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Substrate transport apparatus
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Patent number 11,978,651
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Issue date May 7, 2024
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BROOKS AUTOMATION US, LLC
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Robert T. Caveney
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
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Patent number 11,978,649
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Issue date May 7, 2024
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BROOKS AUTOMATION US, LLC
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Robert T. Caveney
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H01 - BASIC ELECTRIC ELEMENTS
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Transfer apparatus
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Patent number 11,948,816
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Issue date Apr 2, 2024
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Tokyo Electron Limited
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Masahiro Dogome
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H01 - BASIC ELECTRIC ELEMENTS
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Monolithic platen
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Patent number 11,919,126
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Issue date Mar 5, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Tsung-Lung Lai
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B24 - GRINDING POLISHING
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Vapor deposition device
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Patent number 11,898,246
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Issue date Feb 13, 2024
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Sumco Corporation
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Naoyuki Wada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate transport apparatus
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Patent number 11,894,252
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Issue date Feb 6, 2024
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BROOKS AUTOMATION US, LLC
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Robert T. Caveney
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Material handling robot
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Patent number 11,887,880
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Issue date Jan 30, 2024
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Persimmon Technologies Corporation
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Martin Hosek
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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