Mechanical parts of transfer devices

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CPC
H01L21/67742

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67742Mechanical parts of transfer devices

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Stage, testing apparatus, and stage operating method
- Patent number 12,354,898
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Masahito Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet processing system and system and method for manufacturing semic...
- Patent number 12,347,702
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ying-Chieh Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module and destructive analysis automation appa...
- Patent number 12,343,881
- Issue date Jul 1, 2025
- Samsung Electronics Co., Ltd.
- Youn Gon Oh
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 12,341,031
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular material handling robot platform
- Patent number 12,341,043
- Issue date Jun 24, 2025
- Persimmon Technologies Corporation
- Martin Hosek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,341,046
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- G01 - MEASURING TESTING
Information Patent Grant
Resin shaping device
- Patent number 12,341,036
- Issue date Jun 24, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveyance method, substrate conveyance apparatus, moldin...
- Patent number 12,339,584
- Issue date Jun 24, 2025
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pump, chemical liquid supplying unit, and substrate treating apparatus
- Patent number 12,331,736
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Young Jun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spindle assembly for wafer transfer in a multi-station process module
- Patent number 12,334,375
- Issue date Jun 17, 2025
- Lam Research Corporation
- Andrew Borth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process tool and method for handling semiconductor substrate
- Patent number 12,327,743
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Fung-Chih Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection system and method of use thereof
- Patent number 12,322,616
- Issue date Jun 3, 2025
- JNK TECH
- Youngjin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanical indexer for multi-station process module
- Patent number 12,322,641
- Issue date Jun 3, 2025
- Lam Research Corporation
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for cleaning a package
- Patent number 12,322,608
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Exhaust assembly, and liquid processing apparatus and substrate pro...
- Patent number 12,318,819
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Kyung Min Kim
- B08 - CLEANING
Information Patent Grant
Monolithic platen
- Patent number 12,311,498
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for measuring the gap
- Patent number 12,313,392
- Issue date May 27, 2025
- Semes Co., Ltd.
- Chung Woo Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate transport apparatus
- Patent number 12,300,528
- Issue date May 13, 2025
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transport apparatus with pulley with a non-circular profile
- Patent number 12,296,473
- Issue date May 13, 2025
- Persimmon Technologies Corporation
- Martin Hosek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer frame sorter and stocker
- Patent number 12,300,532
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,293,928
- Issue date May 6, 2025
- Semes Co., Ltd.
- Eui Sang Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chamber semiconductor manufacturing system
- Patent number 12,288,701
- Issue date Apr 29, 2025
- Syskey Technology Co., Ltd.
- Hsueh-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Core module for semiconductor production facility machinery
- Patent number 12,288,697
- Issue date Apr 29, 2025
- Brooks Automation (Germany), GMBH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,288,704
- Issue date Apr 29, 2025
- Applied Materials, Inc.
- Ralph P. Antonio
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Gas curtain device for load port
- Patent number 12,281,816
- Issue date Apr 22, 2025
- SPRINGFIELD TECHNOLOGIES & INTELLIGENCE, INC.
- Kuan-Ting Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method using th...
- Patent number 12,283,510
- Issue date Apr 22, 2025
- Semes Co., Ltd.
- Sang Oh Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-vacuum twin-arm robot
- Patent number 12,283,508
- Issue date Apr 22, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 12,283,502
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Young Wook Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport vacuum platform
- Patent number 12,283,507
- Issue date Apr 22, 2025
- Permission Technologies Corporation
- Christopher Hofmeister
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...
- Publication number 20250239475
- Publication date Jul 24, 2025
- JSW Aktina System Co., Ltd.
- Takahiro FUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20250232967
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250226245
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Tae Kun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DIE AND METHODS OF FORMATION
- Publication number 20250218793
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufactacturing Company, Ltd.
- I-Chun WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218821
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Jong Wha KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING
- Publication number 20250218837
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Clinton SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER ARM AND APPARATUS USING THE SAME
- Publication number 20250201613
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Yuki Dammura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER UNIT, AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20250198833
- Publication date Jun 19, 2025
- SEMES CO., LTD.
- Ki Sang EUM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBER AND CLEANING METHOD THEREFOR, AND SEMICONDUCTOR D...
- Publication number 20250191949
- Publication date Jun 12, 2025
- JIANGSU LEADMICRO NANO-TECHNOLOGY CO., LTD.
- Ren ZHOU
- B08 - CLEANING
Information Patent Application
SENSOR SUBSTRATE AND INTEGRATED SENSING SURFACES
- Publication number 20250183074
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Chuang-Chia Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FURNACE TUBE ASSEMBLY AND DISASSEMBLY AUXILIARY DEVICE
- Publication number 20250183077
- Publication date Jun 5, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qi WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS
- Publication number 20250183067
- Publication date Jun 5, 2025
- Intel Corporation
- John William Rudolph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174477
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174487
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND TURN-OVER DEVICE THEREOF
- Publication number 20250157841
- Publication date May 15, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Yazhou Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS O...
- Publication number 20250140584
- Publication date May 1, 2025
- SCREEN Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...
- Publication number 20250125169
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE
- Publication number 20250125170
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CERAMIC RF RETURN KIT DESIGN
- Publication number 20250118577
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Vellaichamy Nagappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...
- Publication number 20250112074
- Publication date Apr 3, 2025
- LPE S.p.A.
- Francesco Corea
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
- Publication number 20250100161
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jen-Ti WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250096018
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Changhwa JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250096020
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20250096029
- Publication date Mar 20, 2025
- BROOKS AUTOMATION US, LLC
- Dana L. ATWOOD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20250096023
- Publication date Mar 20, 2025
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20250087514
- Publication date Mar 13, 2025
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...
- Publication number 20250073915
- Publication date Mar 6, 2025
- ATECO INC.
- Taek Seon LEE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, A...
- Publication number 20250079206
- Publication date Mar 6, 2025
- EBARA CORPORATION
- Yoshimasa OZONE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...
- Publication number 20250069926
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Arunkumar Ramachandraiah
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS

Mechanical parts of transfer devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Stage, testing apparatus, and stage operating method

Wet processing system and system and method for manufacturing semic...

Equipment front end module and destructive analysis automation appa...

Light irradiation type heat treatment method and heat treatment app...

Modular material handling robot platform

Transfer apparatus and transfer method

Resin shaping device

Substrate conveyance method, substrate conveyance apparatus, moldin...

Pump, chemical liquid supplying unit, and substrate treating apparatus

Spindle assembly for wafer transfer in a multi-station process module

Process tool and method for handling semiconductor substrate

Substrate inspection system and method of use thereof

Mechanical indexer for multi-station process module

Apparatus and methods for cleaning a package

Transfer apparatus and transfer method

Exhaust assembly, and liquid processing apparatus and substrate pro...

Monolithic platen

Apparatus and method for measuring the gap

Substrate transport apparatus

Transport apparatus with pulley with a non-circular profile

Wafer frame sorter and stocker

Apparatus and method for treating substrate

Multi-chamber semiconductor manufacturing system

Core module for semiconductor production facility machinery

Methods and apparatus for processing a substrate

Gas curtain device for load port

Substrate treating apparatus and substrate treating method using th...

In-vacuum twin-arm robot

Substrate transfer device and substrate transfer method

Substrate transport vacuum platform

Patents Applicationslast 30 patents

CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...

PROCESSING SYSTEM AND PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM

SEMICONDUCTOR DIE AND METHODS OF FORMATION

SUBSTRATE PROCESSING APPARATUS

SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING

SUBSTRATE TRANSFER ARM AND APPARATUS USING THE SAME

TRANSFER UNIT, AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

LOAD LOCK CHAMBER AND CLEANING METHOD THEREFOR, AND SEMICONDUCTOR D...

SENSOR SUBSTRATE AND INTEGRATED SENSING SURFACES

FURNACE TUBE ASSEMBLY AND DISASSEMBLY AUXILIARY DEVICE

MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

SUBSTRATE CLEANING APPARATUS AND TURN-OVER DEVICE THEREOF

SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS O...

WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...

RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE

CERAMIC RF RETURN KIT DESIGN

WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

TRANSPORT APPARATUS AND ADAPTER PENDANT

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE TRANSPORT APPARATUS

SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...

INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, A...

INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...

SUBSTRATE PROCESSING APPARATUS