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Measuring geometric parameters of semiconductor structures

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Industry

  • CPC
  • G01B2210/56
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Parent Industries

GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B2210/00Aspects not specifically covered by any group under G01B

Current Industry

G01B2210/56Measuring geometric parameters of semiconductor structures
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