Mounting of individual elements

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CPC
G03F7/70825

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70825Mounting of individual elements

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Actuator device and method for aligning an optical element, optical...
- Patent number 12,164,234
- Issue date Dec 10, 2024
- Carl Zeiss SMT GmbH
- Boaz Pnini-Mittler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drive device, optical system and lithography apparatus
- Patent number 12,153,353
- Issue date Nov 26, 2024
- Carl Zeiss SMT GmbH
- Oliver Herbst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography
- Patent number 12,147,162
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Catharinus De Schiffart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving apparatus, exposure apparatus, and article manufacturing me...
- Patent number 12,140,874
- Issue date Nov 12, 2024
- Canon Kabushiki Kaisha
- Tomohiro Okamoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Optical system and lithography apparatus
- Patent number 12,130,557
- Issue date Oct 29, 2024
- Carl Zeiss SMT GmbH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly, in particular in a microlithographic projection exposure...
- Patent number 12,105,434
- Issue date Oct 1, 2024
- Carl Zeiss SMT GmbH
- Stefan Troeger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exhaust gas monitor for photoresist adhesion control
- Patent number 12,044,983
- Issue date Jul 23, 2024
- Texas Instruments Incorporated
- Joseph Peter Plourde
- G01 - MEASURING TESTING
Information Patent Grant
Single-volume baking chamber for mask clean
- Patent number 11,921,422
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Banqiu Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active reticle carrier for in situ stage correction
- Patent number 11,774,866
- Issue date Oct 3, 2023
- KLA Corporation
- Avner Safrani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for semiconductor lithography having...
- Patent number 11,754,934
- Issue date Sep 12, 2023
- Carl Zeiss SMT GmbH
- Peter Nieland
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mounting fixture of apparatus for clamping film
- Patent number 11,754,933
- Issue date Sep 12, 2023
- Himax Technologies Limited
- Fang-Wan Lu
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Compensation of creep effects in an imaging device
- Patent number 11,703,770
- Issue date Jul 18, 2023
- Carl Zeiss SMT GmbH
- Eylem Bektas Knauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mounting arrangement for optical systems
- Patent number 11,692,816
- Issue date Jul 4, 2023
- Cognex Corporation
- Andrew Goodale
- G01 - MEASURING TESTING
Information Patent Grant
Exhaust gas monitor for photoresist adhesion control
- Patent number 11,675,278
- Issue date Jun 13, 2023
- Texas Instruments Incorporated
- Joseph Peter Plourde
- G01 - MEASURING TESTING
Information Patent Grant
Multi-volume baking chamber for mask clean
- Patent number 11,644,748
- Issue date May 9, 2023
- Applied Materials, Inc.
- Banqiu Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography
- Patent number 11,635,696
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Catharinus De Schiffart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,609,504
- Issue date Mar 21, 2023
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 11,543,756
- Issue date Jan 3, 2023
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Weight-force compensation device
- Patent number 11,537,052
- Issue date Dec 27, 2022
- Carl Zeiss SMT GmbH
- Michael Erath
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Extreme ultraviolet (EUV) mask inspection system, a load-lock chamb...
- Patent number 11,531,277
- Issue date Dec 20, 2022
- Samsung Electronics Co., Ltd.
- Jihoon Na
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element driving mechanism
- Patent number 11,520,244
- Issue date Dec 6, 2022
- TDK TAIWAN CORP.
- Fu-Yuan Wu
- G11 - INFORMATION STORAGE
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number RE49297
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- Hrishikesh Patel
Information Patent Grant
Optical apparatus
- Patent number 11,428,892
- Issue date Aug 30, 2022
- Gigaphoton Inc.
- Hiroshi Someya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly for use in semiconductor photolithography and method of ma...
- Patent number 11,415,893
- Issue date Aug 16, 2022
- ASML Holding N.V.
- Stephen Roux
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compensation of creep effects in an imaging device
- Patent number 11,415,895
- Issue date Aug 16, 2022
- Carl Zeiss SMT GmbH
- Marwène Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for temperature control of a component
- Patent number 11,372,341
- Issue date Jun 28, 2022
- Carl Zeiss SMT GmbH
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
- Patent number 11,333,971
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 11,335,548
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actuator device for aligning an element, projection exposure appara...
- Patent number 11,320,749
- Issue date May 3, 2022
- Carl Zeiss SMT GmbH
- Boaz Pnini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Supporting an optical element
- Patent number 11,314,177
- Issue date Apr 26, 2022
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240329547
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Shinichi MACHIDORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, LOCKING DEVICE, AND METHOD
- Publication number 20240319618
- Publication date Sep 26, 2024
- ASML Holding N.V.
- Daniel Nathan BURBANK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
COMBINED DISPENSING AND STAMPING APPARATUS AND METHOD FOR APPLYING...
- Publication number 20240264524
- Publication date Aug 8, 2024
- ASMPT SINGAPORE PTE. LTD
- Kai Siu LAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LITHOGRAPHY SYSTEM COMPRISING A GAS-BINDING COMPONENT IN THE FO...
- Publication number 20240201604
- Publication date Jun 20, 2024
- Carl Zeiss SMT GMBH
- Ralf WICHARD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240201602
- Publication date Jun 20, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240176256
- Publication date May 30, 2024
- ECLAT FOREVER MACHINERY CO., LTD.
- KUN-LIN CHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATT...
- Publication number 20240175479
- Publication date May 30, 2024
- ASML NETHERLANDS B.V.
- Maarten Hartger KIMMAN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD
- Publication number 20240152062
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Sukjong Bae
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BEARING SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR PRODUCING A BEAR...
- Publication number 20240126184
- Publication date Apr 18, 2024
- Carl Zeiss SMT GMBH
- Radhakrishna RAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE CONDITIONING SYSTEM AND METHOD
- Publication number 20240094647
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK INSPECTION APPARATUS WITH A PLATFORM MODULE
- Publication number 20240027922
- Publication date Jan 25, 2024
- STEK CO., LTD.
- Ming-Sheng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK INSPECTION APPARATUS
- Publication number 20240027895
- Publication date Jan 25, 2024
- STEK CO., LTD.
- Ming-Sheng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOUNTING FOR A LITHOGRAPHY SYSTEM, AND LITHOGRAPHY SYSTEM
- Publication number 20240004315
- Publication date Jan 4, 2024
- Carl Zeiss SMT GMBH
- Boaz Pnini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD
- Publication number 20230400761
- Publication date Dec 14, 2023
- Canon Kabushiki Kaisha
- Toshihiko Nishida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND WIRING PATTERN FORMING METHOD
- Publication number 20230400773
- Publication date Dec 14, 2023
- Nikon Corporation
- Masaki KATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WORKPIECE SUPPORT
- Publication number 20230375945
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Yi SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR POSITIONING AND HOLDING AT LEAST ONE OPTICAL ELEMENT, ME...
- Publication number 20230350311
- Publication date Nov 2, 2023
- Carl Zeiss SMT GMBH
- Thomas GROEZINGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILTER ASSEMBLY, IN PARTICULAR FOR A CONTROL LOOP FOR CONTROLLING T...
- Publication number 20230324649
- Publication date Oct 12, 2023
- Carl Zeiss SMT GMBH
- Thomas Gorius
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
EXHAUST GAS MONITOR FOR PHOTORESIST ADHESION CONTROL
- Publication number 20230273532
- Publication date Aug 31, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Joseph Peter Plourde
- G01 - MEASURING TESTING
Information Patent Application
NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, PATTERN FORMATION METHOD...
- Publication number 20230236505
- Publication date Jul 27, 2023
- SAN-APRO LTD.
- Takuto NAKAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...
- Publication number 20230236518
- Publication date Jul 27, 2023
- ASML NETHERLANDS B.V.
- Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT FOR AN OPTICAL ELEMENT
- Publication number 20230236516
- Publication date Jul 27, 2023
- Carl Zeiss SMT GMBH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT LITHOGRAPHY
- Publication number 20230221651
- Publication date Jul 13, 2023
- ASML NETHERLANDS B.V.
- Catharinus DE SCHIFFART
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20230213876
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Hyo Won YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIELD FACET FOR A FIELD FACET MIRROR OF A PROJECTION EXPOSURE SYSTEM
- Publication number 20230205099
- Publication date Jun 29, 2023
- Carl Zeiss SMT GMBH
- Stefan Lippoldt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BUFFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
- Publication number 20230195001
- Publication date Jun 22, 2023
- SEMES CO., LTD.
- Jong Kook Bae
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS AND LITHOGRAPHIC APPARATUS USING THE OPTICAL APPA...
- Publication number 20230185204
- Publication date Jun 15, 2023
- ASML Holding N.V.
- Joe TRANCHO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONNECTING COMPONENTS OF AN OPTICAL IMAGING DEVICE
- Publication number 20230117243
- Publication date Apr 20, 2023
- Carl Zeiss SMT GMBH
- Viktor Schulga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A...
- Publication number 20230081234
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Philipp Gaida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Mounting of individual elements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Actuator device and method for aligning an optical element, optical...

Drive device, optical system and lithography apparatus

Imprint lithography

Driving apparatus, exposure apparatus, and article manufacturing me...

Optical system and lithography apparatus

Assembly, in particular in a microlithographic projection exposure...

Exhaust gas monitor for photoresist adhesion control

Single-volume baking chamber for mask clean

Active reticle carrier for in situ stage correction

Projection exposure apparatus for semiconductor lithography having...

Mounting fixture of apparatus for clamping film

Compensation of creep effects in an imaging device

Mounting arrangement for optical systems

Exhaust gas monitor for photoresist adhesion control

Multi-volume baking chamber for mask clean

Imprint lithography

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Weight-force compensation device

Extreme ultraviolet (EUV) mask inspection system, a load-lock chamb...

Optical element driving mechanism

Lithographic apparatus and a device manufacturing method

Optical apparatus

Assembly for use in semiconductor photolithography and method of ma...

Compensation of creep effects in an imaging device

Method for temperature control of a component

Imprint apparatus, imprint method, and method of manufacturing article

Exposure apparatus and article manufacturing method

Actuator device for aligning an element, projection exposure appara...

Supporting an optical element

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LITHOGRAPHIC APPARATUS, LOCKING DEVICE, AND METHOD

PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...

COMBINED DISPENSING AND STAMPING APPARATUS AND METHOD FOR APPLYING...

EUV LITHOGRAPHY SYSTEM COMPRISING A GAS-BINDING COMPONENT IN THE FO...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATT...

MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD

BEARING SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR PRODUCING A BEAR...

PATTERNING DEVICE CONDITIONING SYSTEM AND METHOD

MASK INSPECTION APPARATUS WITH A PLATFORM MODULE

MASK INSPECTION APPARATUS

MOUNTING FOR A LITHOGRAPHY SYSTEM, AND LITHOGRAPHY SYSTEM

IMPRINT APPARATUS, IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS AND WIRING PATTERN FORMING METHOD

WORKPIECE SUPPORT

DEVICE FOR POSITIONING AND HOLDING AT LEAST ONE OPTICAL ELEMENT, ME...

FILTER ASSEMBLY, IN PARTICULAR FOR A CONTROL LOOP FOR CONTROLLING T...

EXHAUST GAS MONITOR FOR PHOTORESIST ADHESION CONTROL

NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, PATTERN FORMATION METHOD...

OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...

SUPPORT FOR AN OPTICAL ELEMENT

IMPRINT LITHOGRAPHY

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

FIELD FACET FOR A FIELD FACET MIRROR OF A PROJECTION EXPOSURE SYSTEM

BUFFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

OPTICAL APPARATUS AND LITHOGRAPHIC APPARATUS USING THE OPTICAL APPA...

CONNECTING COMPONENTS OF AN OPTICAL IMAGING DEVICE

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A...