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H01J2237/24564
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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/24564
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Patents Grants
last 30 patents
Information
Patent Grant
In-situ closed-loop management of radio frequency power generator
Patent number
12,368,023
Issue date
Jul 22, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Wei Ting Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,362,143
Issue date
Jul 15, 2025
Tokyo Electron Limited
Satoru Kawakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for controlling a plasma sheath characteristic
Patent number
12,362,159
Issue date
Jul 15, 2025
Lam Research Corporation
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,362,145
Issue date
Jul 15, 2025
Tokyo Electron Limited
Yuji Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for measuring pedestal voltage uniformity in p...
Patent number
12,362,136
Issue date
Jul 15, 2025
Stephen Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radio-frequency antenna and plasma processing device
Patent number
12,354,839
Issue date
Jul 8, 2025
EMD CORPORATION
Akinori Ebe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Determining an optimal ion energy for plasma processing of a dielec...
Patent number
12,347,662
Issue date
Jul 1, 2025
PRODRIVE TECHNOLOGIES INNOVATION SERVICES B.V.
Qihao Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multiple charged-particle beam apparatus and methods of operating t...
Patent number
12,347,643
Issue date
Jul 1, 2025
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,334,299
Issue date
Jun 17, 2025
HITACHI HIGH-TECH CORPORATION
U Oh
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma diagnosis system and plasma diagnosis method
Patent number
12,315,710
Issue date
May 27, 2025
Kwangwoon University Industry-Academic Collaboration Foundation
Gi Chung Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier device, semiconductor apparatus, and residual charge detect...
Patent number
12,315,706
Issue date
May 27, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jian Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power adjustment method of upper electrode power supply and semicon...
Patent number
12,300,460
Issue date
May 13, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jing Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid matcher and radio frequency matching system including the hy...
Patent number
12,288,674
Issue date
Apr 29, 2025
Samsung Electronics Co., Ltd.
Hyosin Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
12,281,381
Issue date
Apr 22, 2025
Applied Materials, Inc.
Sireesh Adimadhyam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Closed loop faraday correction of a horizontal beam current profile...
Patent number
12,283,460
Issue date
Apr 22, 2025
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Assessment of matching networks
Patent number
12,272,533
Issue date
Apr 8, 2025
Advanced Energy Industries, Inc.
Corneluis Erasmus van Greunen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductive broad-band sensors for electromagnetic waves
Patent number
12,272,532
Issue date
Apr 8, 2025
COMET Technologies USA, Inc.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for using binning to increase power during a lo...
Patent number
12,266,505
Issue date
Apr 1, 2025
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing apparatus and dielectric window cleaning m...
Patent number
12,257,608
Issue date
Mar 25, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Chunming Liu
B08 - CLEANING
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,261,027
Issue date
Mar 25, 2025
Tokyo Electron Limited
Natsumi Torii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam particle beam system and method for operating same
Patent number
12,255,040
Issue date
Mar 18, 2025
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
12,249,485
Issue date
Mar 11, 2025
Kokusai Electric Corporation
Takeshi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
12,230,471
Issue date
Feb 18, 2025
HITACHI HIGH-TECH CORPORATION
Shota Aida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring instrument and measuring method
Patent number
12,222,379
Issue date
Feb 11, 2025
Tokyo Electron Limited
Takayuki Hatanaka
G01 - MEASURING TESTING
Information
Patent Grant
High-frequency power supply apparatus
Patent number
12,205,798
Issue date
Jan 21, 2025
Daihen Corporation
Yuichi Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rating substrate support assemblies based on impedance circuit elec...
Patent number
12,205,791
Issue date
Jan 21, 2025
Applied Materials, Inc.
Arvind Shankar Raman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,205,801
Issue date
Jan 21, 2025
Tokyo Electron Limited
Toshiaki Saijo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,191,124
Issue date
Jan 7, 2025
Tokyo Electron Limited
Tatsuo Matsudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arc management algorithm of RF generator and match box for CCP plas...
Patent number
12,176,190
Issue date
Dec 24, 2024
Applied Materials, Inc.
Tiefeng Shi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ribbon beam angle adjustment in an ion implantation system
Patent number
12,170,182
Issue date
Dec 17, 2024
Advanced Ion Beam Technology, Inc.
Zhimin Wan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD
Publication number
20250232946
Publication date
Jul 17, 2025
Hitachi High-Tech Corporation
Minami UCHIHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT DEVICE AND ETCHING METHOD
Publication number
20250226183
Publication date
Jul 10, 2025
TOKYO ELECTRON LIMITED
Natsumi TORII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL-TIME MEASUREMENT OF MICROWAVE RESONATORS AS PLASMA DIAGNOSTICS...
Publication number
20250218751
Publication date
Jul 3, 2025
Applied Materials, Inc.
DAVID PETERSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fast Frequency Tracking Control for Radiofrequency Power Amplifiers...
Publication number
20250218726
Publication date
Jul 3, 2025
LAM RESEARCH CORPORATION
Sanghyeon Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
Publication number
20250218747
Publication date
Jul 3, 2025
SEMES CO., LTD.
Dong Hun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIMODE DOSE COMPENSATION SYSTEM
Publication number
20250218722
Publication date
Jul 3, 2025
Applied Materials, Inc.
Klaus PETRY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD, PROCESS MODULE MATCHING METHOD, AND SUBSTRATE...
Publication number
20250210310
Publication date
Jun 26, 2025
SEMES CO., LTD.
Sang Moon YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE MEASUREMENT METHOD OF SUBSTRATE PROCESSING APPARATUS
Publication number
20250201515
Publication date
Jun 19, 2025
SEMES CO., LTD.
Sang Moon YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA STATE MONITORING DEVICE FOR CONNECTING TO AN IMPEDANCE MATCH...
Publication number
20250201540
Publication date
Jun 19, 2025
TRUMPF Hüttinger GmbH + Co. KG
Florian A. Maier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIT, SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING,...
Publication number
20250201518
Publication date
Jun 19, 2025
Kokusai Electric Corporation
Takeshi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, RF SYSTEM, AND RF CONTROL METHOD
Publication number
20250191883
Publication date
Jun 12, 2025
TOKYO ELECTRON LIMITED
Ryuta HIGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR DEVICE FOR SEMICONDUCTOR EQUIPMENT, METHOD OF OPERATING A SE...
Publication number
20250189347
Publication date
Jun 12, 2025
Samsung Electronics Co., Ltd.
Gyoseon Choo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ENHANCED RF POWER DELIVERY USING HARMONIC WAV...
Publication number
20250191879
Publication date
Jun 12, 2025
FORTH-RITE TECHNOLOGIES, LLC
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS
Publication number
20250183002
Publication date
Jun 5, 2025
FEI Company
Gert-Jan de Vos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
E-BEAM EXPOSURE METHOD AND MASK MANUFACTURING METHOD COMPRISING THE...
Publication number
20250157789
Publication date
May 15, 2025
Samsung Electronics Co., Ltd.
Jungwook SHON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL PROGRAM, INFORMATION PROCESSING PROGRAM, CONTROL METHOD, IN...
Publication number
20250157798
Publication date
May 15, 2025
TOKYO ELECTRON LIMITED
Ryohei TAKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RATING SUBSTRATE SUPPORT ASSEMBLIES BASED ON IMPEDANCE CIRCUIT ELEC...
Publication number
20250157788
Publication date
May 15, 2025
Applied Materials, Inc.
Arvind Shankar Raman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
REAL-TIME PLASMA MEASUREMENT AND CONTROL
Publication number
20250140541
Publication date
May 1, 2025
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD TO MEASURE ION PROPERTIES IN A PLASMA SYSTEM
Publication number
20250132138
Publication date
Apr 24, 2025
TOKYO ELECTRON LIMITED
Zhiying Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Novel arc management algorithm of RF generator and Match box for CC...
Publication number
20250118543
Publication date
Apr 10, 2025
Applied Materials, Inc.
Tiefeng SHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND INTERLOCK METHOD THEREOF
Publication number
20250112028
Publication date
Apr 3, 2025
JUSUNG ENGINEERING CO., LTD.
Sang Kyo KWON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RIBBON BEAM ANGLE ADJUSTMENT IN AN ION IMPLANTATION SYSTEM
Publication number
20250062097
Publication date
Feb 20, 2025
ADVANCED ION BEAM TECHNOLOGY, INC.
Zhimin WAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING CHAMBERS
Publication number
20250062165
Publication date
Feb 20, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Hung LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSIS DEVICE AND MANUFACTURING METHOD OF PLASMA DIAGNOSI...
Publication number
20250046588
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
Youn Sok Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD...
Publication number
20250037969
Publication date
Jan 30, 2025
NuFlare Technology, Inc.
Tatsuya MUROFUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MONITORING NEUTRON RAY AND ION IMPLANTER
Publication number
20250014862
Publication date
Jan 9, 2025
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Tsuyoshi NAKAJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSTIC APPARATUS, AND APPARATUS FOR FABRICATING SEMICOND...
Publication number
20250006477
Publication date
Jan 2, 2025
Samsung Electronics Co., Ltd.
Haewook PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSTIC CIRCUIT INCLUDING VARIABLE AMPLIFICATION UNIT AND...
Publication number
20240429034
Publication date
Dec 26, 2024
Samsung Electronics Co., Ltd.
Juhyun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240420923
Publication date
Dec 19, 2024
TOKYO ELECTRON LIMITED
Manabu ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PLASMA PROCESSING AND METHOD OF ETCHING
Publication number
20240395509
Publication date
Nov 28, 2024
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS