Mechanical scanning

Industry

CPC
H01J2237/1503

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1503Mechanical scanning

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle system and methods for irradiating a planning targ...
- Patent number 10,020,161
- Issue date Jul 10, 2018
- The Trustees of the University of Pennsylvania
- Alejandro Carabe-Fernandez
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Ion implanter and ion implant method thereof
- Patent number 8,987,691
- Issue date Mar 24, 2015
- Advanced Ion Beam Technology, Inc.
- Zhimin Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for multi-directionally scanning a beam of cha...
- Patent number 8,481,959
- Issue date Jul 9, 2013
- John Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for scanning a beam of charged particles
- Patent number 8,399,851
- Issue date Mar 19, 2013
- John Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam processing device
- Patent number 8,076,658
- Issue date Dec 13, 2011
- Global Beam Technologies AG
- Franz Vokurka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Portable electron microscope using micro-column
- Patent number 8,071,944
- Issue date Dec 6, 2011
- Cebt Co. Ltd
- Ho Seob Kim
- G01 - MEASURING TESTING
Information Patent Grant
Micromachined electron or ion-beam source and secondary pickup for...
- Patent number 7,960,695
- Issue date Jun 14, 2011
- Victor B. Kley
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and methods for ion beam implantation using ribbon and sp...
- Patent number 7,902,527
- Issue date Mar 8, 2011
- Jiong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting a specimen surface, apparatus and use of fluor...
- Patent number 7,732,762
- Issue date Jun 8, 2010
- Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
- Michiel David Nijkerk
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for ion beam implantation using ribbon and spo...
- Patent number 7,675,050
- Issue date Mar 9, 2010
- Advanced Ion Beam Technology, Inc.
- Jiong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for preventing parasitic beamlets from affecting ion imp...
- Patent number 7,482,598
- Issue date Jan 27, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for reducing effects of photoresist outgassing
- Patent number 7,476,878
- Issue date Jan 13, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spot grid array electron imaging system
- Patent number 6,946,655
- Issue date Sep 20, 2005
- Applied Materials, Inc.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multijunction photovoltaic cells and panels using a silicon or sili...
- Patent number 6,340,788
- Issue date Jan 22, 2002
- Hughes Electronics Corporation
- Richard R. King
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, method of making the apparatus, exposure method...
- Patent number 6,320,195
- Issue date Nov 20, 2001
- Nikon Corporation
- Nobutaka Magome
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of manufacturing electrically conductive molded bodies by pl...
- Patent number 4,877,642
- Issue date Oct 31, 1989
- U.S. Philips Corp.
- Georg F. Gartner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-energy scanning transmission electron microscope
- Patent number 4,618,767
- Issue date Oct 21, 1986
- International Business Machines Corporation
- David A. Smith
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE SYSTEM AND METHODS FOR IRRADIATING A PLANNING TARG...
- Publication number 20170213690
- Publication date Jul 27, 2017
- The Trustees of the University of Pennsylvania
- Alejandro Carabe-Fernandez
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ION IMPLANTER AND ION IMPLANT METHOD THEREOF
- Publication number 20130130484
- Publication date May 23, 2013
- ADVANCED ION BEAM TECHNOLOGY, INC.
- ZHIMIN WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems And Methods For Scanning A Beam Of Charged Particles
- Publication number 20110186747
- Publication date Aug 4, 2011
- John Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Scanning A Beam Of Charged Particles
- Publication number 20110186743
- Publication date Aug 4, 2011
- John Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Scanning A Beam Of Charged Particles
- Publication number 20110186748
- Publication date Aug 4, 2011
- John Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANT METHOD THEREOF
- Publication number 20110049383
- Publication date Mar 3, 2011
- ADVANCED ION BEAM TECHNOLOGY, INC.
- ZHIMIN WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM PROCESSING DEVICE
- Publication number 20100012860
- Publication date Jan 21, 2010
- ALL WELDING TECHNOLOGIES AG
- Franz Vokurka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHODS FOR ION BEAM IMPLANTATION USING RIBBON AND SP...
- Publication number 20090189096
- Publication date Jul 30, 2009
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Jiong CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Portable Electron Microscope Using Micro-Column
- Publication number 20080315096
- Publication date Dec 25, 2008
- Ho Seob Kim
- G01 - MEASURING TESTING
Information Patent Application
Motioning Equipment for Electron Column
- Publication number 20080210866
- Publication date Sep 4, 2008
- CEBT Co. Ltd.
- Ho Seob Kim
- G11 - INFORMATION STORAGE
Information Patent Application
APPARATUS AND METHOD FOR ION BEAM IMPLANTATION USING RIBBON AND SPO...
- Publication number 20080029716
- Publication date Feb 7, 2008
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Jiong CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Inspecting A Specimen Surface, Apparatus And Use Of Fluor...
- Publication number 20070272856
- Publication date Nov 29, 2007
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Michiel David Nijkerk
- G01 - MEASURING TESTING
Information Patent Application
TECHNIQUES FOR REDUCING EFFECTS OF PHOTORESIST OUTGASSING
- Publication number 20070125957
- Publication date Jun 7, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PREVENTING PARASITIC BEAMLETS FROM AFFECTING ION IMP...
- Publication number 20070125955
- Publication date Jun 7, 2007
- Varian Semiconductor Equipment Associates Inc.
- Russell J. LOW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Spot grid array electron imaging system
- Publication number 20030085353
- Publication date May 8, 2003
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS

Mechanical scanning

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle system and methods for irradiating a planning targ...

Ion implanter and ion implant method thereof

Apparatus and method for multi-directionally scanning a beam of cha...

Systems and methods for scanning a beam of charged particles

Electron beam processing device

Portable electron microscope using micro-column

Micromachined electron or ion-beam source and secondary pickup for...

Apparatus and methods for ion beam implantation using ribbon and sp...

Method of inspecting a specimen surface, apparatus and use of fluor...

Apparatus and method for ion beam implantation using ribbon and spo...

Techniques for preventing parasitic beamlets from affecting ion imp...

Techniques for reducing effects of photoresist outgassing

Spot grid array electron imaging system

Multijunction photovoltaic cells and panels using a silicon or sili...

Exposure apparatus, method of making the apparatus, exposure method...

Method of manufacturing electrically conductive molded bodies by pl...

Low-energy scanning transmission electron microscope

Patents Applicationslast 30 patents

CHARGED PARTICLE SYSTEM AND METHODS FOR IRRADIATING A PLANNING TARG...

ION IMPLANTER AND ION IMPLANT METHOD THEREOF

Systems And Methods For Scanning A Beam Of Charged Particles

Systems And Methods For Scanning A Beam Of Charged Particles

Systems And Methods For Scanning A Beam Of Charged Particles

ION IMPLANTER AND ION IMPLANT METHOD THEREOF

ELECTRON BEAM PROCESSING DEVICE

APPARATUS AND METHODS FOR ION BEAM IMPLANTATION USING RIBBON AND SP...

Portable Electron Microscope Using Micro-Column

Motioning Equipment for Electron Column

APPARATUS AND METHOD FOR ION BEAM IMPLANTATION USING RIBBON AND SPO...

Method Of Inspecting A Specimen Surface, Apparatus And Use Of Fluor...

TECHNIQUES FOR REDUCING EFFECTS OF PHOTORESIST OUTGASSING

TECHNIQUES FOR PREVENTING PARASITIC BEAMLETS FROM AFFECTING ION IMP...

Spot grid array electron imaging system