Mechanical parts of transfer devices

Industry

CPC
H01L21/67742

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67742Mechanical parts of transfer devices

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and substr...
- Patent number 12,183,612
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing module and processing method
- Patent number 12,183,603
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with enhanced flow field therein
- Patent number 12,183,608
- Issue date Dec 31, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,176,205
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, processing system, and transfer method
- Patent number 12,170,216
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Shinya Okano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer detection method and substrate processing apparatus
- Patent number 12,159,798
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,154,797
- Issue date Nov 26, 2024
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,148,637
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thickness measurement of substrate using color metrology
- Patent number 12,148,148
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Dominic J. Benvegnu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automated transfer of edge ring requiring rotational alignment
- Patent number 12,142,466
- Issue date Nov 12, 2024
- Lam Research Corporation
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,142,478
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate processing system and subst...
- Patent number 12,142,506
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position detection and determination device and position calibratio...
- Patent number 12,131,963
- Issue date Oct 29, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chin-Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device, and non-transitory computer readable medium for det...
- Patent number 12,119,246
- Issue date Oct 15, 2024
- Ebara Corporation
- Hidetatsu Isokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer robot and robot system
- Patent number 12,090,670
- Issue date Sep 17, 2024
- Kabushiki Kaisha Yaskawa Denki
- Osamu Harada
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer apparatus and processing system
- Patent number 12,087,608
- Issue date Sep 10, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Teaching apparatus and substrate alignment apparatus using the same
- Patent number 12,074,051
- Issue date Aug 27, 2024
- Samsung Electronics Co., Ltd.
- Taehyoung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot detection and control system within chamber and substrate pro...
- Patent number 12,070,848
- Issue date Aug 27, 2024
- SEMES Co. Ltd.
- Da Sol Kim
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Load port module
- Patent number 12,068,186
- Issue date Aug 20, 2024
- Brooks Automotion US, LLC
- Radik Sunugatov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for cleaning semiconductor wafers
- Patent number 12,068,149
- Issue date Aug 20, 2024
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air curtain for defect reduction
- Patent number 12,062,562
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chih Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MANIFOLD FOR SUPPLYING COOLANT TO COMPONENTS OF SUBSTRATE PROCESSIN...
- Publication number 20250006469
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Miguel Benjamin VASQUEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE
- Publication number 20250006533
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Wataru MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Teaching Transfer Robot and Substrate Processing System
- Publication number 20240424666
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- Kosuke KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES
- Publication number 20240421244
- Publication date Dec 19, 2024
- SUZHOU SC-SOLAR EQUIPMENT CO., LTD
- Jiliang Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...
- Publication number 20240420982
- Publication date Dec 19, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Wenkai CHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...
- Publication number 20240416645
- Publication date Dec 19, 2024
- Applied Materials Italia S.R.L.
- Davide COLLA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Transfer Apparatus And Processing System
- Publication number 20240404858
- Publication date Dec 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES
- Publication number 20240404857
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hao LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR CLEANING A PACKAGE
- Publication number 20240395571
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE TR...
- Publication number 20240395589
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TRANSFER DEVICE
- Publication number 20240383127
- Publication date Nov 21, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi ONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240387207
- Publication date Nov 21, 2024
- SEMES CO., LTD.
- Ki Won HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240379396
- Publication date Nov 14, 2024
- BROOKS AUTOMATION US, LLC
- Levid E. Hanley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20240379397
- Publication date Nov 14, 2024
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER
- Publication number 20240371673
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Aditya Chuttar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240373683
- Publication date Nov 7, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR CURTAIN FOR DEFECT REDUCTION
- Publication number 20240355660
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20240355614
- Publication date Oct 24, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD
- Publication number 20240347364
- Publication date Oct 17, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Rie ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...
- Publication number 20240347363
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sung-Ju Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR INSPECTION STATIONS
- Publication number 20240339344
- Publication date Oct 10, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yan-Hong LIU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20240339340
- Publication date Oct 10, 2024
- ASM IP HOLDING B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334758
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334759
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SEMICONDUCTOR WAFER
- Publication number 20240312818
- Publication date Sep 19, 2024
- UK ROBOTICS. CO., LTD.
- Woo Jong YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20240290645
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE
- Publication number 20240258136
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mechanical parts of transfer devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate transfer apparatus, substrate transfer method, and substr...

Substrate processing apparatus for processing substrates

Processing module and processing method

Substrate container with enhanced flow field therein

Method and chamber for backside physical vapor deposition

Transfer device, processing system, and transfer method

System with substrate carrier deterioration detection and repair

Substrate processing system and transfer method

Transfer detection method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Thickness measurement of substrate using color metrology

Sensor-based correction of robot-held object

Substrate processing apparatus

Automated transfer of edge ring requiring rotational alignment

Method and chamber for backside physical vapor deposition

Substrate transfer apparatus, substrate processing system and subst...

Vacuum apparatus

Position detection and determination device and position calibratio...

Method, device, and non-transitory computer readable medium for det...

Calibration of an electronics processing system

Transfer robot and robot system

Transfer apparatus and processing system

Substrate processing module and method of moving a workpiece

Teaching apparatus and substrate alignment apparatus using the same

Robot detection and control system within chamber and substrate pro...

Load port module

Apparatus and method for cleaning semiconductor wafers

Air curtain for defect reduction

Chamber architecture for epitaxial deposition and advanced epitaxia...

Patents Applicationslast 30 patents

MANIFOLD FOR SUPPLYING COOLANT TO COMPONENTS OF SUBSTRATE PROCESSIN...

SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE

Method for Teaching Transfer Robot and Substrate Processing System

HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES

PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...

PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...

Transfer Apparatus And Processing System

SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES

APPARATUS AND METHODS FOR CLEANING A PACKAGE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE TR...

SUBSTRATE TRANSFER DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSFER APPARATUS

LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

AIR CURTAIN FOR DEFECT REDUCTION

APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS

SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD

SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...

SYSTEMS AND METHODS FOR INSPECTION STATIONS

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

APPARATUS FOR TRANSPORTING SEMICONDUCTOR WAFER

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE