Membership
Tour
Register
Log in
Measurements of electric or magnetic variables
Follow
Industry
CPC
H01J2237/24564
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/24564
Measurements of electric or magnetic variables
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate pedestal for improved substrate processing
Patent number
11,984,305
Issue date
May 14, 2024
Applied Materials, Inc.
Viren Kalsekar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radio frequency match network and generator
Patent number
11,961,711
Issue date
Apr 16, 2024
COMET Technologies USA, Inc.
Alexandre De Chambrier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analysis method and analysis system of voltage contrast defect
Patent number
11,927,625
Issue date
Mar 12, 2024
Powerchip Semiconductor Manufacturing Corporation
Yue-Ying Yen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing apparatus and measurement method
Patent number
11,908,665
Issue date
Feb 20, 2024
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for tuning plasma distribution using phase control
Patent number
11,908,662
Issue date
Feb 20, 2024
Applied Materials, Inc.
Xiaopu Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
11,894,222
Issue date
Feb 6, 2024
Tokyo Electron Limited
Atsushi Takeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Common substrate and shadow ring lift apparatus
Patent number
11,881,375
Issue date
Jan 23, 2024
Applied Materials, Inc.
Abhishek Chowdhury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ closed-loop management of radio frequency power generator
Patent number
11,854,768
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei Ting Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,837,440
Issue date
Dec 5, 2023
Kokusai Electric Corporation
Takeshi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductive broad-band sensors for electromagnetic waves
Patent number
11,830,708
Issue date
Nov 28, 2023
COMET Technologies USA, Inc.
Stephen E. Savas
G01 - MEASURING TESTING
Information
Patent Grant
Primary charged particle beam current measurement
Patent number
11,817,292
Issue date
Nov 14, 2023
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
John Breuer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and power supply device
Patent number
11,810,752
Issue date
Nov 7, 2023
HITACHI HIGH-TECH CORPORATION
Wen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and power supply control method
Patent number
11,776,795
Issue date
Oct 3, 2023
Tokyo Electron Limited
Koichi Nagami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real time photoresist outgassing control system and method
Patent number
11,749,500
Issue date
Sep 5, 2023
Applied Materials, Inc.
Nevin Clay
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Direct frequency tuning for matchless plasma source in substrate pr...
Patent number
11,728,137
Issue date
Aug 15, 2023
Lam Research Corporation
Yuhou Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of power generation with phase linked solid-state...
Patent number
11,721,526
Issue date
Aug 8, 2023
MKS Instruments, Inc.
Francesco Braghiroli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection method and plasma processing apparatus
Patent number
11,705,313
Issue date
Jul 18, 2023
Tokyo Electron Limited
Yusuke Hirayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arc detector for detecting arcs, plasma system and method of detect...
Patent number
11,674,981
Issue date
Jun 13, 2023
TRUMPF Huettinger Sp. z o. o.
Andrzej Klimczak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for controlling edge ring variation
Patent number
11,668,553
Issue date
Jun 6, 2023
Applied Materials Inc.
Sathyendra Ghantasala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
11,657,999
Issue date
May 23, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Time-dependent defect inspection apparatus
Patent number
11,651,935
Issue date
May 16, 2023
ASML Netherlands B.V.
Chih-Yu Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for plasma head helium measurement
Patent number
11,651,942
Issue date
May 16, 2023
Ontos Equipment Systems, Inc.
Robert Emmett Hughlett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,610,754
Issue date
Mar 21, 2023
HITACHI HIGH-TECH CORPORATION
Katsura Takaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsing control match network
Patent number
11,605,527
Issue date
Mar 14, 2023
COMET Technologies USA, Inc.
Alexandre De Chambrier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter irradiating ion mean onto wafer and ion implantation...
Patent number
11,603,590
Issue date
Mar 14, 2023
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Kazuhisa Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for reduction of particle contamination by bia...
Patent number
11,600,464
Issue date
Mar 7, 2023
Advanced Ion Beam Technology, Inc.
Shao-Yu Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,600,475
Issue date
Mar 7, 2023
Tokyo Electron Limited
Taro Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate pedestal for improved substrate processing
Patent number
11,587,773
Issue date
Feb 21, 2023
Applied Materials, Inc.
Viren Kalsekar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion collector for use in plasma systems
Patent number
11,581,169
Issue date
Feb 14, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Otto Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system for adjusting the current of individual partic...
Patent number
11,562,880
Issue date
Jan 24, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION SYSTEM
Publication number
20240151665
Publication date
May 9, 2024
Hitachi High-Tech Corporation
Yohei NAKAMURA
G01 - MEASURING TESTING
Information
Patent Application
INDUCTIVE BROAD-BAND SENSORS FOR ELECTROMAGNETIC WAVES
Publication number
20240145221
Publication date
May 2, 2024
COMET TECHNOLOGIES USA, INC.
STEPHEN E. SAVAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
Publication number
20240136148
Publication date
Apr 25, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
Publication number
20240136160
Publication date
Apr 25, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE WITH FAST CLO...
Publication number
20240128048
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Ingo Mueller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITANCE SENSING SYSTEMS AND METHODS
Publication number
20240125832
Publication date
Apr 18, 2024
Advanced Energy Industries, Inc.
Donald Enzinna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONTROL APPARATUS AND METHOD USING THE SAME
Publication number
20240128054
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Changho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105423
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Takeshi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETERMINING AN OPTIMAL ION ENERGY FOR PLASMA PROCESSING OF A DIELEC...
Publication number
20240105430
Publication date
Mar 28, 2024
PRODRIVE TECHNOLOGIES INNOVATION SERVICES B.V.
Qihao YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE TWISTING CONTROL IN DIELECTRIC ETCH
Publication number
20240105432
Publication date
Mar 28, 2024
LAM RESEARCH CORPORATION
Neil Macaraeg Mackie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240096609
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Liang LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU CLOSED-LOOP MANAGEMENT OF RADIO FREQUENCY POWER GENERATOR
Publication number
20240087851
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei Ting LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...
Publication number
20240071719
Publication date
Feb 29, 2024
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR DETECTING END POINT
Publication number
20240063002
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Masakazu HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Process Control of Multi-Electrode Systems Equipped with Ion...
Publication number
20240055228
Publication date
Feb 15, 2024
MKS Instruments, Inc.
Linnell MARTINEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE COMPENSATION FOR PLASMA PROCESSING APPLICATIONS
Publication number
20240055244
Publication date
Feb 15, 2024
Applied Materials, Inc.
Shreeram Jyoti DASH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing with Broadband RF Waveforms
Publication number
20240021410
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Jianping Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE PREPARATION
Publication number
20240021402
Publication date
Jan 18, 2024
University College Dublin, National University of Ireland
Denis Dowling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSIS SYSTEM AND PLASMA DIAGNOSIS METHOD
Publication number
20240021420
Publication date
Jan 18, 2024
Kwangwoon University Industry-Academic Collaboration Foundation
Gi Chung KWON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240014009
Publication date
Jan 11, 2024
Panasonic Intellectual Property Management Co., Ltd.
Naoaki TAKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOOL FOR PREVENTING OR SUPPRESSING ARCING
Publication number
20230416922
Publication date
Dec 28, 2023
LAM RESEARCH CORPORATION
Yukinori SAKIYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA IGNITION VALIDATION IN A PLASMA-ASSISTED WAFER PROCESS BACKG...
Publication number
20230402270
Publication date
Dec 14, 2023
ASM IP HOLDING, B.V.
BeomGyu Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Plasma Process
Publication number
20230386789
Publication date
Nov 30, 2023
TOKYO ELECTRON LIMITED
Charles Schlechte
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF GENERATOR WITH CARBONIZATION PREVENTION SYSTEM
Publication number
20230360881
Publication date
Nov 9, 2023
Samsung Electronics Co., Ltd.
Kwangyoung Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES
Publication number
20230360896
Publication date
Nov 9, 2023
Applied Materials, Inc.
David Coumou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230360893
Publication date
Nov 9, 2023
SEMES CO., LTD.
DUKHYUN SON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING ENDPOINT IN PLASMA PROCESSING
Publication number
20230352283
Publication date
Nov 2, 2023
FORTH-RITE TECHNOLOGIES, LLC
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING EXCURSION IN PLASMA PROCESSING
Publication number
20230352284
Publication date
Nov 2, 2023
FORTH-RITE TECHNOLOGIES, LLC
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20230343555
Publication date
Oct 26, 2023
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS