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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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Discharge tubes exposing object to beam
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Patents Grants
last 30 patents
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Patent Grant
Testing assembly including a multiple degree of freedom stage
Patent number
12,140,571
Issue date
Nov 12, 2024
Bruker Nano, Inc.
Edward Cyrankowski
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
Patent number
12,106,945
Issue date
Oct 1, 2024
Samsung Electronics Co., Ltd.
Siqing Lu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for temperature monitoring in cryo-electron microscopy
Patent number
12,070,753
Issue date
Aug 27, 2024
FEI Company
Jakub Drahotsky
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Semiconductor manufacturing apparatus and wafer holding table for s...
Patent number
12,046,488
Issue date
Jul 23, 2024
Sumitomo Electric Industries, Ltd.
Koichi Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operating a gas feed device for a particle beam apparatus
Patent number
12,002,656
Issue date
Jun 4, 2024
Carl Zeiss Microscopy GmbH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operating a gas supply device for a particle beam device
Patent number
11,764,036
Issue date
Sep 19, 2023
Carl Zeiss Microscopy GmbH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for non line-of-sight doping
Patent number
11,631,588
Issue date
Apr 18, 2023
Varian Semiconductor Equipment Associates, Inc.
Christopher R. Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device with at least one adjustable sample holder and method of cha...
Patent number
11,476,080
Issue date
Oct 18, 2022
TESCAN Brno, s.r.o.
Pavel Dolezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Testing assembly including a multiple degree of freedom stage
Patent number
11,237,087
Issue date
Feb 1, 2022
Bruker Nano, Inc.
Edward Cyrankowski
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam inspection tool and method of controlling heat load
Patent number
11,158,484
Issue date
Oct 26, 2021
ASML Netherlands B.V.
Dennis Herman Caspar Van Banning
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer holder
Patent number
11,127,605
Issue date
Sep 21, 2021
Sumitomo Electric Industries, Ltd.
Koichi Kimura
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Roll to roll fabrication apparatus for preventing thermal impact
Patent number
11,008,656
Issue date
May 18, 2021
LG Display Co., Ltd.
Seunghyun Youk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Specimen observation method
Patent number
10,852,253
Issue date
Dec 1, 2020
HITACHI HIGH-TECH CORPORATION
Kiyotaka Nakano
G01 - MEASURING TESTING
Information
Patent Grant
Method of analyzing surface modification of a specimen in a charged...
Patent number
10,811,223
Issue date
Oct 20, 2020
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and charged particle beam device
Patent number
10,770,259
Issue date
Sep 8, 2020
HITACHI HIGH-TECH CORPORATION
Motohiro Takahashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Specimen holder
Patent number
10,768,124
Issue date
Sep 8, 2020
Mel-Build Corporation
Hiroya Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of observing liquid specimen, method of analyzing liquid spe...
Patent number
10,741,357
Issue date
Aug 11, 2020
Jeol Ltd.
Noriyuki Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for using multimodal imaging to determine struc...
Patent number
10,707,052
Issue date
Jul 7, 2020
Atomnaut Inc.
Peter V. Liddicoat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Testing assembly including a multiple degree of freedom stage
Patent number
10,663,380
Issue date
May 26, 2020
Bruker Nano, Inc.
Edward Cyrankowski
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
System and method for performing nano beam diffraction analysis
Patent number
10,658,154
Issue date
May 19, 2020
International Business Machines Corporation
Marc Adam Bergendahl
G01 - MEASURING TESTING
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Patent Grant
Examination container and electron microscope
Patent number
10,607,808
Issue date
Mar 31, 2020
TAIWAN ELECTRON MICROSCOPE INSTRUMENT CORPORATION
Tsu-Wei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced FIB-SEM systems for large-volume 3D imaging
Patent number
10,600,615
Issue date
Mar 24, 2020
Howard Hughes Medical Institute
C. Shan Xu
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle instruments
Patent number
10,475,620
Issue date
Nov 12, 2019
NANOSCOPE SERVICES LIMITED
Lloyd Peto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and method for using multimodal imaging to determine struct...
Patent number
10,446,368
Issue date
Oct 15, 2019
Atomnaut Inc.
Peter V. Liddicoat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Double-tilt in-situ nanoindentation platform for transmission elect...
Patent number
10,410,822
Issue date
Sep 10, 2019
Beijing University of Technology
Xiaodong Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for acquiring image and ion beam apparatus
Patent number
10,276,343
Issue date
Apr 30, 2019
Tomokazu Kozakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming an electrical connection to a sample support in...
Patent number
10,256,563
Issue date
Apr 9, 2019
Protochips, Inc.
John Damiano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contactless temperature measurement in a charged particle microscope
Patent number
10,134,563
Issue date
Nov 20, 2018
FEI Company
Jacob Simon Faber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of modifying a sample surface layer from a microscopic sample
Patent number
10,105,734
Issue date
Oct 23, 2018
FEI Company
Tomas Vystavel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for performing nano beam diffraction analysis
Patent number
10,109,455
Issue date
Oct 23, 2018
International Business Machines Corporation
Marc Adam Bergendahl
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and System for Sample Preparation
Publication number
20240426717
Publication date
Dec 26, 2024
FEI Company
Jakub Kuba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240213000
Publication date
Jun 27, 2024
TOKYO ELECTRON LIMITED
Kazuya NAGASEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING ION BEAM BASED ON OPTICAL MICROSCOPY IMAGING
Publication number
20240112880
Publication date
Apr 4, 2024
Institute of Biophysics, Chinese Academy of Sciences
Tao XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
Publication number
20240038486
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ching Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE
Publication number
20230420224
Publication date
Dec 28, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR OBSERVING PERMEATION AND DIFFUSION PATH OF OBSERVATION T...
Publication number
20230127466
Publication date
Apr 27, 2023
National Institute for Materials Science
Akiko Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...
Publication number
20230103943
Publication date
Apr 6, 2023
Xiamen Chip-Nova Technology Co., Ltd.
Honggang Liao
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION
Publication number
20230038565
Publication date
Feb 9, 2023
Axcelis Technologies, Inc.
Causon Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE
Publication number
20220357251
Publication date
Nov 10, 2022
Bruker Nano, Inc.
Edward Cyrankowski
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20220076931
Publication date
Mar 10, 2022
Samsung Electronics Co., Ltd.
Siqing Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device with at Least One Adjustable Sample Holder and Method of Cha...
Publication number
20210384005
Publication date
Dec 9, 2021
TESCAN Brno, s.r.o.
Pavel Dolezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR TEMPERATURE MONITORING IN CRYO-ELECTRON MICROSCOPY
Publication number
20210299665
Publication date
Sep 30, 2021
FEI Company
Jakub Drahotsky
G01 - MEASURING TESTING
Information
Patent Application
TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE
Publication number
20200408655
Publication date
Dec 31, 2020
Bruker Nano, Inc.
Edward Cyrankowski
G01 - MEASURING TESTING
Information
Patent Application
OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE
Publication number
20200335309
Publication date
Oct 22, 2020
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR USING MULTIMODAL IMAGING TO DETERMINE STRUC...
Publication number
20200020507
Publication date
Jan 16, 2020
Atomnaut Inc.
Peter V. LIDDICOAT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Observing Liquid Specimen, Method of Analyzing Liquid Spe...
Publication number
20190295813
Publication date
Sep 26, 2019
JEOL Ltd.
Noriyuki Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Publication number
20190228947
Publication date
Jul 25, 2019
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR USING MULTIMODAL IMAGING TO DETERMINE STRUC...
Publication number
20190074160
Publication date
Mar 7, 2019
Atomnaut Inc.
Peter V. Liddicoat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED...
Publication number
20190051492
Publication date
Feb 14, 2019
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Performing Nano Beam Diffraction Analysis
Publication number
20190035599
Publication date
Jan 31, 2019
International Business Machines Corporation
Marc Adam BERGENDAHL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Performing Nano Beam Diffraction Analysis
Publication number
20180190470
Publication date
Jul 5, 2018
International Business Machines Corporation
Marc Adam BERGENDAHL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT
Publication number
20180148843
Publication date
May 31, 2018
LG Display Co., Ltd.
Seunghyun YOUK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING AN ELECTRICAL CONNECTION TO A SAMPLE SUPPORT IN...
Publication number
20180097307
Publication date
Apr 5, 2018
PROTOCHIPS, INC.
John DAMIANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A DOUBLE-TILT IN-SITU NANOINDENTATION PLATFORM FOR TRANSMISSION ELE...
Publication number
20180053625
Publication date
Feb 22, 2018
BEIJING UNIVERSITY OF TECHNOLOGY
XIAODONG HAN
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR PERFORMING NANO BEAM DIFFRACTION ANALYSIS
Publication number
20180005798
Publication date
Jan 4, 2018
International Business Machines Corporation
Marc Adam BERGENDAHL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE
Publication number
20170030812
Publication date
Feb 2, 2017
HYSITRON, INC.
Edward Cyrankowski
G02 - OPTICS
Information
Patent Application
SPECIMEN HOLDER FOR A CHARGED PARTICLE MICROSCOPE
Publication number
20160181059
Publication date
Jun 23, 2016
FEI Company
Tomas Vystavel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique For Temperature Measurement And Calibration Of Semiconduc...
Publication number
20150276487
Publication date
Oct 1, 2015
Varian Semiconductor Equipment Associates, Inc.
Jeffrey E. Krampert
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR PREPARING AND ANALYZING AN OBJECT AS WELL AS PARTICLE BE...
Publication number
20150214004
Publication date
Jul 30, 2015
CARL ZEISS MICROSCOPY GMBH
Giuseppe Pavia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20150060695
Publication date
Mar 5, 2015
HITACHI HIGH-TECH SCIENCE CORPORATION
Xin MAN
H01 - BASIC ELECTRIC ELEMENTS