Mechanical parts of transfer devices

Industry

CPC
H01L21/67742

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67742Mechanical parts of transfer devices

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Reduced footprint wafer handling platform
- Patent number 12,272,583
- Issue date Apr 8, 2025
- Lam Research Corporation
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling device for a wafer
- Patent number 12,261,075
- Issue date Mar 25, 2025
- SEMSYSCO GMBH
- Andreas Gleissner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring substrate in vacuum chamber
- Patent number 12,255,090
- Issue date Mar 18, 2025
- T-Robotics Co., Ltd.
- Soo Jong Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting shelf module and wafer container using same
- Patent number 12,237,190
- Issue date Feb 25, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-speed layout method and layout device for photovoltaic modules
- Patent number 12,224,371
- Issue date Feb 11, 2025
- SUZHOU SC-SOLAR EQUIPMENT CO., LTD
- Jiliang Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method and substrate transfer system
- Patent number 12,224,193
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus with parallel first and second parts o...
- Patent number 12,217,986
- Issue date Feb 4, 2025
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement correction in indexed multi-station processing cham...
- Patent number 12,217,985
- Issue date Feb 4, 2025
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reconfigurable mainframe with replaceable interface plate
- Patent number 12,211,714
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of controlling substrate transfer system and the substrate t...
- Patent number 12,211,719
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating a substrate
- Patent number 12,205,837
- Issue date Jan 21, 2025
- Semes Co., Ltd.
- Seong Hyun Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch curing chamber with gas distribution and individual pumping
- Patent number 12,203,171
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Adib Khan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,952
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and substr...
- Patent number 12,183,612
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing module and processing method
- Patent number 12,183,603
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with enhanced flow field therein
- Patent number 12,183,608
- Issue date Dec 31, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,176,205
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, processing system, and transfer method
- Patent number 12,170,216
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Shinya Okano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer detection method and substrate processing apparatus
- Patent number 12,159,798
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,154,797
- Issue date Nov 26, 2024
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,148,637
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thickness measurement of substrate using color metrology
- Patent number 12,148,148
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Dominic J. Benvegnu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automated transfer of edge ring requiring rotational alignment
- Patent number 12,142,466
- Issue date Nov 12, 2024
- Lam Research Corporation
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,142,478
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...
- Publication number 20250112074
- Publication date Apr 3, 2025
- LPE S.p.A.
- Francesco Corea
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
- Publication number 20250100161
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jen-Ti WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250096018
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Changhwa JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250096020
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20250096029
- Publication date Mar 20, 2025
- BROOKS AUTOMATION US, LLC
- Dana L. ATWOOD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20250096023
- Publication date Mar 20, 2025
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20250087514
- Publication date Mar 13, 2025
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...
- Publication number 20250073915
- Publication date Mar 6, 2025
- ATECO INC.
- Taek Seon LEE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, A...
- Publication number 20250079206
- Publication date Mar 6, 2025
- EBARA CORPORATION
- Yoshimasa OZONE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...
- Publication number 20250069926
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Arunkumar Ramachandraiah
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE WAFER BOW MANAGEMENT
- Publication number 20250069959
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Mayur Govind Kulkarni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR WAFER WET PROCESS
- Publication number 20250062141
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jie CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED LOAD PORT FIRST AID PLATFORM
- Publication number 20250054796
- Publication date Feb 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM
- Publication number 20250054792
- Publication date Feb 13, 2025
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20250054793
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250046628
- Publication date Feb 6, 2025
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20250046631
- Publication date Feb 6, 2025
- SEMES CO., LTD.
- Young Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...
- Publication number 20250038027
- Publication date Jan 30, 2025
- LPE S.p.A.
- Maurilio Giuseppe Meschia
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
High Throughput Substrate Processing Cluster Tool With Factory Inte...
- Publication number 20250038021
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Upendra UMMETHALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT CONTROL DEVICE
- Publication number 20250022736
- Publication date Jan 16, 2025
- Hirata Corporation
- Itaru MOMOKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROCESS SYSTEM, METHOD, AND SUBSTRATE CHUCK
- Publication number 20250022739
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Matthew Charles Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS PLATFORM
- Publication number 20250014931
- Publication date Jan 9, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Haiwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...
- Publication number 20250014929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Risa TANIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANIFOLD FOR SUPPLYING COOLANT TO COMPONENTS OF SUBSTRATE PROCESSIN...
- Publication number 20250006469
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Miguel Benjamin VASQUEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE
- Publication number 20250006533
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Wataru MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Teaching Transfer Robot and Substrate Processing System
- Publication number 20240424666
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- Kosuke KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES
- Publication number 20240421244
- Publication date Dec 19, 2024
- SUZHOU SC-SOLAR EQUIPMENT CO., LTD
- Jiliang Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...
- Publication number 20240420982
- Publication date Dec 19, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Wenkai CHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...
- Publication number 20240416645
- Publication date Dec 19, 2024
- Applied Materials Italia S.R.L.
- Davide COLLA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Mechanical parts of transfer devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Reduced footprint wafer handling platform

Substrate handling device for a wafer

Apparatus for transferring substrate in vacuum chamber

Semiconductor processing apparatus and method utilizing electrostat...

Supporting shelf module and wafer container using same

High-speed layout method and layout device for photovoltaic modules

Control method and substrate transfer system

Substrate treating apparatus with parallel first and second parts o...

Wafer placement correction in indexed multi-station processing cham...

Reconfigurable mainframe with replaceable interface plate

Method of controlling substrate transfer system and the substrate t...

Apparatus for treating a substrate

Batch curing chamber with gas distribution and individual pumping

Substrate processing apparatus

Substrate transfer apparatus, substrate transfer method, and substr...

Substrate processing apparatus for processing substrates

Processing module and processing method

Substrate container with enhanced flow field therein

Method and chamber for backside physical vapor deposition

Transfer device, processing system, and transfer method

System with substrate carrier deterioration detection and repair

Substrate processing system and transfer method

Transfer detection method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Thickness measurement of substrate using color metrology

Sensor-based correction of robot-held object

Substrate processing apparatus

Automated transfer of edge ring requiring rotational alignment

Method and chamber for backside physical vapor deposition

Patents Applicationslast 30 patents

WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

TRANSPORT APPARATUS AND ADAPTER PENDANT

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE TRANSPORT APPARATUS

SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...

INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, A...

INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...

SUBSTRATE PROCESSING APPARATUS

ADAPTIVE WAFER BOW MANAGEMENT

SYSTEM AND METHOD FOR WAFER WET PROCESS

INTEGRATED LOAD PORT FIRST AID PLATFORM

SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...

High Throughput Substrate Processing Cluster Tool With Factory Inte...

SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT CONTROL DEVICE

PROCESS SYSTEM, METHOD, AND SUBSTRATE CHUCK

PROCESS PLATFORM

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...

MANIFOLD FOR SUPPLYING COOLANT TO COMPONENTS OF SUBSTRATE PROCESSIN...

SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE

Method for Teaching Transfer Robot and Substrate Processing System

HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES

PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...

PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...