date Aug 9, 2018
- Board of Regents of the University of Texas System
- Hugo Celio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL FIBER FEEDTHROUGH DEVICE AND FIBER PATH ARRANGEMENT
- Publication number 20180182594
- Publication date Jun 28, 2018
- MAPPER LITHOGRAPHY IP BV
- Johannes Petrus Sprengers
- G02 - OPTICS
Information Patent Application
APPARATUS FOR MODIFYING SURFACES OF TITANIUM IMPLANTS MADE OF TITAN...
- Publication number 20170358423
- Publication date Dec 14, 2017
- SODICK CO., LTD.
- Motohiro INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANT SYSTEM HAVING GRID ASSEMBLY
- Publication number 20170345964
- Publication date Nov 30, 2017
- INTEVAC, INC.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PART...
- Publication number 20170062174
- Publication date Mar 2, 2017
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Toshiyuki Iwahori
- H01 - BASIC ELECTRIC ELEMENTS

Means for transferring objects between different enclosures of different pressure or atmosphere

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum apparatus

Methods and systems for sample transfer

Sample protection device for scanning electron microscopy

Systems and apparatuses for contamination-free vacuum transfer of s...

Transport apparatus and method for transferring a sample between tw...

Sample holder and charged particle beam system

Vacuum processing apparatus and operating method of vacuum processi...

Charged particle beam device

Etching method, plasma processing apparatus, and processing system

System for dynamically compensating position errors of a sample

Cryotransfer system

Scanning electron microscope

Scanning electron microscope

Simple and environment-friendly production equipment for carbon nan...

Sample carrier and electron microscope

Correlation microscope

Load lock system for charged particle beam imaging

Ion implant system having grid assembly

Sample stage

System of height and alignment rollers for precise alignment of waf...

Transfer chamber and method of using a transfer chamber

Automated experiment apparatus and automated experiment method usin...

Workpiece transport and positioning apparatus

Transporting apparatus and method of transporting using the same

Electron microscope and method for transmission electron microscopy...

Workpiece holder for workpiece transport apparatus

Cryogenic specimen processing in a charged particle microscope

Wafer temperature control with consideration to beam power input

Apparatus for modifying surfaces of titanium implants made of titan...

Optical fiber feedthrough device and fiber path arrangement

Patents Applicationslast 30 patents

Device For Interfacing A Sample Transfer Device To An Analytic Or S...

Charged Particle Beam Device and Sample Analysis Method

SYSTEMS AND APPARATUSES FOR CONTAMINATION-FREE VACUUM TRANSFER OF S...

METHODS AND SYSTEMS FOR SAMPLE TRANSFER

MODULAR ULTRA-HIGH VACUUM ELECTRON MICROSCOPE

WORKSTATION, PREPARATION STATION AND METHOD FOR MANIPULATING AN ELE...

Sample Holder and Charged Particle Beam System

SAMPLE PROTECTION DEVICE FOR SCANNING ELECTRON MICROSCOPY

ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND PROCESSING SYSTEM

Charged Particle Beam Device

SCANNING ELECTRON MICROSCOPE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

TRANSPORT APPARATUS AND METHOD FOR TRANSFERRING A SAMPLE BETWEEN TW...

ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND PROCESSING SYSTEM

REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA HEATED CHAMBER HO...

REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA PURGE GAS DILUTIO...

MECHANICAL FEEDTHROUGH APPARATUS

CRYOTRANSFER SYSTEM

SAMPLE STAGE

LOAD LOCK SYSTEM FOR CHARGED PARTICLE BEAM IMAGING

SYSTEM FOR DYNAMICALLY COMPENSATING POSITION ERRORS OF A SAMPLE

VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSI...

SCANNING ELECTRON MICROSCOPE

SIMPLE AND ENVIRONMENT-FRIENDLY PRODUCTION EQUIPMENT FOR CARBON NAN...

AUTOMATED EXPERIMENT APPARATUS AND AUTOMATED EXPERIMENT METHOD USIN...

INTERFACE DESIGNED WITH DIFFERENTIAL PUMPING AND BUILT-IN FIGURE OF...

OPTICAL FIBER FEEDTHROUGH DEVICE AND FIBER PATH ARRANGEMENT

APPARATUS FOR MODIFYING SURFACES OF TITANIUM IMPLANTS MADE OF TITAN...

ION IMPLANT SYSTEM HAVING GRID ASSEMBLY

TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PART...