micro-machined flowmeters

Industry

CPC
G01F1/8445

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Parent Industries

GPHYSICS G01Measuring instruments G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL METERING BY VOLUME G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow

Current Industry

G01F1/8445micro-machined flowmeters

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS-based Coriolis mass flow controller
- Patent number 11,860,016
- Issue date Jan 2, 2024
- Lam Research Corporation
- Dennis Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS coriolis gas flow controller
- Patent number 11,662,237
- Issue date May 30, 2023
- Lam Research Corporation
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor for measuring at least one measured variable
- Patent number 10,935,404
- Issue date Mar 2, 2021
- TrueDyne Sensors AG
- Patrick Reith
- G01 - MEASURING TESTING
Information Patent Grant
Coriolis flow sensor having two detection elements partly overlappi...
- Patent number 10,627,277
- Issue date Apr 21, 2020
- Berkin B.V.
- Joost Conrad Lotters
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for density and mass flow sensing with a micr...
- Patent number 9,784,657
- Issue date Oct 10, 2017
- Integrated Sensing Systems, Inc.
- Michael William Putty
- G01 - MEASURING TESTING
Information Patent Grant
Microfluidic device and microtube thereof
- Patent number 8,992,859
- Issue date Mar 31, 2015
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flow meter and use thereof for determining a flow of a medium, as w...
- Patent number 8,881,601
- Issue date Nov 11, 2014
- Berkin B.V.
- Theodorus Simon Josef Lammerink
- G01 - MEASURING TESTING
Information Patent Grant
Process of making a microtube and microfluidic devices formed there...
- Patent number 8,585,910
- Issue date Nov 19, 2013
- Integrated Sensing Systems Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic device and method of use
- Patent number 8,408,073
- Issue date Apr 2, 2013
- Integrated Sensing Systems Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Microfluidic device and methods of operation and making
- Patent number 8,272,274
- Issue date Sep 25, 2012
- Integrated Sensing Systems Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Process of fabricating microfluidic device chips and chips formed t...
- Patent number 8,021,961
- Issue date Sep 20, 2011
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fluid delivery system and sensing unit therefor
- Patent number 8,016,798
- Issue date Sep 13, 2011
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Flowmeter
- Patent number 7,895,905
- Issue date Mar 1, 2011
- Berkin B.V.
- Theodorus Simon Josef Lammerink
- G01 - MEASURING TESTING
Information Patent Grant
Method of treating a bodily fluid
- Patent number 7,879,241
- Issue date Feb 1, 2011
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Micromechanical sensor for measuring the mass flow rate in accordan...
- Patent number 7,874,219
- Issue date Jan 25, 2011
- Siemens Aktiengesellschaft
- Roman Frahnow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method of assessing a property of a flowing fluid
- Patent number 7,823,445
- Issue date Nov 2, 2010
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Microfluidic device and microtube therefor
- Patent number 7,628,082
- Issue date Dec 8, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Ultrasonic-densiometer mass flow sensor for use in flow metering units
- Patent number 7,600,417
- Issue date Oct 13, 2009
- Hamilton Sundstrand Corporation
- Bruce Paradise
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
Information Patent Grant
Microfluidic device and method of operation
- Patent number 7,581,429
- Issue date Sep 1, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Microfluidic device
- Patent number 7,568,399
- Issue date Aug 4, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Process of making a microtube and microfluidic devices formed there...
- Patent number 7,381,628
- Issue date Jun 3, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for detecting and treating chemical and biologica...
- Patent number 7,354,429
- Issue date Apr 8, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Process of making a microtube and microfluidic devices formed there...
- Patent number 7,351,603
- Issue date Apr 1, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fluid system and method of assessing a property of a fluid flowing...
- Patent number 7,263,882
- Issue date Sep 4, 2007
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Fluid sensing device with integrated bypass and process therefor
- Patent number 7,228,735
- Issue date Jun 12, 2007
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Resonant tube viscosity sensing device
- Patent number 7,059,176
- Issue date Jun 13, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Mass flow measurement device
- Patent number 7,032,462
- Issue date Apr 25, 2006
- Emerson Electric Co.
- Michael J. Barger
- G01 - MEASURING TESTING
Information Patent Grant
Method of fabricating a micromachined tube for fluid flow
- Patent number 6,935,010
- Issue date Aug 30, 2005
- Integrated Sensing Systems, Inc.
- Srinivas Tadigadapa
- G01 - MEASURING TESTING
Information Patent Grant
Fluid delivery system and method
- Patent number 6,932,114
- Issue date Aug 23, 2005
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Coriolis mass flow controller
- Patent number 6,769,301
- Issue date Aug 3, 2004
- Emerson Electric Co.
- Michael J. Barger
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL SYSTEM COMPONENT OR A MICROFLUIDIC COMPONENT...
- Publication number 20220324701
- Publication date Oct 13, 2022
- BERKIN B.V.
- Wouter SPARREBOOM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SU-8 MICRO CORIOLIS MASS FLOW SENSOR
- Publication number 20210190564
- Publication date Jun 24, 2021
- Universiteit Twente
- Remco John Wiegerink
- G01 - MEASURING TESTING
Information Patent Application
MEMS CORIOLIS GAS FLOW CONTROLLER
- Publication number 20210140807
- Publication date May 13, 2021
- LAM RESEARCH CORPORATION
- Iqbal A. SHAREEF
- G01 - MEASURING TESTING
Information Patent Application
MEMS-BASED CORIOLIS MASS FLOW CONTROLLER
- Publication number 20210096011
- Publication date Apr 1, 2021
- LAM RESEARCH CORPORATION
- Dennis SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORIOLIS FLOWSENSOR
- Publication number 20190056254
- Publication date Feb 21, 2019
- BERKIN B.V.
- Joost Conrad Lotters
- G01 - MEASURING TESTING
Information Patent Application
MEMS SENSOR FOR MEASURING AT LEAST ONE MEASURED VARIABLE
- Publication number 20180348033
- Publication date Dec 6, 2018
- TrueDyne Sensors AG
- Patrick REITH
- G01 - MEASURING TESTING
Information Patent Application
MICROFLUIDIC DEVICE AND MICROTUBE THEREOF
- Publication number 20140044900
- Publication date Feb 13, 2014
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLOW METER AND USE THEREOF FOR DETERMINING A FLOW OF A MEDIUM, AS W...
- Publication number 20120304731
- Publication date Dec 6, 2012
- BERKIN B.V.
- Theodorus Simon Josef LAMMERINK
- G01 - MEASURING TESTING
Information Patent Application
MICROFLUIDIC DEVICE AND METHOD OF USE
- Publication number 20120260718
- Publication date Oct 18, 2012
- INTEGRATED SENSING SYSTEMS INC.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DEVICE AND METHOD FOR DETECTING CHEMICAL AND BIOLOGICAL AGENTS
- Publication number 20120157961
- Publication date Jun 21, 2012
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
MICROFLUIDIC DEVICE AND METHODS OF OPERATION AND MAKING
- Publication number 20100037706
- Publication date Feb 18, 2010
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FLOWMETER
- Publication number 20090308177
- Publication date Dec 17, 2009
- BERKIN B.V.
- Theodorus Simon Josef LAMMERINK
- G01 - MEASURING TESTING
Information Patent Application
PROCESS OF FABRICATING MICROFLUIDIC DEVICE CHIPS AND CHIPS FORMED T...
- Publication number 20090283844
- Publication date Nov 19, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR FOR MEASURING THE MASS FLOW RATE IN ACCORDAN...
- Publication number 20090272200
- Publication date Nov 5, 2009
- SIEMENS AKTIENGESELLSCHAFT
- Roman Frahnow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...
- Publication number 20090220710
- Publication date Sep 3, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD OF ASSESSING A PROPERTY OF A FLOWING FLUID
- Publication number 20090145198
- Publication date Jun 11, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Application
MICROFLUIDIC DEVICE AND METHOD OF USE
- Publication number 20090075129
- Publication date Mar 19, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
MICROFLUIDIC DEVICE AND MICROTUBE THEREFOR
- Publication number 20080314161
- Publication date Dec 25, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF TREATING A BODILY FLUID
- Publication number 20080214978
- Publication date Sep 4, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DEVICE FOR DELIVERING ANTIDOTES
- Publication number 20080152676
- Publication date Jun 26, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DEVICE AND METHOD FOR DETECTING AND TREATING CHEMICAL AND BIOLOGICA...
- Publication number 20080065050
- Publication date Mar 13, 2008
- INTEGRATED SENSING SYSTEMS
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
MICROFLUIDIC DEVICE AND METHOD OF OPERATION
- Publication number 20070157739
- Publication date Jul 12, 2007
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Application
Ultrasonic-densiometer mass flow sensor for use in flow metering units
- Publication number 20070151333
- Publication date Jul 5, 2007
- Hamilton Sundstrand
- Bruce Paradise
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
MICROFLUIDIC DEVICE
- Publication number 20070151335
- Publication date Jul 5, 2007
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Application
FLUID SYSTEM AND METHOD OF ASSESSING A PROPERTY OF A FLUID FLOWING...
- Publication number 20060213552
- Publication date Sep 28, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEDICAL TREATMENT PROCEDURE AND SYSTEM IN WHICH BIDIRECTIONAL FLUID...
- Publication number 20060211981
- Publication date Sep 21, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...
- Publication number 20060175303
- Publication date Aug 10, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUID SENSING DEVICE WITH INTEGRATED BYPASS AND PROCESS THEREFOR
- Publication number 20060169038
- Publication date Aug 3, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Application
PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...
- Publication number 20060037187
- Publication date Feb 23, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEDICAL TREATMENT SYSTEM AND METHOD
- Publication number 20050284815
- Publication date Dec 29, 2005
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

micro-machined flowmeters

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS-based Coriolis mass flow controller

MEMS coriolis gas flow controller

MEMS sensor for measuring at least one measured variable

Coriolis flow sensor having two detection elements partly overlappi...

Apparatus and methods for density and mass flow sensing with a micr...

Microfluidic device and microtube thereof

Flow meter and use thereof for determining a flow of a medium, as w...

Process of making a microtube and microfluidic devices formed there...

Microfluidic device and method of use

Microfluidic device and methods of operation and making

Process of fabricating microfluidic device chips and chips formed t...

Fluid delivery system and sensing unit therefor

Flowmeter

Method of treating a bodily fluid

Micromechanical sensor for measuring the mass flow rate in accordan...

System and method of assessing a property of a flowing fluid

Microfluidic device and microtube therefor

Ultrasonic-densiometer mass flow sensor for use in flow metering units

Microfluidic device and method of operation

Microfluidic device

Process of making a microtube and microfluidic devices formed there...

Device and method for detecting and treating chemical and biologica...

Process of making a microtube and microfluidic devices formed there...

Fluid system and method of assessing a property of a fluid flowing...

Fluid sensing device with integrated bypass and process therefor

Resonant tube viscosity sensing device

Mass flow measurement device

Method of fabricating a micromachined tube for fluid flow

Fluid delivery system and method

Coriolis mass flow controller

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL SYSTEM COMPONENT OR A MICROFLUIDIC COMPONENT...

SU-8 MICRO CORIOLIS MASS FLOW SENSOR

MEMS CORIOLIS GAS FLOW CONTROLLER

MEMS-BASED CORIOLIS MASS FLOW CONTROLLER

CORIOLIS FLOWSENSOR

MEMS SENSOR FOR MEASURING AT LEAST ONE MEASURED VARIABLE

MICROFLUIDIC DEVICE AND MICROTUBE THEREOF

FLOW METER AND USE THEREOF FOR DETERMINING A FLOW OF A MEDIUM, AS W...

MICROFLUIDIC DEVICE AND METHOD OF USE

DEVICE AND METHOD FOR DETECTING CHEMICAL AND BIOLOGICAL AGENTS

MICROFLUIDIC DEVICE AND METHODS OF OPERATION AND MAKING

FLOWMETER

PROCESS OF FABRICATING MICROFLUIDIC DEVICE CHIPS AND CHIPS FORMED T...

MICROMECHANICAL SENSOR FOR MEASURING THE MASS FLOW RATE IN ACCORDAN...

PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...

SYSTEM AND METHOD OF ASSESSING A PROPERTY OF A FLOWING FLUID

MICROFLUIDIC DEVICE AND METHOD OF USE

MICROFLUIDIC DEVICE AND MICROTUBE THEREFOR

METHOD OF TREATING A BODILY FLUID

DEVICE FOR DELIVERING ANTIDOTES

DEVICE AND METHOD FOR DETECTING AND TREATING CHEMICAL AND BIOLOGICA...

MICROFLUIDIC DEVICE AND METHOD OF OPERATION

Ultrasonic-densiometer mass flow sensor for use in flow metering units

MICROFLUIDIC DEVICE

FLUID SYSTEM AND METHOD OF ASSESSING A PROPERTY OF A FLUID FLOWING...

MEDICAL TREATMENT PROCEDURE AND SYSTEM IN WHICH BIDIRECTIONAL FLUID...

PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...

FLUID SENSING DEVICE WITH INTEGRATED BYPASS AND PROCESS THEREFOR

PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...

MEDICAL TREATMENT SYSTEM AND METHOD